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28 条记录 (耗时 0.032 秒)

    ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE
    2.
    发明申请
    ROLL-TO-ROLL REACTOR FOR PROCESSING FLEXIBLE CONTINUOUS WORKPIECE 审中-公开
    用于加工柔性连续工件的辊对辊反应器

    公开(公告)号：US20120234314A1

    公开(公告)日：2012-09-20

    申请号：US13100201

    申请日：2011-05-03

    申请人： Howard Zolla ,  Jorge Vasquez ,  James Freitag ,  Mustafa Pinarbasi ,  Robert J. Bailey

    发明人： Howard Zolla ,  Jorge Vasquez ,  James Freitag ,  Mustafa Pinarbasi ,  Robert J. Bailey

    IPC分类号： F24C3/00

    CPC分类号： H01L31/0322 ,  H01L31/0749 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

    摘要： The present invention provides a reactor for preparing thin films of compound semiconductors for photovoltaic devices. The reactor includes a chamber that has a bottom surface that, in some locations, has protrusions that contact the bottom surface of the substrate having the compound semiconductor to provide uniform heating and cooling of the substrate. Interior walls of the chamber can also be lined with high thermal conductivity portions and low thermal conductivity portions interposed between high thermal conductivity portions.

    摘要翻译： 本发明提供一种用于制备用于光伏器件的化合物半导体的薄膜的反应器。 反应器包括具有底表面的室，其在一些位置具有与具有化合物半导体的衬底的底表面接触的突起，以提供衬底的均匀加热和冷却。 腔室的内壁还可以衬有高导热部分和介于高导热部分之间的低导热部分。

    ROLL-TO-ROLL PROCESSING AND TOOLS FOR THIN FILM SOLAR CELL MANUFACTURING
    3.
    发明申请
    ROLL-TO-ROLL PROCESSING AND TOOLS FOR THIN FILM SOLAR CELL MANUFACTURING 审中-公开
    薄膜太阳能电池制造的滚动到滚动加工和工具

    公开(公告)号：US20100226629A1

    公开(公告)日：2010-09-09

    申请号：US12721446

    申请日：2010-03-10

    申请人： Bulent M. Basol ,  Howard Zolla ,  Mustafa Pinarbasi ,  Gregory Norsworthy

    发明人： Bulent M. Basol ,  Howard Zolla ,  Mustafa Pinarbasi ,  Gregory Norsworthy

    IPC分类号： F26B3/28 ,  F24F7/00 ,  F26B3/34

    CPC分类号： F27B9/045 ,  C23C14/5866 ,  F27B9/063 ,  F27B9/20 ,  F27B9/28 ,  F27B9/36 ,  H01L21/67109 ,  H01L21/67126 ,  H01L21/6776 ,  H01L31/0322 ,  Y02E10/541

    摘要： Described are roll-to-roll or reel-to-reel thermal or rapid thermal processing tools (reactors) are used to react a precursor layer on a continuous flexible workpiece. Variants of the reactors are described, including a reactor having multiple exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap; and a reactor including multiple gas inlets and exhaust outlets connected to a process gap of the reactor between an entrance opening and an exit opening of the process gap. Also described is an exhaust system that separates the Group VIA material vapors from other gaseous species for re-cycling or easy disposal and techniques and apparatus for efficient removal of moisture from the workpiece before processing precursor layer in the RTP tool.

    摘要翻译： 描述了卷对卷或卷对卷热或快速热处理工具（反应器）用于使连续柔性工件上的前体层反应。 描述了反应器的变型，包括具有多个排气出口的反应器，该排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到所述反应器的过程间隙，位于所述工艺间隙的入口和出口之间; 以及包括多个气体入口和排气出口的反应器，所述多个气体入口和排气出口连接到处理间隙的入口和出口之间的反应器的工艺间隙。 还描述了一种排气系统，其将VIA族VIA气体物质与其他气态物质分离以进行重新循环或易于处置，以及在RTP工具中处理前体层之前有效去除工件的水分的技术和设备。

    TRACKING SYSTEM AND METHOD FOR SOLAR CELL MANUFACTURING
    5.
    发明申请
    TRACKING SYSTEM AND METHOD FOR SOLAR CELL MANUFACTURING 审中-公开
    太阳能电池制造的跟踪系统和方法

    公开(公告)号：US20130096710A1

    公开(公告)日：2013-04-18

    申请号：US13275243

    申请日：2011-10-17

    申请人： Mustafa Pinarbasi ,  Howard Zolla ,  Serkan Erdemli

    发明人： Mustafa Pinarbasi ,  Howard Zolla ,  Serkan Erdemli

    IPC分类号： G06F19/00

    CPC分类号： H01L31/02 ,  H01L31/0322 ,  H01L31/206 ,  Y02E10/541 ,  Y02P70/521

    摘要： A system and method of manufacturing solar panels whereby parameters about how each cell, each array and each panel are recorded in a database or electronic memory. The cells, arrays and panels are also provided an identification, such as a bar code, to allow for subsequent retrieval of the parameters. The electronic memory is arranged so that different cells, arrays and panels that share the same parameters can be identified.

    摘要翻译： 一种制造太阳能电池板的系统和方法，其中关于每个电池，每个阵列和每个面板如何记录在数据库或电子存储器中的参数。 单元格，阵列和面板还提供了诸如条形码的标识，以允许随后检索参数。 电子存储器被布置成可以识别共享相同参数的不同的单元，阵列和面板。

    Electrical connection structure for magnetic heads and method of making the same
    6.
    发明申请
    Electrical connection structure for magnetic heads and method of making the same 失效
    磁头的电气连接结构及其制造方法

    公开(公告)号：US20060114607A1

    公开(公告)日：2006-06-01

    申请号：US10999265

    申请日：2004-11-30

    申请人： Mustafa Pinarbasi ,  Howard Zolla

    发明人： Mustafa Pinarbasi ,  Howard Zolla

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3116 ,  G11B5/3163

    摘要： An electrical connection structure suitable for use in a magnetic head and disk drive, as well as a method of making the same, are disclosed. An electrically conductive etch stop layer is formed over a first electrically conductive layer. An electrically conductive diffusion barrier layer is then formed over the electrically conductive etch stop layer, followed by the formation of an insulator layer over the electrically conductive diffusion barrier layer. Next, a patterned photoresist is formed over left and right regions of the insulator layer so as to expose a central region of the insulator layer. Utilizing an etching process with the patterned photoresist in place, insulator materials of the insulator layer in the central region are removed to form a via which exposes electrically conductive materials in the central region. Finally, a second electrically conductive layer is formed within the via over the electrically conductive materials in the central region. Advantageously, the electrically conductive diffusion barrier layer reduces or eliminates oxidation of a top surface of the electrically conducting etch stop layer during the formation of the electrical connection.

    摘要翻译： 公开了适用于磁头和磁盘驱动器的电连接结构及其制造方法。 在第一导电层上形成导电蚀刻停止层。 然后在导电蚀刻停止层上形成导电扩散阻挡层，随后在导电扩散阻挡层上形成绝缘体层。 接下来，在绝缘体层的左右区域上形成图案化的光致抗蚀剂，以暴露绝缘体层的中心区域。 利用图案化的光致抗蚀剂的蚀刻工艺，去除中心区域中的绝缘体层的绝缘体材料以形成在中心区域中暴露导电材料的通孔。 最后，在中心区域中的导电材料上的通孔内形成第二导电层。 有利地，导电扩散阻挡层在形成电连接期间降低或消除导电蚀刻停止层的顶表面的氧化。

    Method for fabricating a pole tip in a magnetic transducer
    8.
    发明申请
    Method for fabricating a pole tip in a magnetic transducer 有权
    用于在磁换能器中制造极尖的方法

    公开(公告)号：US20060000795A1

    公开(公告)日：2006-01-05

    申请号：US10882883

    申请日：2004-06-30

    申请人： Tsung Chen ,  David Druist ,  Quang Le ,  Kim Lee ,  Chun-Ming Wang ,  Howard Zolla

    发明人： Tsung Chen ,  David Druist ,  Quang Le ,  Kim Lee ,  Chun-Ming Wang ,  Howard Zolla

    IPC分类号： B44C1/22

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49032

    摘要： A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.

    摘要翻译： 描述了制造具有梯形极片尖端的磁头的方法。 沉积主极片的主体，然后沉积用于极片尖端的一个或多个层。 床材料沉积在极片末端材料上。 在用于极片尖端的区域上的床材料中形成空隙。 空隙填充有耐离子碾磨材料，例如氧化铝，优选使用原子层沉积或原子层化学气相沉积。 除去过量的抗离子碾磨材料和床料。 结果是在极片尖端的区域上形成离子铣削掩模。 然后使用离子铣削去除极片末端层中的未掩模材料，并且在主极片上形成斜面极片末端，并且优选地形成斜面。