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    FAST PHASE PROCESSING OF OFF-AXIS INTERFEROGRAMS
    1.
    发明申请
    FAST PHASE PROCESSING OF OFF-AXIS INTERFEROGRAMS 审中-公开
    离轴间隔的快速相位处理

    公开(公告)号：US20160290782A1

    公开(公告)日：2016-10-06

    申请号：US15089691

    申请日：2016-04-04

    申请人： Ramot at Tel-Aviv University Ltd.

    发明人： Pinhas GIRSHOVITZ ,  Natan Tzvi SHAKED

    IPC分类号： G01B9/021 ,  G01B11/26

    CPC分类号： G01B9/021 ,  G01B11/0675 ,  G01B11/2441

    摘要： Techniques for extracting phase data of off-axis interferogram images are disclosed. At least one sample-related interferogram image associated with a sample is spectrally decomposed to obtain a set of frequency components thereof, and a portion of the set of frequency components is used to generate at least one complex image having a reduced size being smaller in size than the sample-related interferogram image and being indicative of the phase data of the at least one sample-related interferogram image. The reduced size complex image is then used to generate a phase image of the least one sample-related interferogram image.

    摘要翻译： 公开了用于提取离轴干涉图像的相位数据的技术。 与样本相关联的至少一个样本相关干涉图像被频谱分解以获得其一组频率分量，并且该组频率分量的一部分被用于生成具有尺寸更小的尺寸更小的至少一个复合图像 并且指示所述至少一个样本相关干涉图像的相位数据。 然后使用缩小尺寸的复合图像来生成至少一个样本相关干涉图像的相位图像。

    POLARIZATION-INDEPENDENT DIFFERENTIAL INTERFERENCE CONTRAST OPTICAL ARRANGEMENT
    2.
    发明申请
    POLARIZATION-INDEPENDENT DIFFERENTIAL INTERFERENCE CONTRAST OPTICAL ARRANGEMENT 审中-公开
    极化独立差分干涉对比度光学布置

    公开(公告)号：US20160259158A1

    公开(公告)日：2016-09-08

    申请号：US15092220

    申请日：2016-04-06

    申请人： Ramot at Tel-Aviv University Ltd.

    发明人： Pinhas GIRSHOVITZ ,  Natan Tzvi SHAKED

    IPC分类号： G02B21/00 ,  G02B27/52

    CPC分类号： G02B21/0056 ,  G01J9/0215 ,  G02B21/14 ,  G02B27/52

    摘要： The present invention discloses an optical arrangement to be associated with an optical system and an external imaging system, a sample inspection imaging system and a method for generating a differential interference contrast (DIC) image. The optical arrangement comprises a beam-shearing interference module including at least two optical elements being at least partially reflective. A first optical element is configured and operable for receiving an image from the imaging system including an input beam and splitting the input beam into first and second light beams of the same amplitude and phase modulation. A second optical element is accommodated in first and second optical paths of the first and second light beams. At least one of the first and second optical elements is configured and operable for creating a shear between the first and second light beams. The second optical element is configured for reflecting the first and second light beams with a shear between them towards the detector to thereby generate a differential interference contrast (DIC) image.

    摘要翻译： 本发明公开了一种与光学系统和外部成像系统相关联的光学装置，样本检查成像系统和用于产生微分干涉对比（DIC）图像的方法。 光学装置包括光束剪切干涉模块，其包括至少部分反射的至少两个光学元件。 第一光学元件被配置和操作用于从成像系统接收包括输入光束并且将输入光束分成具有相同幅度和相位调制的第一和第二光束的图像。 第二光学元件容纳在第一和第二光束的第一和第二光路中。 第一和第二光学元件中的至少一个被构造和操作用于在第一和第二光束之间产生剪切。 第二光学元件被配置为将第一和第二光束之间的剪切反射到检测器，从而产生差分干涉对比度（DIC）图像。