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    Ozone generator
    1.
    发明授权
    Ozone generator 有权
    臭氧发生器

    公开(公告)号：US06932946B2

    公开(公告)日：2005-08-23

    申请号：US09885102

    申请日：2001-06-21

    申请人： Ryoichi Shinjo ,  Minoru Harada ,  Yukiko Nishioka

    发明人： Ryoichi Shinjo ,  Minoru Harada ,  Yukiko Nishioka

    IPC分类号： C01B13/11 ,  H01T23/00 ,  B01J19/08

    CPC分类号： C01B13/11 ,  C01B2201/12 ,  C01B2201/22

    摘要： An ozone generator comprises a pair of spaced opposing electrodes, electrically conductive members connecting the pair of electrodes to a high-voltage alternating-current power source to generate an electric discharge between the electrodes, and a dielectric provided between the opposing electrodes. A gas flow passage for allowing flow of a material gas therethrough is defined by the surfaces of the electrodes. At least one of the surfaces of the pair of electrodes has a plurality of parallel grooves. The material gas flows in a space between the plurality of grooves and the dielectric, in a direction transverse to the grooves.

    摘要翻译： 臭氧发生器包括一对间隔的相对电极，将该对电极连接到高压交流电源的导电构件，以在电极之间产生放电，以及设置在相对电极之间的电介质。 用于允许材料气体流过其中的气体流动通道由电极的表面限定。 该对电极的至少一个表面具有多个平行的凹槽。 材料气体在横向于槽的方向上在多个槽和电介质之间的空间中流动。

    Discharge reactor
    2.
    发明授权
    Discharge reactor 失效
    放电反应堆

    公开(公告)号：US5549874A

    公开(公告)日：1996-08-27

    申请号：US49866

    申请日：1993-04-20

    申请人： Ichiro Kamiya ,  Ryoichi Shinjo ,  Takeshi Murakami ,  Yukiko Nishioka ,  Minoru Harada

    发明人： Ichiro Kamiya ,  Ryoichi Shinjo ,  Takeshi Murakami ,  Yukiko Nishioka ,  Minoru Harada

    IPC分类号： H01J49/02 ,  C01B13/11 ,  B01J19/08

    CPC分类号： C01B13/11 ,  C01B2201/34 ,  Y10S422/907

    摘要： A discharge reactor that generates silent discharge and/or creeping discharge between dielectric and high voltage electrode and/or grounded electrode, said dielectric being located between high voltage electrode and grounded electrode, and which generates clean ozone in the discharge space 1 as it passes through said discharge space 1 or as it is held within said discharge space 1, which discharge reactor is characterized in that the dielectric is made of highly purified quartz glass (SiO.sub.2) or single-crystal sapphire which is a highly purified crystallized aluminium oxide or high-purity alumina ceramics which is the firing of highly purified aluminum oxide. Further, in order to obtain cleaner and highly concentration ozone, at least the electrode or electrodes in the area of the discharge space which is to be exposed to discharge are made of a high-purity aluminum material and at least the area of the discharge space which is to be exposed to discharge is further coated with an anodic oxidation film.

    摘要翻译： 一种在电介质和高电压电极和/或接地电极之间产生静电放电和/或爬电放电的放电反应器，所述电介质位于高电压电极和接地电极之间，并且在放电空间1中通过时产生干净的臭氧 所述放电空间1或其保持在所述放电空间1内，该放电反应器的特征在于电介质由高度纯化的石英玻璃（SiO 2）或单晶蓝宝石制成，其是高度纯化的结晶的氧化铝或高纯度的结晶的氧化铝， 纯度高的氧化铝陶瓷，是高纯度氧化铝的烧制。 此外，为了获得更清洁和高浓度的臭氧，至少要放电的放电空间区域中的电极或电极由高纯度铝材料制成，并且至少放电空间的区域 进一步用阳极氧化膜进行曝光。

    Ozonizer
    3.
    发明授权
    Ozonizer 失效
    臭氧发生器

    公开(公告)号：US5538695A

    公开(公告)日：1996-07-23

    申请号：US85152

    申请日：1993-07-02

    申请人： Ryoichi Shinjo ,  Ichiro Kamiya ,  Minoru Harada ,  Yukiko Nishioka

    发明人： Ryoichi Shinjo ,  Ichiro Kamiya ,  Minoru Harada ,  Yukiko Nishioka

    IPC分类号： C01B13/10 ,  C01B13/11 ,  B01J19/12

    CPC分类号： C01B13/11 ,  C01B2201/22 ,  C01B2201/64 ,  C01B2201/66 ,  C01B2201/74

    摘要： In an electric discharge type ozonizer using highly pure oxygen gas having a purity of not lower than 99.99% as a raw material gas, the pressure of a gas in the discharge space of a discharger is raised to a level higher than atmospheric pressure by at least 1.1 kgf/cm.sup.2, and/or in which a liquid-cooled discharger is used, and the temperature of the cooling liquid is set at a level not lower than 15.degree. C., whereby the ozonizer is capable of stably producing ozone gas at a high ozone concentration without causing lowering of the ozone concentration with time.

    摘要翻译： 在使用纯度不低于99.99％的高纯氧气作为原料气体的放电式臭氧发生器中，放电器的放电空间中的气体压力至少升高至大气压以上 1.1kgf / cm2，和/或其中使用液冷式排出器，冷却液的温度设定在不低于15℃的水平，由此臭氧发生器能够在 臭氧浓度高而不会随时间降低臭氧浓度。

    Ozone generating apparatus
    5.
    发明授权
    Ozone generating apparatus 失效
    臭氧发生装置

    公开(公告)号：US5702673A

    公开(公告)日：1997-12-30

    申请号：US633551

    申请日：1996-04-17

    申请人： Naruhiko Kaji ,  Yutaka Nakano ,  Rempei Nakata ,  Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura

    发明人： Naruhiko Kaji ,  Yutaka Nakano ,  Rempei Nakata ,  Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura

    IPC分类号： C01B13/10 ,  C01B13/11

    CPC分类号： C01B13/11 ,  C01B13/10

    摘要： An ozone generating apparatus produces highly pure ozone gas which can be used in a semiconductor manufacturing process. The ozone generating apparatus comprises a high voltage source, an ozone generating cell which generates ozone gas by supplying a material gas while applying a high voltage from the high voltage source, and a passage for delivering the generated ozone gas from the ozone generating cell to a desired location. The passage comprises a material which has a passivation film formed by a passivation treatment in a dry process. The oxide passivation film comprises chromium oxide film, iron oxide film or a composite film of chromium oxide and iron oxide.

    摘要翻译： 臭氧发生装置产生可用于半导体制造工艺的高纯度臭氧气体。 臭氧发生装置包括高电压源，臭氧发生电池，其通过在从高电压源施加高电压的同时供给材料气体而产生臭氧气体，以及用于将产生的臭氧气体从臭氧发生电池输送到 理想位置。 该通道包括具有通过在干法中的钝化处理形成的钝化膜的材料。 氧化物钝化膜包括氧化铬膜，氧化铁膜或氧化铬和氧化铁的复合膜。

    Method and apparatus for generating ozone and methods of its use
    6.
    发明授权
    Method and apparatus for generating ozone and methods of its use 失效
    用于生成臭氧的方法和装置及其使用方法

    公开(公告)号：US5632868A

    公开(公告)日：1997-05-27

    申请号：US518418

    申请日：1995-08-23

    申请人： Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura ,  Rempei Nakata ,  Kunihiro Miyazaki ,  Naruhiko Kaji ,  Yutaka Nakano

    发明人： Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura ,  Rempei Nakata ,  Kunihiro Miyazaki ,  Naruhiko Kaji ,  Yutaka Nakano

    IPC分类号： C01B13/10 ,  C01B13/11 ,  C23C8/12 ,  C23C16/40 ,  C23C16/44 ,  C23C16/448

    CPC分类号： C23C16/448 ,  C01B13/10 ,  C01B13/11 ,  C23C16/402 ,  C23C16/4402 ,  C23C8/12 ,  C01B2201/60

    摘要： Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices.Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10-20 vol % of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.

    摘要翻译： 臭氧发生器（10），其在施加高压下向臭氧发生电池（11）供应进料气体，并且通过臭氧气体输送路径（由管道（14）和（15）组成）输送臭氧气体） 在臭氧发生电池（11）中产生的臭氧气体输送路径的特征在于，臭氧气体输送路径具有用于除去NOx，HF和SO x中的至少一种的装置（在附图中，用于除去NOx的装置），臭氧气体 从臭氧发生电池（11）通过所述去除装置，由此在所述臭氧气体中的NOx，HF和SO x中的至少一种在被输送到后续阶段之前被去除。 产物臭氧根本不被Cr化合物污染或污染不足，导致制造高度集成的半导体器件的任何实际问题。 或者，臭​​氧发生器（10）包括具有用于供应进料气体的入口（8）的臭氧发生电池（11），用于排出产生的臭氧的高压施加装置（35）和出口（29），以及臭氧输送路径 （30）和（31）用于输送生成的臭氧的特征在于，使用补充有10〜20体积％的二氧化碳和/或一氧化碳（2）的氧（1）作为原料气。 这样生成的臭氧在Cr化合物的含量上显着地很低，因此可以适当地用于形成金属氧化物，特别是氧化硅。

    Method and apparatus for generating ozone and methods of its use
    8.
    发明授权
    Method and apparatus for generating ozone and methods of its use 失效
    用于生成臭氧的方法和装置及其使用方法

    公开(公告)号：US5792326A

    公开(公告)日：1998-08-11

    申请号：US782390

    申请日：1997-01-13

    申请人： Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura ,  Rempei Nakata ,  Kunihiro Miyazaki ,  Naruhiko Kaji ,  Yutaka Nakano

    发明人： Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura ,  Rempei Nakata ,  Kunihiro Miyazaki ,  Naruhiko Kaji ,  Yutaka Nakano

    IPC分类号： C01B13/10 ,  C01B13/11 ,  C23C8/12 ,  C23C16/40 ,  C23C16/44 ,  C23C16/448

    CPC分类号： C23C16/448 ,  C01B13/10 ,  C01B13/11 ,  C23C16/402 ,  C23C16/4402 ,  C23C8/12 ,  C01B2201/60

    摘要： Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices. Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10-20 vol % of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.

    摘要翻译： 臭氧发生器（10），其在施加高压下向臭氧发生电池（11）供应进料气体，并且通过臭氧气体输送路径（由管道（14）和（15）组成）输送臭氧气体） 在臭氧发生电池（11）中产生的臭氧气体输送路径的特征在于，臭氧气体输送路径具有用于除去NOx，HF和SO x中的至少一种的装置（在附图中，用于除去NOx的装置），臭氧气体 从臭氧发生电池（11）通过所述去除装置，由此在所述臭氧气体中的NOx，HF和SO x中的至少一种在被输送到后续阶段之前被去除。 产物臭氧根本不被Cr化合物污染或污染不足，导致制造高度集成的半导体器件的任何实际问题。 或者，臭​​氧发生器（10）包括具有用于供应进料气体的入口（8）的臭氧发生电池（11），用于排出产生的臭氧的高压施加装置（35）和出口（29），以及臭氧输送路径 （30）和（31）用于输送生成的臭氧的特征在于，使用补充有10〜20体积％的二氧化碳和/或一氧化碳（2）的氧（1）作为原料气。 这样生成的臭氧在Cr化合物的含量上显着地很低，因此可以适当地用于形成金属氧化物，特别是氧化硅。

    Ozonizer
    10.
    发明授权
    Ozonizer 失效
    臭氧发生器

    公开(公告)号：US5794114A

    公开(公告)日：1998-08-11

    申请号：US517879

    申请日：1995-08-23

    申请人： Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura ,  Rempei Nakata ,  Kunihiro Miyazaki ,  Naruhiko Kaji

    发明人： Minoru Harada ,  Ryoichi Shinjo ,  Manabu Tsujimura ,  Rempei Nakata ,  Kunihiro Miyazaki ,  Naruhiko Kaji

    IPC分类号： C01B13/11 ,  B01J19/08

    CPC分类号： C01B13/11

    摘要： In an improved ozonizer, at least those parts of an ozone gas delivery path located downstream of an ozone generating cell which are to come into contact with ozone gas are either composed of or coated with at least one ozone-resistant, Cr-free material selected from among aluminum (Al), an aluminum alloy, Teflon, fluorinated nickel, a nickel alloy, a silicon oxide based glass and a high-purity aluminium oxide. The ozonizer is capable of producing ozone that is not contaminated with Cr compounds at all or which is insufficiently contaminated to cause any practical problem in the fabrication of highly integrated semiconductor devices.

    摘要翻译： 在改进的臭氧发生器中，至少与臭氧气体接触的位于臭氧发生电池下游的臭氧气体输送路径的那些部分由或者由至少一种耐臭氧，不含Cr的材料选择 从铝（Al），铝合金，特氟隆，氟化镍，镍合金，氧化硅基玻璃和高纯度氧化铝中选择。 臭氧发生器能够产生根本没有被Cr化合物污染的臭氧，或者在高度集成的半导体器件的制造中没有被污染不足造成任何实际问题。