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公开(公告)号:US06766936B2
公开(公告)日:2004-07-27
申请号:US10234777
申请日:2002-09-04
申请人: Ryuichi Kyomasu , Osamu Kakutani , Yoshihiko Seino
发明人: Ryuichi Kyomasu , Osamu Kakutani , Yoshihiko Seino
IPC分类号: B23K520
CPC分类号: H01L24/78 , B06B3/00 , H01L2224/78 , H01L2224/78301 , H01L2224/78308 , H01L2924/00014 , H01L2924/01006 , H01L2924/01033 , H01L2224/48 , H01L2224/45099 , H01L2924/00
摘要: A transducer vibrated by a vibrator and used in a bonding apparatus, the transducer including holding portions and connecting portions. The holding portions are provided so as to protrude at at least two locations that correspond to the nodes of vibration of a transducer main body, and the connecting portions each connects the tip ends of two protruding holding portions to each other. The external force applied to one of the holding portions is thus dispersed in each of the respective holding portions connected by the connecting portions, deformation of the holding portions is prevented, and the respective holding portions can be formed extremely thin in the axial direction of the transducer main body.
摘要翻译: 传感器由振动器振动并用于粘合装置中,换能器包括保持部分和连接部分。 保持部设置成在与换能器主体的振动的节点对应的至少两个位置处突出,并且连接部分将两个突起保持部分的前端彼此连接。 因此,施加到一个保持部分的外力分散在由连接部分连接的每个保持部分中,防止了保持部分的变形,并且各个保持部分可以在 传感器主体。
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公开(公告)号:US06719183B2
公开(公告)日:2004-04-13
申请号:US10185583
申请日:2002-06-28
申请人: Ryuichi Kyomasu , Yoshihiko Seino
发明人: Ryuichi Kyomasu , Yoshihiko Seino
IPC分类号: B23K520
CPC分类号: H01L24/78 , B23K1/06 , B23K20/004 , B23K20/106 , B23K2101/32 , H01L2224/78301 , H01L2224/78308 , H01L2924/00014 , H01L2924/01006 , H01L2924/01033 , H01L2224/48 , H01L2224/45099
摘要: A transducer vibrated by a vibrator and used in a bonding apparatus, the transducer including holding portions provided so as to protrude at at least two locations that correspond to the nodes of vibration of a transducer main body, and connecting portions each connecting the tip ends of two protruding holding portions to each other. The transducer main body, holding portions and connecting portions are integrally formed from a single material member.
摘要翻译: 一种由振动器振动并用于接合装置的换能器,所述换能器包括设置成在与换能器主体的振动的节点相对应的至少两个位置处突出的保持部分,以及连接部分, 两个突出的保持部彼此。 传感器主体,保持部和连接部由单个材料构成一体。
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公开(公告)号:US4674670A
公开(公告)日:1987-06-23
申请号:US762823
申请日:1985-08-06
申请人: Kenji Watanabe , Isamu Yamazaki , Ryuichi Kyomasu , Nobuhiro Takasugi , Tsutomu Mimata , Osamu Kakutani
发明人: Kenji Watanabe , Isamu Yamazaki , Ryuichi Kyomasu , Nobuhiro Takasugi , Tsutomu Mimata , Osamu Kakutani
CPC分类号: H01L24/78 , B23K20/005 , H01L21/67144 , H01L21/67248 , H01L21/67259 , H01L2224/78 , H01L2924/00014 , H01L2924/01033 , H01L2924/01039 , H01L2924/01082
摘要: The invention relates to a manufacturing apparatus which comprises moving means which continuously moves the works that are transferred along a frame chute, and detector means which detects at least a portion of the work that is moved. The moving means is controlled by kind-of-work data and by a work position signal from the detector means, and the work is set to a predetermined position. Hence, even a work of a different kind can be set to an optimum bonding position without the need of exchanging the unit, making it possible to perform the operation fully automatically and to meet general purposes.Further, provision is made of means which moves the frame chute in a direction at right angles with the direction in which the work is moved, so that even that work that has different widths and shapes in the widthwise direction can be placed in position and subjected to the bonding fully automatically.The detector means can be provided not only at the bonding position but also at a position on the upstream side having a relation relative to the bonding position.The invention can be adapted particularly effectively to a wire bonder and a pellet bonder.
摘要翻译: 本发明涉及一种制造装置,其包括连续地移动沿着框架槽传送的工件的移动装置和检测至少一部分被移动的工件的检测器装置。 移动装置由工作数据和来自检测装置的工作位置信号控制,工件被设定到预定位置。 因此,即使不同种类的工作也可以被设定为最佳的结合位置,而不需要更换单元,使得可以完全自动地执行操作并且达到一般目的。 此外,提供了使框架滑槽沿与工件移动方向成直角的方向移动的装置,使得即使在宽度方向上具有不同宽度和形状的工件也可以被放置就位 完全自动粘接。 检测器装置不仅可以在接合位置处设置,而且还可以设置在上游侧的位置,具有相对于接合位置的关系。 本发明可以特别有效地适用于焊线机和颗粒接合机。
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公开(公告)号:US4763827A
公开(公告)日:1988-08-16
申请号:US38939
申请日:1987-04-16
申请人: Kenji Watanabe , Isamu Yamazaki , Ryuichi Kyomasu , Nobuhiro Takasugi , Tsutomu Mimata , Osamu Kakutani
发明人: Kenji Watanabe , Isamu Yamazaki , Ryuichi Kyomasu , Nobuhiro Takasugi , Tsutomu Mimata , Osamu Kakutani
CPC分类号: H01L24/78 , B23K20/005 , H01L21/67144 , H01L21/67248 , H01L21/67259 , H01L2224/78 , H01L2924/00014 , H01L2924/01033 , H01L2924/01039 , H01L2924/01082
摘要: The invention relates to a manufacturing apparatus which comprises moving means which continuously moves the works that are transferred along a frame chute, and detector means which detects at least a portion of the work that is moved. The moving means is controlled by kind-of-work data and by a work position signal from the detector means, and the work is set to a predetermined position. Hence, even a work of a different kind can be set to an optimum bonding position without the need of exchanging the unit, making it possible to perform the operation fully automatically and to meet general purposes.Further, provision is made of means which moves the frame chute in a direction at right angles with the direction in which the work is moved, so that even that work that has different widths and shapes in the widthwise direction can be placed in position and subjected to the bonding fully automatically.The detector means can be provided not only at the bonding position but also at a position on the upstream side having a relation relative to the bonding position.The invention can be adapted particularly effectively to a wire bonder and a pellet bonder.
摘要翻译: 本发明涉及一种制造装置,其包括连续地移动沿着框架槽传送的工件的移动装置和检测至少一部分被移动的工件的检测器装置。 移动装置由工作数据和来自检测装置的工作位置信号控制,工件被设定到预定位置。 因此,即使不同种类的工作也可以被设定为最佳的结合位置,而不需要更换单元,使得可以完全自动地执行操作并且达到一般目的。 此外,提供了使框架滑槽沿与工件移动方向成直角的方向移动的装置,使得即使在宽度方向上具有不同宽度和形状的工件也可以被放置就位 完全自动粘接。 检测器装置不仅可以在接合位置处设置,而且还可以设置在上游侧的位置,具有相对于接合位置的关系。 本发明可以特别有效地适用于引线接合机和颗粒接合机。
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公开(公告)号:US06727666B2
公开(公告)日:2004-04-27
申请号:US10133535
申请日:2002-04-26
申请人: Ryuichi Kyomasu , Hiroto Urabayashi , Minoru Torihata , Kuniyuki Takahashi , Toshimichi Miyahara
发明人: Ryuichi Kyomasu , Hiroto Urabayashi , Minoru Torihata , Kuniyuki Takahashi , Toshimichi Miyahara
IPC分类号: H02P780
CPC分类号: H01L21/6835 , G05B2219/41205 , G05B2219/45026 , G05B2219/49266
摘要: An XY table used in a semiconductor manufacturing apparatus including lower (X table) fixed to an X movable element and an upper table (Y table) fixed to a Y movable element, in which the upper table (Y table) is supported movably in a Y direction and immovably in an X direction on the lower table (X table), the X movable element is immovable in the Y direction with respect to the X motor main body, the Y movable element is movable in the X direction with respect to the Y motor main body. Furthermore, the Y motor main body is provided with a permanent magnet that covers an entire region of movement of a magnetic action component (coils) of the Y movable element in the X direction.
摘要翻译: 一种用于半导体制造装置的XY工作台,其包括固定到X可移动元件的下部(X工作台)和固定到Y可移动元件的上部工作台(Y工作台),其中上部工作台(Y工作台)可移动地支撑在Y Y方向并且在X台上在X方向上不可移动,X可移动元件相对于X电动机主体在Y方向上不可移动,Y可移动元件可相对于X方向在X方向上移动 Y电机主体。 此外,Y电动机主体设置有永磁体,该永久磁铁覆盖Y方向上的Y可移动元件的磁作用部件(线圈)的整个移动区域。
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公开(公告)号:US06467673B2
公开(公告)日:2002-10-22
申请号:US09750841
申请日:2000-12-28
IPC分类号: H01L21607
CPC分类号: H01L24/78 , B23K20/004 , G06T7/70 , G06T2207/30148 , H01L2224/78301 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01027 , H01L2924/01033 , H01L2924/01039 , H01L2924/12041 , H01L2224/48 , H01L2224/45099
摘要: Wire bonding method and apparatus in which axial center of a bonding tool is brought to a reference member, and light-emitting diodes are sequentially lit so that images of the reference member and bonding tool in the X and Y directions are acquired by an offset correction camera. In this way, the amount of deviation between the bonding tool and the reference member is measured. Then, a position detection camera is caused to approach the reference member, and the amount of deviation between the optical axis of the position detection camera and the reference member is measured by the position detection camera. The accurate offset amount are determined on the basis of these measured values and the amounts of movement.
摘要翻译: 引线接合方法和接合工具的轴向中心被引入基准部件的装置,发光二极管依次点亮,使得基准部件和接合工具在X和Y方向上的图像通过偏移校正获得 相机。 以这种方式,测量接合工具和参考构件之间的偏差量。 然后,使位置检测摄像机接近基准构件,并且通过位置检测摄像机测量位置检测摄像机的光轴与基准构件之间的偏移量。 基于这些测量值和运动量来确定精确的偏移量。
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公开(公告)号:US06449516B1
公开(公告)日:2002-09-10
申请号:US09401155
申请日:1999-07-01
申请人: Ryuichi Kyomasu , Motohiko Kato
发明人: Ryuichi Kyomasu , Motohiko Kato
IPC分类号: G05B1918
CPC分类号: H01L24/78 , B23K20/004 , B23K2101/40 , B23Q15/22 , G05B2219/37555 , G05B2219/50299 , G06T7/70 , G06T2207/30141 , H01L2224/78301 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01033 , H01L2924/01039 , H01L2924/01061 , H01L2924/01082 , H01L2224/48 , H01L2224/45099 , H01L2224/05599
摘要: In a bonding method and apparatus, a position-detecting camera is moved to a point above reference marks, and the positional relationship between the reference marks and the optical axis of the position-detecting camera is measured by the position-detecting camera, a bonding tool is moved to a point above the reference marks in accordance with an amount of offset stored in memory beforehand, the positional relationships between the reference marks and the tool are measured by an offset-correcting camera, and an accurate amount of offset is determined by correcting the mount of offset stored in memory beforehand based upon such a measurement result.
摘要翻译: 在接合方法和装置中,将位置检测摄像机移动到参考标记之上的位置,并且通过位置检测摄像机测量位置检测摄像机的参考标记和光轴之间的位置关系, 预先根据存储在存储器中的偏移量将工具移动到参考标记之上的点,通过偏移校正照相机测量参考标记和工具之间的位置关系,并且通过以下方式确定精确的偏移量: 基于这样的测量结果预先校正存储在存储器中的偏移量的位置。
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公开(公告)号:US6135338A
公开(公告)日:2000-10-24
申请号:US169890
申请日:1998-10-12
IPC分类号: H01L21/60 , B23K20/10 , H01L21/607
CPC分类号: H01L24/78 , B23K20/106 , H01L2224/78301 , H01L2224/78308 , H01L2224/85205 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01033 , H01L2924/01039 , H01L2924/01082
摘要: An ultrasonic horn that has a capillary attachment hole to hold a capillary therein so as to be used in wire bonding, including a perpendicular slit provided on the opposite side of the capillary attachment hole from the tip end of the ultrasonic horn. An area surrounding the capillary attachment hole is formed thin, and the slit is narrowed and tightened by a bolt so as to insure a stable capillary holding force and prevent deterioration in the holding force over time.
摘要翻译: 一种超声波喇叭,其具有用于将毛细管保持在其中以用于引线接合的毛细管附接孔,包括设置在毛细管附接孔的与超声波喇叭的前端相反的一侧的垂直狭缝。 毛细管附接孔周围的区域形成得较薄,狭缝由螺栓变窄并紧固,以确保毛细管的保持力稳定,防止持续力随时间的劣化。
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公开(公告)号:US06814121B2
公开(公告)日:2004-11-09
申请号:US10267154
申请日:2002-10-09
IPC分类号: B32B3120
CPC分类号: H01L24/78 , B23K20/004 , H01L2224/78301 , H01L2224/8513 , H01L2924/00014 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01039 , H01L2924/01074 , H01L2924/01082 , H01L2924/12041 , H01L2924/12042 , Y10T29/49131 , Y10T29/53178 , H01L2224/48 , H01L2224/45099 , H01L2924/00
摘要: In measuring the position of a bonding tool accurately in offset correction in a bonding apparatus, the tool is moved to approach a reference member, the tool is illuminated with a reference pattern by a laser diode, and the deviation between the reference member and tool in one horizontal direction is measured based upon the image of the reference pattern projected on the tool. A position detection camera images the tool in another horizontal direction, thus measuring the deviation of the tool and reference member. The position detection camera is moved to approach the reference member, and the deviation between the position detection camera and the reference member is measured by the position detection camera. The accurate offset amounts between the position detection camera and the tool are determined based upon these measured values and amounts of movement of the position detection camera and the tool.
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公开(公告)号:US06491202B1
公开(公告)日:2002-12-10
申请号:US09607259
申请日:2000-06-30
申请人: Ryuichi Kyomasu , Fumio Miyano , Toshihiko Toyama
发明人: Ryuichi Kyomasu , Fumio Miyano , Toshihiko Toyama
IPC分类号: B23K106
CPC分类号: H01L24/85 , B23K20/004 , B23K20/26 , B23K37/003 , H01L24/48 , H01L24/78 , H01L2224/48225 , H01L2224/48227 , H01L2224/48247 , H01L2224/78301 , H01L2224/78703 , H01L2224/85048 , H01L2224/85075 , H01L2224/85205 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01033 , H01L2924/01079 , H01L2924/01082 , H01L2924/04953 , H01L2224/45099 , H01L2224/05599 , H01L2924/00
摘要: A wire bonding apparatus equipped with a chip heating assembly which is installed above a heater block that contains heaters so as to heat the chip portion of a device such as a semiconductor device, and a cooling pipe which is installed in the heater block so as to cool the heater block. The temperature of the bonding surface of the device is maintained by the chip heating assembly at a temperature that allows bonding to be executed while the heater block is cooled by cooling water or a cooling air draft that flows through the cooling pipe so that the temperature of the heater block is maintained at a low temperature that cause no softening of the resin substrate of the device.
摘要翻译: 一种装配有芯片加热组件的引线接合装置,其安装在加热器块的上方,该加热器块包含加热器,以加热诸如半导体器件的器件的芯片部分,以及安装在加热器块中的冷却管,以便 冷却加热器块。 装置的接合表面的温度由芯片加热组件保持在允许结合进行的温度,同时加热器块通过冷却水冷却或冷却空气通过冷却管道,使得温度 加热器块保持在不会使装置的树脂基板软化的低温下。
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