公开(公告)号：US20050151442A1

公开(公告)日：2005-07-14

申请号：US10990411

申请日：2004-11-18

申请人： Ryuji Kihara ,  Takuya Nakajima ,  Makoto Furuhata

发明人： Ryuji Kihara ,  Takuya Nakajima ,  Makoto Furuhata

IPC分类号： B81B3/00 ,  B81C1/00 ,  B81C3/00 ,  H02N1/00 ,  H02N2/00 ,  H03H3/007 ,  H03H9/00 ,  H03H9/02 ,  H03H9/10 ,  H03H9/24

CPC分类号： H03H9/2431 ,  H03H3/0072 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/1057 ,  H03H9/2436 ,  H03H9/2457 ,  H03H9/2463 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02519

摘要： Exemplary embodiments of the invention provide a micromechanical electrostatic resonator which designs high frequency, increases a ratio of output voltage to input voltage, and designs low drive voltage or reduced power consumption. A micromechanical electrostatic resonator of exemplary embodiments includes a plate-shaped vibration body, a pair of electrodes arranged oppositely to each other at both sides of the vibration body with a gap from an outer circumferential portion of the vibration body, a feeding device to apply in-phase alternating-current power to the pair of electrodes, and a detecting device to obtain an output corresponding to a change in capacitance between the vibration body and the electrodes. The planar shape of the vibration body takes a shape having a curved outline which comprises a neck portion.

摘要翻译： 本发明的示例性实施例提供一种微机械静电谐振器，其设计高频率，增加输出电压与输入电压的比率，并且设计低驱动电压或降低功耗。 示例性实施例的微机械静电谐振器包括板状振动体，在振动体两侧彼此相对布置的一对电极，与振动体的外周部分具有间隙，施加在 相对于该对电极的相位交流电力，以及检测装置，以获得与振动体和电极之间的电容变化相对应的输出。 振动体的平面形状具有包括颈部的弯曲轮廓的形状。

公开(公告)号：US07215061B2

公开(公告)日：2007-05-08

申请号：US10990411

申请日：2004-11-18

申请人： Ryuji Kihara ,  Takuya Nakajima ,  Makoto Furuhata

发明人： Ryuji Kihara ,  Takuya Nakajima ,  Makoto Furuhata

IPC分类号： H02N1/00 ,  H03H9/00 ,  H01L29/00

CPC分类号： H03H9/2431 ,  H03H3/0072 ,  H03H9/02259 ,  H03H9/02433 ,  H03H9/1057 ,  H03H9/2436 ,  H03H9/2457 ,  H03H9/2463 ,  H03H2009/02496 ,  H03H2009/02503 ,  H03H2009/02519

摘要： Exemplary embodiments of the invention provide a micromechanical electrostatic resonator which designs high frequency, increases a ratio of output voltage to input voltage, and designs low drive voltage or reduced power consumption. A micromechanical electrostatic resonator of exemplary embodiments includes a plate-shaped vibration body, a pair of electrodes arranged oppositely to each other at both sides of the vibration body with a gap from an outer circumferential portion of the vibration body, a feeding device to apply in-phase alternating-current power to the pair of electrodes, and a detecting device to obtain an output corresponding to a change in capacitance between the vibration body and the electrodes. The planar shape of the vibration body takes a shape having a curved outline which comprises a neck portion.

摘要翻译： 本发明的示例性实施例提供一种微机械静电谐振器，其设计高频率，增加输出电压与输入电压的比率，并且设计低驱动电压或降低功耗。 示例性实施例的微机械静电谐振器包括板状振动体，在振动体两侧彼此相对布置的一对电极，与振动体的外周部分具有间隙，施加在 相对于该对电极的相位交流电力，以及检测装置，以获得与振动体和电极之间的电容变化相对应的输出。 振动体的平面形状具有包括颈部的弯曲轮廓的形状。

公开(公告)号：US08912031B2

公开(公告)日：2014-12-16

申请号：US13306493

申请日：2011-11-29

申请人： Yoko Kanemoto ,  Ryuji Kihara

发明人： Yoko Kanemoto ,  Ryuji Kihara

IPC分类号： H01L21/00 ,  B81C1/00

CPC分类号： B81C1/00801 ,  B81B2201/0271 ,  B81B2207/07 ,  B81C2201/053 ,  Y10T29/49165

摘要： An electronic device includes: a vibrator disposed within a cavity on a substrate and electrically driven; an enclosure wall which has electric conductivity and sections the cavity from an insulation layer surrounding the circumference of the cavity; a first wiring and a second wiring which connect with the vibrator and penetrate the enclosure wall; and a liquid flow preventing portion disposed at the position where the first wiring and the second wiring penetrate the enclosure wall to prevent flow of etchant dissolving the insulation layer from the cavity toward the insulation layer and insulate the first wiring and the second wiring from the enclosure wall.

摘要翻译： 电子设备包括：振动器，设置在基板上的空腔内并电驱动; 封闭壁，其具有导电性，并且将空腔从围绕空腔圆周的绝缘层分开; 与振动器连接并穿透封闭壁的第一布线和第二布线; 以及设置在所述第一布线和所述第二布线穿过所述封闭壁的位置处的液体流动防止部，以防止将所述绝缘层从所述空腔朝向所述绝缘层溶解的蚀刻剂流动，并且将所述第一布线和所述第二布线与所述封装 壁。

公开(公告)号：US08305152B2

公开(公告)日：2012-11-06

申请号：US12974258

申请日：2010-12-21

申请人： Toru Watanabe ,  Shogo Inaba ,  Ryuji Kihara

发明人： Toru Watanabe ,  Shogo Inaba ,  Ryuji Kihara

IPC分类号： H03B5/30 ,  H03H9/205

CPC分类号： H03B5/30 ,  H03H3/0072 ,  H03H9/2457

摘要： An oscillator includes: a plurality of MEMS vibrators formed on a substrate; and an oscillator configuration circuit connected to the plurality of MEMS vibrators, wherein the plurality of MEMS vibrators each have a beam structure, and the respective beam structures are different, whereby their resonant frequencies are different.

摘要翻译： 振荡器包括：形成在基板上的多个MEMS振动器; 以及连接到所述多个MEMS振动器的振荡器配置电路，其中所述多个MEMS振子各自具有波束结构，并且所述各个波束结构不同，由此它们的谐振频率不同。

公开(公告)号：US08587390B2

公开(公告)日：2013-11-19

申请号：US13307336

申请日：2011-11-30

申请人： Ryuji Kihara

发明人： Ryuji Kihara

IPC分类号： H03H9/24 ,  H01L21/00

CPC分类号： H03H9/2457 ,  B81B2201/0271 ,  B81B2203/019 ,  B81C1/0015 ,  H03H3/0076 ,  H03H2009/02291 ,  H03H2009/02511

摘要： A MEMS resonator according to the invention includes: a substrate; a first electrode formed above the substrate; and a second electrode having a supporting portion which is formed above the substrate and a beam portion which is supported by the supporting portion and arranged above the first electrode, wherein the beam portion has, in plan view, a shape in which the width monotonically decreases in a direction from the supporting portion toward a tip of the beam portion in a region overlapping the first electrode.

摘要翻译： 根据本发明的MEMS谐振器包括：基板; 形成在所述衬底上的第一电极; 以及第二电极，其具有形成在所述基板上方的支撑部分和梁部分，所述梁部分由所述支撑部分支撑并且布置在所述第一电极之上，其中所述梁部分在平面图中具有所述宽度单调减小的形状 在与第一电极重叠的区域中从支撑部朝向梁部的尖端的方向。

公开(公告)号：US08026120B2

公开(公告)日：2011-09-27

申请号：US12684248

申请日：2010-01-08

申请人： Ryuji Kihara ,  Shogo Inaba

发明人： Ryuji Kihara ,  Shogo Inaba

IPC分类号： H01L21/00

CPC分类号： H03H3/0077 ,  H03H9/2457 ,  H03H2009/02496 ,  H03H2009/02511

摘要： A method of manufacturing an MEMS device includes: forming a covering structure having an MEMS structure and a hollow portion, which is located on a periphery of the MEMS structure and is opened to an outside, on a substrate; and performing surface etching for the MEMS structure in a gas phase by supplying an etching gas to the periphery of the MEMS structure from the outside.

摘要翻译： 一种制造MEMS器件的方法包括：在基板上形成具有MEMS结构的覆盖结构和位于MEMS结构的外围并向外部敞开的中空部分; 并且通过从外部向MEMS结构的外围提供蚀刻气体，在气相中对MEMS结构进行表面蚀刻。

公开(公告)号：US08847708B2

公开(公告)日：2014-09-30

申请号：US13431354

申请日：2012-03-27

申请人： Ryuji Kihara

发明人： Ryuji Kihara

IPC分类号： H03H9/24 ,  H03H9/125 ,  H03H9/52 ,  H03H3/007

CPC分类号： H03H3/0072 ,  H03H9/2457

摘要： A MEMS vibrator according to the invention includes: a first electrode fixed to a surface of a substrate; and a second electrode having a beam portion including a second face facing a first face of the first electrode, and a supporting portion supporting the beam portion and fixed to the surface of the substrate. The beam portion has a first portion whose length in a normal direction of the first face of the beam portion monotonically decreases toward a tip of the beam portion.

摘要翻译： 根据本发明的MEMS振动器包括：固定到基板表面的第一电极; 以及第二电极，其具有包括面对第一电极的第一面的第二面的光束部分和支撑光束部分并固定到基板的表面的支撑部分。 梁部分具有第一部分，其在梁部分的第一面的法线方向上的长度朝向梁部分的末端单调减小。

公开(公告)号：US20080079142A1

公开(公告)日：2008-04-03

申请号：US11906551

申请日：2007-10-02

申请人： Manuel Carmona ,  Ryuji Kihara ,  Jaume Esteve

发明人： Manuel Carmona ,  Ryuji Kihara ,  Jaume Esteve

IPC分类号： H01L23/12 ,  H01L21/52

CPC分类号： B81C1/00333 ,  B81C2203/0145

摘要： The present invention is related in general to a wafer-level packaging technique for micro-electro-mechanical systems (MEMS). A cap structure is provided encapsulating a MEMS element formed on a base substrate. A channel communicates etching holes provided on said cap structure, for the passage of an etching fluid to a chamber in which the MEMS element is housed. The holes are arranged in such a manner that they do not overlap, which allows the provision of a large number of etching holes above the MEMS element, but prevents a sealing material from reaching the MEMS element. The invention provides a low cost wafer-level packaging technique for MEMS devices, that reduces the total etching time of the sacrificial material and provides a reinforced protective cap structure for the MEMS package.

摘要翻译： 本发明一般涉及用于微电子机械系统（MEMS）的晶片级封装技术。 提供封装形成在基底基板上的MEMS元件的盖结构。 通道传送设置在所述盖结构上的蚀刻孔，用于将蚀刻流体通过到其中容纳MEMS元件的室。 孔以这样的方式排列，使得它们不重叠，这允许在MEMS元件上方提供大量蚀刻孔，但是防止密封材料到达MEMS元件。 本发明提供了一种用于MEMS器件的低成本晶片级封装技术，其减少了牺牲材料的总蚀刻时间，并为MEMS封装提供了增强的保护帽结构。

公开(公告)号：US20050189845A1

公开(公告)日：2005-09-01

申请号：US11065122

申请日：2005-02-24

申请人： Ryuji Kihara

发明人： Ryuji Kihara

IPC分类号： H02N1/00

CPC分类号： H02N1/006 ,  H02N1/008

摘要： Exemplary embodiments of the invention provide a micro-mechanical electrostatic actuator with a high driving force and a small occupied space and a micro-mechanical electrostatic actuator in which the movable electrode can be easily manufactured. A micro-mechanical electrostatic actuator of the exemplary embodiments of the present invention includes a substrate, a movable electrode supported by the substrate so as to be movable in a plane along a surface of the substrate and having a frame-shape and an opening that penetrates in a vertical direction perpendicular to the plane, drive electrodes provided in the opening of the substrate, a voltage supply applying a voltage between the movable electrode and the drive electrode and a signal output providing an output signal according to displacement of the movable electrode.

摘要翻译： 本发明的示例性实施例提供具有高驱动力和小占用空间的微机械静电致动器以及可容易地制造可动电极的微机械静电致动器。 本发明的示例性实施例的微机械静电致动器包括基板，由基板支撑的可移动电极，以便能够沿着基板的表面在平面内移动，并具有框架形状和开口 在垂直于该平面的垂直方向上，设置在基板的开口中的驱动电极，施加可动电极和驱动电极之间的电压的电压源，以及根据可动电极的位移提供输出信号的信号输出。