摘要:
A method for etching a feature in an etch layer is provided. A patterned photoresist mask is formed over the etch layer with photoresist features with sidewalls wherein the sidewalls of the photoresist features have striations forming peaks and valleys. The striations of the sidewalls of the photoresist features are reduced. The reducing the striations comprises at least one cycle, wherein each cycle comprises etching back peaks formed by the striations of the sidewalls of the photoresist features and depositing on the sidewalls of the photoresist features. Features are etched into the etch layer through the photoresist features. The photoresist mask is removed.
摘要:
A method for etching features into an etch layer disposed below a photoresist mask without an intermediate hardmask is provided. A plurality of etch cycles are provided. Each etch cycle comprises providing a deposition etch phase that etches features into the etch layer and deposits polymer on sidewalls of the features and over the photoresist and providing a cleaning phase that removes polymer deposited on the sidewalls.
摘要:
A plasma processing apparatus for processing a substrate is provided. A plasma processing chamber with chamber walls is provided. A substrate support is provided within the chamber walls. At least one confinement ring is provided, where the confinement ring and the substrate support define a plasma volume. A magnetic source for generating a magnetic field for magnetically enhancing physical confinement provided by the at least one confinement ring is provided.
摘要:
Disclosed is an organic light emitting device. The organic light emitting device comprises a first electrode, organic material layer(s) comprising a light emitting layer, and a second electrode. The first electrode, the organic material layer(s), and the second electrode form layered structure and at least one layer of the organic material layer(s) include the compound of Formula 1 or the compound of Formula 1 into which a thermosetting or photo-crosslinkable functional group is introduced.
摘要:
The present invention provides an aqueous formulation of human erythropoietin having the storage stability over a long period without serum albumin, in which the formulation comprises a pharmaceutically effective amount of human erythropoietin; non-ionic surfactant, polyhydric alcohol, neutral amino acid and sugar alcohol as stabilizers; isotonic reagent; and buffering reagent.
摘要:
Disclosed herein is a process for preparing an antimicrobial elastic fiber. The process comprises: mixing a glass compound, as an antimicrobial agent, containing ZnO, SiO2, and an alkali metal oxide, and having an average particle size of 0.1 μm to 5 μm, with a dispersant; sand grinding or milling the mixture; and adding the ground or milled mixture to a solution of a segmented polyurethane polymer to prepare an elastic yarn. The process can provide advantageous effects that spinnability is improved and the color of yarn remains unchanged.
摘要:
Provided is a goods information providing terminal that includes an authentication unit authenticating a user based on bio information including a user's fingerprint and initiating a user session when the user is authenticated; a goods information request unit requesting a goods management server that manages goods information and information on the location of goods from a radio frequency identification (RFID) attached to the goods to provide the goods information and the information on the location of the goods; a goods information display unit displaying to the user the goods information or the information on the location of the goods acquired from the goods management server; and a goods processing unit acquiring goods information including how to contact a seller from the goods management server, and contacting an associated agency including the seller when the goods need to be repaired or exchanged.
摘要:
The invention relates to a method and apparatus for determining a genre of multimedia data by analyzing the multimedia data, the apparatus including: a feature extractor extracting predetermined feature information from multimedia data; and a genre determination unit analyzing the extracted feature information of the multimedia data according to multimedia data genre determining logic associated with the extracted feature information and determining a genre of the multimedia data.
摘要:
A broadcasting program storing method of a mobile communication terminal and a mobile communication terminal using the same are disclosed. The method includes according to an embodiment allocating and storing a presently receiving broadcasting stream to and in at least one time section of a plurality of time sections while playing a broadcasting stream, and selecting at least one time section from the plural time sections to reproduce a broadcasting stream allocated to the selected time section. Thus, the broadcasting stream can be stored in real time while viewing the broadcasting program and the stored broadcasting stream can be easily searched for or reproduced.
摘要:
A hinge device for storage cases to hingedly connect a case body and a door. The hinge device includes a housing fixed to one of the case body and the door, first and second hinge shafts rotatably attached to opposite ends of the housing, respectively, such that the first and second hinge shafts are fixed to the other of the case body and the door, a cam driving unit disposed at the first hinge shaft in the housing, and a torsion spring having one end fixed to the second hinge shaft and the other end fixed in the housing such that the rotation resistance of the door is increased when the door is closed, and the torsion spring is returned to its original state when the door is opened.