SEMICONDUCTOR DEVICE HAVING VIA PROTECTIVE LAYER

    公开(公告)号:US20230111136A1

    公开(公告)日:2023-04-13

    申请号:US17966864

    申请日:2022-10-16

    摘要: A semiconductor device is disclosed. The semiconductor device includes a via passivation layer disposed on an inactive surface of a substrate, a through-electrode vertically penetrating the substrate and the via passivation layer, a concave portion formed in the top surface of the via passivation layer and disposed adjacent to the through-electrode, and a via protective layer coplanar with the via passivation layer and the through-electrode and to fill the concave portion. In a horizontal cross-sectional view, the via protective layer has a band shape surrounding the through-electrode.

    SEMICONDUCTOR PACKAGE
    7.
    发明申请

    公开(公告)号:US20230060115A1

    公开(公告)日:2023-02-23

    申请号:US17723552

    申请日:2022-04-19

    IPC分类号: H01L23/00 H01L25/065

    摘要: A semiconductor package includes a first semiconductor chip on a base chip, a second semiconductor chip on the first semiconductor chip in a first direction, each of the first and second semiconductor chips including a TSV and being electrically connected to each other via the TSV, dam structures on the base chip and surrounding a periphery of the first semiconductor chip, a first adhesive film between the base chip and the first semiconductor chip, a portion of the first adhesive film filling a space between the first semiconductor chip and the dam structures, a second adhesive film between the first semiconductor chip and the second semiconductor chip, a portion of the second adhesive film overlapping the dam structures in the first direction, and an encapsulant encapsulating a portion of each of the dam structures, the first semiconductor chip, and the second semiconductor chip.

    SEMICONDUCTOR DEVICE HAVING VIA PROTECTIVE LAYER

    公开(公告)号:US20210335688A1

    公开(公告)日:2021-10-28

    申请号:US17035145

    申请日:2020-09-28

    摘要: A semiconductor device is disclosed. The semiconductor device includes a via passivation layer disposed on an inactive surface of a substrate, a through-electrode vertically penetrating the substrate and the via passivation layer, a concave portion formed in the top surface of the via passivation layer and disposed adjacent to the through-electrode, and a via protective layer coplanar with the via passivation layer and the through-electrode and to fill the concave portion. In a horizontal cross-sectional view, the via protective layer has a band shape surrounding the through-electrode.