-
公开(公告)号:US20240375293A1
公开(公告)日:2024-11-14
申请号:US18437837
申请日:2024-02-09
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jungjoon Park , Jongseong Ko , Daeyong Kim , Donghyun Kim , Jisu Kim , Pyungkang Kim , Kihong Park , Jungjun Park , Jooyoung Park , Junhyeok Park , Hoseok Song , Chiho Ahn , Kongwoo Lee , Hyunyoung Lee , Chuyoung Choung , Jeongmin Hwang
Abstract: An in-chamber maintenance apparatus may include a stage module including a stage body in a chamber having a hollow interior, an XY stage mounted on an upper surface of the stage body and movable in an X-axis and a Y-axis direction perpendicular to each other, and a first driving portion configured to drive the XY stage, and a gripper module including a gripper body coupled to an upper surface of the XY stage, a gripping portion supported by the gripper body and configured to move up and down and rotate with respect to a Z-axis perpendicular to the X-axis and the Y-axis to be inserted into the hollow interior, and a second driving portion configured to drive the gripping portion.
-
公开(公告)号:US20240379384A1
公开(公告)日:2024-11-14
申请号:US18608633
申请日:2024-03-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jongseong Ko , Daeyong Kim , Donghyun Kim , Pyungkang Kim , Kihong Park , Jungjoon Park , Jungjun Park , Jooyoung Park , Hoseok Song , Kongwoo Lee , Hyunyoung Lee , Chuyoung Choung , Jeongmin Hwang , Jisu Kim , Junhyeok Park , Chiho Ahn
IPC: H01L21/67
Abstract: The present disclosure relates to wire grippers, wire processing apparatuses, and wire processing methods. An example wire gripper comprises a gripper body, a wire supply in the gripper body and supplying a wire, a wire cutting section including a cutter that cuts the wire supplied from the wire supply, a pressure roller below the wire supply and providing a guide groove to guide the wire supplied from the wire supply, a twister on a side of the pressure roller, and a reloader that drives an end of the wire to move from the wire supply to the twister. The twister holds and twists the end of the wire guided by the pressure roller.
-
公开(公告)号:US20240377840A1
公开(公告)日:2024-11-14
申请号:US18640395
申请日:2024-04-19
Applicant: Samsung Electronics Co., Ltd.
Inventor: Daehyun Yoon , Jungjun Park , Jongbeom Park , Kongwoo Lee
IPC: G05D1/656 , G05D105/20 , G05D107/70
Abstract: An automatic guided vehicle assembly includes a non-powered cart having a shelf unit configured to receive parts or tools, and an automated guided vehicle configured to attach and detach from the non-powered cart and configured to perform autonomous driving, wherein the automated guided vehicle includes a fastening pin configured to move upwardly and downwardly to attach to or detach the automated guided vehicle from the non-powered cart, wherein the non-powered cart includes a fastening unit configured to attach to and detach from the automated guided vehicle, and wherein the fastening unit includes a fastening member having a fastening guide configured to guide coupling of the fastening pinto the fastening unit.
-
公开(公告)号:US20250073892A1
公开(公告)日:2025-03-06
申请号:US18639076
申请日:2024-04-18
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jongseong Ko , Pyungkang Kim , Junhyeok Park , Donghyun Kim , Jungjoon Park , Hyoin Kim , Jungjun Park , Kongwoo Lee , Hyunyoung Lee , Beomsoo Hwang , Seojoo Choi
Abstract: Disclosed are a robot apparatus and a robot system. The robot apparatus includes a first robot unit supported by a frame structure and a second robot unit disposed under the frame structure and configured to move the first robot unit. The first robot unit includes first and second robot arms with first and second tool replacement portions. Tools to perform work are mounted on the replacement portions. A robot arm moving module is configured to move each of the first and second robot arms in a vertical direction. The robot system also includes a work table and a work table moving module configured to move the work table in all three directions. A controller inside the frame structure controls the movement of the robot arms and also of the work table.
-
公开(公告)号:US20240379345A1
公开(公告)日:2024-11-14
申请号:US18394524
申请日:2023-12-22
Applicant: Samsung Electronics Co., Ltd.
Inventor: Jeongmin Hwang , Jongseong Ko , Daeyong Kim , Donghyun Kim , Jisu Kim , Pyungkang Kim , Kihong Park , Jungjoon Park , Jungjun Park , Jooyoung Park , Junhyeok Park , Hoseok Song , Chiho Ahn , Kongwoo Lee , Hyunyoung Lee , Chuyoung Choung
Abstract: An apparatus for cleaning a semiconductor fabrication chamber may include a cleaning module, an inspection module and a drive module. The cleaning module may clean an inner area of the semiconductor fabrication chamber in a non-contact manner. The inspection module may be configured to inspect a cleaning of the semiconductor fabrication chamber by the cleaning module. The drive module may be configured to move the cleaning module and the inspection module in the semiconductor fabrication chamber. Thus, the non-contact type cleaning module may effectively remove the contaminant on an inner wall of the semiconductor fabrication chamber having a complicated shape and/or a part on the inner wall of the semiconductor fabrication chamber having a complicated shape.
-
6.
公开(公告)号:US09381653B2
公开(公告)日:2016-07-05
申请号:US14643702
申请日:2015-03-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Byeongsang Kim , Kang-Min Park , Jungjun Park , JaeChul Hwang
IPC: H01L21/677 , B25J19/00 , B25J15/00 , B25J11/00
CPC classification number: B25J19/0091 , B25J11/0095 , B25J15/0014 , H01L21/67766
Abstract: The robot including a main body, an arm connected to the main body, a hand connected to the arm, the hand including a hand base and a finger, and a hand bracket unit between the hand base and the finger or between the hand base and the arm, may be provided. The hand bracket unit may include a vibration damping member provided between the hand base and the finger or between the hand base and the arm, thereby damping vibration of the hand base or the finger.
Abstract translation: 该机器人包括主体,连接到主体的臂,连接到手臂的手,手包括手基座和手指,以及在手基座和手指之间或手基座和手指之间的手托架单元, 可以提供手臂。 手托架单元可以包括设置在手基座和手指之间或手基座和手臂之间的减震构件,从而阻止手基座或手指的振动。
-
-
-
-
-