公开(公告)号：US11453030B2

公开(公告)日：2022-09-27

申请号：US16690595

申请日：2019-11-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Chikara Kojima ,  Koji Ohashi ,  Hironori Suzuki

IPC: B06B1/06 ,  B06B1/02

Abstract: An ultrasonic sensor includes an opening portion, vibrating plate covering the opening portion, piezoelectric element overlapping with the opening portion, and a coupling electrode coupled to the piezoelectric element, extended from a position overlapping the opening portion to a position not overlapping the opening portion, and having a line width smaller than a width of the piezoelectric element. The piezoelectric has a first and second line portion, and a corner portion coupling the first and second line portions, when an intersection point connects a center of gravity of the piezoelectric and the corner portion with a virtual circle inscribed in the outline of the piezoelectric is a first intersection point of a tangent line. The first intersection point with the first and second line portions are a second and third intersection points, the coupling electrode coupled to a corner portion from the second intersection point to the third intersection point.

公开(公告)号：US11437564B2

公开(公告)日：2022-09-06

申请号：US16817754

申请日：2020-03-13

Applicant: Seiko Epson Corporation

Inventor： Chikara Kojima ,  Koji Ohashi ,  Hironori Suzuki

IPC: H01L41/113 ,  H01L41/053 ,  H01L41/047

Abstract: An ultrasonic device includes a base member including a first surface and a second surface different from the first surface, a vibration plate provided at the first surface of the base member, and a piezoelectric element provided at the vibration plate. The base member includes a hole formed from the first surface to the second surface, and a wall portion surrounding the hole. The vibration plate includes, when viewed in a direction from the first surface toward the second surface, a supporting portion overlapping the wall portion, and a blocking portion that overlaps the hole and blocks the hole. The piezoelectric element is laminated at the blocking portion. The supporting portion has a first Young's modulus. The blocking portion includes a first blocking portion having the first Young's modulus and a second blocking portion having a second Young's modulus smaller than the first Young's modulus.

公开(公告)号：US11594671B2

公开(公告)日：2023-02-28

申请号：US16681980

申请日：2019-11-13

Applicant: SEIKO EPSON CORPORATION

Inventor： Koji Ohashi ,  Hironori Suzuki ,  Chikara Kojima

IPC: H01L41/113 ,  B06B1/06 ,  H04R17/00 ,  G01H11/08 ,  G01S15/08 ,  G01S15/42 ,  G01S3/808 ,  H02N2/00

Abstract: An ultrasonic device according to an aspect of the present disclosure includes a substrate in which an opening section piercing through the substrate in a thickness direction is provided, a vibration plate provided on the substrate to close the opening section, a piezoelectric element provided in a position corresponding to the opening section on a first surface at the opposite side of the substrate side of the vibration plate, and an elastic layer provided in contact with a second surface at the substrate side of the vibration plate at the inner side of the opening section of the substrate. The elastic layer includes a curved surface recessed to the vibration plate side at the opposite side of the vibration plate side.

公开(公告)号：US11532780B2

公开(公告)日：2022-12-20

申请号：US16690845

申请日：2019-11-21

Applicant: SEIKO EPSON CORPORATION

Inventor： Chikara Kojima ,  Koji Ohashi ,  Hironori Suzuki

IPC: H01L41/113 ,  G01S15/08 ,  H01L27/20 ,  G01S7/521

Abstract: An ultrasonic sensor includes an element substrate having a first and a second surface at an opposite side of the first surface, including an opening section piercing through the element substrate in a Z direction from the first to second surface, a vibrating plate on the first surface of the element substrate to close the opening section, a plurality of vibration regions extending along an X direction orthogonal to the Z direction on the vibration plate in positions overlapping the opening section, and a plurality of piezoelectric elements to correspond to the plurality of vibration regions of the vibration plate. The opening section includes, on the first surface, a first and second side parallel to the X direction and a third and fourth side coupling end portions in the X direction of the first and second sides at an acute or obtuse angle to the first and the second side.

公开(公告)号：US11453031B2

公开(公告)日：2022-09-27

申请号：US16660847

申请日：2019-10-23

Applicant: Seiko Epson Corporation

Inventor： Hironori Suzuki ,  Chikara Kojima ,  Koji Ohashi ,  Yasuyuki Matsumoto ,  Katsuhiro Imai

IPC: B06B1/06 ,  H01L41/047 ,  H01L41/053 ,  B06B1/02 ,  H01L41/23 ,  H01L41/08 ,  H01L41/04

Abstract: An ultrasonic element includes an element substrate including a first surface, a second surface having a front-back relation with the first surface, an opening section piercing through the element substrate from the first surface to the second surface, and a partition wall section surrounding the opening section, a supporting film provided on the first surface of the element substrate to cover the opening section and including a third surface facing the opening section and a fourth surface having a front-back relation with the third surface, a piezoelectric element provided on the fourth surface of the supporting film and disposed in a region overlapping the opening section of the supporting film in a plan view from a film thickness direction extending from the third surface to the fourth surface, a sealing plate provided to be opposed to the fourth surface of the supporting film and joined to the supporting film by an adhesive member via a beam section projecting toward the supporting film, and a wall section provided on the fourth surface of the supporting film and provided to project toward the sealing plate between the beam section and the piezoelectric element.

公开(公告)号：US11041832B2

公开(公告)日：2021-06-22

申请号：US16431783

申请日：2019-06-05

Applicant: Seiko Epson Corporation

Inventor： Hironori Suzuki ,  Chikara Kojima

IPC: G01N29/32 ,  B65H7/12

Abstract: An ultrasonic device has a substrate in which ultrasonic elements transmitting an ultrasonic wave in a first direction are arrayed. A reverberation reduction film which reduces reverberant vibration of the substrate is arranged on a side of the first direction in the ultrasonic element. In the reverberation reduction film, a groove is arranged between the ultrasonic elements next to each other.

公开(公告)号：US10206280B2

公开(公告)日：2019-02-12

申请号：US15710094

申请日：2017-09-20

Applicant: Seiko Epson Corporation

Inventor： Hironori Suzuki ,  Hiroshi Matsuda ,  Koji Ohashi

IPC: H05K7/00 ,  H05K1/11 ,  H05K1/18 ,  B06B1/06

Abstract: A mounting structure includes a first substrate on which an elastic core section is provided, a conductive film that is provided over the first substrate from an upper part of the core section, and a second substrate on which a wiring portion connected to the conductive film on the core section is provided, in which the conductive film has a notch that partially exposes an end part of a surface of the core section which is in contact with the first substrate.

公开(公告)号：US09592031B2

公开(公告)日：2017-03-14

申请号：US14227558

申请日：2014-03-27

Applicant: SEIKO EPSON CORPORATION

Inventor： Kanechika Kiyose ,  Hironori Suzuki ,  Hiroshi Matsuda

IPC: A61B8/00 ,  B06B1/06 ,  A61B8/08 ,  H01L41/08 ,  H01L41/047 ,  H01L27/20 ,  H01L41/332

CPC classification number: A61B8/4494 ,  A61B8/4427 ,  A61B8/5207 ,  B06B1/0629 ,  B06B1/0688 ,  H01L27/20 ,  H01L41/047 ,  H01L41/0805 ,  H01L41/332 ,  Y10T29/42

Abstract: An ultrasonic transducer device includes a base, a first electrode film, a piezoelectric film, a second electrode film and a first conductive film. The base has a plurality of vibrating film portions arranged in an array pattern. The first electrode film is disposed on each of the vibrating film portions. The piezoelectric film is disposed on the first electrode film. The second electrode film is disposed on the piezoelectric film. The first conductive film is connected to the first electrode film. The first conductive film has a film thickness larger than a film thickness of the first electrode film.

Abstract translation: 超声波换能器装置包括基座，第一电极膜，压电膜，第二电极膜和第一导电膜。 底座具有以阵列图形排列的多个振动膜部。 第一电极膜设置在每个振动膜部分上。 压电膜设置在第一电极膜上。 第二电极膜设置在压电膜上。 第一导电膜连接到第一电极膜。 第一导电膜的膜厚大于第一电极膜的膜厚。

公开(公告)号：US09561527B2

公开(公告)日：2017-02-07

申请号：US14994461

申请日：2016-01-13

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomoaki Nakamura ,  Hironori Suzuki ,  Jiro Tsuruno

IPC: B06B1/06 ,  H01L41/08 ,  G01S15/02 ,  A61B8/00 ,  H01L41/053

CPC classification number: B06B1/0644 ,  A61B8/4444 ,  B06B1/0622 ,  G01S15/02 ,  G10K9/122 ,  G10K13/00 ,  H01L41/053 ,  H01L41/0825

Abstract: An ultrasonic transducer includes a substrate, a supporting film disposed on the substrate, and a piezoelectric element disposed on the supporting film. The substrate includes an opening. The piezoelectric element is disposed on an area that overlaps the opening in a plan view in a thickness direction of the substrate. A thickness of the supporting film at an area that overlaps the piezoelectric element in a plan view of the supporting film is smaller than a thickness of the supporting film at a different area different from the area that overlaps the piezoelectric element.

Abstract translation: 超声换能器包括基板，设置在基板上的支撑膜和设置在支撑膜上的压电元件。 基板包括开口。 压电元件设置在与基板的厚度方向的平面图重叠的区域上。 在支撑膜的平面图中与压电元件重叠的区域处的支撑膜的厚度小于在与压电元件重叠的区域不同的区域处的支撑膜的厚度。

公开(公告)号：US09231190B2

公开(公告)日：2016-01-05

申请号：US14448407

申请日：2014-07-31

Applicant: SEIKO EPSON CORPORATION

Inventor： Tomoaki Nakamura ,  Hironori Suzuki

IPC: H01L41/312 ,  H01L41/23 ,  H03H3/02 ,  H03H3/04 ,  H01L41/09 ,  B06B1/06 ,  A61B8/08 ,  A61B8/00 ,  G01N29/36

CPC classification number: H01L41/23 ,  A61B8/0891 ,  A61B8/4227 ,  A61B8/4455 ,  B06B1/0651 ,  G01N29/36 ,  H01L41/0973 ,  H01L41/22 ,  H01L41/312 ,  H03H3/02 ,  H03H3/04 ,  H03H2003/045 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126

Abstract: A method for manufacturing an ultrasonic transducer includes: forming a piezoelectric element by laminating a lower electrode, a piezoelectric body, and an upper electrode on a first face of a support film; affixing a reinforcing substrate that covers the piezoelectric element to the first face of the support film; forming a photosensitive resin substrate to a second face of the support film that is on an opposite side from the first face; forming an opening in the resin substrate by irradiating the resin substrate with light; and removing the reinforcing substrate.

Abstract translation: 一种制造超声换能器的方法包括：通过在支撑膜的第一面上层叠下电极，压电体和上电极来形成压电元件; 将覆盖所述压电元件的增强基板固定到所述支撑膜的第一面; 在与所述第一面相反一侧的所述支撑膜的第二面上形成感光性树脂基板; 通过用光照射树脂基板在树脂基板中形成开口; 并移除加强基板。