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公开(公告)号：US20200238654A9
公开(公告)日：2020-07-30
申请号：US16510226
申请日：2019-07-12
Applicant: SIGMA-TECHNOLOGY INC.
Inventor： Yoshiaki TACHIBANA
IPC: B32B3/26 , B32B3/30 , B32B5/02 , B32B5/24 , B32B27/34 , B32B5/18 , B60N2/58 , B60N2/64 , B32B27/06 , B32B27/32 , B32B27/36
Abstract: Provided are a cleaning method and cleaning device for cleaning with micro/nano-bubbles, with which a simple method of spraying a treatment solution containing micro/nano-bubbles onto a substrate to be processed makes it possible to efficiently and reliably peel off residual resist or remove contaminants from the substrate, while reducing an environmental load.This cleaning method is characterized in that, with respect to a substrate to be treated to which a resist film has adhered onto the substrate or a substrate to be treated to which the surface thereof has been contaminated with a metal or metal compounds, the resist film is peeled off or the metals or metal compounds are removed by spraying onto the substrate to be treated a treatment solution containing gaseous micro/nano-bubbles and having a temperature maintained at 30° C. to 90° C., the mean particle size of the micro/nano-bubbles when measured by an ice embedding method using a cryo-transmission electron microscope being 100 nm or smaller, preferably 30 nm or smaller, and also preferably the density of such bubbles being 108 or more bubbles per 1 mL.
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Patent Agency Ranking
公开(公告)号：US20190298653A1
公开(公告)日：2019-10-03
申请号：US16301435
申请日：2017-05-11
Applicant: Dai YAMANOUCHI , SIGMA-TECHNOLOGY INC.
Inventor： Dai YAMANOUCHI , Yoshiaki TACHIBANA , Kosuke TACHIBANA
Abstract: Provided are an administrable aqueous solution to a living body and a method for manufacturing the same, the administrable aqueous solution having a function of supplying sufficient oxygen to peripheral cells, causing less damage and injury of cells under a hypoxic or anaerobic stimulation, and continuously exhibiting a sufficiently high and stable effect to protect cells. The administrable aqueous solution to a living body according to the present invention contains oxygen nanobubbles having a mean particle size of 30 nm or less and a density of 1016 bubbles per ml, preferably a mean particle size of 1 to 10 nm and a density 1017 bubbles or more per ml, respectively, as determined by a measurement with a cryo-transmission electron microscope by an ice-embedding method. The administrable aqueous solution to a living body according to the present invention contains oxygen nanobubbles which are generated by jetting an aqueous solution containing dissolved oxygen from the outside of a cylinder, the cylinder being provided with 2 or more small through holes formed in the circumferential direction, via the small through-holes under atmospheric pressure or higher and thus bringing the jetted solution into collision in such a manner that water hammer is concentrated at the center of the cylinder on the same plane parallel to a cross-section in a radial direction of the cylinder.
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公开(公告)号：US20210138410A1
公开(公告)日：2021-05-13
申请号：US16623175
申请日：2017-08-02
Applicant: SIGMA-TECHNOLOGY INC.
Inventor： Yoshiaki TACHIBANA , Kousuke TACHIBANA , Souzou SASAJIMA , Kyoko HONMA
Abstract: Provided are: a microbubble generation device utilizing a swirling flow generated by injecting of a pressurized liquid; a microbubble generation method capable of generating a large amount of bubbles; and a shower apparatus and an oil-water separation apparatus having said microbubble generation device. This microbubble generation device comprises: a cylindrical or conical cylinder with a gas-liquid swirling chamber therein; a gas-liquid discharge inlet provided on one end of the cylindrical or conical cylinder; and a liquid supply cylinder and a gas supply cylinder for introducing a liquid and a gas into the gas-liquid swirling chamber. For the gas-liquid discharge outlet, a plurality of small cylindrical through-holes or a plurality of small recessed parts with a circular cross-section and at least a semicircular circumferential length, are respectively provided in the wall of a closed end at one end of the cylindrical or conical cylinder or on the circumferential surface of the inner wall of an open end at one end thereof.
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公开(公告)号：US20180161737A1
公开(公告)日：2018-06-14
申请号：US15319041
申请日：2015-12-01
Applicant: SIGMA-TECHNOLOGY INC.
Inventor： Yoshiaki TACHIBANA
IPC: B01F1/00 , B01F3/04 , B01F5/02 , B01F15/06 , H01L21/02 , H01L21/033 , H01L21/304 , B05B7/16
CPC classification number: B01F1/0005 , B01F1/00 , B01F3/04 , B01F3/04049 , B01F5/02 , B01F5/0231 , B01F15/06 , B05B7/16 , B05B7/1666 , B05B7/32 , B05D1/02 , B05D3/10 , B08B3/02 , B08B3/08 , H01L21/02052 , H01L21/027 , H01L21/0331 , H01L21/304
Abstract: Provided are a cleaning method and cleaning device for cleaning with micro/nano-bubbles, with which a simple method of spraying a treatment solution containing micro/nano-bubbles onto a substrate to be processed makes it possible to efficiently and reliably peel off residual resist or remove contaminants from the substrate, while reducing an environmental load. This cleaning method is characterized in that, with respect to a substrate to be treated to which a resist film has adhered onto the substrate or a substrate to be treated to which the surface thereof has been contaminated with a metal or metal compounds, the resist film is peeled off or the metals or metal compounds are removed by spraying onto the substrate to be treated a treatment solution containing gaseous micro/nano-bubbles and having a temperature maintained at 30° C. to 90° C., the mean particle size of the micro/nano-bubbles when measured by an ice embedding method using a cryo-transmission electron microscope being 100 nm or smaller, preferably 30 nm or smaller, and also preferably the density of such bubbles being 108 or more bubbles per 1 mL.
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公开(公告)号：US20200338000A1
公开(公告)日：2020-10-29
申请号：US16922027
申请日：2020-07-07
Applicant: Dai YAMANOUCHI , SIGMA-TECHNOLOGY INC.
Inventor： Dai YAMANOUCHI , Yoshiaki TACHIBANA , Kosuke TACHIBANA
Abstract: Provided is a method for manufacturing an administrable aqueous solution to a living body, the administrable aqueous solution having a function of supplying sufficient oxygen to peripheral cells, causing less damage and injury of cells under a hypoxic or anaerobic stimulation, and continuously exhibiting a sufficiently high and stable effect to protect cells. The administrable aqueous solution to a living body according to the present invention contains oxygen nanobubbles having a mean particle size of 30 nm or less and a density of 1016 bubbles per ml, preferably a mean particle size of 1 to 10 nm and a density 1017 bubbles or more per ml, respectively, as determined by a measurement with a cryo-transmission electron microscope by an ice-embedding method. The administrable aqueous solution to a living body according to the present invention contains oxygen nanobubbles which are generated by jetting an aqueous solution containing dissolved oxygen from the outside of a cylinder, the cylinder being provided with 2 or more small through holes formed in the circumferential direction, via the small through-holes under atmospheric pressure or higher and thus bringing the jetted solution into collision in such a manner that water hammer is concentrated at the center of the cylinder on the same plane parallel to a cross-section in a radial direction of the cylinder.
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公开(公告)号：US20190329520A1
公开(公告)日：2019-10-31
申请号：US16510226
申请日：2019-07-12
Applicant: SIGMA-TECHNOLOGY INC.
Inventor： Yoshiaki TACHIBANA
IPC: B32B3/26 , B32B3/30 , B32B5/02 , B32B5/24 , B32B27/34 , B32B5/18 , B60N2/58 , B60N2/64 , B32B27/06 , B32B27/32 , B32B27/36
Abstract: Provided are a cleaning method and cleaning device for cleaning with micro/nano-bubbles, with which a simple method of spraying a treatment solution containing micro/nano-bubbles onto a substrate to be processed makes it possible to efficiently and reliably peel off residual resist or remove contaminants from the substrate, while reducing an environmental load.This cleaning method is characterized in that, with respect to a substrate to be treated to which a resist film has adhered onto the substrate or a substrate to be treated to which the surface thereof has been contaminated with a metal or metal compounds, the resist film is peeled off or the metals or metal compounds are removed by spraying onto the substrate to be treated a treatment solution containing gaseous micro/nano-bubbles and having a temperature maintained at 30° C. to 90° C., the mean particle size of the micro/nano-bubbles when measured by an ice embedding method using a cryo-transmission electron microscope being 100 nm or smaller, preferably 30 nm or smaller, and also preferably the density of such bubbles being 108 or more bubbles per 1 mL.
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