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    Method for residue-free block pattern transfer onto metal interconnects for air gap formation
    4.
    发明授权
    Method for residue-free block pattern transfer onto metal interconnects for air gap formation 有权
    用于空隙形成的无残留块图案转移到金属互连上的方法

    公开(公告)号：US09390967B2

    公开(公告)日：2016-07-12

    申请号：US14567567

    申请日：2014-12-11

    Applicant: International Business Machines Corporation ,  STMicroelectronics, Inc.

    Inventor： Joe Lee ,  Yann Mignot ,  Brown C. Peethala

    IPC: H01L21/768

    CPC classification number: H01L21/7682 ,  H01L21/31111 ,  H01L21/31144 ,  H01L21/32133 ,  H01L21/76802 ,  H01L21/76843

    Abstract: A selective wet etching process is used, prior to air gap opening formation, to remove a sacrificial nitride layer from over a first region of an interconnect dielectric material containing a plurality of first conductive metal structures utilizing a titanium nitride hard mask portion located over a second region of the interconnect dielectric material as an etch mask. The titanium nitride hard mask portion located over the second region of the interconnect dielectric material is thereafter removed, again prior to air gap opening formation, utilizing another wet etch process. The wet etching processes are used instead of reactive ion etching.

    Abstract translation: 在气隙开口形成之前使用选择性湿法蚀刻工艺，以从包含多个第一导电金属结构的互连电介质材料的第一区域上方移除牺牲氮化物层，所述第一导电金属结构利用位于第二层上的氮化钛硬掩模部分 互连电介质材料的区域作为蚀刻掩模。 此后，在气隙开口形成之前，再次移除位于互连电介质材料的第二区域之上的氮化钛硬掩模部分，利用另一湿蚀刻工艺。 使用湿蚀刻工艺代替反应离子蚀刻。

    Trench interconnect having reduced fringe capacitance
    5.
    发明授权
    Trench interconnect having reduced fringe capacitance 有权
    具有降低的边缘电容的沟槽互连

    公开(公告)号：US09214429B2

    公开(公告)日：2015-12-15

    申请号：US14098346

    申请日：2013-12-05

    Applicant: STMicroelectronics, Inc. ,  International Business Machines Corporation

    Inventor： John H. Zhang ,  Hsueh-Chung Chen ,  Lawrence A. Clevenger ,  Yann Mignot ,  Carl Radens ,  Richard Stephen Wise ,  Yannick Loquet ,  Yiheng Xu

    IPC: H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L23/532 ,  H01L21/768 ,  H01L23/522

    CPC classification number: H01L23/53295 ,  H01L21/76807 ,  H01L21/7682 ,  H01L21/76831 ,  H01L21/76879 ,  H01L23/5222 ,  H01L23/5226 ,  H01L23/5329 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: Ultra-low-k dielectric materials used as inter-layer dielectrics in high-performance integrated circuits are prone to be structurally unstable. The Young's modulus of such materials is decreased, resulting in porosity, poor film strength, cracking, and voids. An alternative dual damascene interconnect structure incorporates deep air gaps into a high modulus dielectric material to maintain structural stability while reducing capacitance between adjacent nanowires. Incorporation of a deep air gap having k=1.0 compensates for the use of a higher modulus film having a dielectric constant greater than the typical ultra-low-k (ULK) dielectric value of about 2.2. The higher modulus film containing the deep air gap is used as an insulator and a means of reducing fringe capacitance between adjacent metal lines. The dielectric layer between two adjacent metal lines thus forms a ULK/high-modulus dielectric bi-layer.

    Abstract translation: 在高性能集成电路中用作层间电介质的超低k电介质材料容易在结构上不稳定。 这种材料的杨氏模量降低，导致孔隙率，差的膜强度，开裂和空隙。 一种替代的双镶嵌互连结构将深空气隙结合到高模量介电材料中以维持结构稳定性，同时减小相邻纳米线之间的电容。 结合k = 1.0的深空气间隙补偿使用介电常数大于典型的超低k（ULK）介电值约2.2的介电常数的较高模量的膜。 使用含有深空气间隙的较高模量的膜作为绝缘体和减少相邻金属线之间的条纹电容的装置。 因此，两个相邻金属线之间的电介质层形成ULK /高模量介电双层。

    TRENCH INTERCONNECT HAVING REDUCED FRINGE CAPACITANCE
    6.
    发明申请
    TRENCH INTERCONNECT HAVING REDUCED FRINGE CAPACITANCE 有权
    具有减少的FRINGE电容的TRENCH INTERCONNECT

    公开(公告)号：US20150162278A1

    公开(公告)日：2015-06-11

    申请号：US14098346

    申请日：2013-12-05

    Applicant: International Business Machines Corporation ,  STMicroelectronics, Inc.

    Inventor： John H. Zhang ,  Hsueh-Chung Chen ,  Lawrence A. Clevenger ,  Yann Mignot ,  Carl Radens ,  Richard Stephen Wise ,  Yannick Loquet ,  Yiheng Xu

    IPC: H01L23/528 ,  H01L23/522 ,  H01L23/532 ,  H01L21/768

    CPC classification number: H01L23/53295 ,  H01L21/76807 ,  H01L21/7682 ,  H01L21/76831 ,  H01L21/76879 ,  H01L23/5222 ,  H01L23/5226 ,  H01L23/5329 ,  H01L2221/1094 ,  H01L2924/0002 ,  H01L2924/00

    Abstract: Ultra-low-k dielectric materials used as inter-layer dielectrics in high-performance integrated circuits are prone to be structurally unstable. The Young's modulus of such materials is decreased, resulting in porosity, poor film strength, cracking, and voids. An alternative dual damascene interconnect structure incorporates deep air gaps into a high modulus dielectric material to maintain structural stability while reducing capacitance between adjacent nanowires. Incorporation of a deep air gap having k=1.0 compensates for the use of a higher modulus film having a dielectric constant greater than the typical ultra-low-k (ULK) dielectric value of about 2.2. The higher modulus film containing the deep air gap is used as an insulator and a means of reducing fringe capacitance between adjacent metal lines. The dielectric layer between two adjacent metal lines thus forms a ULK/high-modulus dielectric bi-layer.

    Abstract translation: 在高性能集成电路中用作层间电介质的超低k电介质材料容易在结构上不稳定。 这种材料的杨氏模量降低，导致孔隙率，差的膜强度，开裂和空隙。 一种替代的双镶嵌互连结构将深空气隙结合到高模量介电材料中以维持结构稳定性，同时减小相邻纳米线之间的电容。 结合k = 1.0的深空气间隙补偿使用介电常数大于典型的超低k（ULK）介电值约2.2的介电常数的较高模量的膜。 使用含有深空气间隙的较高模量的膜作为绝缘体和减少相邻金属线之间的条纹电容的装置。 因此，两个相邻金属线之间的电介质层形成ULK /高模量介电双层。

    Co-integration of tensile silicon and compressive silicon germanium
    7.
    发明授权
    Co-integration of tensile silicon and compressive silicon germanium 有权

    公开(公告)号：US10037922B2

    公开(公告)日：2018-07-31

    申请号：US15874813

    申请日：2018-01-18

    Applicant: STMICROELECTRONICS, INC.

    Inventor： Nicolas Loubet ,  Pierre Morin ,  Yann Mignot

    IPC: H01L27/092 ,  H01L21/8238 ,  H01L29/417 ,  H01L29/78

    Abstract: Integrated circuits are disclosed in which the strain properties of adjacent pFETs and nFETs are independently adjustable. The pFETs include compressive-strained SiGe on a silicon substrate, while the nFETs include tensile-strained silicon on a strain-relaxed SiGe substrate. Adjacent n-type and p-type FinFETs are separated by electrically insulating regions formed by a damascene process. During formation of the insulating regions, the SiGe substrate supporting the n-type devices is permitted to relax elastically, thereby limiting defect formation in the crystal lattice of the SiGe substrate.

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