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公开(公告)号:US20210320268A1
公开(公告)日:2021-10-14
申请号:US17077648
申请日:2020-10-22
发明人: Minkyung KANG , Byungsoo SO , Jaewoo JEONG , Jongjun BAEK , Hiroshi OKUMURA
摘要: A method of manufacturing a display apparatus includes forming a first substrate on a support substrate; forming a first barrier layer on the first substrate; and forming a conductive layer by implanting n-type impurities or p-type impurities in the first barrier layer and at least a portion of the first substrate. A display apparatus includes a conductive layer arranged on a substrate and a barrier layer arranged on the conductive layer. The conductive layer is doped with n-type impurities when the first barrier layer is doped with n-type impurities, and the conductive layer is doped with p-type impurities when the first barrier layer is doped with p-type impurities.
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公开(公告)号:US20210033853A1
公开(公告)日:2021-02-04
申请号:US16802011
申请日:2020-02-26
发明人: Jihwan KIM , Jongjun BAEK , Byungsoo SO , Hiroshi OKUMURA
IPC分类号: G02B26/12 , G02F1/07 , H01L21/67 , H01L21/02 , B23K26/064 , B23K26/082 , B23K26/354
摘要: Provided are a laser annealing apparatus and a method of manufacturing a substrate having a poly-Si layer using the laser annealing apparatus. The laser annealing apparatus includes a laser beam source that emits a linearly polarized laser beam, a polygon mirror that rotates around a rotation axis and reflects the laser beam emitted from the laser beam source, a first Kerr cell disposed on a laser beam path between the laser beam source and the polygon mirror, and a first optical element that directs the laser beam reflected by the polygon mirror toward an amorphous Si layer where the laser beam is irradiated upon the amorphous Si layer.
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公开(公告)号:US20240321904A1
公开(公告)日:2024-09-26
申请号:US18732591
申请日:2024-06-03
发明人: Jihyun KIM , Taewook KANG , Byungsoo SO , Hyuneok SHIN , Wooseok JEON
IPC分类号: H01L27/12 , H01L23/00 , H01L25/16 , H01L27/15 , H10K59/131
CPC分类号: H01L27/124 , H01L24/05 , H01L27/1218 , H01L27/1266 , H01L24/08 , H01L24/32 , H01L24/80 , H01L24/83 , H01L25/167 , H01L27/156 , H01L2224/05541 , H01L2224/05571 , H01L2224/08225 , H01L2224/32225 , H01L2224/80203 , H01L2224/80801 , H01L2224/83203 , H01L2224/83851 , H10K59/131
摘要: A display device including a display area and a non-display area further includes a base layer including a first surface and a second surface opposite to the first surface, the base layer having, in the non-display area, an opening portion penetrating the first surface and the second surface; a pad unit including a terminal on the first surface, the pad unit extending from the first surface to the opening portion; a connection line connected to the terminal on the first surface, the connection line extending from the non-display area to the display area; an insulating layer covering the terminal and the connection line; a thin-film transistor including a semiconductor layer on the insulating layer, the thin-film transistor being connected to the connection line; and a display element connected to the thin-film transistor, the display element being in the display area.
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公开(公告)号:US20200335560A1
公开(公告)日:2020-10-22
申请号:US16843368
申请日:2020-04-08
发明人: Jongjun BAEK , Jaewoo JEONG , Byungsoo SO
摘要: A display panel includes: a base substrate; a circuit layer on the base substrate; and a display element layer on the circuit layer, wherein the circuit layer includes an active layer on the base substrate and containing boron and fluorine; a control electrode on the active layer; and a control electrode insulation layer between the active layer and the control electrode, wherein the active layer includes: a core layer in which a concentration of the boron is greater than a concentration of the fluorine; and a surface layer on the core layer and in which a concentration of the fluorine is greater than a concentration of the boron.
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公开(公告)号:US20230371311A1
公开(公告)日:2023-11-16
申请号:US18355732
申请日:2023-07-20
发明人: Jongjun BAEK , Jaewoo JEONG , Byungsoo SO
IPC分类号: H10K59/121 , H01L29/16 , H01L29/04 , H01L29/786 , H10K50/12 , H10K50/165 , H10K59/123 , H10K71/00
CPC分类号: H10K59/1213 , H01L29/1604 , H01L29/045 , H01L29/78675 , H10K50/12 , H10K50/165 , H10K59/123 , H10K71/00
摘要: A display apparatus includes a substrate, a first thin film transistor on the substrate, the first thin film transistor including an active layer including a source region, a drain region, and a channel region between the source region and the drain region, and a display device on the substrate and electrically connected to the first thin film transistor. The source region, the drain region, and the channel region include a first dopant and a second dopant, the second dopant being different from the first dopant. A concentration of the first dopant in the channel region is less than a concentration of the first dopant in the source region and the drain region.
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公开(公告)号:US20230111736A1
公开(公告)日:2023-04-13
申请号:US17958518
申请日:2022-10-03
发明人: Jaewoo JEONG , Juhyun LEE , Byungsoo SO , Taewook KANG
摘要: A display apparatus a substrate including a lower organic layer, a lower barrier layer, an upper organic layer, and an upper barrier layer, which are sequentially stacked on each other, a pixel circuit layer on the substrate, and a display element layer on the pixel circuit layer. The upper barrier layer includes a first inorganic barrier layer on the upper organic layer, a shielding layer on the first inorganic barrier layer, the shielding layer comprising an oxide semiconductor material, and a second inorganic barrier layer on the shielding layer.
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公开(公告)号:US20210296374A1
公开(公告)日:2021-09-23
申请号:US17030977
申请日:2020-09-24
发明人: Jongoh SEO , Gyungmin BAEK , Byungsoo SO
IPC分类号: H01L27/12 , H01L29/786 , H01L29/66 , H01L21/02
摘要: A manufacturing method of a display apparatus including preparing a substrate, forming an amorphous silicon layer on the substrate, cleaning the amorphous silicon layer with hydrofluoric acid, crystallizing the amorphous silicon layer into a polycrystalline silicon layer, and forming a metal layer directly on the polycrystalline silicon layer.
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公开(公告)号:US20220384538A1
公开(公告)日:2022-12-01
申请号:US17819616
申请日:2022-08-12
发明人: Jongjun BAEK , Jaewoo JEONG , Byungsoo SO
摘要: A display panel includes: a base substrate; a circuit layer on the base substrate; and a display element layer on the circuit layer, wherein the circuit layer includes an active layer on the base substrate and containing boron and fluorine; a control electrode on the active layer; and a control electrode insulation layer between the active layer and the control electrode, wherein the active layer includes: a core layer in which a concentration of the boron is greater than a concentration of the fluorine; and a surface layer on the core layer and in which a concentration of the fluorine is greater than a concentration of the boron.
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公开(公告)号:US20220093649A1
公开(公告)日:2022-03-24
申请号:US17339149
申请日:2021-06-04
发明人: Jihyun KIM , Taewook KANG , Byungsoo SO , Hyuneok SHIN , Wooseok JEON
摘要: A display device including a display area and a non-display area further includes a base layer including a first surface and a second surface opposite to the first surface, the base layer having, in the non-display area, an opening portion penetrating the first surface and the second surface; a pad unit including a terminal on the first surface, the pad unit extending from the first surface to the opening portion; a connection line connected to the terminal on the first surface, the connection line extending from the non-display area to the display area; an insulating layer covering the terminal and the connection line; a thin-film transistor including a semiconductor layer on the insulating layer, the thin-film transistor being connected to the connection line; and a display element connected to the thin-film transistor, the display element being in the display area.
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公开(公告)号:US20210265440A1
公开(公告)日:2021-08-26
申请号:US17317304
申请日:2021-05-11
发明人: Jongjun BAEK , Jaewoo JEONG , Byungsoo SO
摘要: A display apparatus includes a substrate, a first thin film transistor on the substrate, the first thin film transistor including an active layer including a source region, a drain region, and a channel region between the source region and the drain region, and a display device on the substrate and electrically connected to the first thin film transistor. The source region, the drain region, and the channel region include a first dopant and a second dopant, the second dopant being different from the first dopant. A concentration of the first dopant in the channel region is less than a concentration of the first dopant in the source region and the drain region.
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