公开(公告)号：US20240322713A1

公开(公告)日：2024-09-26

申请号：US18396845

申请日：2023-12-27

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  Eui Gyu KIM ,  Sukha RYU ,  SANGHEON JEON

IPC: H02N13/00 ,  B05C13/00 ,  B05C21/00

CPC classification number: H02N13/00 ,  B05C13/00 ,  B05C21/005

Abstract: A thin film deposition apparatus according to an embodiment includes a chamber, a deposition source disposed in a chamber and that supplies a deposition material to the substrate, a mask assembly comprising pattern holes through which the deposition material passes, and an electrostatic chuck facing the mask assembly and that fixes the substrate. The electrostatic chuck comprises a body that supports the substrate, an insulating layer disposed on the body, a first electrode disposed in the insulating layer and spaced apart from the body by a first distance, a second electrode disposed in the insulating layer and spaced apart from the body by a second distance, and a conductive layer disposed in the insulating layer and spaced apart from the body by a third distance. The first electrode and the second electrode are supplied with different voltages, and the third distance is greater than the first distance.

公开(公告)号：US20230317492A1

公开(公告)日：2023-10-05

申请号：US18104453

申请日：2023-02-01

Applicant: Samsung Display Co., Ltd.

Inventor： EUIGYU KIM ,  SANG MIN YI ,  JUNHYEUK KO ,  JONGBUM KIM ,  JAESUK MOON ,  HONG-KYUN AHN ,  KYUNGHOON CHUNG

IPC: H01L21/683

CPC classification number: H01L21/6833

Abstract: Disclosed is a deposition mask stage comprising a stage frame, chucks combined with the stage frame, and support blocks on a back side of the stage frame. The chucks are spaced apart from each other in a first direction and a second direction that are defined in an extending direction of the stage frame. The first and second directions intersect each other. The support blocks are spaced apart from each other in the first direction and the second direction on the back side of the stage frame.

公开(公告)号：US20240298512A1

公开(公告)日：2024-09-05

申请号：US18664528

申请日：2024-05-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： SEIL KIM ,  EUIGYU KIM ,  KWANHEE LEE ,  SANG MIN YI ,  JUNHYEUK KO ,  SEUNGJU HONG

IPC: H10K71/16 ,  B05C21/00 ,  C23C14/04 ,  H10K71/00

CPC classification number: H10K71/166 ,  B05C21/005 ,  C23C14/042 ,  H10K71/00 ,  H10K71/164

Abstract: A mask includes a first mask that includes a first long side that extends in a first direction and a first short side that extends in a second direction that crosses the first direction and that includes a first edge portion, a first center portion, and a first welded portion, that are sequentially arranged in the first direction. The mask further includes a second mask that includes a second long side that extends in the first direction and a second short side that extends in the second direction and that includes a second welded portion, a second center portion, and a second edge portion, that are sequentially arranged in the first direction. The first welded portion is in contact with the second welded portion.

公开(公告)号：US20240068082A1

公开(公告)日：2024-02-29

申请号：US18218485

申请日：2023-07-05

Applicant: Samsung Display Co., LTD.

Inventor： JUNHYEUK KO ,  MINGOO KANG ,  EUIGYU KIM ,  JONGBUM KIM ,  Sukha RYU ,  SANG MIN YI ,  KYUNGHOON CHUNG

IPC: C23C14/04 ,  H10K71/10

CPC classification number: C23C14/042 ,  H10K71/191 ,  H01L21/682

Abstract: A deposition apparatus includes a mask, a mask frame, a stage disposed on a rear surface of the mask frame, and first to third external force applying parts disposed on the stage. Each of the first portion and the second portion includes a support and a driving part which moves the support. The first to third external force applying parts applies external force to the mask frame to control a shape of the mask frame.

公开(公告)号：US20240096679A1

公开(公告)日：2024-03-21

申请号：US18469684

申请日：2023-09-19

Applicant: Samsung Display Co., LTD.

Inventor： JUNHYEUK KO ,  MINGOO KANG ,  MINSEOK KIM ,  MINCHUL SONG ,  Sukha Ryu ,  EUIGYU KIM

IPC: H01L21/683 ,  H01L21/68

CPC classification number: H01L21/6833 ,  H01L21/682

Abstract: A substrate loading device includes an electrostatic chuck that chucks a substrate, a mask frame disposed under the electrostatic chuck, and including an edge having a flat top surface, and a plurality of holders disposed between the electrostatic chuck and the mask frame. Each of the plurality of holders includes a first connection part connected to a side of the electrostatic chuck, a second connection part connected to the first connection part and extending in a direction intersecting an extension direction of the first connection part, and a third connection part connected to the second connection part, extending in a direction intersecting an extension direction of the second connection part, and rotationally moving between a first position overlapping the substrate in a thickness direction of the substrate and a second position spaced apart from the substrate.

公开(公告)号：US20240084433A1

公开(公告)日：2024-03-14

申请号：US18239508

申请日：2023-08-29

Applicant: Samsung Display Co., LTD.

Inventor： KYONGHO HONG ,  SUNGHO PARK ,  JUNGSEOB LEE ,  JUNHYEUK KO ,  EUIGYU KIM ,  SANG MIN YI ,  SANGJIN HAN

IPC: C23C14/04 ,  H10K71/16

CPC classification number: C23C14/042 ,  H10K71/166

Abstract: A stage unit includes a stage that provides a seating surface and has an opening formed through the seating surface, a first support unit disposed below the opening and coupled to the stage, a second support unit disposed below the opening and coupled to the stage, where the second support unit is spaced apart from the first support unit on a plane, and a flatness measurement unit supported by the first support unit. Each of the first support unit and the second support unit provides a support surface that crosses the seating surface, and the support surface of the first support unit and the support surface of the second support unit are movable in a direction toward and away from the opening.

公开(公告)号：US20240044001A1

公开(公告)日：2024-02-08

申请号：US18336207

申请日：2023-06-16

Applicant: Samsung Display Co., LTD.

Inventor： YOUNGSUN CHO ,  JUNHYEUK KO ,  MYUNGKYU KIM ,  YOUNG KWANG LEE ,  Seung Min JIN ,  Jae Min HONG

IPC: C23C16/458 ,  C23C16/04

CPC classification number: C23C16/458 ,  C23C16/042

Abstract: A deposition apparatus according to an embodiment includes a deposition source, and a deposition portion that faces the deposition source. The deposition portion is disposed at an angle of about 4 degrees to about 14 degrees with respect to an imaginary vertical line that is perpendicular to ground. The deposition portion includes a frame including an opening, and an outer portion disposed around the opening, a substrate disposed on a first side of the frame, and a plurality of back stages disposed on a second side opposite to the first side of the frame. The frame moves by movement of the plurality of back stages.

公开(公告)号：US20240226955A9

公开(公告)日：2024-07-11

申请号：US18234937

申请日：2023-08-17

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  MINGOO KANG ,  JUNHYEUK KO ,  EUIGYU KIM ,  SUKHA RYU ,  YOUNGSUN CHO

IPC: B05C13/02 ,  B05C21/00 ,  H01L21/683 ,  H10K71/16

CPC classification number: B05C13/02 ,  B05C21/005 ,  H01L21/6833 ,  H10K71/166

Abstract: A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.

公开(公告)号：US20240146214A1

公开(公告)日：2024-05-02

申请号：US18446274

申请日：2023-08-08

Applicant: Samsung Display Co., LTD.

Inventor： MINCHUL SONG ,  JUNHYEUK KO ,  MINGOO KANG ,  EUIGYU KIM ,  Sukha Ryu ,  YOUNGSUN CHO

IPC: H02N13/00 ,  C23C14/50

CPC classification number: H02N13/00 ,  C23C14/50

Abstract: An electrostatic chuck unit includes: a first plate having a first surface and a second surface facing each other and a first hole extending from the first surface to the second surface; a second plate on the first surface of the first plate and having a groove corresponding to the first hole; a coupling bolt inserted into the first hole and the groove; and a height adjusting member spaced apart from the coupling bolt in a plan view.

公开(公告)号：US20220020926A1

公开(公告)日：2022-01-20

申请号：US17231652

申请日：2021-04-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： SEIL KIM ,  EUIGYU KIM ,  KWANHEE LEE ,  SANG MIN YI ,  JUNHYEUK KO ,  SEUNGJU HONG

IPC: H01L51/00 ,  H01L51/56 ,  C23C14/04

Abstract: A mask includes a first mask that includes a first long side that extends in a first direction and a first short side that extends in a second direction that crosses the first direction and that includes a first edge portion, a first center portion, and a first welded portion, that are sequentially arranged in the first direction. The mask further includes a second mask that includes a second long side that extends in the first direction and a second short side that extends in the second direction and that includes a second welded portion, a second center portion, and a second edge portion, that are sequentially arranged in the first direction. The first welded portion is in contact with the second welded portion.