公开(公告)号：US20150015859A1

公开(公告)日：2015-01-15

申请号：US14141147

申请日：2013-12-26

Applicant: Samsung Display Co., Ltd.

Inventor： Sanghyun Yun ,  Cha-Dong Kim ,  Changhoon Kim ,  Jung-In Park ,  Kibeom Lee ,  Hikuk Lee ,  Jaehyuk Chang

IPC: G03F7/20

CPC classification number: G03F7/70291 ,  G03F7/2051 ,  G03F7/70208 ,  G03F7/70275 ,  G03F7/70458

Abstract: Provided is a digital exposure device. The digital exposure device includes a stage mounted with a substrate on which a pattern is formed, a first light source, a first head, and a digital micro-mirror device control unit. The stage is configured to move in a scan direction. The first light source is configured to provide a first light. The first head is spaced apart from the stage in a first direction and is configured to receive the first light, to generate at least one spot beam by modulating the first light, and to project the at least one spot beam onto the substrate. The digital micro-mirror device control unit is configured to control an energy of the at least one spot beam generated from the first head to be inversely proportional to a size of the at least spot beam generated from the first head.

Abstract translation: 提供了一种数字曝光装置。 数字曝光装置包括安装有其上形成有图案的基板的台，第一光源，第一头和数字微镜装置控制单元。 舞台被配置为沿扫描方向移动。 第一光源被配置为提供第一光。 第一头部在第一方向上与舞台间隔开，并且被配置为接收第一光，通过调制第一光以产生至少一个点光束，并将至少一个光束投射到衬底上。 数字微镜装置控制单元被配置为控制从第一头产生的至少一个点束的能量与从第一头产生的至少点光束的尺寸成反比。

公开(公告)号：US09684164B2

公开(公告)日：2017-06-20

申请号：US14169215

申请日：2014-01-31

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Changhoon Kim ,  Sanghyun Yun ,  Hikuk Lee ,  Jaehyuk Chang ,  Cha-Dong Kim ,  Kibeom Lee

IPC: G06F19/00 ,  G02B26/08 ,  G03F7/20

CPC classification number: G02B26/0866 ,  G03F7/70291 ,  G03F7/70475 ,  G03F7/70508

Abstract: A digital exposure device includes: a stage having a substrate seated thereon where a pattern is to be formed and moving in a scan direction; a data modification unit receiving design data and generating modified data by extending the design data; and a digital exposure unit receiving the design data and projecting a light controlled according to the design data on the substrate, wherein the modified data includes intermedial data corresponding to the size difference between an image of the design data and an image of the modified data and some of unit data forming the intermedial data are data obtained when unit data of the design data are shifted in any expansion direction.

公开(公告)号：US09310697B2

公开(公告)日：2016-04-12

申请号：US14141147

申请日：2013-12-26

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Sanghyun Yun ,  Cha-Dong Kim ,  Changhoon Kim ,  Jung-In Park ,  Kibeom Lee ,  Hikuk Lee ,  Jaehyuk Chang

IPC: G03B27/44 ,  G03B27/54 ,  G03F7/20

CPC classification number: G03F7/70291 ,  G03F7/2051 ,  G03F7/70208 ,  G03F7/70275 ,  G03F7/70458

Abstract: Provided is a digital exposure device. The digital exposure device includes a stage mounted with a substrate on which a pattern is formed, a first light source, a first head, and a digital micro-mirror device control unit. The stage is configured to move in a scan direction. The first light source is configured to provide a first light. The first head is spaced apart from the stage in a first direction and is configured to receive the first light, to generate at least one spot beam by modulating the first light, and to project the at least one spot beam onto the substrate. The digital micro-mirror device control unit is configured to control an energy of the at least one spot beam generated from the first head to be inversely proportional to a size of the at least spot beam generated from the first head.

Abstract translation: 提供了一种数字曝光装置。 数字曝光装置包括安装有其上形成有图案的基板的台，第一光源，第一头和数字微镜装置控制单元。 舞台被配置为沿扫描方向移动。 第一光源被配置为提供第一光。 第一头部在第一方向上与舞台间隔开，并且被配置为接收第一光，通过调制第一光以产生至少一个点光束，并将至少一个光束投射到衬底上。 数字微镜装置控制单元被配置为控制从第一头产生的至少一个点束的能量与从第一头产生的至少点光束的尺寸成反比。

公开(公告)号：US20220197133A1

公开(公告)日：2022-06-23

申请号：US17379339

申请日：2021-07-19

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaehyuk Chang ,  Taejoon Kim ,  Hyunkyu Sun ,  Sikyung Lim

IPC: G03F1/70

Abstract: A method of managing a critical dimension error includes (i) defining, in a photomask, N openings having a width, where N is a natural number, (ii) using graphs for each of the N openings, each of the graphs being obtained by setting locations through an opening of the N openings as a first axis and an intensity of transmitting light as a second axis, obtaining ILSi proportional to an inclination of a tangent to a graph of the graphs at a location corresponding to an edge of an opening and Ii which is an intensity of transmitting light at the location, where i is a natural number from 1 to N, (iii) obtaining, with respect to each of the N openings, a real width CDi of the openings, and (iv) when I a ⁢ v ⁢ e = 1 N ⁢ ∑ i = 1 N ⁢ I i , CD a ⁢ v ⁢ e = 1 N ⁢ ∑ i = 1 N ⁢ CD i ⁢ ⁢ and ⁢ ⁢ ILS a ⁢ v ⁢ e = 1 N ⁢ ∑ i = 1 N ⁢ ILS i , obtaining AIMEEFi which is an aerial image mask error enhancement factor with respect to each of the N openings according to an equation below: AIMEEF i = - 2 ⁢ I i - I a ⁢ v ⁢ e ( C ⁢ D i - C ⁢ D a ⁢ v ⁢ e ) · ILS a ⁢ v ⁢ e · I a ⁢ v ⁢ e . [ Equation ]

公开(公告)号：US11934095B2

公开(公告)日：2024-03-19

申请号：US17379339

申请日：2021-07-19

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jaehyuk Chang ,  Taejoon Kim ,  Hyunkyu Sun ,  Sikyung Lim

IPC: G03F1/70

CPC classification number: G03F1/70

Abstract: A method of managing a critical dimension error includes (i) defining, in a photomask, N openings having a width, where N is a natural number, (ii) using graphs for each of the N openings, each of the graphs being obtained by setting locations through an opening of the N openings as a first axis and an intensity of transmitting light as a second axis, obtaining ILSi proportional to an inclination of a tangent to a graph of the graphs at a location corresponding to an edge of an opening and Ii which is an intensity of transmitting light at the location, where i is a natural number from 1 to N, (iii) obtaining, with respect to each of the N openings, a real width CDi of the openings, and (iv) when






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公开(公告)号：US09851635B2

公开(公告)日：2017-12-26

申请号：US14801111

申请日：2015-07-16

Applicant: SAMSUNG DISPLAY CO., LTD. ,  AZ ELECTRONIC MATERIALS (LUXEMBOURG) SARL

Inventor： Chadong Kim ,  Hoon Kang ,  Wooyong Sung ,  Hikuk Lee ,  Changhoon Kim ,  Jungin Park ,  Sanghyun Yun ,  Kibeom Lee ,  Jaehyuk Chang ,  Deokman Kang ,  Younsuk Kim ,  Saetae Oh

IPC: G03F7/004 ,  G03F7/20 ,  G03F7/40 ,  G03F7/038 ,  C07D213/02 ,  G03F7/00 ,  H01L21/00

CPC classification number: G03F7/004 ,  C07D213/02 ,  G03F7/0007 ,  G03F7/0045 ,  G03F7/038 ,  G03F7/0382 ,  G03F7/0384 ,  G03F7/20 ,  G03F7/2057 ,  G03F7/40 ,  H01L21/00

Abstract: A photoresist composition includes an alkali soluble resin, a hardening agent, a photo acid generator, and an organic solvent. The photo acid generator may be represented by Formula 1, in which L11 is selected from a single bond, a C1-C10 alkylene group, a C2-C10 alkenylene group, and a C2-C10 alkynylene group; and R11 is selected from a C6-C15 aryl group, or a C6-C15 aryl group with at least one substitutent group selected from a group comprising deuterium, a hydroxyl group, a C1-C10 alkyl group, a C1-C10 alkoxy group, and a C6-C15 aryl group.

公开(公告)号：US20150025665A1

公开(公告)日：2015-01-22

申请号：US14169215

申请日：2014-01-31

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Changhoon Kim ,  Sanghyun Yun ,  Hikuk Lee ,  Jaehyuk Chang ,  Cha-Dong Kim ,  Kibeom Lee

IPC: G06F17/50

CPC classification number: G02B26/0866 ,  G03F7/70291 ,  G03F7/70475 ,  G03F7/70508

Abstract: A digital exposure device includes: a stage having a substrate seated thereon where a pattern is to be formed and moving in a scan direction; a data modification unit receiving design data and generating modified data by extending the design data; and a digital exposure unit receiving the design data and projecting a light controlled according to the design data on the substrate, wherein the modified data includes intermedial data corresponding to the size difference between an image of the design data and an image of the modified data and some of unit data forming the intermedial data are data obtained when unit data of the design data are shifted in any expansion direction.

Abstract translation: 一种数字曝光装置，包括：台座，其上设置有要形成图案并在扫描方向上移动的基板; 数据修改单元，通过扩展设计数据来接收设计数据并产生修改的数据; 以及数字曝光单元，其接收所述设计数据并将根据所述设计数据控制的光投射到所述基板上，其中，所述修改数据包括对应于所述设计数据的图像与所述修改数据的图像之间的尺寸差的中间数据，以及 形成中间数据的一些单位数据是当设计数据的单位数据在任何扩展方向上移位时获得的数据。