METHOD OF FORMING STRUCTURE INCLUDING MICROPATTERN, METHOD OF FORMING NANOPATTERN, AND METHOD OF MANUFACTURING DISPLAY PANEL FOR LIQUID CRYSTAL DISPLAY
    3.
    发明申请
    METHOD OF FORMING STRUCTURE INCLUDING MICROPATTERN, METHOD OF FORMING NANOPATTERN, AND METHOD OF MANUFACTURING DISPLAY PANEL FOR LIQUID CRYSTAL DISPLAY 有权
    形成微型结构的方法,形成纳米材料的方法以及制造用于液晶显示的显示面板的方法

    公开(公告)号:US20150038044A1

    公开(公告)日:2015-02-05

    申请号:US14108761

    申请日:2013-12-17

    IPC分类号: G02F1/1333 G02F1/1335

    摘要: A method of forming a micropattern structure includes: coating a structure including a plurality of guide blocks extending in a first direction on a substrate and disposed to be spaced apart from each other in a second direction, which is perpendicular to the first direction, with a sacrificial material; ashing a portion of the sacrificial material to expose upper portions of the plurality of guide blocks; coating the structure with a first material having a polarity that is contrary to a polarity of a filling material filling the structure; heat-treating the structure to chemically bond the first material to the upper portions of the plurality of guide blocks; removing the sacrificial material and excess first material to form a first material cap chemically bonded to the upper portions of the plurality of guide blocks; and filling the structure with the filling material.

    摘要翻译: 一种形成微图案结构的方法包括:涂覆包括在基板上沿第一方向延伸的多个引导块的结构,并且设置成在垂直于第一方向的第二方向上彼此间隔开, 牺牲材料; 灰化所述牺牲材料的一部分以暴露所述多个引导块的上部; 用具有与填充结构的填充材料的极性相反的极性的第一材料涂覆结构; 对所述结构进行热处理以将所述第一材料化学结合到所述多个引导块的上部; 去除牺牲材料和过量的第一材料,以形成化学键合到多个引导块的上部的第一材料帽; 并用填充材料填充结构。

    PATTERNING METHOD AND METHOD OF MANUFACTURING WIRE GRID POLARIZER USING THE SAME
    5.
    发明申请
    PATTERNING METHOD AND METHOD OF MANUFACTURING WIRE GRID POLARIZER USING THE SAME 有权
    使用该方法制造线网极化器的方法和方法

    公开(公告)号:US20160077264A1

    公开(公告)日:2016-03-17

    申请号:US14628985

    申请日:2015-02-23

    CPC分类号: G02B5/3058 G03F7/0002

    摘要: A pattering method includes forming guide layer patterns, which are separated from each other, on a top surface of a base substrate, forming a neutral layer, which includes a random copolymer comprising first blocks or second blocks, on an entirety of the top surface of the base substrate exposed between the guide layer patterns, forming hydrophobic layer patterns which extend from top surfaces of the guide layer patterns to side surfaces of the guide layer patterns and are separated from each other, coating a block copolymer, which comprises the first blocks and the second blocks, on a top surface of the neutral layer exposed between the hydrophobic layer patterns, alternately arranging the first blocks and the second blocks by heat-treating or solvent-annealing the block copolymer, and forming block copolymer patterns by removing the first blocks or the second blocks.

    摘要翻译: 图案化方法包括在基底的顶表面上形成彼此分离的引导层图案,形成中性层,其包括在第一块或第二块的整个顶表面上的包含第一块或第二块的无规共聚物 基底基板暴露在引导层图案之间,形成疏水层图案,其从引导层图案的顶表面延伸到引导层图案的侧表面并彼此分离,涂覆包含第一嵌段和 第二块,在暴露在疏水层图案之间的中性层的顶表面上,通过热处理或溶剂退火嵌段共聚物交替地布置第一块和第二块,并通过除去第一块形成嵌段共聚物图案 或第二块。

    WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME

    公开(公告)号:US20180136382A1

    公开(公告)日:2018-05-17

    申请号:US15871186

    申请日:2018-01-15

    摘要: A method of fabricating a wire grid polarizer includes sequentially depositing a conductive wire pattern layer, and a plurality of guide patterns which forms one or more trenches therebetween on the conductive wire pattern layer, hydrophobically treating surfaces of the conductive wire pattern layer exposed in the trenches, and the guide patterns, coating the hydrophobically treated conductive wire pattern layer in the trenches with a neutral layer to partially fill the trenches, filling a remainder of the trenches with a block copolymer of two monomers with different etching rates, aligning the block copolymer filled in the trenches, selectively removing blocks of one monomer among the two monomers from the aligned block copolymer, and patterning the conductive wire pattern layer by using blocks of the other monomer among the two monomers remaining in the trenches and the guide patterns as a mask.

    WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME
    7.
    发明申请
    WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME 有权
    电网极化器及其制造方法

    公开(公告)号:US20160274285A1

    公开(公告)日:2016-09-22

    申请号:US14924423

    申请日:2015-10-27

    IPC分类号: G02B5/30 H01L27/12

    CPC分类号: G02B5/3058 H01L27/124

    摘要: A wire grid polarizer includes a substrate, and a plurality of wire patterns which is arranged on the substrate at periodic intervals, where the wire patterns include first wire patterns, which are disposed on the substrate, and one or more second wire patterns, which are disposed on one or more of the first wire patterns each of the second wire patterns including at least one of a neutral pattern, a surface treatment pattern and first and second monomer block patterns.

    摘要翻译: 线栅偏振器包括基板和以周期性间隔布置在基板上的多个线图案,其中布线图案包括设置在基板上的第一布线图案和一个或多个第二布线图案, 布置在一个或多个第一线图案中,每个第二线图包括中性图案,表面处理图案和第一和第二单体块图案中的至少一个。

    WIRE GRID POLARIZER PLATE AND DISPLAY DEVICE INCLUDING THE SAME
    9.
    发明申请
    WIRE GRID POLARIZER PLATE AND DISPLAY DEVICE INCLUDING THE SAME 有权
    电线极板和显示装置,包括它们

    公开(公告)号:US20160313481A1

    公开(公告)日:2016-10-27

    申请号:US14990334

    申请日:2016-01-07

    IPC分类号: G02B5/30 G02F1/1335

    摘要: The wire grid polarizer plate includes a light permeable substrate and a conductive pattern layer arranged on one surface of the light permeable substrate, the conductive pattern layer includes window regions and at least one reflective region arranged in a rectangular region which is circumscribed to the window regions, the window regions have target patterns including conductive simple closed curves surrounding in piles, spaced apart from each other at an interval of a period which is shorter than a wavelength of incident light, transmit first polarized light of the incident light and reflect second polarized light which is perpendicular to the first polarized light and the reflective regions reflect both of the first polarized light and the second polarized light.

    摘要翻译: 线栅偏振板包括透光基板和布置在透光基板的一个表面上的导电图案层,导电图案层包括窗口区域和布置在与窗口区域相切的矩形区域中的至少一个反射区域 窗口区域具有目标图案,其包括围绕桩的导电简单闭合曲线,以比入射光的波长短的周期间隔彼此隔开,透射入射光的第一偏振光并反射第二偏振光 其垂直于第一偏振光,并且反射区域反射第一偏振光和第二偏振光。

    WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME
    10.
    发明申请
    WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME 有权
    电网极化器及其制造方法

    公开(公告)号:US20160178822A1

    公开(公告)日:2016-06-23

    申请号:US14704667

    申请日:2015-05-05

    摘要: A method of fabricating a wire grid polarizer includes sequentially forming a conductive layer, a guide layer, and a surface treatment protection layer on a substrate, patterning the surface treatment protection layer and the guide layer, forming a surface treatment film on side surfaces and upper surfaces of the first and second patterns, removing the first and second surface treatment protection patterns from the respective first and second patterns on which the surface treatment film is formed, to expose upper surfaces of the first and second guide patterns and providing a block copolymer of two monomers having mutually different etch rates into a space defined by the conductive layer and the first and second guide patterns, wherein a transfer layer which is hydrophobic to the block copolymer of two monomers is formed on the upper surfaces of the first and second guide patterns.

    摘要翻译: 线栅偏振器的制造方法包括在基板上顺序形成导电层,引导层和表面处理保护层,对表面处理保护层和引导层进行图案化,在侧面和上部形成表面处理膜 第一和第二图案的表面,从形成有表面处理膜的相应的第一和第二图案中去除第一和第二表面处理保护图案,以暴露第一和第二引导图案的上表面,并提供 两个单体具有相互不同的蚀刻速率进入由导电层和第一和第二引导图案限定的空间中,其中在第一和第二引导图案的上表面上形成对两个单体的嵌段共聚物疏水的转移层 。