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公开(公告)号:US11245073B2
公开(公告)日:2022-02-08
申请号:US16944350
申请日:2020-07-31
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seung-Geun Yu , Zhu Wu , Ja Bin Lee , Jung Moo Lee , Jinwoo Lee , Kyubong Jung
Abstract: A switching element includes a lower barrier electrode on a substrate, a switching pattern on the lower barrier electrode, and an upper barrier electrode on the switching pattern. The lower barrier electrode includes a first lower barrier electrode layer, and a second lower barrier electrode layer interposed between the first lower barrier electrode layer and the switching pattern and whose density is different from the density of the first lower barrier electrode.
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公开(公告)号:US11856794B2
公开(公告)日:2023-12-26
申请号:US17364378
申请日:2021-06-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Dong Sung Choi , Jong Uk Kim , Kwang Min Park , Zhe Wu , Ja Bin Lee , Jae Ho Jung
CPC classification number: H10B63/24 , H10N70/841 , H10N70/8828
Abstract: A semiconductor memory device includes a first memory cell provided on a substrate, a second memory cell provided on the substrate and spaced apart from the first memory cell, a passivation layer extending along a side surface of the first memory cell and a side surface of the second memory cell, and a gap fill layer covering the passivation layer. Each of the first memory cell and the second memory cell includes a selection pattern having ovonic threshold switching characteristics, and a storage pattern provided on the selection pattern. The passivation layer includes a lower portion filling a space between the selection pattern of the first memory cell and the selection pattern of the second memory cell, and an upper portion extending along a side surface of the storage pattern of each of the first memory cell and the second memory cell.
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公开(公告)号:US20220059615A1
公开(公告)日:2022-02-24
申请号:US17364378
申请日:2021-06-30
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Dong Sung CHOI , Jong Uk Kim , Kwang Min Park , Zhe Wu , Ja Bin Lee , Jae Ho Jung
Abstract: A semiconductor memory device includes a first memory cell provided on a substrate, a second memory cell provided on the substrate and spaced apart from the first memory cell, a passivation layer extending along a side surface of the first memory cell and a side surface of the second memory cell, and a gap fill layer covering the passivation layer. Each of the first memory cell and the second memory cell includes a selection pattern having ovonic threshold switching characteristics, and a storage pattern provided on the selection pattern. The passivation layer includes a lower portion filling a space between the selection pattern of the first memory cell and the selection pattern of the second memory cell, and an upper portion extending along a side surface of the storage pattern of each of the first memory cell and the second memory cell.
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公开(公告)号:US20210193922A1
公开(公告)日:2021-06-24
申请号:US16988957
申请日:2020-08-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Ja Bin Lee , Zhe Wu , Kwangmin Park , Gwangguk An , Dongho Ahn , Seung-Geun Yu , Jinwoo Lee
Abstract: A variable resistance memory device includes a plurality of memory cells arranged on a substrate. Each of the memory cells includes a selection element pattern and a variable resistance pattern stacked on the substrate. The selection element pattern includes a first selection element pattern having a chalcogenide material and a second selection element pattern having a metal oxide and coupled to the first selection element pattern.
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公开(公告)号:US11616197B2
公开(公告)日:2023-03-28
申请号:US16988957
申请日:2020-08-10
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Ja Bin Lee , Zhe Wu , Kwangmin Park , Gwangguk An , Dongho Ahn , Seung-Geun Yu , Jinwoo Lee
Abstract: A variable resistance memory device includes a plurality of memory cells arranged on a substrate. Each of the memory cells includes a selection element pattern and a variable resistance pattern stacked on the substrate. The selection element pattern includes a first selection element pattern having a chalcogenide material and a second selection element pattern having a metal oxide and coupled to the first selection element pattern.
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公开(公告)号:US10128312B2
公开(公告)日:2018-11-13
申请号:US15485594
申请日:2017-04-12
Applicant: Samsung Electronics Co., Ltd.
Inventor: Zhe Wu , Jeong Hee Park , Dong Ho Ahn , Jin Woo Lee , Hee Ju Shin , Ja Bin Lee
Abstract: There is provided a non-volatile memory device which can enhance the reliability of a memory device by using an ovonic threshold switch (OTS) selection element including a multilayer structure. The non-volatile memory device includes a first electrode and a second electrode spaced apart from each other, a selection element layer between the first electrode and the second electrode, which is closer to the second electrode rather than to the first electrode, and which includes a first chalcogenide layer, a second chalcogenide layer, and a material layer disposed between the first and second chalcogenide layers. The first chalcogenide layer including a first chalcogenide material, and the second chalcogenide layer including a second chalcogenide material. A memory layer between the first electrode and the selection element layer includes a third chalcogenide material which is different from the first and second chalcogenide materials.
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公开(公告)号:US11211427B2
公开(公告)日:2021-12-28
申请号:US16386893
申请日:2019-04-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jinwoo Lee , Zhe Wu , Kyubong Jung , Seung-geun Yu , Ja Bin Lee
Abstract: A switching element includes a lower barrier electrode disposed on a substrate, a switching pattern disposed on the lower barrier electrode, and an upper barrier electrode disposed on the switching pattern. The switching pattern includes a first switching pattern, and a second switching pattern disposed on the first switching pattern and having a density different from a density of the first switching pattern.
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公开(公告)号:US11152064B2
公开(公告)日:2021-10-19
申请号:US16530517
申请日:2019-08-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Zhe Wu , Ja Bin Lee , Jin Woo Lee , Kyu Bong Jung
Abstract: A memory device includes a word line, a bit line intersecting the word line, and a memory cell at an intersection of the word line and the bit line. The memory cell includes a first electrode connected to the word line; a second electrode connected to the bit line; and a selective element layer between the first electrode and the second electrode. The selective element layer includes one of Ge—Se—Te, Ge—Se—Te—As, and Ge—Se—Te—As—Si, and a composition ratio of arsenic (As) component of each of the Ge—Se—Te—As and the Ge—Se—Te—As—Si being greater than 0.01 and less than 0.17.
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公开(公告)号:US10777745B2
公开(公告)日:2020-09-15
申请号:US16364232
申请日:2019-03-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Seung-Geun Yu , Zhu Wu , Ja Bin Lee , Jung Moo Lee , Jinwoo Lee , Kyubong Jung
Abstract: A switching element includes a lower barrier electrode on a substrate, a switching pattern on the lower barrier electrode, and an upper barrier electrode on the switching pattern. The lower barrier electrode includes a first lower barrier electrode layer, and a second lower barrier electrode layer interposed between the first lower barrier electrode layer and the switching pattern and whose density is different from the density of the first lower barrier electrode.
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