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公开(公告)号:US11302396B2
公开(公告)日:2022-04-12
申请号:US16862167
申请日:2020-04-29
Applicant: Samsung Electronics Co., Ltd.
Inventor: Taehong Kwon , Youngsun Min , Daeseok Byeon , Kyunghwa Yun
Abstract: A memory device includes a memory cell array, a row decoder connected to the memory cell array by a plurality of string selection lines, a plurality of word lines, and a plurality of ground selection lines, and a common source line driver connected to the memory cell array by a common source line. The memory cell array is located in an upper chip, at least a portion of the row decoder is located in a lower chip, at least a portion of the common source line driver is located in the upper chip, and a plurality of upper bonding pads of the upper chip are connected to a plurality of lower bonding pads of the lower chip to connect the upper chip to the lower chip.
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公开(公告)号:US11189634B2
公开(公告)日:2021-11-30
申请号:US16705395
申请日:2019-12-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyunghwa Yun , Chanho Kim , Pansuk Kwak
IPC: H01L27/11582 , H01L23/528 , H01L27/11573 , H01L29/78 , H01L29/10 , G11C16/04 , G11C16/14 , G11C16/26 , G11C16/10 , G11C16/08 , H01L27/11565 , H01L23/532
Abstract: A memory device including: a memory cell array disposed in a first semiconductor layer, the memory cell array including a plurality of wordlines extended in a first direction and stacked in a second direction substantially perpendicular to the first direction; and a plurality of pass transistors disposed in the first semiconductor layer, wherein a first pass transistor of the plurality of pass transistors is disposed between a first signal line of a plurality of signal lines and a first wordline of the plurality of wordlines, and wherein the plurality of signal lines are arranged at the same level as a common source line.
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公开(公告)号:US20220277792A1
公开(公告)日:2022-09-01
申请号:US17746393
申请日:2022-05-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyunghwa Yun , Chanho Kim , Pansuk Kwak
IPC: G11C16/08 , G11C16/10 , H01L27/11582 , H01L27/1157 , H01L27/11573
Abstract: A memory device including: a memory cell array disposed in a first semiconductor layer, the memory cell array including a plurality of wordlines extended in a first direction and stacked in a second direction substantially perpendicular to the first direction; and a plurality of pass transistors disposed in the first semiconductor layer, wherein a first pass transistor of the plurality of pass transistors is disposed between a first signal line of a plurality of signal lines and a first wordline of the plurality of wordlines, and wherein the plurality of signal lines are arranged at the same level as a common source line.
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公开(公告)号:US10763278B2
公开(公告)日:2020-09-01
申请号:US16243837
申请日:2019-01-09
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyunghwa Yun , Pansuk Kwak , Chanho Kim , Junghwa Lee
IPC: H01L27/11582 , H01L23/528 , H01L23/535 , H01L27/11573
Abstract: A semiconductor memory device includes a substrate having a cell array region and a contact region, a stack structure including a plurality of gate electrodes on the cell array region and the contact region, a plurality of cell vertical channel structures extending through the stack structure on the cell array region, and a contact structure disposed beside of the stack structure on a top surface of the substrate and disposed along a line extending from the cell array region toward the contact region. The height of the contact structure on the cell array region is different from the height of the contact structure on the contact region.
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公开(公告)号:US11875855B2
公开(公告)日:2024-01-16
申请号:US17746393
申请日:2022-05-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyunghwa Yun , Chanho Kim , Pansuk Kwak
Abstract: A memory device including: a memory cell array disposed in a first semiconductor layer, the memory cell array including a plurality of wordlines extended in a first direction and stacked in a second direction substantially perpendicular to the first direction; and a plurality of pass transistors disposed in the first semiconductor layer, wherein a first pass transistor of the plurality of pass transistors is disposed between a first signal line of a plurality of signal lines and a first wordline of the plurality of wordlines, and wherein the plurality of signal lines are arranged at the same level as a common source line.
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公开(公告)号:US11289500B2
公开(公告)日:2022-03-29
申请号:US17001035
申请日:2020-08-24
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyunghwa Yun , Pansuk Kwak , Chanho Kim , Dongku Kang
IPC: G11C16/04 , H01L27/11573 , H01L27/1157 , G11C16/08 , G11C7/18 , H01L27/11524 , H01L27/11519 , H01L27/11529 , H01L27/11556 , H01L27/11565 , H01L27/11582
Abstract: A memory device comprises a peripheral circuit region including a first substrate and circuit elements on the first substrate, the circuit elements including a row decoder, and a memory cell region including a cell array region and a cell contact region, wherein the cell array region includes wordlines, stacked on a second substrate on the peripheral circuit region, and channel structures extending in a direction perpendicular to an upper surface of the second substrate and penetrating the wordlines, wherein the cell contact region includes cell contacts connected to the wordlines and on both sides of the cell array region in a first direction parallel to the upper surface of the second substrate, the cell contacts including a first cell contact region and a second cell contact region, the first and second cell contact regions having different lengths to each other in the first direction, wherein each of the first and second cell contact regions includes first pads having different lengths than each other in the first direction, and second pads different from the first pads, wherein the cell contacts are connected to the wordlines in the first pads, wherein the number of the second pads included in the first cell contact region is greater than the number of the second pads included in the second cell contact region, and wherein the memory cell region includes a first metal pad and the peripheral circuit region includes a second metal pad, and the memory cell region and the peripheral circuit region are vertically connected to each other by the first metal pad and the second metal pad.
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公开(公告)号:US11282827B2
公开(公告)日:2022-03-22
申请号:US16940333
申请日:2020-07-27
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyunghwa Yun , Chanho Kim , Dongku Kang
IPC: H01L25/18 , H01L23/00 , H01L25/065 , H01L27/11519 , H01L27/11565 , H01L27/11582 , H01L25/00 , H01L27/11548 , H01L27/11575 , H01L27/11556
Abstract: A nonvolatile memory device includes a memory cell region including first metal pads, and a peripheral circuit region including second metal pads. The memory cell region includes a vertical structure including pairs of a first insulating layer and a first conductive layer, a second insulating layer on the vertical structure, a second conductive layer and a third conductive layer spaced apart from each other on the second insulating layer, first vertical channels and second vertical channels. The second conductive layer and the third conductive layer are connected with a first through via penetrating the vertical structure and a region of the second insulating layer that is exposed between the second conductive layer and the third conductive layer. The peripheral circuit region is vertically connected to the memory cell region by the first metal pads and the second metal pads directly.
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公开(公告)号:US20240334699A1
公开(公告)日:2024-10-03
申请号:US18424495
申请日:2024-01-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Younghak Son , Kyunghwa Yun , Chanho Kim
CPC classification number: H10B43/27 , H01L24/08 , H01L24/80 , H01L25/0657 , H01L25/18 , H01L25/50 , H10B41/27 , H10B80/00 , H01L2224/08145 , H01L2224/80895 , H01L2224/80896 , H01L2924/1431 , H01L2924/14511
Abstract: An example memory device includes a plurality of memory blocks, each including a cell region and a cell wiring region. At least one memory block includes a wordline pattern portion and a channel structure. The wordline pattern portion is provided in the cell region and the cell wiring region, and includes wordlines spaced apart from each other and stacked in a first direction. The channel structure is provided in the cell region to extend in the first direction. The wordline pattern portion extends a second direction, perpendicular to the first direction, when viewed from above, and has at least one staircase portion including a first staircase pattern, having sequentially descending staircases, and a second staircase pattern, having sequentially ascending staircases. The first staircase pattern and the second staircase pattern are provided in different numbers in the at least one memory block.
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公开(公告)号:US11355194B2
公开(公告)日:2022-06-07
申请号:US16942299
申请日:2020-07-29
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Kyunghwa Yun , Chanho Kim , Pansuk Kwak
IPC: G11C16/08 , G11C16/10 , H01L27/11582 , H01L27/1157 , H01L27/11573
Abstract: A memory device including: a memory cell array disposed in a first semiconductor layer, the memory cell array including a plurality of wordlines extended in a first direction and stacked in a second direction substantially perpendicular to the first direction; and a plurality of pass transistors disposed in the first semiconductor layer, wherein a first pass transistor of the plurality of pass transistors is disposed between a first signal line of a plurality of signal lines and a first wordline of the plurality of wordlines, and wherein the plurality of signal lines are arranged at the same level as a common source line.
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公开(公告)号:US11211391B2
公开(公告)日:2021-12-28
申请号:US16814491
申请日:2020-03-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Kyunghwa Yun , Pansuk Kwak , Chanho Kim , Dongku Kang
IPC: G11C16/04 , H01L27/11556 , H01L27/11582 , G11C5/06 , G11C5/02
Abstract: A memory device includes a peripheral circuit region including a first substrate and circuit elements on the first substrate, the circuit elements including a row decoder; a cell array region including wordlines, stacked on a second substrate on the peripheral circuit region, and channel structures extending in a direction perpendicular to an upper surface of the second substrate and penetrating through the wordlines; and a cell contact region including cell contacts connected to the wordlines and on both sides of the cell array region in a first direction parallel to the upper surface of the second substrate, the cell contacts including a first cell contact region and a second cell contact region, the first and second cell contact regions having different lengths to each other in the first direction. Each of the first and second cell contact regions includes first pads having different lengths to each other in the first direction and second pads different from the first pads, and the cell contacts are connected to the wordlines in the first pads. The number of the second pads included in the first cell contact region is greater than the number of the second pads included in the second cell contact region.
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