公开(公告)号：US08970025B2

公开(公告)日：2015-03-03

申请号：US14279776

申请日：2014-05-16

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Hun Kim ,  Jin-Woo Park ,  Dae-Young Choi ,  Mi-Yeon Kim ,  Sun-Hye Lee

IPC: H01L23/02 ,  H01L21/00 ,  H01L23/522 ,  H01L25/10 ,  H01L25/16 ,  H01L21/78 ,  H01L23/48 ,  H01L25/065 ,  H01L25/00 ,  H01L23/00 ,  H01L23/31

CPC classification number: H01L23/5226 ,  H01L21/78 ,  H01L23/3128 ,  H01L23/481 ,  H01L24/14 ,  H01L24/81 ,  H01L24/97 ,  H01L25/0657 ,  H01L25/105 ,  H01L25/16 ,  H01L25/50 ,  H01L2224/13022 ,  H01L2224/13025 ,  H01L2224/14181 ,  H01L2224/16145 ,  H01L2224/16146 ,  H01L2224/16225 ,  H01L2224/17181 ,  H01L2224/32145 ,  H01L2224/32225 ,  H01L2224/45124 ,  H01L2224/45144 ,  H01L2224/48225 ,  H01L2224/48227 ,  H01L2224/73204 ,  H01L2224/94 ,  H01L2225/06541 ,  H01L2225/06565 ,  H01L2225/1005 ,  H01L2225/1023 ,  H01L2225/1052 ,  H01L2225/1058 ,  H01L2924/01019 ,  H01L2924/10253 ,  H01L2924/12042 ,  H01L2924/15311 ,  H01L2924/15331 ,  H01L2924/181 ,  H01L2924/00 ,  H01L2224/11 ,  H01L2924/00012

Abstract: Provided is a method of forming a package-on-package. An encapsulation is formed to cover a wafer using a wafer level molding process. The wafer includes a plurality of semiconductor chips and a plurality of through silicon vias (TSVs) passing through the semiconductor chips. The encapsulant may have openings aligned with the TSVs. The encapsulant and the semiconductor chips are divided to form a plurality of semiconductor packages. Another semiconductor package is stacked on one selected from the semiconductor packages. The other semiconductor package is electrically connected to the TSVs.

Abstract translation: 提供了一种形成封装封装的方法。 使用晶片级成型工艺形成覆盖晶片的封装。 晶片包括多个半导体芯片和穿过半导体芯片的多个通孔硅通孔（TSV）。 密封剂可以具有与TSV对准的开口。 密封剂和半导体芯片被分割以形成多个半导体封装。 另一个半导体封装堆叠在从半导体封装中选择的一个上。 另一个半导体封装电连接到TSV。