Graphene heat dissipating structure

    公开(公告)号:US09721867B1

    公开(公告)日:2017-08-01

    申请号:US14662091

    申请日:2015-03-18

    摘要: Various technologies presented herein relate to forming one or more heat dissipating structures (e.g., heat spreaders and/or heat sinks) on a substrate, wherein the substrate forms part of an electronic component. The heat dissipating structures are formed from graphene, with advantage being taken of the high thermal conductivity of graphene. The graphene (e.g., in flake form) is attached to a diazonium molecule, and further, the diazonium molecule is utilized to attach the graphene to material forming the substrate. A surface of the substrate is treated to comprise oxide-containing regions and also oxide-free regions having underlying silicon exposed. The diazonium molecule attaches to the oxide-free regions, wherein the diazonium molecule bonds (e.g., covalently) to the exposed silicon. Attachment of the diazonium plus graphene molecule is optionally repeated to enable formation of a heat dissipating structure of a required height.

    Lithographically defined microporous carbon-composite structures
    10.
    发明授权
    Lithographically defined microporous carbon-composite structures 有权
    光学定义的微孔碳 - 复合结构

    公开(公告)号:US09513554B1

    公开(公告)日:2016-12-06

    申请号:US14749328

    申请日:2015-06-24

    IPC分类号: G03F7/40

    摘要: A microporous carbon scaffold is produced by lithographically patterning a carbon-containing photoresist, followed by pyrolysis of the developed resist structure. Prior to exposure, the photoresist is loaded with a nanoparticulate material. After pyrolysis, the nanonparticulate material is dispersed in, and intimately mixed with, the carbonaceous material of the scaffold, thereby yielding a carbon composite structure.

    摘要翻译: 通过对含碳光致抗蚀剂进行光刻图案化,然后对显影的抗蚀剂结构进行热解而制造微孔碳支架。 在曝光之前,光致抗蚀剂装载有纳米颗粒材料。 热解后,将纳米颗粒材料分散在支架的含碳材料中并与其充分混合,从而产生碳复合结构。