Alignment system used in nano-imprint lithography and nano imprint lithography method using the alignment system
    1.
    发明申请
    Alignment system used in nano-imprint lithography and nano imprint lithography method using the alignment system 审中-公开
    对准系统用于纳米压印光刻和纳米压印光刻法使用对准系统

    公开(公告)号:US20060172229A1

    公开(公告)日:2006-08-03

    申请号:US11340696

    申请日:2006-01-27

    IPC分类号: H01L21/00 G03C5/00

    摘要: An alignment system used in nano-imprint lithography and a nano-imprint lithography method using the alignment system are provided. The alignment system includes: a plurality of electron emission devices, which are provided in the mold and emit electrons; and a plurality of electrodes, which are provided to face the electron emission devices and at which the electrons emitted from the electron emission devices arrive. The mold and the substrate are aligned with each other by maximizing the amount of current in each of the electrodes.

    摘要翻译: 提供了用于纳米压印光刻的对准系统和使用对准系统的纳米压印光刻方法。 对准系统包括:多个电子发射装置,其设置在模具中并发射电子; 以及设置成面对电子发射器件并且从电子发射器件发射的电子到达的多个电极。 通过使每个电极中的电流量最大化,模具和衬底彼此对准。

    Resistive random access memory device
    2.
    发明授权
    Resistive random access memory device 失效
    电阻随机存取存储器件

    公开(公告)号:US07985961B2

    公开(公告)日:2011-07-26

    申请号:US12003133

    申请日:2007-12-20

    IPC分类号: H01L47/00

    摘要: Example embodiments may provide resistive random access memory devices and/or methods of manufacturing resistive random access memory devices. Example embodiment resistive random access memory devices may include a switching device and/or a storage node connected to the switching device. The storage node may include a stack structure including a plurality of resistance change layers separated from one another and first and second electrodes each on a side wall of the stack structure. The resistance change layers may be connected to the first and the second electrodes in parallel and/or may have different switching voltages from each other.

    摘要翻译: 示例性实施例可以提供电阻性随机存取存储器件和/或制造电阻随机存取存储器件的方法。 示例性实施例电阻随机存取存储器设备可以包括连接到交换设备的交换设备和/或存储节点。 存储节点可以包括堆叠结构,其包括彼此分离的多个电阻变化层以及每个在堆叠结构的侧壁上的第一和第二电极。 电阻变化层可以并联连接到第一和第二电极和/或可以具有彼此不同的开关电压。

    Resistive random access memory device including an amorphous solid electrolyte layer
    5.
    发明申请
    Resistive random access memory device including an amorphous solid electrolyte layer 审中-公开
    包括无定形固体电解质层的电阻式随机存取存储器件

    公开(公告)号:US20070176264A1

    公开(公告)日:2007-08-02

    申请号:US11653316

    申请日:2007-01-16

    IPC分类号: H01L29/22

    CPC分类号: H01L45/04 H01L45/145

    摘要: Provided is a resistive memory device including an amorphous solid electrolyte layer in a storage node. The resistive memory device includes a switching device and a storage node connected to the switching device. The storage node includes upper and lower electrodes formed of a bivalent or multivalent metal, and an amorphous solid electrolyte layer and an ion source layer formed of a monovalent metal between the upper and lower electrodes.

    摘要翻译: 提供了一种在存储节点中包括无定形固体电解质层的电阻式存储器件。 电阻式存储器件包括连接到开关器件的开关器件和存储节点。 存储节点包括由二价或多价金属形成的上电极和下电极,以及在上电极和下电极之间由非金属固体电解质层和由一价金属形成的离子源层。

    Resistive random access memory device
    9.
    发明授权
    Resistive random access memory device 有权
    电阻随机存取存储器件

    公开(公告)号:US07619915B2

    公开(公告)日:2009-11-17

    申请号:US11979894

    申请日:2007-11-09

    IPC分类号: H01L47/00

    CPC分类号: H01L45/04 H01L45/145

    摘要: Provided is a resistive random access memory (RRAM) device having a switching device and a storage node connected to the switching device, the storage node including a first electrode formed of a metal compound, the metal compound including metal with no more than a divalence and a metal compound having anions, a solid electrolyte layer formed on the first electrode, and a second electrode formed on the solid electrolyte layer.

    摘要翻译: 提供一种电阻随机存取存储器(RRAM)装置,其具有与开关装置连接的开关装置和存储节点,所述存储节点包括由金属化合物形成的第一电极,所述金属化合物包括不超过二价的金属, 具有阴离子的金属化合物,形成在第一电极上的固体电解质层和形成在固体电解质层上的第二电极。