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35 条记录 (耗时 0.032 秒)

    Apparatus for focusing a charged particle beam onto a specimen
    1.
    发明授权
    Apparatus for focusing a charged particle beam onto a specimen 失效
    用于将带电粒子束聚焦到样本上的装置

    公开(公告)号：US4605860A

    公开(公告)日：1986-08-12

    申请号：US654457

    申请日：1984-09-26

    申请人： Satoru Fukuhara ,  Mikio Ichihashi ,  Hisaya Murakoshi ,  Shigemitsu Seitoh

    发明人： Satoru Fukuhara ,  Mikio Ichihashi ,  Hisaya Murakoshi ,  Shigemitsu Seitoh

    IPC分类号： H01J37/21 ,  H01J37/28 ,  H01J37/304 ,  G01K1/08 ,  H01J3/14

    CPC分类号： H01J37/304 ,  H01J37/21

    摘要： Disclosed is an apparatus for focusing a charged particle beam onto a speciman, which comprises a scanner for scanning a pre-formed standard pattern with a charged particle beam, a converging unit capable of converging the charged particle beam onto a specimen, a detector for detecting secondary charged particles emitted as a result of scanning the standard pattern by the scanner, a circuit for deriving a standard frequency component determined by the period of scanning with the charged particle beam and the shape of the portion of the standard pattern in the region being scanned with the charged particle beam, and a circuit cooperating with the converging unit for finding the maximum value of the amplitude of the standard frequency component thereby identifying attainment of focusing of the charged particle beam with high accuracy.

    摘要翻译： 公开了一种用于将带电粒子束聚焦到标本上的装置，其包括用于利用带电粒子束扫描预形成的标准图案的扫描器，能够将带电粒子束收敛到样本上的会聚单元，用于检测的检测器 作为由扫描仪扫描标准图案的结果而发射的二次带电粒子，用于导出由带电粒子束扫描的周期确定的标准频率分量的电路和被扫描的区域中的标准图案的部分的形状 带电粒子束，以及与会聚单元配合的电路，用于找到标准频率分量的振幅的最大值，从而以高精度识别带电粒子束的聚焦。

    Small-dimension measurement system by scanning electron beam
    2.
    发明授权
    Small-dimension measurement system by scanning electron beam 失效
    通过扫描电子束的小尺寸测量系统

    公开(公告)号：US4600839A

    公开(公告)日：1986-07-15

    申请号：US576324

    申请日：1984-02-02

    申请人： Mikio Ichihashi ,  Satoru Fukuhara ,  Masahide Okumura ,  Hisaya Murakoshi

    发明人： Mikio Ichihashi ,  Satoru Fukuhara ,  Masahide Okumura ,  Hisaya Murakoshi

    IPC分类号： G01B15/00 ,  G01R31/305 ,  H01J37/28 ,  G01N23/00

    CPC分类号： H01J37/28 ,  G01B15/00 ,  G01R31/305

    摘要： A small-dimension measurement system by scanning electron beam comprises an electron optical column including an electron source for emitting an electron beam to scan a sample, at least one pair of detectors disposed symmetrically with respect to an optical axis of the electron optical column for detecting position information from the sample by scanning of the electron beam, and a signal selecting circuit for subjecting the outputs of the paired detectors to a predetermined signal selection. The signal selecting circuit selectively and alternately provides maximum or peak portions of the outputs of the paired detectors which portions correspond to opposite edge portions of the sample. The output of the signal selecting circuit is applied to a signal processing circuit for conversion into a dimension of a predetermined pattern on the sample.

    摘要翻译： 通过扫描电子束的小尺寸测量系统包括电子光学柱，其包括用于发射电子束以扫描样品的电子源，至少一对相对于电子光学柱的光轴对称设置的检测器，用于检测 通过扫描电子束从样品的位置信息，以及信号选择电路，用于对成对的检测器的输出进行预定的信号选择。 信号选择电路选择性地并且交替地提供成对检测器的输出的最大值或峰值部分，这些部分对应于样品的相对边缘部分。 信号选择电路的输出被施加到信号处理电路，以转换成样本上的预定图案的尺寸。

    Voltage measurement method using electron beam
    3.
    发明授权
    Voltage measurement method using electron beam 失效
    使用电子束的电压测量方法

    公开(公告)号：US5093616A

    公开(公告)日：1992-03-03

    申请号：US580532

    申请日：1990-09-11

    申请人： Shigemitsu Seitoh ,  Hideo Todokoro ,  Satoru Fukuhara ,  Hiroyuki Shinada

    发明人： Shigemitsu Seitoh ,  Hideo Todokoro ,  Satoru Fukuhara ,  Hiroyuki Shinada

    IPC分类号： H01J37/28 ,  G01R31/305

    CPC分类号： G01R31/305

    摘要： An electron beam is irradiated on a sample to generate secondary electrons from the sample, the secondary electrons are detected by a secondary electron detector through a retarding grid to provide a secondary electron detector output signal, the relation is acquired in advance between a known sample voltage and a value (normalized secondary electron signal for the known sample voltage) resulting from dividing a differential value of the secondary electron detector output signal at a retarding grid voltage by the secondary electron detector output signal, and this relation is retrieved with a normalized secondary electron signal obtained with an unknown sample voltage to determine an absolute value of the unknown sample voltage.

    摘要翻译： 电子束被照射在样品上以从样品产生二次电子，二次电子通过延迟栅格由二次电子检测器检测，以提供二次电子检测器输出信号，该关系在已知的采样电压 以及通过二次电子检测器输出信号将延迟电网电压的二次电子检测器输出信号的微分值除以由二次电子检测器输出信号分离得到的值（已知样品电压的归一化二次电子信号），并且用归一化二次电子 用未知样品电压获得的信号，以确定未知样品电压的绝对值。

    Magnetic field measurement optimization apparatus using a charged particle beam
    4.
    发明授权
    Magnetic field measurement optimization apparatus using a charged particle beam 失效
    使用带电粒子束的磁场测量优化装置

    公开(公告)号：US5111141A

    公开(公告)日：1992-05-05

    申请号：US607351

    申请日：1990-10-31

    申请人： Satoru Fukuhara ,  Hiroyuki Shinada ,  Shigemitsu Seitoh

    发明人： Satoru Fukuhara ,  Hiroyuki Shinada ,  Shigemitsu Seitoh

    IPC分类号： G01R33/028 ,  G01R31/305 ,  G01R33/02 ,  G01R33/10

    CPC分类号： G01R31/305 ,  G01R33/0213

    摘要： A magnetic field measuring apparatus measures the magnetic field intensity of a magnetic field created by a sample magnetic head by passing a finely focussed charged particle beam through the magnetic field and by measuring the deflection of the charged particle beam caused by the deflecting action of the magnetic field on the charged particle beam. The path of the charged particle beam (the sample magnetic head) is shifted stepwise toward the sample magnetic head (the path of the charged particle beam) until the charged particle impinges on the surface of the sample magnetic head. Upon the detection of the impingement of the charged particle beam on the surface of the sample magnetic head, the path of the charged particle beam (the sample magnetic head) is put one step back so that the path of the charged particle beam extends as close as possible to the surface of the sample magnetic head for accurate magnetic field intensity measurements. Thus, the distribution of magnetic field intensity in the magnetic field can be accurately determined.

    摘要翻译： 磁场测量装置通过使精细聚焦的带电粒子束通过磁场并通过测量由磁性的偏转作用引起的带电粒子束的偏转来测量由样本磁头产生的磁场的磁场强度 场上的带电粒子束。 带电粒子束（样品磁头）的路径朝向样品磁头（带电粒子束的路径）逐步移动，直到带电粒子撞击在样品磁头的表面上。 当检测到带电粒子束在样品磁头的表面上的撞击时，将带电粒子束（样品磁头）的路径退后一步，使得带电粒子束的路径尽可能地延伸 尽可能对样品磁头的表面进行精确的磁场强度测量。 因此，可以精确地确定磁场中磁场强度的分布。