公开(公告)号：US06451696B1

公开(公告)日：2002-09-17

申请号：US09384725

申请日：1999-08-27

申请人： Yoshihiro Hara ,  Tetsuo Suzuki ,  Satoru Takada ,  Hidetoshi Inoue

发明人： Yoshihiro Hara ,  Tetsuo Suzuki ,  Satoru Takada ,  Hidetoshi Inoue

IPC分类号： H01L21302

CPC分类号： H01L21/02032

摘要： A method for reclaiming a wafer substrate material having a metallic film and a dielectric film includes a step for removing the entire metallic film and a part of the dielectric film with a chemical etching agent so as not to substantially dissolve the wafer substrate material itself, a step for removing the residual dielectric layer and the degenerated zone beneath the surface of the substrate by chemical-mechanical polishing, and a step for polishing at least one surface of the substrate.

摘要翻译： 用于回收具有金属膜和电介质膜的晶片衬底材料的方法包括用化学蚀刻剂去除整个金属膜和一部分电介质膜以便基本上不溶解晶片衬底材料本身的步骤， 用于通过化学机械抛光去除基底表面下面的残余介电层和退化区的步骤，以及用于抛光基底的至少一个表面的步骤。

公开(公告)号：US5855735A

公开(公告)日：1999-01-05

申请号：US538265

申请日：1995-10-03

申请人： Satoru Takada ,  Hidetoshi Inoue ,  Yoshihiro Hara

发明人： Satoru Takada ,  Hidetoshi Inoue ,  Yoshihiro Hara

IPC分类号： H01L21/66 ,  B24B9/06 ,  B24B21/00 ,  B24B37/04 ,  H01L21/02 ,  H01L21/30 ,  H01L21/304 ,  C23F3/00

CPC分类号： H01L21/02032 ,  B24B21/00 ,  B24B37/04 ,  B24B9/065 ,  H01L21/02079 ,  H01L21/30

摘要： A process comprising removing surface layer materials from the wafer by inducing micro-fractures in the surface using a rotating pad and an abrasive slurry until all of the surface layer materials are removed; and chemically etching the surfaces of the wafer until all micro-fractures are removed therefrom. Edge materials are removed by abrasive tape. Wafer thickness reduction during recycling is less than 30 microns per cycle. One of the front and back surfaces of the wafer substrate is polished, any dots or grooves being on the non-polished side. The abrasive slurry contains more than 6 volume percent abrasive particles, and the abrasive slurry has a viscosity greater than about 2 cP at ambient temperature. The preferred pad comprises an organic polymer having a hardness greater than about 40 on the Shore D scale, optimally a polyurethane. The pressure of the pad against the wafer surface preferably does not exceed about 3 psi. Preferably, the chemical etching solution contains potassium hydroxide. An acidic solution can then be applied to the wafer surface. The reclaimed semiconductor wafer can be a silicon wafer having a matted side having etch pits which does not exceed 20 microns in width, an average roughness not exceeding 0.5 microns and a peak-to-valley roughness not exceeding 5 microns. Any laser markings from the original wafer are present on the matted side of the wafer.

摘要翻译： 一种方法，其包括通过使用旋转垫和研磨​​剂浆料在表面中诱导微裂纹从晶片去除表面层材料，直到除去所有表面层材料; 并化学蚀刻晶片的表面，直到从中除去所有的微裂缝。 边缘材料由砂带除去。 回收期间的晶片厚度减少每周期小于30微米。 对晶片基板的正面和背面之一进行抛光，任何点或凹槽位于非抛光侧。 研磨浆料含有超过6体积％的磨料颗粒，研磨浆料在环境温度下的粘度大于约2cP。 优选的垫包括在肖氏D刻度上硬度大于约40的有机聚合物，最佳地是聚氨酯。 衬垫对晶片表面的压力优选不超过约3psi。 优选地，化学蚀刻溶液含有氢氧化钾。 然后可以将酸性溶液施加到晶片表面。 回收的半导体晶片可以是具有无光泽面的蚀刻凹坑的硅晶片，其宽度不超过20微米，平均粗糙度不超过0.5微米，峰 - 谷粗糙度不超过5微米。 来自原始晶片的任何激光标记存在于晶片的无光泽侧。

公开(公告)号：US06406923B1

公开(公告)日：2002-06-18

申请号：US09630316

申请日：2000-07-31

申请人： Hidetoshi Inoue ,  Satoru Takada ,  Yoshihiro Hara

发明人： Hidetoshi Inoue ,  Satoru Takada ,  Yoshihiro Hara

IPC分类号： H01L2100

CPC分类号： H01L21/02079 ,  H01L21/02032 ,  H01L21/30604 ,  H01L21/31111 ,  H01L21/32135

摘要： A process capable of reclaiming used semiconductor wafers with a reduced metallic contamination level on wafer surfaces. The process comprises the steps of removing one or more surface layers of the substrate by chemical etching; scraping off one surface of the substrate in small amount by mechanical machining; removing a damage layer, which has occurred due to the mechanical machining, by chemical etching; and polishing the other surface of the substrate into a mirror finish.

摘要翻译： 能够在晶片表面上回收具有降低的金属污染水平的已使用的半导体晶片的工艺。 该方法包括通过化学蚀刻去除衬底的一个或多个表面层的步骤; 通过机械加工刮擦少量的基板的一个表面; 通过化学蚀刻去除由于机械加工而发生的损伤层; 并将基板的另一表面抛光成镜面。

公开(公告)号：US09608275B2

公开(公告)日：2017-03-28

申请号：US13820071

申请日：2011-08-12

申请人： Hidetoshi Inoue ,  Kunihiko Nakayama ,  Zenya Ashitaka

发明人： Hidetoshi Inoue ,  Kunihiko Nakayama ,  Zenya Ashitaka

IPC分类号： H01G9/045 ,  H01M4/66 ,  C23C8/20 ,  C23C8/64 ,  C23C28/00 ,  H01G9/04 ,  H01G11/30 ,  H01G11/50 ,  H01M4/36 ,  H01M8/0206

CPC分类号： H01M4/667 ,  C23C8/20 ,  C23C8/64 ,  C23C28/00 ,  H01G9/04 ,  H01G11/30 ,  H01G11/50 ,  H01M4/366 ,  H01M4/661 ,  H01M8/0206 ,  Y02E60/13 ,  Y02P70/56 ,  Y10T428/265 ,  Y10T428/31678

摘要： Provided are an electrically conductive layer coated aluminum material having properties which can withstand long term use; and a method for manufacturing the electrically conductive layer coated aluminum material. The electrically conductive layer coated aluminum material includes: an aluminum material (1); a first electrically conductive layer (2); an interposing layer (3); and a second electrically conductive layer (4). The first electrically conductive layer (2) is formed on a surface of the aluminum material (1) and includes an organic substance having electrical conductivity. The interposing layer (3) is formed between the aluminum material (1) and the first electrically conductive layer (2) and includes a carbide of aluminum. The second electrically conductive layer (4) is formed on a surface of the first electrically conductive layer (2) and includes carbon-containing particles (41). A resin is attached onto the surface of the aluminum material (1) and is dried, a carbon-containing substance is attached thereonto, and thereafter, the aluminum material (1) is placed in a space including a hydrocarbon-containing substance and is heated, thereby forming the first electrically conductive layer (2), the interposing layer (3), and the second electrically conductive layer (4).

公开(公告)号：US20120261162A1

公开(公告)日：2012-10-18

申请号：US13513958

申请日：2011-03-30

申请人： Kunihiko Nakayama ,  Zenya Ashitaka ,  Hidetoshi Inoue ,  Miho Suzuki

发明人： Kunihiko Nakayama ,  Zenya Ashitaka ,  Hidetoshi Inoue ,  Miho Suzuki

IPC分类号： H01B5/00 ,  C23C28/00 ,  C23C8/00 ,  B05D5/12 ,  B05D3/02

CPC分类号： H01G9/0032 ,  H01G9/042 ,  H01G9/045 ,  H01G9/07

摘要： Provided are an electrode structure capable of suppressing a leakage current, having a high capacitance, allowing an electrical short circuit caused through contact with an electrolyte to be suppressed, and operable to be applied as an anode of a capacitor; a method for manufacturing the electrode structure; and a capacitor including the electrode structure. The method for manufacturing the electrode structure includes: a covering layer formation step of forming on a surface of an aluminum material a covering layer of a dielectric precursor including valve metal; and a reduction heating step of heating in a reducing atmosphere including no carbon the aluminum material having the covering layer formed thereon. The electrode structure includes: an aluminum material; a covering layer being formed on a surface of the aluminum material, including valve metal, and having an electrically conductive portion; and an interposing layer being formed between the aluminum material and the covering layer and including aluminum and oxygen.

摘要翻译： 提供一种能够抑制具有高电容的漏电流的电极结构，允许抑制与电解质接触引起的电短路，并可操作地作为电容器的阳极施加; 电极结构体的制造方法; 以及包括电极结构的电容器。 电极结构体的制造方法包括：覆盖层形成工序，在铝材的表面上形成包含阀金属的电介质前体的覆盖层; 以及还原加热步骤，其在不含碳的还原气氛中加热其上形成有覆盖层的铝材料。 电极结构包括：铝材料; 覆盖层形成在铝材的表面上，包括阀金属，并具有导电部分; 并且在铝材料和覆盖层之间形成包括铝和氧的中介层。

公开(公告)号：US08385051B2

公开(公告)日：2013-02-26

申请号：US13255448

申请日：2010-03-04

申请人： Kunihiko Nakayama ,  Zenya Ashitaka ,  Hidetoshi Inoue

发明人： Kunihiko Nakayama ,  Zenya Ashitaka ,  Hidetoshi Inoue

IPC分类号： H01G9/00

CPC分类号： H01B3/002 ,  B05D5/12 ,  H01G9/0032 ,  H01G9/012 ,  H01G9/045 ,  H01G9/07 ,  H01M4/661 ,  H01M4/667 ,  Y02E60/122 ,  Y02P70/54 ,  Y10T428/256 ,  Y10T428/265 ,  Y10T428/269 ,  Y10T428/31678

摘要： Provided are an electrode structure which is excellent in adhesiveness between an aluminum material as a base material and a dielectric layer and adhesiveness between the dielectric layers and allows a higher capacitance than the conventional one to be obtained, even when a thickness of the dielectric layer is thick; a method for manufacturing the above-mentioned electrode structure; and a capacitor and a battery, each of which includes the above-mentioned electrode structure. An electrode structure comprises: an aluminum material; a dielectric layer formed on a surface of the aluminum material; and an interposing layer formed in at least one part of a region of the surface of the aluminum material between the aluminum material and the dielectric layer and including aluminum and carbon, the dielectric layer includes dielectric particles including valve metal, and an organic substance layer is formed on at least one part of a surface of the dielectric particle. A mixture layer of dielectric particles including the valve metal and a binder is formed on a surface of the aluminum material, and thereafter, the aluminum material is heated in a state where the aluminum material is placed in a space including a hydrocarbon-containing substance.

摘要翻译： 提供一种电极结构，即，作为基材的铝材料与电介质层之间的粘附性和电介质层之间的粘合性优异，并且即使当电介质层的厚度为 厚; 制造上述电极结构体的方法; 以及包括上述电极结构的电容器和电池。 电极结构包括：铝材料; 形成在所述铝材料的表面上的电介质层; 以及在所述铝材料与所述电介质层之间的铝材表面的至少一部分的区域的至少一部分中形成的包含铝和碳的中间层，所述电介质层包括包含阀金属的电介质粒子，有机物质层为 形成在电介质颗粒的表面的至少一部分上。 在铝材的表面上形成包括阀金属和粘合剂的电介质颗粒的混合层，之后在将铝材料置于包含含烃物质的空间的状态下加热铝材料。

公开(公告)号：US20120003544A1

公开(公告)日：2012-01-05

申请号：US13255448

申请日：2010-03-04

申请人： Kunihiko Nakayama ,  Zenya Ashitaka ,  Hidetoshi Inoue

发明人： Kunihiko Nakayama ,  Zenya Ashitaka ,  Hidetoshi Inoue

IPC分类号： H01M4/583 ,  H01G4/005 ,  B05D5/12 ,  H01B5/00

CPC分类号： H01B3/002 ,  B05D5/12 ,  H01G9/0032 ,  H01G9/012 ,  H01G9/045 ,  H01G9/07 ,  H01M4/661 ,  H01M4/667 ,  Y02E60/122 ,  Y02P70/54 ,  Y10T428/256 ,  Y10T428/265 ,  Y10T428/269 ,  Y10T428/31678

摘要： Provided are an electrode structure which is excellent in adhesiveness between an aluminum material as a base material and a dielectric layer and adhesiveness between the dielectric layers and allows a higher capacitance than the conventional one to be obtained, even when a thickness of the dielectric layer is thick; a method for manufacturing the above-mentioned electrode structure; and a capacitor and a battery, each of which includes the above-mentioned electrode structure. An electrode structure comprises: an aluminum material; a dielectric layer formed on a surface of the aluminum material; and an interposing layer formed in at least one part of a region of the surface of the aluminum material between the aluminum material and the dielectric layer and including aluminum and carbon, the dielectric layer includes dielectric particles including valve metal, and an organic substance layer is formed on at least one part of a surface of the dielectric particle. A mixture layer of dielectric particles including the valve metal and a binder is formed on a surface of the aluminum material, and thereafter, the aluminum material is heated in a state where the aluminum material is placed in a space including a hydrocarbon-containing substance.

摘要翻译： 提供一种电极结构，即，作为基材的铝材料与电介质层之间的粘附性和电介质层之间的粘合性优异，并且即使当电介质层的厚度为 厚; 制造上述电极结构体的方法; 以及包括上述电极结构的电容器和电池。 电极结构包括：铝材料; 形成在所述铝材料的表面上的电介质层; 以及在所述铝材料与所述电介质层之间的铝材表面的至少一部分的区域的至少一部分中形成的包含铝和碳的中间层，所述电介质层包括包含阀金属的电介质粒子，有机物质层为 形成在电介质颗粒的表面的至少一部分上。 在铝材的表面上形成包括阀金属和粘合剂的电介质颗粒的混合层，之后在将铝材料置于包含含烃物质的空间的状态下加热铝材料。

公开(公告)号：US20110318550A1

公开(公告)日：2011-12-29

申请号：US13203869

申请日：2010-03-04

申请人： Hidetoshi Inoue ,  Kunihiko Nakayama ,  Zenya Ashitaka

发明人： Hidetoshi Inoue ,  Kunihiko Nakayama ,  Zenya Ashitaka

IPC分类号： B32B3/10 ,  B05D5/12

CPC分类号： H01M4/667 ,  H01G9/045 ,  H01G9/048 ,  H01G11/22 ,  H01G11/24 ,  H01G11/26 ,  H01G11/28 ,  H01G11/30 ,  H01G11/74 ,  H01G11/86 ,  H01M4/661 ,  Y02E60/13 ,  Y10T428/24851

摘要： Provided are an electrically conductive substance coated aluminum material in which an electrically conductive substance ensuring electrical conductivity of a surface is not exfoliated from an aluminum material due to moisture even in a case where the electrically conductive substance coated aluminum material is used under a high humidity condition and which can be favorably used as a material for a current collector and an electrode; and a method for manufacturing the electrically conductive substance coated aluminum material. The electrically conductive substance coated aluminum material comprises: an aluminum foil (1); and an organic substance layer (2) formed on a surface of the aluminum foil (1); and an interposing layer (3) formed in at least one part of regions of the surface of the aluminum foil (1) between the aluminum foil (1) and the organic substance layer (2) and including a carbide of aluminum, and the organic substance layer (2) includes a carbon precursor as an electrically conductive substance. A resin layer is formed on the surface of the aluminum foil (1), and the aluminum foil (1) having the resin layer formed thereon is placed in a space including a hydrocarbon-containing substance and is heated, thereby forming the organic substance layer (2) including the carbon precursor.

摘要翻译： 提供一种导电物质涂覆的铝材料，其中即使在高湿度条件下使用导电物质涂覆的铝材料的情况下，确保表面的导电性的导电物质也不会由于水分而从铝材料中脱落 并且可以有利地用作集电器和电极的材料; 以及制造导电物质涂覆的铝材料的方法。 导电物质涂覆的铝材料包括：铝箔（1）; 和形成在铝箔（1）的表面上的有机物质层（2）。 以及形成在所述铝箔（1）和所述有机物质层（2）之间的铝箔（1）的表面的至少一部分区域中并且包含铝的碳化物的中间层（3），并且所述有机物 物质层（2）包括作为导电物质的碳前体。 在铝箔（1）的表面上形成树脂层，并且将其上形成有树脂层的铝箔（1）放置在包含含烃物质的空间中，并加热，从而形成有机物质层 （2）包括碳前体。

公开(公告)号：US20110027537A1

公开(公告)日：2011-02-03

申请号：US12935971

申请日：2009-01-28

申请人： Hidetoshi Inoue ,  Kunihiko Nakayama ,  Zenya Ashitaka

发明人： Hidetoshi Inoue ,  Kunihiko Nakayama ,  Zenya Ashitaka

IPC分类号： B32B5/16 ,  H01G4/008 ,  B32B3/00 ,  B05D1/12 ,  H01M4/02

CPC分类号： C23C8/02 ,  C23C8/04 ,  C23C8/60 ,  C23C12/02 ,  C23C24/08 ,  C23C26/00 ,  C23C28/00 ,  H01G11/26 ,  H01G11/28 ,  H01G11/42 ,  H01G11/68 ,  H01G11/70 ,  H01M4/66 ,  H01M4/661 ,  H01M4/663 ,  H01M4/75 ,  Y02E60/13 ,  Y10T428/24612 ,  Y10T428/25

摘要： Provided are a carbon-coated aluminum material capable of improving properties of adhesion between a carbon-containing layer and an aluminum material and properties of mutual adhesion among carbon-containing particles included in the carbon-containing layer; and a method for manufacturing the carbon-coated aluminum material. The carbon-coated aluminum material comprises: aluminum foil (1); a carbon-containing layer (2) formed on a surface of the aluminum foil (1); and an interposing layer(s) (3) formed between the aluminum foil (1) and the carbon-containing layer (2) and on at least one region of the surface of the aluminum foil (1), the interposing layer (3) including a carbide of aluminum. The carbon-containing layer (2) includes a plurality of the carbon-containing particles (22) and an organic layer (23) is formed on a surface of each of the carbon-containing particles (22). On the surface of each of the carbon-containing particles (22), a resin layer is formed; resin-coated carbon-containing particles each having the resin layer formed thereon are caused to adhere to the surface of the aluminum foil (1); and the aluminum foil (1) and the resin-coated carbon-containing particles are placed in a space including a hydrocarbon-containing substance and heated therein.

摘要翻译： 本发明提供能够改善含碳层和铝材之间粘合性能的碳涂覆铝材料和包含在含碳层中的含碳颗粒之间的相互粘合性能; 以及碳涂覆铝材料的制造方法。 碳涂覆的铝材料包括：铝箔（1）; 形成在所述铝箔（1）的表面上的含碳层（2）; 和形成在铝箔（1）和含碳层（2）之间以及在铝箔（1）的表面的至少一个区域上的中介层（3），中间层（3） 包括铝的碳化物。 含碳层（2）包含多个含碳颗粒（22），在每个含碳颗粒（22）的表面上形成有机层（23）。 在每个含碳颗粒（22）的表面上形成树脂层; 使其上形成有树脂层的树脂包覆的含碳颗粒附着在铝箔（1）的表面上; 并且将铝箔（1）和树脂包覆的含碳颗粒放置在包含含烃物质的空间中并在其中加热。

公开(公告)号：US20100320950A1

公开(公告)日：2010-12-23

申请号：US12866800

申请日：2009-03-10

申请人： Hidetoshi Inoue ,  Kenji Nojima

发明人： Hidetoshi Inoue ,  Kenji Nojima

IPC分类号： H02P6/14

CPC分类号： H02M7/53871 ,  H02M2007/53876

摘要： In a 2-shunt system, accurate sensorless vector control can be realized without increasing shunt resistors. There is disclosed an inverter device including an inverter main circuit obtained by connecting, in a three-phase bridge-like manner, three arms formed by coupling, in series with a direct-current power source, two switching elements which perform mutually opposite on/off operations, to apply three-phase pseudo alternating-current voltages of a three-phase PWM system to an electric motor; shunt resistors connected to the direct-current power source in series with at least two of the three arms of the inverter main circuit; and a controller for detecting currents flowing through the shunt resistors in a predetermined cycle to control the on/off operations of the switching elements of the inverter main circuit based on the detected currents. The controller converts, into the current value of a specific angle range, a current value detected at a time before approximately 180° corresponding to the specific angle range where the on-time of the switching elements is continuously not more than a predetermined value, and then uses the converted current value.

摘要翻译： 在2分流系统中，无需增加分流电阻即可实现精确的无传感器矢量控制。 公开了一种逆变器装置，其包括逆变器主电路，该逆变器主电路以三相桥式方式连接三个臂，其通过与直流电源串联耦合而形成的两个开关元件， 将三相PWM系统的三相模拟交流电压施加到电动机上; 连接到与逆变器主电路的三个臂中的至少两个串联的直流电源的分流电阻器; 以及控制器，用于以预定周期检测流过分流电阻器的电流，以基于检测到的电流来控制逆变器主电路的开关元件的接通/断开操作。 控制器将特定角度范围的当前值转换为对应于开关元件的接通时间不超过预定值的特定角度范围的大约180°之前的时间检测的电流值，以及 然后使用转换的当前值。