公开(公告)号：US5272360A

公开(公告)日：1993-12-21

申请号：US662635

申请日：1991-02-28

申请人： Satoru Todoroki ,  Masahiro Tanaka ,  Kunihiko Watanabe ,  Mitsuo Nakatani

发明人： Satoru Todoroki ,  Masahiro Tanaka ,  Kunihiko Watanabe ,  Mitsuo Nakatani

IPC分类号： C23C16/511 ,  G02F1/1368 ,  H01L21/318 ,  H01L21/77 ,  H01L21/84 ,  H01L29/49 ,  H01L27/01 ,  H01L27/13 ,  H01L29/78

CPC分类号： C23C16/511 ,  H01L21/3185 ,  H01L27/1214 ,  H01L29/4908 ,  G02F1/1368

摘要： A microwave plasma enhanced CVD method and apparatus wherein a microwave is applied, after expanded, over a greater area than the area in which a desired thin film is to be formed. With this arrangement, uniform microwave application is assured to produce uniform plasma over a wide area. This enables realization of a large size liquid crystal display.

摘要翻译： 一种微波等离子体增强CVD方法和装置，其中在扩展之后，在比要形成所需薄膜的区域更大的面积上施加微波。 通过这种布置，可以确保均匀的微波应用在广泛的区域上产生均匀的等离子体。 这使得能够实现大尺寸液晶显示器。

公开(公告)号：US5399202A

公开(公告)日：1995-03-21

申请号：US986683

申请日：1992-12-08

申请人： Hiroshi Kikuchi ,  Yasushi Sano ,  Satoru Todoroki ,  Hitoshi Oka ,  Toshiyuki Koshita ,  Masato Kikuchi ,  Mitsuo Nakatani ,  Michio Tsukii

发明人： Hiroshi Kikuchi ,  Yasushi Sano ,  Satoru Todoroki ,  Hitoshi Oka ,  Toshiyuki Koshita ,  Masato Kikuchi ,  Mitsuo Nakatani ,  Michio Tsukii

IPC分类号： C23F1/00 ,  C09D9/00 ,  C11D7/32 ,  G02F1/1362 ,  G03F7/42 ,  H01L21/027 ,  H01L21/30 ,  H01L21/302 ,  H01L21/3065 ,  H05K3/06 ,  B08B3/08 ,  B08B3/10

CPC分类号： C11D7/3281 ,  C11D7/3218 ,  G03F7/425 ,  G02F1/1362

摘要： A resist is peeled without leaving a residue after peeling, by bringing a resist-peeling liquid comprising a primary aliphatic amine of 2-6 carbon atoms into contact with the surface of an etched novolak positive photoresist, and removing the resist-peeling liquid containing the thus peeled resist from the surface of the etched resist. The used resist-peeling liquid can easily be recovered and regenerated.

摘要翻译： 通过使包含2-6个碳原子的脂肪族脂族胺的抗蚀剂剥离液与蚀刻的酚醛清漆型正性光致抗蚀剂的表面接触，除去剥离后的残留物，除去含有 从而从蚀刻抗蚀剂的表面剥离抗蚀剂。 所使用的抗蚀剂剥离液可以容易地回收和再生。

公开(公告)号：US5633175A

公开(公告)日：1997-05-27

申请号：US373769

申请日：1995-01-17

申请人： Hiroshi Kikuchi ,  Yasushi Sano ,  Satoru Todoroki ,  Hitoshi Oka ,  Toshiyuki Koshita ,  Masato Kikuchi ,  Mitsuo Nakatani ,  Michio Tsukii

发明人： Hiroshi Kikuchi ,  Yasushi Sano ,  Satoru Todoroki ,  Hitoshi Oka ,  Toshiyuki Koshita ,  Masato Kikuchi ,  Mitsuo Nakatani ,  Michio Tsukii

IPC分类号： C11D7/32 ,  G02F1/1362 ,  G03F7/42 ,  B08B3/08 ,  B08B3/10 ,  H01L21/335

CPC分类号： C11D7/3218 ,  G03F7/425 ,  G02F1/1362 ,  Y10S438/951

摘要： A liquid crystal display device is produced by effecting in the course of its production steps a resist-peeling method including the steps of (a) changing the quality of a resist layer on a substrate, (b) contacting the changed resist with a liquid containing 2-amino-1-ethanol, and (c) removing the liquid containing the thus peeled resist from the surface of the etched resist, and optionally, (d) regenerating a liquid containing 2-amino-1-ethanol by distillation from the liquid used in step (c) and reusing the regenerated liquid in step (b).

摘要翻译： 通过在其制造步骤中进行抗蚀剂剥离方法来制造液晶显示装置，该方法包括以下步骤：（a）改变基板上的抗蚀剂层的质量，（b）使改变的抗蚀剂与含有 2-氨基-1-乙醇，和（c）从蚀刻抗蚀剂的表面除去含有这样剥离的抗蚀剂的液体，任选地，（d）通过蒸馏从液体中再生含有2-氨基-1-乙醇的液体 在步骤（c）中使用并在步骤（b）中重新使用再生液体。

公开(公告)号：US06900853B2

公开(公告)日：2005-05-31

申请号：US10274966

申请日：2002-10-22

申请人： Kunihiko Watanabe ,  Masahiro Ukisu ,  Tomoyuki Ariyoshi ,  Mitsuo Nakatani ,  Masahiko Suzuki ,  Hideki Kuriyama ,  Keiichiro Ashizawa

发明人： Kunihiko Watanabe ,  Masahiro Ukisu ,  Tomoyuki Ariyoshi ,  Mitsuo Nakatani ,  Masahiko Suzuki ,  Hideki Kuriyama ,  Keiichiro Ashizawa

IPC分类号： G02F1/1343 ,  G02F1/1333 ,  G02F1/1362 ,  G02F1/136 ,  G09G3/36 ,  H01L31/20

CPC分类号： G02F1/136227 ,  G02F1/134363 ,  G02F2001/133397

摘要： A liquid crystal display device is provided with a pair of substrates which are arranged to face each other in an opposed manner and a liquid crystal layer which is sandwiched between main surfaces of a pair of substrates. On the main surface of one of the pair of substrates which faces the liquid crystal layer, pixel regions including switching elements, pixel electrodes which are connected to the switching elements and a protective film which is disposed at liquid crystal layer side of the switching elements are formed. In such a liquid crystal device, the protective film is formed by laminating the plurality of material layers which include at least a first material layer and a second material layer which is arranged closer to the liquid crystal layer side than the first material layer. Further, the second material layer exhibits resistivity which is lower than resistivity of the first material layer and higher than resistivity of silicon or semiconductor layers which constitute channels of the switching elements. Due to such a constitution, the image retention which is generated on a display screen of the liquid crystal display device can be reduced.

摘要翻译： 液晶显示装置具有相对设置的一对基板和夹在一对基板的主表面之间的液晶层。 在面向液晶层的一对基板中的一个的主表面上，包括开关元件的像素区域，连接到开关元件的像素电极和设置在开关元件的液晶层侧的保护膜是 形成。 在这种液晶装置中，通过层叠多个材料层而形成保护膜，所述多个材料层至少包括第一材料层和比第一材料层更靠近液晶层侧布置的第二材料层。 此外，第二材料层的电阻率低于第一材料层的电阻率，并且高于构成开关元件的通道的硅或半导体层的电阻率。 由于这样的结构，可以减少在液晶显示装置的显示画面上产生的图像保持。

公开(公告)号：US4902394A

公开(公告)日：1990-02-20

申请号：US146031

申请日：1988-01-20

申请人： Akihiro Kenmotsu ,  Shigeru Kobayashi ,  Kunihiko Watanabe ,  Eiji Matsuzaki ,  Yoshifumi Yoritomi ,  Toshiyuki Koshita ,  Mitsuo Nakatani

发明人： Akihiro Kenmotsu ,  Shigeru Kobayashi ,  Kunihiko Watanabe ,  Eiji Matsuzaki ,  Yoshifumi Yoritomi ,  Toshiyuki Koshita ,  Mitsuo Nakatani

IPC分类号： C23C14/14 ,  C23C14/34 ,  C23C14/54 ,  C23C14/56 ,  H01L21/203

CPC分类号： C23C14/543 ,  C23C14/3464 ,  C23C14/548

摘要： A sputtering method and apparatus for use in forming thin films on a substrate. The power output of a sputtering power source is periodically changed to a high level power and a low level power, and each film is deposited to a thickness corresponding to the integrated value of the high level power, whereby a desired thickness can be obtained in any of multilayer films having mutually different film thickness ratios.

摘要翻译： 用于在基板上形成薄膜的溅射方法和装置。 溅射电源的功率输出周期性变化为高电平功率和低电平功率，并且将每个膜沉积到对应于高电平功率的积分值的厚度，由此可以获得期望的厚度 的具有相互不同的膜厚比的多层膜。

公开(公告)号：US20050200786A1

公开(公告)日：2005-09-15

申请号：US11126328

申请日：2005-05-11

申请人： Kunihiko Watanabe ,  Masahiro Ukisu ,  Tomoyuki Ariyoshi ,  Mitsuo Nakatani ,  Masahiko Suzuki ,  Hideki Kuriyama ,  Keiichiro Ashizawa

发明人： Kunihiko Watanabe ,  Masahiro Ukisu ,  Tomoyuki Ariyoshi ,  Mitsuo Nakatani ,  Masahiko Suzuki ,  Hideki Kuriyama ,  Keiichiro Ashizawa

IPC分类号： G02F1/1343 ,  G02F1/1333 ,  G02F1/1362

CPC分类号： G02F1/136227 ,  G02F1/134363 ,  G02F2001/133397

摘要： A liquid crystal display device is provided with a pair of substrates which are arranged to face each other in an opposed manner and a liquid crystal layer which is sandwiched between main surfaces of a pair of substrates. On the main surface of one of the pair of substrates which faces the liquid crystal layer, pixel regions including switching elements, pixel electrodes which are connected to the switching elements and a protective film which is disposed at liquid crystal layer side of the switching elements are formed. In such a liquid crystal device, the protective film is formed by laminating the plurality of material layers which include at least a first material layer and a second material layer which is arranged closer to the liquid crystal layer side than the first material layer. Further, the second material layer exhibits resistivity which is lower than resistivity of the first material layer and higher than resistivity of silicon or semiconductor layers which constitute channels of the switching elements. Due to such a constitution, the image retention which is generated on a display screen of the liquid crystal display device can be reduced.

公开(公告)号：US4604294A

公开(公告)日：1986-08-05

申请号：US660230

申请日：1984-10-12

申请人： Masahiro Tanaka ,  Kazufumi Azuma ,  Kazuo Nate ,  Mitsuo Nakatani

发明人： Masahiro Tanaka ,  Kazufumi Azuma ,  Kazuo Nate ,  Mitsuo Nakatani

IPC分类号： G03C1/76 ,  B05D3/06 ,  B05D7/24

CPC分类号： B05D1/60 ,  B05D3/06

摘要： An organic thin film consisting essentially of an organic compound is formed on a substrate surface by vacuum vapor deposition by exposing the organic compound as a vapor source to a laser beam having an energy level corresponding to that of the chemical bond of the organic compound, thereby sputtering the organic compound onto a substrate surface in vacuum and forming the organic thin film thereon. When a light or radiation-sensitive organic compound is used as the vapor source, a light or radiation-sensitive resist film is formed. The thin film thus formed retains the original chemical structure of the vapor source, and has a good flatness. Resolvability of resist film is improved owing to the absence of pin holes and particulate matters. A resist film having a higher sensitivity and a better contrast is formed by heating the substrate during the vapor deposition.

摘要翻译： 通过将有机化合物作为蒸汽源暴露于具有与有机化合物的化学键的能级对应的能级的激光束，通过真空汽相沉积在基板表面上形成基本上由有机化合物构成的有机薄膜，由此 在真空中将有机化合物溅射到基板表面上并在其上形成有机薄膜。 当使用光或辐射敏感的有机化合物作为蒸气源时，形成光或辐射敏感的抗蚀剂膜。 由此形成的薄膜保持蒸气源的原始化学结构，并且具有良好的平坦度。 由于没有针孔和颗粒物质，抗蚀剂膜的可分离性得到改善。 通过在气相沉积期间加热基底来形成具有更高灵敏度和更好对比度的抗蚀剂膜。

公开(公告)号：US07530184B2

公开(公告)日：2009-05-12

申请号：US11470942

申请日：2006-09-07

申请人： Hiroyoshi Ishihama ,  Mitsuo Nakatani ,  Yasunari Watanabe

发明人： Hiroyoshi Ishihama ,  Mitsuo Nakatani ,  Yasunari Watanabe

IPC分类号： E01H5/06

CPC分类号： E02F3/815

摘要： A working machine having a blade is disclosed, the blade comprising a body blade and an extension blade, the body blade having a body-side mounting portion having a body-side mounting hole and the extension blade having an extension-side mounting portion having an extension-side mounting hole, the body-side mounting hole and the extension-side mounting hole being formed vertically through the body-side mounting portion and the extension-side mounting portion, respectively. Further provided are mounting members adapted to be inserted into the mounting holes to connect the body blade and the extension blade with each other, and positioning members and a cutout portion for aligning the positions of the body-side mounting hole and the extension-side mounting hole vertically with each other and inhibiting the body-side mounting portion and the extension-side mounting portion from pivoting around the mounting members.

摘要翻译： 公开了一种具有叶片的工作机，所述叶片包括主体叶片和延伸叶片，所述主体叶片具有主体侧安装部分，所述主体侧安装部分具有主体侧安装孔，所述延伸叶片具有延伸侧安装部分， 延伸侧安装孔，主体侧安装孔和延伸侧安装孔分别垂直地形成在主体侧安装部和延伸侧安装部上。 还提供了适于插入到安装孔中以将主体叶片和延伸叶片彼此连接的安装构件，以及用于使主体侧安装孔和延伸侧安装件的位置对准的定位构件和切口部 并且禁止体侧安装部和延伸侧安装部围绕安装构件枢转。

公开(公告)号：US06903786B2

公开(公告)日：2005-06-07

申请号：US10865779

申请日：2004-06-14

申请人： Tomoaki Takahashi ,  Sakari Kaneku ,  Hideaki Yamamoto ,  Mitsuo Nakatani ,  Hiroshi Sasaki

发明人： Tomoaki Takahashi ,  Sakari Kaneku ,  Hideaki Yamamoto ,  Mitsuo Nakatani ,  Hiroshi Sasaki

IPC分类号： G02F1/136 ,  C23C28/02 ,  C25F3/02 ,  G02F1/1343 ,  G02F1/1362 ,  G02F1/1368 ,  G09F9/30 ,  H01L21/3063 ,  H01L21/336 ,  H01L29/786

CPC分类号： G02F1/13458 ,  G02F1/134363 ,  G02F1/136286 ,  G02F2001/13629

摘要： A method of manufacturing an LCD device which includes a gate line having an effective display area which includes an aluminum alloy layer and an aluminum oxide layer. The gate line also includes a gate terminal portion which is made up of the same aluminum alloy layer with a molybdenum alloy layer formed thereon. To form this structure, an insulating substrate of the LCD device, with the laminated structure of the aluminum alloy layer and the molybdenum layer, is immersed in an electrolytic solution. During the immersion, the molybdenum layer is etched off the aluminum alloy in the effective displaying area, while the etching is prevented in the gate terminal area by a protective layer. Following this, the aluminum oxide layer is formed over the aluminum alloy in the effected display area while the device is still immersed in the electrolytic solution.

摘要翻译： 一种制造LCD装置的方法，其包括具有包括铝合金层和氧化铝层的有效显示区域的栅极线。 栅极线还包括由形成有钼合金层的相同的铝合金层构成的栅极端子部。 为了形成该结构，将具有铝合金层和钼层的层叠结构的LCD装置的绝缘基板浸渍在电解液中。 在浸渍期间，在有效显示区域中，钼层被蚀刻掉铝合金，同时通过保护层在栅极端子区域中防止蚀刻。 接下来，在受影响的显示区域中在铝合金上形成氧化铝层，同时该装置仍然浸没在电解液中。

公开(公告)号：US5493129A

公开(公告)日：1996-02-20

申请号：US372289

申请日：1989-06-27

申请人： Eiji Matsuzaki ,  Akihiro Kenmotsu ,  Yoshifumi Yoritomi ,  Toshiyuki Koshita ,  Takao Takano ,  Mitsuo Nakatani

发明人： Eiji Matsuzaki ,  Akihiro Kenmotsu ,  Yoshifumi Yoritomi ,  Toshiyuki Koshita ,  Takao Takano ,  Mitsuo Nakatani

IPC分类号： H01L29/417 ,  H01L29/786 ,  H01L29/04

CPC分类号： H01L29/78696 ,  H01L29/41733 ,  H01L29/78669 ,  H01L29/78687

摘要： A thin film transistor structure for use in driving liquid crystal display elements has a semiconductor active layer, a control electrode layer underlying the active layer with an insulating layer interposed therebetween and first and second main electrode layers formed on or above the active layer in a spaced relation with each other to define a channel in the active layer in cooperation with the control electrode layer between the main electrode layers. The active layer has a first peripheral edge portion generally perpendicular to the direction of the channel and a second peripheral edge portion generally not perpendicular to the direction of the channel. The first and/or second main electrode layer extends over the first and/or second peripheral edge portion of the active layer such that at least a part of the first peripheral edge portion and/or at least part of the second peripheral edge portion of the active layer has its side face directly covered with the main electrode layer.