利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

8 条记录 (耗时 0.021 秒)

    Microwave excursion detection for semiconductor processing
    1.
    发明授权
    Microwave excursion detection for semiconductor processing 有权
    微波偏移检测用于半导体处理

    公开(公告)号：US08841629B2

    公开(公告)日：2014-09-23

    申请号：US13534575

    申请日：2012-06-27

    申请人： Scott A. Hendrickson ,  Liliya Krivulina ,  Juan Carlos Rocha ,  Sanjeev Baluja

    发明人： Scott A. Hendrickson ,  Liliya Krivulina ,  Juan Carlos Rocha ,  Sanjeev Baluja

    IPC分类号： G01J1/42

    CPC分类号： H05B3/0047

    摘要： Devices and methods are provided for monitoring low-level microwave excursions from a UV curing system to determine if equipment is damaged, such as screen tears or improper assembly of UV lampheads. A radio frequency (RF) detector may be used to detect microwaves in a range of about 0.2-5 mW/cm2, wherein the RF detector comprises an antenna with a hoop shaped portion, a circuit board having a diode detector and an amplifier circuit, a housing, and a bracket coupled to the housing that is suitable for coupling the RF detector to the UV curing system. An alarm threshold may also be set, which can be correlated to microwave levels at or below levels that could cause damage to semiconductor devices being processed. A substrate processing system comprising an RF detector is also provided.

    摘要翻译： 提供的装置和方法用于监测来自UV固化系统的低水平微波偏移，以确定设备是否损坏，如屏幕撕裂或UV灯头的组装不当。 可以使用射频（RF）检测器来检测约0.2-5mW / cm 2范围内的微波，其中RF检测器包括具有环形部分的天线，具有二极管检测器和放大器电路的电路板， 壳体和联接到壳体的支架，其适于将RF检测器耦合到UV固化系统。 还可以设置警报阈值，其可以与可能对正被处理的半导体器件造成损坏的等于或低于水平的微波水平相关。 还提供了包括RF检测器的衬底处理系统。

    MICROWAVE EXCURSION DETECTION FOR SEMICONDUCTOR PROCESSING
    2.
    发明申请
    MICROWAVE EXCURSION DETECTION FOR SEMICONDUCTOR PROCESSING 有权
    用于半导体处理的微波检测

    公开(公告)号：US20140000515A1

    公开(公告)日：2014-01-02

    申请号：US13534575

    申请日：2012-06-27

    申请人： SCOTT A. HENDRICKSON ,  Liliya Krivulina ,  Juan Carlos Rocha ,  Sanjeev Baluja

    发明人： SCOTT A. HENDRICKSON ,  Liliya Krivulina ,  Juan Carlos Rocha ,  Sanjeev Baluja

    IPC分类号： C23C16/52 ,  G01T1/00

    CPC分类号： H05B3/0047

    摘要： Devices and methods are provided for monitoring low-level microwave excursions from a UV curing system to determine if equipment is damaged, such as screen tears or improper assembly of UV lampheads. A radio frequency (RF) detector may be used to detect microwaves in a range of about 0.2-5 mW/cm2, wherein the RF detector comprises an antenna with a hoop shaped portion, a circuit board having a diode detector and an amplifier circuit, a housing, and a bracket coupled to the housing that is suitable for coupling the RF detector to the UV curing system. An alarm threshold may also be set, which can be correlated to microwave levels at or below levels that could cause damage to semiconductor devices being processed. A substrate processing system comprising an RF detector is also provided.

    摘要翻译： 提供的装置和方法用于监测来自UV固化系统的低水平微波偏移，以确定设备是否损坏，如屏幕撕裂或UV灯头的组装不当。 可以使用射频（RF）检测器来检测约0.2-5mW / cm 2范围内的微波，其中RF检测器包括具有环形部分的天线，具有二极管检测器和放大器电路的电路板， 壳体和联接到壳体的支架，其适于将RF检测器耦合到UV固化系统。 还可以设置警报阈值，其可以与可能对正被处理的半导体器件造成损坏的等于或低于水平的微波水平相关。 还提供了包括RF检测器的衬底处理系统。