Implantable microelectrode
    1.
    发明授权
    Implantable microelectrode 失效
    可植入微电极

    公开(公告)号:US5515848A

    公开(公告)日:1996-05-14

    申请号:US482189

    申请日:1995-06-07

    摘要: A miniature, electrically-insulated multi-conductor electrical cable suitable for implantation in living bodies and readily connected to sensors or electrodes, and implantable microelectrodes attached to such cables. Individual electrical conductors are coated with at least one layer of, insulating material and stranded together, or optionally bound together by an additional layer of insulating material which is compatible with implantation in living bodies. The individual conductors are separated from one another in terminal portions of the cable and are held by a ribbonizing resin at a predetermined pitch to facilitate connection of each of the conductors. The terminal portions may define microelectrodes. Another microelectrode includes an electrically conductive electrode core member sharpened and coated with a thin layer of a dielectric material. An extremely small area of the core at the sharpened point is exposed by ablating the dielectric material by the use of an ultraviolet laser beam scanned over the material. Multiple conductor microelectrodes may also be supported within a hollow needle or in flat ribbon configuration, with openings in dielectric material defining active electrode sites. Multiple active electrode sites may be defined on a microelectrode accompanied by an integrated circuit after connection of the integrated circuit to a multiconductor cable.

    摘要翻译: 适用于植入生物体并容易连接到传感器或电极的微型电绝缘多导体电缆,以及连接到这种电缆的可植入微电极。 单个电导体涂覆有至少一层绝缘材料并且绞合在一起,或者可选地通过与植入在活体中相容的附加绝缘材料层结合在一起。 单个导体在电缆的端子部分彼此分离,并且以预定间距由带状树脂保持,以便于每个导体的连接。 端子部分可以限定微电极。 另一个微电极包括一个导电电极芯件,它被削尖并涂覆有一层介电材料。 通过使用在材料上扫描的紫外激光束来烧蚀电介质材料,在锐化点处的芯的极小区域被暴露。 多导体微电极也可以支撑在空心针或扁平带状结构中,电介质材料中的开口限定活性电极位置。 在集成电路连接到多导体电缆之后,可以在伴随着集成电路的微电极上限定多个活性电极位置。

    Method of making implantable microelectrode
    2.
    发明授权
    Method of making implantable microelectrode 失效
    制造可植入微电极的方法

    公开(公告)号:US5524338A

    公开(公告)日:1996-06-11

    申请号:US362806

    申请日:1994-12-22

    摘要: Microelectrodes for use in stimulating and detecting activity in neurons of living organisms, and a method of manufacturing such microelectrodes. An electrically conductive electrode core member is sharpened and coated with a thin layer of a dielectric material. An extremely small area of the core at the sharpened point is exposed by ablating the dielectric material by the use of ultraviolet laser beam scanned over the material. Multiconductor microelectrodes include multiple fine wires which may be arranged in helical strands, optionally supported by a central core member of stiffer material. Multiple conductors may also be supported within a tubular support such as a hollow needle whose distal end is cut at a slant to expose the conductors, or in flat ribbon configuration with openings in dielectric material defining active electrode sites. Multiple active electrode sites may be defined on a microelectrode accompanied by an integrated circuit after connection of the integrated circuit to a multiconductor cable.

    摘要翻译: 用于刺激和检测活生物体神经元活性的微电极,以及制造这种微电极的方法。 导电电极芯构件被磨削并涂覆有介电材料的薄层。 通过使用在材料上扫描的紫外激光束来烧蚀电介质材料,在锐化点处的芯的极小区域被暴露。 多导体微电极包括多个细线,其可以布置成螺旋线,任选由较硬材料的中心芯构件支撑。 多个导体也可以被支撑在管状支撑件内,例如中空针头,其远端以倾斜方式被切割以露出导体,或者在具有限定活性电极位置的介电材料中具有开口的扁平带状构造中。 在集成电路连接到多导体电缆之后,可以在伴随着集成电路的微电极上限定多个活性电极位置。

    Connector with monolithic multi-contact array
    4.
    发明授权
    Connector with monolithic multi-contact array 失效
    单片多接点阵列连接器

    公开(公告)号:US5451169A

    公开(公告)日:1995-09-19

    申请号:US376627

    申请日:1995-01-23

    摘要: Connectors for attachment to cables including a large number of very small flexible conductors (26) or coaxial conductor pairs (74). In a first embodiment very small contacts (36) are arrayed on a flat mating surface (28) of the connector body (22). Contacts (36) are raised slightly above the mating surface by plating conductive metal to form raised bumps (42) on one of a pair of connectors (14, 16). Insulated individual conductors (26) are placed through apertures (48) defined in a substrate acting as a template, and are fastened in place by potting material (50) before shaping the mating surface (28) of the connector body (22) or (24) is shaped. Pin and socket combinations (30, 32) are used to align mating connectors with each other. In other connectors (176, 178) contact bases (198, 200) to be plated may be defined precisely by photoresist lithography on a cover layer (192) attached to the template substrate (180, 182), and an elastomeric layer (190 ) may be provided between the cover layer and the template substrate. In other connectors (90, 146, 240, 460) shields of coaxial conductor pairs and shields of flex circuits are connected electrically to conductive common layers (98, 154, 246, 474) on the rear side of the substrate. In one connector (370) flex circuit conductor traces are exposed on a mating face (394) as contacts (396, 398).

    摘要翻译: 用于连接到包括大量非常小的柔性导体(26)或同轴导体对(74)的电缆的连接器。 在第一实施例中,非常小的触点(36)排列在连接器主体(22)的平坦配合表面(28)上。 触点(36)通过镀覆导电金属稍微升高到配合表面上方,以在一对连接器(14,16)之一上形成凸起凸块(42)。 绝缘的单个导体(26)通过限定在作为模板的基板中的孔(48)放置,并且在成形连接器主体(22)的配合表面(28)之前被灌封材料(50)固定到位,或( 24)成形。 引脚和插座组合(30,32)用于将配合连接器彼此对准。 在其它连接器(176,178)中,可以通过在附着到模板衬底(180,182)的覆盖层(192)上的光致抗蚀剂光刻法和弹性层(190)精确地限定要被电镀的接触基底(198,200) 可以设置在覆盖层和模板基板之间。 在其他连接器(90,146,240,460)中,同轴导体对的屏蔽和柔性电路的屏蔽件电连接到衬底背面上的导电公共层(98,154,246,474)。 在一个连接器(370)中,柔性电路导体迹线作为接触件(396,398)暴露在配合面(394)上。

    Method of making connector with monolithic multi-contact array
    5.
    发明授权
    Method of making connector with monolithic multi-contact array 失效
    制造连接器与单片多接触阵列的方法

    公开(公告)号:US5274917A

    公开(公告)日:1994-01-04

    申请号:US895518

    申请日:1992-06-08

    摘要: Connectors for attachment to cables including a large number of very small flexible conductors or conductor pairs, in which very small contacts are provided as an array exposed on a flat mating surface. Contacts may be raised slightly above the flat surface by plating conductive metal to form raised bumps on one of a pair of connectors. Individual conductors are placed through apertures defined in a substrate acting as a template, and are potted in place before shaping the mating surface of the connector. Contact bases to be plated may be defined precisely by photoresist lithography on a cover layer attached to the template substrate, and an elastomeric layer may be provided between the cover layer and the template substrate. Pin and socket combinations are used to align mating connectors with each other.

    摘要翻译: 用于连接到包括大量非常小的柔性导体或导体对的电缆的连接器,其中提供非常小的触点作为暴露在平坦配合表面上的阵列。 可以通过电镀导电金属在平坦表面上稍微升高触点,以在一对连接器之一上形成凸起的凸块。 单个导体通过限定在作为模板的基板中的孔放置,并且在成形连接器的配合表面之前被封装就位。 可以通过在附着于模板基板的覆盖层上的光致抗蚀剂光刻精确地限定要镀覆的接触基底,并且可以在覆盖层和模板衬底之间设置弹性体层。 引脚和插座组合用于将配合连接器彼此对准。

    Thermally balanced acousto-optic modulator
    6.
    发明授权
    Thermally balanced acousto-optic modulator 有权
    热平衡声光调制器

    公开(公告)号:US06295157B1

    公开(公告)日:2001-09-25

    申请号:US09379566

    申请日:1999-08-23

    IPC分类号: G02F111

    摘要: An acousto-optic modulator for use with a multi-channel laser beam system, for instance, is of conventional structure except that two different RF (radio frequency) signals drive the modulator. These signals each produce at least one output beam as diffracted by the modulator body. These two beams are angularly and spatially separated. One of the sets of beams is incident upon a beam stop, and therefore is not used for writing. Only the other set of beams, driven by the other of the frequencies, performs the actual writing. The optical stop in addition to blocking one of the sets of diffracted beams also blocks the transmission of the zero order (undiffracted) beam. The sum of the load power of the signals at the two frequencies is kept approximately constant, thereby maintaining a constant thermal condition within the modulator.

    摘要翻译: 例如,与多通道激光束系统一起使用的声光调制器是常规结构,除了两个不同的RF(射频)信号驱动调制器。 这些信号各自产生至少一个由调制器体衍射的输出光束。 这两个光束在角度和空间上分离。 波束组中的一个入射到光束停止处,因此不用于书写。 只有由其他频率驱动的另外一组光束执行实际写入。 除了阻挡衍射光束之一之外,光学停止还阻挡零级(未衍射)光束的透射。 在两个频率处的信号的负载功率的总和保持近似恒定,从而在调制器内保持恒定的热条件。

    Critical dimension edge placement and slope enhancement with central pixel dose addition and modulated inner pixels
    7.
    发明授权
    Critical dimension edge placement and slope enhancement with central pixel dose addition and modulated inner pixels 有权
    关键尺寸边缘放置和中心像素剂量加法和调制内像素的斜率增强

    公开(公告)号:US06998217B2

    公开(公告)日:2006-02-14

    申请号:US10326953

    申请日:2003-01-06

    IPC分类号: G03C5/00

    CPC分类号: G03F1/78

    摘要: Systems and methods for gray scale lithography for defining edges such as on microelectronic device patterns during integrated circuit fabrication are disclosed. Methods for critical dimension edge placement and slope enhancement utilize central pixel dose addition or modulated inner pixels. A method for gray scale lithography for defining edges of features generally comprises identifying a center pixel of a feature, exposing the general width of the feature including the identified center pixel with full doses, and enhancing the identified center pixel by exposing the identified center pixel with additional dose to accurately place the edge of the feature, whereby the edge of the feature is defined and moved by exposing the center pixel with the additional dose. Another method for gray scale lithography generally comprises identifying a proximal interior pixel immediately interior to an unbiased edge of the feature, exposing the general width of the feature full dosages, and exposing the proximal interior pixel with a dosage of elevated intensity selected from a set of gray levels, the elevated intensities being above the full dosage, the set of gray levels biases the edge of the feature and facilitates in further moving the edge of the feature in fractional increments of a pixel depending upon the gray level selected.

    摘要翻译: 公开了用于在集成电路制造期间用于限定边缘(例如微电子器件图案)上的灰度光刻的系统和方法。 关键尺寸边缘放置和斜率增强的方法利用中心像素剂量加法或调制内像素。 用于定义特征边缘的灰度光刻的方法通常包括识别特征的中心像素,以全剂量暴露包括所识别的中心像素的特征的一般宽度,以及通过将所识别的中心像素曝光于所识别的中心像素, 附加剂量以精确地放置特征的边缘,由此通过用附加剂量暴露中心像素来限定和移动特征的边缘。 用于灰度光刻的另一种方法通常包括:在特征的非偏向边缘内部识别近端内部像素,暴露特征全部剂量的总体宽度,以及从一组 灰度级,提高的强度高于全剂量,灰度级集合偏置特征的边缘,并且有助于根据所选择的灰度级进一步移动像素的分数增量中的特征边缘。

    Enhanced edge resolution and critical dimension linearity in lithography
    8.
    发明授权
    Enhanced edge resolution and critical dimension linearity in lithography 失效
    光刻中增强的边缘分辨率和临界尺寸线性度

    公开(公告)号:US06819450B1

    公开(公告)日:2004-11-16

    申请号:US09538848

    申请日:2000-03-28

    IPC分类号: G06K1500

    CPC分类号: G03F7/70283 G03F7/70383

    摘要: A semiconductor fabrication gray level photolithography strategy, in which the energy beam intensities corresponding to each gray level are selected from a set of non-linear, non-monotonic intensities. Rasterized geometric shape edges are defined by associating one or more intermediate gray levels with pixels in at least one row of pixels. The geometric shape is printed or imaged on an energy sensitive layer by modulating an energy beam to the intensity corresponding to the associated gray level, and directing the modulated beam to the pixel location on the layer. The intensities corresponding to the gray levels are selected so as to optimize critical dimension (CD) characteristics and other printing features.

    摘要翻译: 半导体制造灰度光刻策略,其中对应于每个灰度级的能量束强度从一组非线性非单调强度中选择。 通过将一个或多个中间灰度级别与至少一行像素中的像素相关联来定义光栅化几何形状边缘。 通过将能量束调制到与相关联的灰度级相对应的强度,并将调制的光束引导到层上的像素位置,将几何形状印刷或成像在能量敏感层上。 选择对应于灰度级的强度,以便优化临界尺寸(CD)特性和其他印刷特征。