公开(公告)号：US20160247532A1

公开(公告)日：2016-08-25

申请号：US14629054

申请日：2015-02-23

Applicant: Seagate Technology LLC

Inventor： Samuel L. Tanaka ,  ChunWai Joseph Tong ,  Thomas L. Greenberg

IPC: G11B5/851 ,  H01J37/34 ,  C23C14/34

CPC classification number: G11B5/851 ,  C23C14/568 ,  H01J37/32733 ,  H01J37/32853 ,  H01J37/32899 ,  H01J37/3405 ,  H01L21/6715 ,  H01L21/67173 ,  H01L21/67706 ,  H01L21/67712 ,  H01L21/6776

Abstract: A coating apparatus for magnetic data storage disks is operable to transport a disk in a disk holding fixture from a first coating area to a second coating area via roller wheels along a first path. A wheel located along the first path between the first coating area and the second coating area within a sealed enclosure is adjusted such that deflection of the disk holding fixture when traversing the disk transport wheel is reduced, such as by adjusting a leadscrew coupled to the disk holding fixture and a frame of the disk coating apparatus. Adjustment is made with the disk coating apparatus sealed and under vacuum, as the position of the disk transport wheel being adjusted may be different under vacuum than under atmospheric pressure. Adjustment is verified by processing a test disk and measuring forces applied to the test disk during transport through the disk coating apparatus.

Abstract translation: 用于磁数据存储盘的涂覆装置可操作以沿着第一路径将盘保持固定装置中的盘从第一涂覆区域经由辊轮传送到第二涂覆区域。 调节在密封外壳内沿着第一涂覆区域和第二涂覆区域之间的第一路径设置的轮子，使得当盘片传送轮横过时，盘保持夹具的偏转减小，例如通过调节联接到盘的丝杠 保持固定装置和盘式涂装装置的框架。 由于盘片运输轮的位置被调整，在密封的真空下进行调整，真空度可能不同于大气压。 通过处理测试盘和测量在通过盘式涂布设备传送过程中施加到测试盘的力量来验证调整。

公开(公告)号：US20170040140A1

公开(公告)日：2017-02-09

申请号：US14820160

申请日：2015-08-06

Applicant: Seagate Technology LLC

Inventor： Samuel L. Tanaka ,  Christopher L. Platt ,  Thomas L. Greenberg

IPC: H01J37/07 ,  H01J37/02 ,  G11B5/85 ,  C23C16/50

CPC classification number: H01J37/07 ,  C23C16/50 ,  G11B5/85 ,  H01J37/023 ,  H01J37/32018 ,  H01J37/3266 ,  H01J37/32669 ,  H01J2237/3321

Abstract: Provided herein is an apparatus comprising a deposition chamber with a cathode, and a means for creating an asymmetric field about the cathode.

Abstract translation: 本文提供了一种包括具有阴极的沉积室和用于产生围绕阴极的不对称场的装置的装置。

公开(公告)号：US20160097118A1

公开(公告)日：2016-04-07

申请号：US14798570

申请日：2015-07-14

Applicant: Seagate Technology LLC

Inventor： Samuel L. Tanaka ,  Thomas L. Greenberg ,  Christopher L. Platt ,  Joseph Tong

IPC: C23C16/26 ,  C23C16/44 ,  H01J37/32 ,  C23C16/505

CPC classification number: C23C16/26 ,  C23C16/44 ,  C23C16/505 ,  H01J37/321 ,  H01J37/32403 ,  H01J37/32651 ,  H01J37/3266

Abstract: A deposition system may have at least a substrate mounted within a sealed chamber. A radio frequency energy can be supplied to an inductive source affixed to the sealed chamber with the inductive source having an inductive coil surrounding a tube. Coupling the radio frequency energy into a gas pumped into the sealed chamber creates plasma to uniformly deposit a thin layer on a surface of the substrate.

Abstract translation: 沉积系统可以具有安装在密封室内的至少一个衬底。 无线电频率能量可以被提供给固定到密封室的感应源，感应源具有围绕管的感应线圈。 将射频能量耦合到泵入密封室中的气体中产生等离子体以在基底的表面上均匀沉积薄层。