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公开(公告)号：US5158931A
公开(公告)日：1992-10-27
申请号：US439388
申请日：1989-11-16
申请人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya , Kazuo Hayashi
发明人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya , Kazuo Hayashi
CPC分类号： H01L39/2448 , C23C14/0021 , C23C14/087 , C23C16/408 , Y10S505/729 , Y10S505/73 , Y10S505/731 , Y10S505/732 , Y10S505/734
摘要： A laser beam 5 is directed to a target made of an oxide superconductor to allow a target spot which is irradiated with the beam to be evaporated and a matter which is evaporated to be deposited as a thin film on the surface of a substrate 3 at which time excited oxygen is supplied to or near a thin film deposition site on the substrate 3. In this way, an oxide superconductor thin film is formed on the substrate with oxygen atoms incorporated in the crystal structure of the thin film.
摘要翻译： PCT No.PCT / JP89 / 00277 Sec。 371日期：一九八九年十一月十六日 102（e）1989年11月16日PCT PCT Fils 3月15日PCT公布。 公开号WO89 / 08605 日期：1989年9月21日。激光束5被引导到由氧化物超导体制成的靶上，以允许用光束照射的靶点被蒸发，并将蒸发的物质作为薄膜沉积在 衬底3的表面，此时激发的氧被供应到衬底3上的薄膜沉积位置处或附近。以这种方式，在衬底上形成氧化物超导体薄膜，氧原子结合在薄的晶体结构中 电影。
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公开(公告)号：US4723262A
公开(公告)日：1988-02-02
申请号：US813544
申请日：1985-12-26
申请人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya
发明人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya
摘要： The soft X-ray apparatus of the present invention includes a vessel at low pressure or a vacuum in which a liquid target material, preferably mercury, is discharged in the form of a series of discontinuous droplets. The flow of the droplets of liquid target material is controlled by a control device, and synchronized with a high energy pulse beam, preferably a high energy laser pulse beam, provided by a laser device through a window in the vessel. In the preferred embodiment, this laser device also is controlled by the control device so that the laser pulse beam impinges a droplet of mercury inside the vessel to produce plasma to thereby generate soft X-rays. The droplets of mercury are sized to correspond to the size of the laser pulse beam at the point where the laser pulse beam impinges the droplet of mercury to maximize the strength of the soft X-rays and efficiently utilize the power of the high energy laser pulse beam. The soft X-rays exit the vessel through additional windows for subsequent use. A recovery mechanism is connected to the vessel to cover any unused liquid target material so that this material can be recirculated.
摘要翻译： 本发明的软X射线装置包括在低压下的容器或液体目标材料（优选汞）以一系列不连续液滴的形式排出的真空。 液体目标材料的液滴的流动由控制装置控制，并且由激光装置通过容器中的窗口提供的高能量脉冲光束（优选高能量激光脉冲光束）同步。 在优选实施例中，该激光装置也由控制装置控制，使得激光脉冲光束在容器内撞击汞滴以产生等离子体从而产生软X射线。 汞的液滴尺寸对应于激光脉冲光束撞击汞滴的点处的激光脉冲束的尺寸，以最大化软X射线的强度并有效利用高能量激光脉冲的功率 光束。 软X射线通过另外的窗户离开船只以供后续使用。 回收机构连接到容器以覆盖任何未使用的液体目标材料，使得该材料可以再循环。
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公开(公告)号：US5077749A
公开(公告)日：1991-12-31
申请号：US489059
申请日：1990-03-07
申请人： Etsuo Noda , Osami Morimiya , Setsuo Suzuki , Shintaro Hata
发明人： Etsuo Noda , Osami Morimiya , Setsuo Suzuki , Shintaro Hata
IPC分类号： H01S3/03 , H01S3/038 , H01S3/0971
CPC分类号： H01S3/09713 , H01S3/03 , H01S3/038
摘要： Disclosed is a laser apparatus for effecting laser oscillation by exciting a laser medium by discharge between an anode and a cathode opposedly arranged to each other in a discharge tube, comprising means disposed in the discharge tube to support both the electrodes movably along the axial direction of the discharge tube so as to prevent warp of the electrodes on laser oscillation and keep the parallelism therebetween with high accuracy. Also disclosed is a laser apparatus comprising main discharge means for effecting laser oscillation by exciting a laser medium by generating discharge, and preionization means for generating ionization previously to the discharge by the main discharge means so as to stabilize laser oscillation under a high gas pressure and a high current density.
摘要翻译： 公开了一种激光装置，其用于通过在放电管内相互排列的阳极和阴极之间的放电激发激光介质来实现激光振荡，该激光装置包括：设置在放电管中的装置，用于将两个电极沿着轴向方向 放电管，以防止激光振荡时的电极翘曲，并以高精度保持其间的平行度。 还公开了一种激光装置，其包括主放电装置，用于通过产生放电来激发激光介质来实现激光振荡;以及预放电装置，用于先前通过主放电装置放电产生电离，以便在高气压下稳定激光振荡， 高电流密度。
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公开(公告)号：US5185552A
公开(公告)日：1993-02-09
申请号：US718978
申请日：1991-06-21
申请人： Setsuo Suzuki , Etsuo Noda , Osami Morimiya
发明人： Setsuo Suzuki , Etsuo Noda , Osami Morimiya
摘要： A vacuum ultraviolet light source for generating a pulse discharge in a low pressure gas and extracting ultraviolet light from a plasma created in that discharge, is disclosed which comprises a discharge space P, a plate-like anode located in the discharge space, a plurality of hollow cathodes located in the discharge space in an opposed, spaced-apart relation to the anode, auxiliary electrodes provided in an inside space of the hollow cathode in a state shielded from the hollow cathode, means which, while maintaining a pressure in the discharge space constant, flows a gas along a route in the discharge space after passing through an inner space in each hollow cathode, a power supply for supplying an electric power for generating a main discharge across the hollow cathode and the anode after a pre-discharge is produced across each hollow cathode and the anode, and ultraviolet extracting means for extracting ultraviolet light radiated from a plasma which is produced by a discharge in the discharge space.
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公开(公告)号：US5048045A
公开(公告)日：1991-09-10
申请号：US494218
申请日：1990-03-15
申请人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya
发明人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya
IPC分类号： H01S3/097 , H01S3/038 , H01S3/0971 , H01S3/0977
CPC分类号： H01S3/038 , H01S3/09716
摘要： An X-ray preionization pulse laser comprises a laser tube in which a pair of main electrodes are disposed to face each other. Pulse discharge between the main electrodes excites a laser medium, thereby obtaining laser oscillation. The laser has a sealed vacuum chamber in which a sliding discharge area is arranged. The sliding discharge area produces sliding discharge that generates X-rays for preionizing the laser medium before the main discharge occurs for laser oscillation.
摘要翻译： X射线预电离脉冲激光器包括激光管，其中一对主电极被设置为彼此相对。 主电极之间的脉冲放电激发激光介质，从而获得激光振荡。 激光器具有密封的真空室，其中布置有滑动排放区域。 滑动放电区域产生滑动放电，其在激光振荡的主放电发生之前产生用于预激光激光介质的X射线。
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公开(公告)号：US5374613A
公开(公告)日：1994-12-20
申请号：US140398
申请日：1993-10-25
申请人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya , Kazuo Hayashi
发明人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya , Kazuo Hayashi
CPC分类号： H01L39/2448 , C23C14/0021 , C23C14/087 , C23C16/408 , Y10S505/729 , Y10S505/73 , Y10S505/731 , Y10S505/732 , Y10S505/734
摘要： A method for manufacturing an oxide superconductor thin film is disclosed, which comprises the steps of: (1) preparing a substrate; depositing an oxide superconductor thin film on said substrate by directing a beam containing constituent elements of an oxide superconductor to said substrate; and supplying excited oxygen to or near a thin film deposition site on said substrate during the deposition of said thin film, wherein said beam is selected from the group consisting of an ion beam, neutral particle beam, molecular beam, cluster beam and cluster ion beam, and wherein said excited oxygen is produced by means of generating discharge in an oxygen gas or oxygen-containing gas or by irradiating an oxygen gas or oxygen-containing gas with a beam.
摘要翻译： 公开了一种制造氧化物超导体薄膜的方法，其包括以下步骤：（1）制备衬底; 通过将包含氧化物超导体的构成元素的光束引导到所述衬底，在所述衬底上沉积氧化物超导体薄膜; 以及在沉积所述薄膜期间将激发的氧供应到所述衬底上的薄膜沉积位置附近，其中所述光束选自离子束，中性粒子束，分子束，簇束和簇离子束 并且其中所述被激发的氧是通过在氧气或含氧气体中产生放电或通过用光束照射氧气或含氧气体而产生的。
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公开(公告)号：US5284824A
公开(公告)日：1994-02-08
申请号：US888627
申请日：1992-06-23
申请人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya , Kazuo Hayashi
发明人： Etsuo Noda , Setsuo Suzuki , Osami Morimiya , Kazuo Hayashi
CPC分类号： H01L39/2448 , C23C14/0021 , C23C14/087 , C23C16/408 , Y10S505/729 , Y10S505/73 , Y10S505/731 , Y10S505/732 , Y10S505/734
摘要： A method for manufacturing an oxide superconductor film is disclosed, which comprises the steps of: preparing a substrate; depositing an oxide superconductor film on said substrate by chemical vapor deposition (CVD); and supplying excited oxygen to or near a film deposition site on said substrate during the deposition of said film.
摘要翻译： 公开了一种制造氧化物超导体膜的方法，其包括以下步骤：制备衬底; 通过化学气相沉积（CVD）在所述衬底上沉积氧化物超导体膜; 以及在所述膜的沉积期间将激发的氧供应到所述衬底上的膜沉积位置附近。
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公开(公告)号：US4339691A
公开(公告)日：1982-07-13
申请号：US199057
申请日：1980-10-20
申请人： Osami Morimiya , Setsuo Suzuki , Shigeki Monma
发明人： Osami Morimiya , Setsuo Suzuki , Shigeki Monma
摘要： Discharge apparatus comprises a vacuum envelope which is evacuated by a pamping apparatus. In the envelope, an anode and a hollow cathode are disposed and are connected to an arc power supply. A disk having an orfice covers one end of the hollow cathode. A low pressure gas is supplied from a gas source to the envelope through the hollow cathode and the orifice, the gas pressure in the hollow cathode being maintained higher than that in the envelope. The hollow cathode and the disk are made of an electrically conductive material and are connected to an ignition power supply. Before effecting discharging between the anode and the hollow cathode, the ignition power supply causes an ignition between the disk and the inner surface of the hollow cathode.
摘要翻译： 排放装置包括由冲压装置抽真空的真空外壳。 在外壳中，设置阳极和中空阴极并连接到电弧电源。 具有透明物的盘覆盖中空阴极的一端。 低压气体通过空心阴极和孔口从气体源供给到外壳，空气阴极中的气体压力保持高于外壳中的气体压力。 空心阴极和盘由导电材料制成，并连接到点火电源。 在阳极和空心阴极之间进行放电之前，点火电源引起盘与中空阴极的内表面之间的点燃。
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