Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method
    2.
    发明授权
    Mask-holding apparatus for a light exposure apparatus and related scanning-exposure method 失效
    用于曝光装置的掩模保持装置和相关的扫描曝光方法

    公开(公告)号:US06888621B2

    公开(公告)日:2005-05-03

    申请号:US10429868

    申请日:2003-05-06

    摘要: An exposure apparatus for exposing a substrate with an image of a pattern formed on a mask, including an illumination system or irradiation for illuminating or irradiating the mask with exposure light. A projection optical system is included for projecting, onto the substrate, an image of the pattern illuminated by the exposure light. The mask is securely supported on a movable mask stage. In one example, a mask holder is provided for supporting the mask from below. A pressing member is also included for applying, from above, a prescribed force to the mask, outside of the points supported by the mask holder.

    摘要翻译: 一种曝光装置,用于将掩模上形成的图案的图像曝光于基板上,所述图案包括照明系统或用曝光灯照射或照射所述掩模的照射。 包括投影光学系统,用于将由曝光光照射的图案的图像投影到基板上。 掩模被牢固地支撑在可移动的掩模台上。 在一个示例中,提供了用于从下方支撑面罩的面罩支架。 还包括按压构件,用于从上面向面罩施加规定的力,在由面罩保持器支撑的点之外。

    Copying machine exposure adjustment device
    10.
    发明授权
    Copying machine exposure adjustment device 失效
    复印机曝光调整装置

    公开(公告)号:US4699502A

    公开(公告)日:1987-10-13

    申请号:US829910

    申请日:1986-02-18

    摘要: A copying machine exposure adjustment device, including an operation panel that converts user operations into digital signals, a digital operation circuit that processes operational data from the operation panel and computes exposure data, a D/A converter that converts exposure data sequentially transmitted from the digital operation circuit into analog exposure data, a copy-lamp control circuit that adjusts the light volume of a copying lamp in response to the exposure data from the D/A converter, an image density circuit that detects light reflected from the original document, and a data correction circuit that corrects the exposure data from the D/A converter in response to the image density data from the image density detector circuit while the automatic exposure mode is in operation.

    摘要翻译: 一种复印机曝光调整装置,包括将用户操作转换为数字信号的操作面板,处理来自操作面板的操作数据并计算曝光数据的数字操作电路,D / A转换器,其转换从数字 操作电路转换为模拟曝光数据,复制灯控制电路,其响应于来自D / A转换器的曝光数据调整复印灯的光量,检测从原稿反射的光的图像浓度电路,以及 数据校正电路,在自动曝光模式运行的同时响应于来自图像浓度检测器电路的图像浓度数据,从D / A转换器校正曝光数据。