Field emission element and process for manufacturing same
    1.
    发明授权
    Field emission element and process for manufacturing same 失效
    场致发射元件及其制造方法

    公开(公告)号:US5637023A

    公开(公告)日:1997-06-10

    申请号:US271676

    申请日:1994-07-07

    CPC分类号: H01J9/025 H01J3/022

    摘要: A field emission element features an emitter which has rectangular projections at its distal end capable of readily controlling the interval between electrodes in increments as small as sub-microns, in order to reduce the voltage at which the device starts field emission at the required level and to improve emission uniformity. An emitter (2,20), a collector (3,21) and a gate (5,22) are arranged on a substrate (1), which is formed with a recess (4) in proximity to the electrodes (2,3,20,21) other than the gate (5). The gate (5) is provided in the recess (4).

    摘要翻译: 场发射元件的特征在于在其远端具有矩形突起的发射极,其能够以小至亚微米的增量容易地控制电极之间的间隔,以便降低器件在所需电平下开始场发射的电压, 以提高排放均匀性。 发射极(2,20),集电极(3,21)和栅极(5,22)布置在衬底(1)上,衬底(1)上形成有靠近电极(2,3)的凹部 ,20,21),而不是门(5)。 门(5)设置在凹部(4)中。

    Field emission element and process for manufacturing same
    2.
    发明授权
    Field emission element and process for manufacturing same 失效
    场致发射元件及其制造方法

    公开(公告)号:US5381069A

    公开(公告)日:1995-01-10

    申请号:US159114

    申请日:1993-11-30

    CPC分类号: H01J9/025 H01J3/022

    摘要: A field emission element in which the emitter has rectangular projections at its distal end capable of readily controlling the interval between electrodes in increments as small as sub-microns, in order to reduce the voltage at which the device starts field emission at the required level and to improve emission uniformity. An emitter (2,20), a collector (3,21) and a gate (5,22) are arranged on a substrate (1), which is formed with a recess (4) in proximity to the electrodes (2,3, 20,21) other than the gate (5). The gate (5) is provided in the recess (4).

    摘要翻译: 场致发射元件,其中发射器在其远端具有矩形突起,能够以小到亚微米的增量容易地控制电极之间的间隔,以便降低器件在所需电平下开始场发射的电压,以及 以提高排放均匀性。 发射极(2,20),集电极(3,21)和栅极(5,22)布置在衬底(1)上,衬底(1)上形成有靠近电极(2,3)的凹部 ,20,21),而不是门(5)。 门(5)设置在凹部(4)中。

    Image display device
    3.
    发明授权
    Image display device 失效
    图像显示装置

    公开(公告)号:US5256936A

    公开(公告)日:1993-10-26

    申请号:US766071

    申请日:1991-09-27

    IPC分类号: H01J3/02 H01J31/12 H01J17/49

    CPC分类号: H01J3/022 H01J31/127

    摘要: An image display device capable of minutely setting the interval between an emitter (6) and a gate (5) with high accuracy and of being driven at a significantly reduced drive voltage with good emission uniformity. Each emitter (6) is provided in a recess in a substrate (2), so that the interval between the emitter (6) and a gate (5) is determined depending upon the thickness of the emitter (6). Thus, the interval can be readily controlled by adjusting or varying the period of time during which the film for the emitter (6) is formed, resulting in a micro-interval of the order of sub-microns between the two components being possible with high accuracy.

    摘要翻译: 一种图像显示装置,其能够以高精度精确地设置发射极(6)和栅极(5)之间的间隔,并以显着降低的驱动电压驱动,并具有良好的发射均匀性。 每个发射器(6)设置在衬底(2)中的凹部中,使得发射极(6)和栅极(5)之间的间隔根据发射极(6)的厚度来确定。 因此,可以通过调节或改变形成发射器(6)的膜的时间段来容易地控制间隔,导致两个部件之间的亚微米量级的微间隔可以高 准确性。

    Field emission element
    5.
    发明授权
    Field emission element 失效
    场发射元件

    公开(公告)号:US5469014A

    公开(公告)日:1995-11-21

    申请号:US829251

    申请日:1992-02-03

    摘要: A field emission element including a gate and an emitter and capable of preventing any of the element oxide layer from being formed on a tip of the emitter to prevent a decrease in emission current, unstable operation and an increase in noise. The gate has a surface formed of a material of oxygen bonding strength higher than that of a material for at least a tip surface of the emitter, so that oxygen atoms and molecules containing oxygen entering the gate may be captured by adsorption on the gate to prevent formation of any oxide layer on the emitter. When a portion of the emitter other than the tip surface is formed of a material of oxygen bonding strength higher than that of the material for the tip surface, formation of any oxide layer on the tip surface of the emitter is minimized.

    摘要翻译: 一种场致发射元件,包括栅极和发射极,并且能够防止在发射极的顶端上形成任何元素氧化物层,以防止发射电流降低,操作不稳定和噪声增加。 栅极具有由氧键合强度高于发光体的至少尖端表面的材料的表面形成的表面,从而可以通过栅极上的吸附捕获氧原子和进入栅极的分子,以防止 在发射体上形成任何氧化物层。 当除尖端表面之外的发射体的一部分由氧结合强度高于尖端表面材料的材料形成时,在发射极的顶端表面上形成任何氧化物层都被最小化。

    Field emission cathode
    6.
    发明授权
    Field emission cathode 失效
    场发射阴极

    公开(公告)号:US5612587A

    公开(公告)日:1997-03-18

    申请号:US438082

    申请日:1995-05-08

    IPC分类号: H01J1/30 H01J1/304 H01J1/02

    CPC分类号: H01J1/3042

    摘要: A field emission cathode capable of reducing an operation voltage and substantially preventing damage of an emitter. An emitter is provided on a substrate. The emitter includes a base and a plurality of rectangular tips projecting from the base. A gate is arranged in a recess formed on the substrate so as to be in proximity to the emitter. A width a of the tips of the emitter and an interval b between the tips are defined to satisfy a relationship of b/a=2. This permits an electric field strength applied to the tips of the emitter to be substantially increased as compared in a conventional field emission cathode of b/a.ltoreq.1, resulting in an operation voltage being reduced and a sufficient amount of emitter current being produced.

    摘要翻译: 能够降低工作电压并且基本上防止发射体损坏的场致发射阴极。 在基板上设置发射极。 发射器包括基部和从基部突出的多个矩形尖端。 栅极被布置在形成在衬底上的凹部中以便靠近发射极。 发射极尖端的宽度a和尖端之间的间隔b被定义为满足b / a = 2的关系。 与传统的b / a 1的场致发射阴极相比,这允许施加到发射极的尖端的电场强度显着增加,导致工作电压降低并产生足够量的发射极电流 。

    Reduced voltage field emission cathode and method for manufacturing same
    8.
    发明授权
    Reduced voltage field emission cathode and method for manufacturing same 失效
    降低电场发射阴极及其制造方法

    公开(公告)号:US06409565B1

    公开(公告)日:2002-06-25

    申请号:US09317864

    申请日:1999-05-25

    IPC分类号: H01J900

    CPC分类号: H01J9/025

    摘要: A field emission cathode capable of emitting electrons under a low voltage. Lead-out electrodes are formed on an insulating layer and openings are formed at a lamination between the insulating layer and each of the lead-out electrodes. Emitters each are arranged in each of the openings. The insulating layer is provided on a lower surface thereof with a photoresist layer modified by heating. The modified photoresist layer is electrically connected through a resistive layer to a cathode electrode. The cathode electrode is formed in a pattern on a cathode substrate made of glass or the like. The emitters each are constituted by a distal end of each of projections of the modified photoresist layer exposed from the insulating layer. The photoresist is modified by heating, resulting in being provided with electrical conductivity and exhibiting stable electron emitting characteristics under a low voltage.

    摘要翻译: 能够在低电压下发射电子的场发射阴极。 引出电极形成在绝缘层上,并且在绝缘层和每个引出电极之间的叠层处形成开口。 发射器各自布置在每个开口中。 绝缘层在其下表面上设置有通过加热改性的光致抗蚀剂层。 改性光致抗蚀剂层通过电阻层电连接到阴极电极。 在由玻璃等制成的阴极基板上形成阴极电极。 发射体各自由从绝缘层露出的改性光致抗蚀剂层的每个突起的远端构成。 通过加热改性光致抗蚀剂,从而提供导电性并在低电压下表现出稳定的电子发射特性。

    Electron emitting element
    9.
    发明授权
    Electron emitting element 失效
    电子发射元件

    公开(公告)号:US5189341A

    公开(公告)日:1993-02-23

    申请号:US701027

    申请日:1991-05-16

    CPC分类号: H01J1/3042

    摘要: An electron emitting element capable of preventing pollution of the emitter due to absorption of gas thereon, to thereby ensure stable emission of electrons over a long period of time even in a low vacuum atmosphere. The electron emitting element is constructed so as to permit a part of electrons emitted from one of emitters to impinge on the other of the emitters being ready for emission to clean it.

    摘要翻译: 一种电子发射元件,其能够防止由于其上的气体吸收引起的发射体的污染,从而即使在低真空气氛中也能够长时间保证电子的稳定的发射。 电子发射元件被构造成允许从发射器之一发射的电子的一部分撞击准备发射的另一个发射器以将其清洁。