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14 条记录 (耗时 0.015 秒)

    Movement guiding mechanism
    1.
    发明授权
    Movement guiding mechanism 失效
    运动引导机制

    公开(公告)号：US5040431A

    公开(公告)日：1991-08-20

    申请号：US299340

    申请日：1989-01-23

    申请人： Shigeo Sakino ,  Eiji Osanai ,  Mahito Negishi ,  Michio Horikoshi ,  Mitsuru Inoue ,  Kazuya Ono

    发明人： Shigeo Sakino ,  Eiji Osanai ,  Mahito Negishi ,  Michio Horikoshi ,  Mitsuru Inoue ,  Kazuya Ono

    IPC分类号： F16C29/02 ,  G03F7/20 ,  H01L21/68

    CPC分类号： F16C29/025 ,  F16C32/06 ,  G03F7/70716 ,  H01L21/68 ,  Y10S248/913 ,  Y10T74/20354

    摘要： In a movement guiding device, two parallel stationary guides are fixed to a surface plate and plural hydrostatic gas or bearing members are provided for the surface plate and the stationary guides. A Y stage is moved in a Y-axis direction under the influence of these bearing members. Additional hydrostatic gas or air bearing members are provided in relation to the surface plate and the Y stage so as to support an X stage for movement in an X-axis direction orthogonal to the Y-axis direction. Guide of the Y stage in the X-axis direction is made by the stationary guides on the surface plate, while guide thereof in a Z-axis direction perpendicular to an X-Y plane is made by the surface plate. Guide of the X stage in the Y-axis direction is made by the Y stage, while the guide thereof in the Z-axis direction is made by the surface plate, similar to the Y stage. With such structure, any vibration, rolling, or otherwise, of the Y stage is not transmitted to the X stage. Thus, high-precision guide is attainable. Linear motors are used as drive sources for the X and Y stages, so that all movable portions are provided by non-contact structures. Further, suitable brake members are used, which members are operable at a time of an accident of the stage. By this, accidental collision of the stage and/or derailment of the stage from the guide can be prevented.

    摘要翻译： 在运动导向装置中，两个平行的固定导轨固定在一个表面板上，为表面板和固定导轨提供多个静压气体或轴承部件。 在这些轴承部件的影响下，Y台架沿Y轴方向移动。 相对于表面板和Y平台设置有额外的静液压气体或空气轴承构件，以支撑X平台在与Y轴方向正交的X轴方向上移动。 通过表面板上的固定引导件在X轴方向上引导Y台的引导，而通过表面板在与X-Y平面垂直的Z轴方向上的引导。 X平台的Y轴方向的引导由Y台进行，其Z轴方向的引导部由表面板制成，与Y台相同。 利用这种结构，Y阶段的任何振动，滚动或其他方式不会传递到X级。 因此，可以实现高精度的引导。 线性电动机用作X和Y级的驱动源，使得所有可移动部分由非接触结构提供。 此外，使用合适的制动构件，这些构件在阶段事故发生时可操作。 由此，可以防止舞台的意外碰撞和/或舞台从导轨脱轨。

    Motion guiding device
    2.
    发明授权
    Motion guiding device 失效
    运动引导装置

    公开(公告)号：US5228358A

    公开(公告)日：1993-07-20

    申请号：US991711

    申请日：1992-12-16

    申请人： Shigeo Sakino ,  Eiji Osanai

    发明人： Shigeo Sakino ,  Eiji Osanai

    IPC分类号： B23Q1/38 ,  B23Q1/62 ,  B23Q5/10 ,  H02K41/03

    CPC分类号： F16C32/0674 ,  B23Q1/38 ,  B23Q1/621 ,  B23Q5/10 ,  H02K41/03 ,  B26D2007/0043 ,  Y10S384/902 ,  Y10T74/20207

    摘要： A motion guiding device includes a first movable member movable in a first direction, a second movable member movable in a second direction different from the first direction and for guiding motion of the first movable member in the first direction through a gas pressure, a base for supporting the first and second movable members independently of each other, with respect to a vertical direction through cooperation of a gas pressure. In addition, a guide is fixed to the base for guiding motion of the second movable member in the second direction through cooperation of a gas pressure and a magnetic force of a permanent magnet, a first linear motor moves the first movable member in the first direction, relative to the second movable member, and a second linear motor moves the second movable member with the first movable member in the second direction.

    摘要翻译： 运动引导装置包括可沿第一方向移动的第一可移动部件，可沿与第一方向不同的第二方向移动的第二可移动部件，并且用于通过气体压力引导第一可动部件沿第一方向的运动， 通过气体压力的协调，相对于垂直方向彼此独立地支撑第一和第二可动构件。 此外，引导件固定到基座，用于通过气体压力和永磁体的磁力的协作来引导第二可动构件沿第二方向的运动，第一线性电动机沿第一方向移动第一可动构件 相对于第二可动构件，第二线性马达使第二可动构件与第一可动构件沿第二方向移动。

    Apparatus for producing color filter with alignment error detection
    5.
    发明授权
    Apparatus for producing color filter with alignment error detection 失效
    用于生产带对准误差检测的滤色片的设备

    公开(公告)号：US5984470A

    公开(公告)日：1999-11-16

    申请号：US634409

    申请日：1996-04-18

    申请人： Shigeo Sakino ,  Kazuaki Masuda ,  Shinsuke Tsuruoka ,  Toshikazu Sakai

    发明人： Shigeo Sakino ,  Kazuaki Masuda ,  Shinsuke Tsuruoka ,  Toshikazu Sakai

    IPC分类号： B41J2/01 ,  B41J2/14 ,  G02B5/20 ,  B41J3/407 ,  B41J23/00

    CPC分类号： B41J2/14016 ,  B41J2/01 ,  G02B5/201 ,  B41J2202/09

    摘要： This invention relates to a highly precise and efficient color filter producing apparatus, which is provided with at least a set of drawing heads for respectively generating ink jets of red, green and blue colors, movement device for moving, with a substrate on which a color filter is to be formed by drawing with said ink jets, in a plane having a predetermined distance from the drawing heads, displacement detection device for detecting relative displacement between the substrate and the drawing heads in directions of six degrees of freedom, device for detecting the reaching position on the substrate of the ink jet discharged from the drawing head, and alignment device for effecting alignment between the substrate and the drawing heads in directions of six degrees of freedom, based on the results of detection of the reaching position and of the relative displacement between the substrate and the drawing head in directions of six degrees of freedom.

    摘要翻译： 本发明涉及一种高精度和高效率的滤色器制造装置，其具有至少一组用于分别产生红色，绿色和蓝色的喷墨的绘图头，用于移动的移动装置，基底上具有颜色 过滤器将通过用所述喷墨头在距离绘图头具有预定距离的平面中绘制而形成，位移检测装置用于检测基板和绘图头之间在六自由度方向上的相对位移的位移检测装置，用于检测 基于从绘图头排出的喷墨基板上的到达位置，以及基于达到位置和相对位置的检测结果，在六个自由度的方向上实现基板和绘图头之间的对准的对准装置 在六个自由度的方向上在基板和绘图头之间的位移。

    Moving/guiding apparatus and exposure apparatus using the same
    6.
    发明授权
    Moving/guiding apparatus and exposure apparatus using the same 有权
    移动/引导装置和使用其的曝光装置

    公开(公告)号：US07535552B2

    公开(公告)日：2009-05-19

    申请号：US10090163

    申请日：2002-03-05

    申请人： Shigeo Sakino

    发明人： Shigeo Sakino

    IPC分类号： G03B27/58 ,  G03B27/62 ,  G05G11/00

    CPC分类号： G03F7/70816 ,  G03F7/70716 ,  G03F7/70841 ,  Y10T74/20354

    摘要： A moving apparatus including a first movable body which moves in a first direction in a horizontal plane, a second movable body arranged in a location different from a location of the first movable body in a vertical direction, which moves in a second direction intersecting with the first direction in the horizontal plane, a first linear motor which moves the first movable body in the first direction, a second linear motor which moves the second movable body in the second direction, a third movable body which is moved in the first direction and is moved in the second direction, a vacuum container which puts the first, second and third movable bodies in a vacuum, driving force transmission rods, and a sealing mechanism for sealing the driving force transmission rods and the vacuum container.

    摘要翻译： 一种移动装置，包括：在水平面上沿第一方向移动的第一移动体;沿与第一移动体垂直方向交叉的第二方向移动的第二移动体， 在第一方向上移动第一可移动体的第一线性马达，沿第二方向移动第二可移动体的第二线性马达，沿第一方向移动的第三可移动体，并且是第一方向 沿第二方向移动的真空容器，其将第一，第二和第三移动体放置在真空中，驱动力传递杆和用于密封驱动力传递杆和真空容器的密封机构。