Power transistor with high voltage counter implant
    2.
    发明授权
    Power transistor with high voltage counter implant 有权
    功率晶体管与高压计数器植入

    公开(公告)号:US08673712B2

    公开(公告)日:2014-03-18

    申请号:US13554880

    申请日:2012-07-20

    摘要: Presented herein is a field effect transistor device, optionally a lateral power transistor, and a method for forming the same, comprising providing a substrate, creating a doped buried layer, and creating a primary well in the substrate on the buried layer. A drift drain may be created in the primary well and a counter implant region implanted in the primary well and between the drift drain and the buried layer. The primary well may comprise a first and second implant region with the second implant region at a depth less than the first. The counter implant may be at a depth between the first and second implant regions. The primary well and counter implant region may comprise dopants of the same conductivity type, or both p+-type dopants. A gate may be formed over a portion of a drift drain.

    摘要翻译: 这里呈现的是场效应晶体管器件,可选地是侧向功率晶体管及其形成方法,包括提供衬底,产生掺杂掩埋层,以及在掩埋层上的衬底中产生初级阱。 可以在主阱中产生漂移漏极,并且在初级阱中以及漂移漏极和埋层之间注入计数器注入区域。 主阱可以包括第一和第二注入区域,其中第二注入区域的深度小于第一注入区域。 计数器植入物可以处于第一和第二植入区域之间的深度。 主阱和计数器注入区域可以包括相同导电类型的掺杂剂,或者两种p +型掺杂剂。 栅极可以形成在漂移漏极的一部分上。

    Power Transistor with High Voltage Counter Implant
    3.
    发明申请
    Power Transistor with High Voltage Counter Implant 有权
    功率晶体管与高压计数器植入

    公开(公告)号:US20140021539A1

    公开(公告)日:2014-01-23

    申请号:US13554880

    申请日:2012-07-20

    IPC分类号: H01L29/78 H01L21/336

    摘要: Presented herein is a field effect transistor device, optionally a lateral power transistor, and a method for forming the same, comprising providing a substrate, creating a doped buried layer, and creating a primary well in the substrate on the buried layer. A drift drain may be created in the primary well and a counter implant region implanted in the primary well and between the drift drain and the buried layer. The primary well may comprise a first and second implant region with the second implant region at a depth less than the first. The counter implant may be at a depth between the first and second implant regions. The primary well and counter implant region may comprise dopants of the same conductivity type, or both p+-type dopants. A gate may be formed over a portion of a drift drain.

    摘要翻译: 这里呈现的是场效应晶体管器件,可选地是侧向功率晶体管及其形成方法,包括提供衬底,产生掺杂掩埋层,以及在掩埋层上的衬底中产生初级阱。 可以在主阱中产生漂移漏极,并且在初级阱中以及漂移漏极和埋层之间注入计数器注入区域。 主阱可以包括第一和第二注入区域,其中第二注入区域的深度小于第一注入区域。 计数器植入物可以处于第一和第二植入区域之间的深度。 主阱和计数器注入区域可以包括相同导电类型的掺杂剂,或者两种p +型掺杂剂。 栅极可以形成在漂移漏极的一部分上。