摘要:
An apparatus for processing a substrate through successive steps including spin-drying the substrate with a single processing facility while preventing the substrate from being contaminated by a substrate processing liquid, etc. The apparatus for processing a substrate includes a substrate holder for holding and rotating a substrate, a scattering prevention cup for circumferentially surrounding the substrate held by the substrate holder to prevent a substrate processing liquid supplied to the substrate from being scattered around, and a scattering prevention cup cleaner for cleaning an inner wall surface of the scattering prevention cup.
摘要:
A substrate processing apparatus and a substrate processing method is provided for performing a chemical liquid process, a cleaning process, a drying process, or the like while rotating a substrate such as a semiconductor wafer or a liquid crystal substrate. A substrate holding apparatus is provided for holding and rotating a substrate. The substrate processing apparatus for processing a substrate while supplying a fluid to the substrate includes a substrate holder for holding and rotating the substrate, and a holder suction unit for sucking the fluid from the substrate holder. The substrate holding apparatus includes a plurality of rollers which are brought into contact with an edge portion of a substrate so as to hold and rotate the substrate, and at least one moving mechanism for moving the rollers.
摘要:
The present invention relates to a substrate processing apparatus and a substrate processing method for performing a chemical liquid process, a cleaning process, a drying process, or the like while rotating a substrate such as a semiconductor wafer or a liquid crystal substrate. The present invention also relates to a substrate holding apparatus for holding and rotating a substrate. The substrate processing apparatus (1) for processing a substrate (W) while supplying a fluid to the substrate (W) includes a substrate holder (11) for holding and rotating the substrate (W), and a holder suction unit (24) for sucking the fluid from the substrate holder (11). The substrate holding apparatus includes a plurality of rollers (20) which are brought into contact with an edge portion of a substrate (W) so as to hold and rotate the substrate (W), and at least one moving mechanism (303a) for moving the rollers (20).
摘要:
The present invention is designed to reduce the space to install antennas and still increase the system capacity despite the state of the distribution of user terminals in cells. According to the radio communication method of the present invention, a radio base station apparatus selects precoding vectors from a codebook that is set in advance to be uneven with respect to the direction of the arrangement of antenna elements, based on communication quality information of the user terminals in the cell, multiplies signals to supply to each antenna element by the selected precoding vectors, and transmits the signals multiplied by the precoding vectors to the user terminals, and the user terminal receives a signal from the radio base station apparatus, extracts a reference signal from the received signal and measures channel quality; and feeds back a communication quality feedback signal, including the measured channel quality, to the radio base station apparatus, via the uplink.
摘要:
A disclosed base station apparatus for a mobile communication system includes a collection unit collecting measured data from one or more user equipment terminals with respect to each direction of arrival, the measured data including at least quality information of a downlink signal, a conversion unit converting the measured data into an evaluation value in accordance with a predetermined evaluation function, a deriving unit deriving a weight update amount determining directivity based on an angular distribution of the plural evaluation values, and a transmission unit transmitting a downlink signal weighted based on the weight update amount.
摘要:
A disclosed base station includes a communication unit configured to receive from a mobile station a first report signal including base station specification information specifying a base station, reception quality information indicating reception quality of a signal received from the specified base station, and change request information requesting to change communication quality between the mobile station and the specified base station; and an automatic area control unit configured to determine whether the base station is specified by the base station specification information, to obtain location information indicating the location of the mobile station if the base station is specified by the base station specification information, and to change at least one base station parameter based on the reception quality information and the location information to change the reception quality at the location of the mobile station.
摘要:
An electrical charging apparatus includes: an electrical charging control ECU that makes a determination about motion of a hybrid vehicle; and a charging-purpose plug which engages with the hybrid vehicle if the amount of movement of the vehicle is less than a predetermined value, and which releases the engagement with the hybrid vehicle if the amount of movement of the vehicle is greater than or equal to the predetermined value. According to the invention, even if the vehicle moves while being charged, the dragging of the charging cable is prevented.
摘要:
An image signal display device includes program data readout circuitry by which at least one second adjustment data not to be adjusted takes a proper value relative to a first adjustment data to be adjusted, in accordance with a predetermined relational expression. Data calculating circuitry is provided to calculate the second adjustment data in accordance with the predetermined relational expression, in response to a change in the first adjustment data. Data changing circuitry is provided to change the second adjustment data together with the first adjustment data. A memory is provided to store at least a coefficient data of the relational expression, wherein the memory can be read out from and written to. A digital/analog conversion circuit is provided to convert an output signal from the memory into an analog signal. Additionally, a display is provided to represent an output signal from the digital/analog conversion circuit as an image.
摘要:
The present invention is designed to execute adequate signaling even when individual user terminals perform communication to support separate types of communication, in MIMO transmission to use antennas having varying antenna configurations depending on the type of communication. A radio base station (200) has an antenna that has varying antenna configurations between at least two types of communication and that can transmit signals to all areas which the radio base station covers, in an antenna configuration to support at least one communication type 1, allocates radio resources to a downlink signal including capacities of a user terminal and a signal type to match a communication type, multiplexes a plurality of reference signals to be used in each communication type on the same resource block, generates precoding weights which allow the antenna to form a number of beams to match the communication type, and multiplies a downlink signal to supply to the antenna by the generated precoding weights.