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26 条记录 (耗时 0.029 秒)

    Water-processable photoresist compositions
    1.
    发明授权
    Water-processable photoresist compositions 失效
    可水加工的光致抗蚀剂组合物

    公开(公告)号：US06399273B1

    公开(公告)日：2002-06-04

    申请号：US09639382

    申请日：2000-08-14

    申请人： Shintaro Yamada ,  Timo Rager ,  C. Grant Willson

    发明人： Shintaro Yamada ,  Timo Rager ,  C. Grant Willson

    IPC分类号： G03F7039

    CPC分类号： G03F7/0392 ,  C08F8/12 ,  C08F212/14 ,  C08F2800/10 ,  C08F2800/20 ,  G03F7/0045 ,  G03F7/039 ,  G03F7/168 ,  Y10S430/106 ,  Y10S430/111 ,  Y10S430/12 ,  C08F122/14

    摘要： Water-processable positive-tone photoresists comprising a water-soluble polymer, wherein the polymer contains a heat-labile functional group that renders the polymer insoluble in water or an aqueous base upon heat treatment, and an acid-labile functional group that restores said water or aqueous base solubility to the polymer upon irradiation in the presence of a water-processable photoacid generator, are described. Also described are the methods of making such polymers and photoresists.

    摘要翻译： 包含水溶性聚合物的可水加工的正色调光致抗蚀剂，其中所述聚合物含有使聚合物不溶于水或热处理时的水性碱的热不稳定官能团，以及还原所述水的酸不稳定官能团 或在水可加工的光致酸产生剂的存在下照射时对基体的水溶性。 还描述了制备这种聚合物和光致抗蚀剂的方法。

    Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing
    3.
    发明授权
    Use of step and flash imprint lithography for direct imprinting of dielectric materials for dual damascene processing 失效
    使用步进和闪光压印光刻技术直接刻印用于双镶嵌加工的介质材料

    公开(公告)号：US07691275B2

    公开(公告)日：2010-04-06

    申请号：US11363071

    申请日：2006-02-27

    申请人： C. Grant Willson ,  Frank Palmieri ,  Yukio Nishimura ,  Stephen C. Johnson ,  Michael D. Stewart

    发明人： C. Grant Willson ,  Frank Palmieri ,  Yukio Nishimura ,  Stephen C. Johnson ,  Michael D. Stewart

    IPC分类号： H01L21/302

    CPC分类号： H01L21/76817 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  H01L21/76807 ,  H01L21/76828

    摘要： In some embodiments, the present invention is directed to methods that involve the combination of step-and-flash imprint lithography (SFIL) with a multi-tier template to simultaneously pattern multiple levels of, for example, an integrated circuit device. In such embodiments, the imprinted material generally does not serve or act as a simple etch mask or photoresist, but rather serves as the insulation between levels and lines, i.e., as a functional dielectric material. After imprinting and a multiple step curing process, the imprinted pattern is filled with metal, as in dual damascene processing. Typically, the two printed levels will comprise a “via level,” which is used to make electrical contact with the previously patterned under-level, and a “wiring level.” The present invention provides for the direct patterning of functional materials, which represents a significant departure from the traditional approach to microelectronics manufacturing.

    摘要翻译： 在一些实施例中，本发明涉及涉及步进和快速压印光刻（SFIL）与多层模板的组合以同时对例如集成电路器件的多个级别进行图案化的方法。 在这样的实施例中，压印材料通常不起到或用作简单的蚀刻掩模或光致抗蚀剂的作用，而是用作层和线之间的绝缘，即功能介电材料。 在印迹和多步固化过程之后，印刷图案充满金属，如在双镶嵌加工中。 通常，两个印刷层将包括用于与先前图案化的底层电接触的“通孔层”和“布线层”。本发明提供了功能材料的直接图案化，其代表 显着地偏离了传统的微电子制造方法。

    Image and part recognition technology
    6.
    发明授权
    Image and part recognition technology 失效
    图像和零件识别技术

    公开(公告)号：US07651850B2

    公开(公告)日：2010-01-26

    申请号：US10847635

    申请日：2004-05-17

    申请人： Jason E. Meiring ,  Timothy B. Michaelson ,  C. Grant Willson

    发明人： Jason E. Meiring ,  Timothy B. Michaelson ,  C. Grant Willson

    IPC分类号： C12M1/36

    CPC分类号： G06K7/1456 ,  G06K7/14 ,  G06K19/06037 ,  G06K19/06196

    摘要： A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems.

    摘要翻译： 用于识别图像的系统和方法可以包括使用对准标记。 识别的图像可以是来自阵列，字符，数字，形状和/或不规则形状的图案。 图案可以由诸如识别标记和/或传感器阵列的阵列中的元件形成。 更具体地，该系统和方法涉及通过考虑图像的取向来区分图像。 对准标记的尺寸和/或位置可以提供关于图像的取向的信息。 有关图像方向的信息可能会减少错误的识别。 图像识别的系统和方法可以与识别标记，生物传感器，微流体阵列和/或光学字符识别系统一起使用。

    Densely packed sensor arrays
    7.
    发明申请
    Densely packed sensor arrays 有权
    密集的传感器阵列

    公开(公告)号：US20090017271A1

    公开(公告)日：2009-01-15

    申请号：US11981282

    申请日：2007-10-31

    申请人： Jason E. Meiring ,  Timothy B. Michaelson ,  C. Grant Willson

    发明人： Jason E. Meiring ,  Timothy B. Michaelson ,  C. Grant Willson

    IPC分类号： B32B3/10 ,  B05D5/00

    CPC分类号： G06K7/14 ,  G06K7/1456 ,  G06K19/06037 ,  Y10T428/24802

    摘要： A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems.

    摘要翻译： 用于识别图像的系统和方法可以包括使用对准标记。 识别的图像可以是来自阵列，字符，数字，形状和/或不规则形状的图案。 图案可以由诸如识别标记和/或传感器阵列的阵列中的元件形成。 更具体地，该系统和方法涉及通过考虑图像的取向来区分图像。 对准标记的尺寸和/或位置可以提供关于图像的取向的信息。 有关图像方向的信息可能会减少错误的识别。 图像识别的系统和方法可以与识别标记，生物传感器，微流体阵列和/或光学字符识别系统一起使用。

    Image and part recognition technology
    9.
    发明授权
    Image and part recognition technology 有权
    图像和零件识别技术

    公开(公告)号：US07901945B2

    公开(公告)日：2011-03-08

    申请号：US12174245

    申请日：2008-07-16

    申请人： Jason E. Meiring ,  Timothy B. Michaelson ,  C. Grant Willson

    发明人： Jason E. Meiring ,  Timothy B. Michaelson ,  C. Grant Willson

    IPC分类号： G01N21/00

    CPC分类号： G06K7/1456 ,  G06K7/14 ,  G06K19/06037 ,  G06K19/06196

    摘要： A system and method for recognition of images may include the use of alignment markers. The image recognized may be a pattern from an array, a character, a number, a shape, and/or irregular shapes. The pattern may be formed by elements in an array such as an identification marking and/or a sensor array. More particularly, the system and method relate to discriminating between images by accounting for the orientation of the image. The size and/or location of alignment markers may provide information about the orientation of an image. Information about the orientation of an image may reduce false recognitions. The system and method of image recognition may be used with identification markings, biosensors, micro-fluidic arrays, and/or optical character recognition systems.

    摘要翻译： 用于识别图像的系统和方法可以包括使用对准标记。 识别的图像可以是来自阵列，字符，数字，形状和/或不规则形状的图案。 图案可以由诸如识别标记和/或传感器阵列的阵列中的元件形成。 更具体地，该系统和方法涉及通过考虑图像的取向来区分图像。 对准标记的尺寸和/或位置可以提供关于图像的取向的信息。 有关图像方向的信息可能会减少错误的识别。 图像识别的系统和方法可以与识别标记，生物传感器，微流体阵列和/或光学字符识别系统一起使用。

    Use of mesoscale self-assembly and recognition to effect delivery of sensing reagent for arrayed sensors
    10.
    发明申请
    Use of mesoscale self-assembly and recognition to effect delivery of sensing reagent for arrayed sensors 审中-公开
    使用中尺度自组装和识别来实现阵列传感器传感试剂的传递

    公开(公告)号：US20080160632A1

    公开(公告)日：2008-07-03

    申请号：US11981485

    申请日：2007-10-31

    申请人： C. Grant Willson ,  Michael Pishko ,  David M. Johnson ,  Ben Rathsack ,  Zachary Hogan

    发明人： C. Grant Willson ,  Michael Pishko ,  David M. Johnson ,  Ben Rathsack ,  Zachary Hogan

    IPC分类号： G01N21/62 ,  G01N33/00

    CPC分类号： G01N21/6452 ,  G01N21/253 ,  G01N21/6454 ,  G01N2021/6482

    摘要： A system and method for the detection of analytes in a fluid, in one embodiment, includes a light source, a sensor array, sensing elements, and a detector. More particularly, the system and method relate to discriminating mixtures of analytes in a fluid. The sensor array is formed from a supporting member into which a plurality of sensing elements may be formed. The sensing element may have a predefined shape. The sensing element may be configured to produce a signal when the sensing element interacts with the analyte. In one embodiment, the identity of the analyte may be determined by the detection of the signal and the shape of the sensing element. Using pattern recognition techniques, the analytes within a multi-analyte fluid may be characterized.

    摘要翻译： 在一个实施例中，用于检测流体中分析物的系统和方法包括光源，传感器阵列，感测元件和检测器。 更具体地，该系统和方法涉及区分流体中分析物的混合物。 传感器阵列由可以形成多个感测元件的支撑构件形成。 感测元件可以具有预定形状。 感测元件可以被配置为当感测元件与分析物相互作用时产生信号。 在一个实施例中，可以通过检测信号和感测元件的形状来确定分析物的身份。 使用模式识别技术，可以对多分析物流体中的分析物进行表征。