公开(公告)号：US09293293B2

公开(公告)日：2016-03-22

申请号：US14240333

申请日：2012-05-22

申请人： Shun-ichi Watanabe ,  Takashi Onishi ,  Yoichi Ose ,  Kuniyasu Nakamura ,  Masaru Moriyama ,  Tomonori Suzuki

发明人： Shun-ichi Watanabe ,  Takashi Onishi ,  Yoichi Ose ,  Kuniyasu Nakamura ,  Masaru Moriyama ,  Tomonori Suzuki

IPC分类号： A61N5/00 ,  H01J37/065

CPC分类号： H01J37/065 ,  H01J2237/0206 ,  H01J2237/0213 ,  H01J2237/026 ,  H01J2237/045 ,  H01J2237/06316

摘要： The objective of the present application is to suppress the occurrence of flares and to reduce the amount of secondary electrons arising at an aperture provided to the lead-out electrode of an electron gun. By coating a thin film having a low rate of secondary electron emission such as carbon onto the aperture of a lead-out electrode closest to an electron source in an electron gun, it is possible to reduce the amount of secondary electrons arising. Secondary electrons arising at the lead-out electrode, are reduced, and so as a result, flare is reduced. By incorporating two apertures to the lead-out electrode, and applying to the two apertures a potential that is equipotential to the lead-out electrode, it is possible to eliminate an electric field from seeping from under to over the lead-out electrode. Secondary electrons arising when an electron beam impacts the lead-out electrode cease to incur force in the direction of passage from the lead-out electrode, and consequently there is a reduction in flares.

摘要翻译： 本申请的目的是抑制耀斑的发生和减少在设置到电子枪的引出电极的孔处产生的二次电子的量。 通过在电子枪中最接近电子源的引出电极的孔径上涂布碳二次电子发射率低的薄膜，可以减少二次电子的产生量。 在引出电极处产生的二次电子减少，结果是减少了耀斑。 通过在引出电极上并入两个孔，并且向两个孔施加与引出电极等电位的电位，可以消除从下面到引出电极渗出的电场。 当电子束撞击引出电极时产生的二次电子停止从引出电极通过的方向上产生力，因此发光减少。

公开(公告)号：US20140197336A1

公开(公告)日：2014-07-17

申请号：US14240333

申请日：2012-05-22

申请人： Shun-ichi Watanabe ,  Takashi Onishi ,  Yoichi Ose ,  Kuniyasu Nakamura ,  Masaru Moriyama ,  Tomonori Suzuki

发明人： Shun-ichi Watanabe ,  Takashi Onishi ,  Yoichi Ose ,  Kuniyasu Nakamura ,  Masaru Moriyama ,  Tomonori Suzuki

IPC分类号： H01J37/065

CPC分类号： H01J37/065 ,  H01J2237/0206 ,  H01J2237/0213 ,  H01J2237/026 ,  H01J2237/045 ,  H01J2237/06316

摘要： The objective of the present application is to suppress the occurrence of flares and to reduce the amount of secondary electrons arising at an aperture provided to the lead-out electrode of an electron gun. By coating a thin film having a low rate of secondary electron emission such as carbon onto the aperture of a lead-out electrode closest to an electron source in an electron gun, it is possible to reduce the amount of secondary electrons arising. Secondary electrons arising at the lead-out electrode, are reduced, and so as a result, flare is reduced. By incorporating two apertures to the lead-out electrode, and applying to the two apertures a potential that is equipotential to the lead-out electrode, it is possible to eliminate an electric field from seeping from under to over the lead-out electrode. Secondary electrons arising when an electron beam impacts the lead-out electrode cease to incur force in the direction of passage from the lead-out electrode, and consequently there is a reduction in flares.

摘要翻译： 本申请的目的是抑制耀斑的发生和减少在设置到电子枪的引出电极的孔处产生的二次电子的量。 通过在电子枪中最接近电子源的引出电极的孔径上涂布碳二次电子发射率低的薄膜，可以减少二次电子的产生量。 在引出电极处产生的二次电子减少，结果是减少了耀斑。 通过在引出电极上并入两个孔，并且向两个孔施加与引出电极等电位的电位，可以消除从下面到引出电极渗出的电场。 当电子束撞击引出电极时产生的二次电子停止从引出电极通过的方向上产生力，因此发光减少。

公开(公告)号：US20130112875A1

公开(公告)日：2013-05-09

申请号：US13808134

申请日：2011-07-11

申请人： Kuniyasu Nakamura ,  Hiromi Inada

发明人： Kuniyasu Nakamura ,  Hiromi Inada

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/263 ,  H01J37/28 ,  H01J2237/0451 ,  H01J2237/1501 ,  H01J2237/2802

摘要： A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.

摘要翻译： 配备有像差校正器的扫描透射电子显微镜能够自动地将会聚孔的位置与光轴的中心对齐，而与操作者的技术和经验无关。 扫描透射电子显微镜系统包括电子源; 聚光透镜，被配置为会聚从电子源发射的电子束; 配置成使电子束对样品进行扫描的偏转器; 被配置为校正电子束的像差的像差校正装置; 收敛孔，被配置为确定电子束的收敛角; 以及检测器，其被配置为检测通过所述样品的衍射的电子。 该系统获取通过通过样本的电子束形成的罗尼克拉姆的对比度的信息，并且基于该信息确定会聚孔径的位置。

公开(公告)号：US4160074A

公开(公告)日：1979-07-03

申请号：US872678

申请日：1978-01-26

申请人： Hiroshi Komada ,  Kuniyasu Nakamura ,  Ryoichi Miyagaki

发明人： Hiroshi Komada ,  Kuniyasu Nakamura ,  Ryoichi Miyagaki

IPC分类号： B29C33/30 ,  B29C44/58 ,  C08J9/00

CPC分类号： C08J9/00 ,  B29C44/10 ,  B29C44/586 ,  B29C33/30 ,  B29K2075/00 ,  C08J2375/04 ,  Y10S264/84

摘要： A polyisocyanate foam having isotropic cells is manufactured by a foaming operation in an apparatus comprising a mold composed of side walls capable of extending and returning, or folding and unfolding, in directions perpendicular to the free rising direction. Mold extending means are provided to spread out the side walls of the mold perpendicular to the free rising direction. While the foamable composition is in a creamy state, it is allowed to rise freely in one direction (the free rising direction), while the side walls of the mold are in their folded condition, until a height detecting means is actuated. Then the side walls of the mold are unfolded to enlarge the cross-sectional area of the mold so that the foamable composition is then permitted further to expand freely in directions perpendicular to the initial free rising direction, until the foamable composition is transformed from the creamy state to the tack-free state, whereby a polyisocyanate foam product having essentially spherical isotropic cells is obtained.

摘要翻译： 具有各向同性电池的多异氰酸酯泡沫体通过发泡操作在包括由能够在垂直于自由上升方向的方向上延伸和返回或折叠和展开的侧壁构成的模具的装置中制造。 提供模延伸装置以垂直于自由上升方向展开模具的侧壁。 当可发泡组合物处于乳状状态时，允许其在一个方向（自由上升方向）上自由上升，同时模具的侧壁处于折叠状态，直到高度检测装置被致动。 然后模具的侧壁展开以扩大模具的横截面积，从而允许可发泡组合物进一步在垂直于初始自由上升方向的方向上自由扩张，直到可发泡组合物从奶油状 状态为无粘性状态，由此获得具有基本上球形各向同性电池的多异氰酸酯泡沫产品。

公开(公告)号：US07372029B2

公开(公告)日：2008-05-13

申请号：US11806120

申请日：2007-05-30

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G21K7/00 ,  G01N23/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.

摘要翻译： 扫描透射电子显微镜，用于扫描样品上的一次电子束，通过检测器检测来自样品的透射电子，并形成透射电子的图像。 扫描透射电子显微镜包括能够将透射电子束切换到光轴预定量的电子光学系统，以及用于基于发射的电子相对于检测器的位移来确定量的确定单元 通过扫描一次电子束。

公开(公告)号：US20050285037A1

公开(公告)日：2005-12-29

申请号：US11157817

申请日：2005-06-22

申请人： Kuniyasu Nakamura ,  Shunichi Watanabe

发明人： Kuniyasu Nakamura ,  Shunichi Watanabe

IPC分类号： G01N23/00

CPC分类号： H01J37/04 ,  H01J37/05 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/04922 ,  H01J2237/057 ,  H01J2237/2802

摘要： The present invention provides a scanning transmission electron microscope which is capable of setting an acceptance angular range of an energy loss spectrometer independent of an acceptance angular range of a scattered electron detector, and makes it unnecessary to change a condition for the energy loss spectrometer with respect to a change in the acceptance angular range of the scattered electron detector. In such a scanning transmission electron microscope equipped with the energy loss spectrometer, a first rotationally symmetric type magnetic lens for setting an acceptance angle of an electron scattered by a specimen is disposed above the scattered electron detector for detecting the electron, a second rotationally symmetric type magnetic lens is disposed between the scattered electron detector and the energy loss spectrometer, the first rotationally symmetric type magnetic lens sets the acceptance angle of the scattered electron, and the second rotationally symmetric type magnetic lens sets an object point of the energy loss spectrometer.

摘要翻译： 本发明提供一种扫描透射电子显微镜，其能够设置与散射电子检测器的接受角度范围无关的能量损失光谱仪的可接受角度范围，并且不需要相对于能量损失光谱仪的条件改变 到散射电子检测器的接受角度范围的变化。 在配备有能量损失光谱仪的扫描透射电子显微镜中，设置用于设定被试样散射的电子的受理角的第一旋转对称型磁性透镜设置在用于检测电子的散射电子检测器的上方，第二旋转对称型 磁性透镜设置在散射电子检测器和能量损失光谱仪之间，第一旋转对称型磁性透镜设定散射电子的接受角，第二旋转对称型磁性透镜设定能量损失光谱仪的目标点。

公开(公告)号：US06548811B1

公开(公告)日：2003-04-15

申请号：US09504044

申请日：2000-02-14

申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi

发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi

IPC分类号： H01J3704

CPC分类号： H01J37/26 ,  H01J37/295 ,  H01J2237/1506

摘要： In order to detect automatically at a high speed and a high probability rate the crystal defects and shape abnormalities in a specimen over a wide area of said specimen, a transmission electron microscope apparatus is employed which has an electron source, a first electrostatic lens, a second electrostatic lens, a third electrostatic lens, a first condenser lens, a second condenser lens, a pre-field objective lens, a deflection coil, a first projection lens, a second projection lens, a third projection lens, a first image shift coil, a second image shift coil, and an image acquisition apparatus, etc. The detection of crystal defects is made definite by observing the specimen image at the same location by multiple variations of the electron beam incidence direction using the deflection coil. In addition, the crystal defects are detected at a high speed by linking the deflection ratios of the deflection coil and of the first image shift coil and the second image shift coil, and carrying out compensation so that image shifts on the image acquisition apparatus due to the multiple electron beam incidence directions are mutually cancelled.

摘要翻译： 为了在所述样本的广泛区域上以高速度和高概率率自动检测样品中的晶体缺陷和形状异常，使用透射型电子显微镜装置，其具有电子源，第一静电透镜， 第二静电透镜，第三静电透镜，第一聚光透镜，第二聚光透镜，预场物镜，偏转线圈，第一投影透镜，第二投影透镜，第三投影透镜，第一图像移动线圈 ，第二图像移位线圈和图像采集装置等。通过使用偏转线圈通过电子束入射方向的多个变化在相同位置观察样本图像来确定晶体缺陷的检测。 此外，通过连接偏转线圈和第一图像移位线圈与第二图像移位线圈的偏转比，高速检测晶体缺陷，并执行补偿，使得图像在图像采集装置上的偏移由于 多个电子束入射方向相互抵消。

公开(公告)号：US08710438B2

公开(公告)日：2014-04-29

申请号：US13808134

申请日：2011-07-11

申请人： Kuniyasu Nakamura ,  Hiromi Inada

发明人： Kuniyasu Nakamura ,  Hiromi Inada

IPC分类号： G21K7/00 ,  H01J37/26 ,  H01J37/28 ,  G01N23/00

CPC分类号： H01J37/263 ,  H01J37/28 ,  H01J2237/0451 ,  H01J2237/1501 ,  H01J2237/2802

摘要： A scanning transmission electron microscope equipped with an aberration corrector is capable of automatically aligning the position of a convergence aperture with the center of an optical axis irrespective of skill and experience of an operator. The scanning transmission electron microscope system includes an electron source; a condenser lens configured to converge an electron beam emitted from the electron source; a deflector configured to cause the electron beam to perform scanning on a sample; an aberration correction device configured to correct an aberration of the electron beam; a convergence aperture configured to determine a convergent angle of the electron beam; and a detector configured to detect electrons passing through or diffracted by the sample. The system acquires information on contrast of a Ronchigram formed by the electron beam passing through the sample, and determines a position of the convergence aperture on the basis of the information.

摘要翻译： 配备有像差校正器的扫描透射电子显微镜能够自动地将会聚孔的位置与光轴的中心对齐，而与操作者的技术和经验无关。 扫描透射电子显微镜系统包括电子源; 聚光透镜，被配置为会聚从电子源发射的电子束; 配置成使电子束对样品进行扫描的偏转器; 被配置为校正电子束的像差的像差校正装置; 收敛孔，被配置为确定电子束的收敛角; 以及检测器，其被配置为检测通过所述样品的衍射的电子。 该系统获取通过通过样本的电子束形成的罗尼克拉姆的对比度的信息，并且基于该信息确定会聚孔径的位置。

公开(公告)号：US20070158568A1

公开(公告)日：2007-07-12

申请号：US11645567

申请日：2006-12-27

申请人： Taisuke Nakamura ,  Kuniyasu Nakamura

发明人： Taisuke Nakamura ,  Kuniyasu Nakamura

IPC分类号： G21K7/00

CPC分类号： H01J37/153 ,  H01J37/222 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/1534 ,  H01J2237/223 ,  H01J2237/2802

摘要： In the type of scanning transmission electron microscopes carrying an aberration corrector, a method of assuring more simplified and manipulatable adjustment of the corrector and a scanning transmission electron microscope having that function are provided. A Ronchigram image is acquired using a spherical standard specimen and parameters necessary for the adjustment are acquired from the thus obtained Ronchigram.

摘要翻译： 在携带像差校正器的扫描透射电子显微镜的类型中，提供了确保校正器的更简化和可操作调节的方法以及具有该功能的扫描透射电子显微镜。 使用球形标准样品获得Ronchigram图像，并且从由此获得的Ronchigram获得调整所需的参数。

公开(公告)号：US07227144B2

公开(公告)日：2007-06-05

申请号：US11328173

申请日：2006-01-10

申请人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

发明人： Ruriko Tsuneta ,  Masanari Koguchi ,  Takahito Hashimoto ,  Kuniyasu Nakamura

IPC分类号： G21K7/00

CPC分类号： H01J37/1474 ,  H01J37/2955 ,  H01J2237/1501 ,  H01J2237/221 ,  H01J2237/2802

摘要： A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.

摘要翻译： 扫描透射电子显微镜，其增强用于消除电子检测器上的透射电子束位置变化的去扫描线圈的校正精度。 这里，这种透射电子束位置变化伴随着由扫描线圈引起的样品上的一次电子束位置变化。 首先，对扫描线圈的控制被数字化。 此外，在与由该数字化产生的数字控制信号同步的同时，在FM（2）中登记的去扫描表中的值被输出到去扫描线圈。 这里，如下创建去扫描台：使用相机拍摄激活扫描线圈和去扫描线圈之前和之后的衍射图像。 然后，基于通过图像处理分析衍射图像的合成位移量获得的结果，生成去扫描表。