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1.发明申请VERTICALLY INTEGRATED 3-AXIS MEMS ANGULAR ACCELEROMETER WITH INTEGRATED ELECTRONICS 有权具有集成电子的垂直集成三轴MEMS角锥加速度计公开(公告)号：US20110197677A1
公开(公告)日：2011-08-18
申请号：US13096732
申请日：2011-04-28
IPC分类号： G01P15/08
CPC分类号： G01P15/0888 , B60R2021/01327 , G01P15/0802 , G01P15/125 , G01P15/18
摘要： Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.
摘要翻译： 公开了用于测量围绕三个相互正交的轴X，Y，Z或围绕这些轴的组合的角加速度的传感器。 传感器包括传感器子组件。 传感器子组件还包括基本上平行于X-Y感测平面的基座; 设置在XY感测平面中并被约束以基于X和/或Y和/或Z 1至少一个连杆旋转的检测质量体，并响应于围绕X和/或Y的角加速度和/ 或Z方向。 最后，传感器在基板处包括至少一个电极或垂直于基板，以及至少一个传感器，用于响应于角加速度的传感器子组件的每个感测方向。 通过调整弯曲和电极的配置可实现多轴检测。
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2.发明申请Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics 有权垂直集成的3轴MEMS角加速度计与集成电子公开(公告)号：US20090145225A1
公开(公告)日：2009-06-11
申请号：US11953762
申请日：2007-12-10
IPC分类号： G01P15/02
CPC分类号： G01P15/0888 , B60R2021/01327 , G01P15/0802 , G01P15/125 , G01P15/18
摘要： Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.
摘要翻译： 公开了用于测量围绕三个相互正交的轴X，Y，Z或围绕这些轴的组合的角加速度的传感器。 传感器包括传感器子组件。 传感器子组件还包括基本上平行于X-Y感测平面的基座; 设置在XY感测平面中并被约束以基于X和/或Y和/或Z 1至少一个连杆旋转的检测质量体，并响应于围绕X和/或Y的角加速度和/ 或Z方向。 最后，传感器在基板处包括至少一个电极或垂直于基板，以及至少一个传感器，用于响应于角加速度的传感器子组件的每个感测方向。 通过调整弯曲和电极的配置可实现多轴检测。
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3.发明申请HERMETICALLY SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT WITH VERTICALLY INTEGRATED ELECTRONICS 审中-公开具有暴露于垂直集成电子环境的部件的密封式MEMS器件公开(公告)号：US20130001550A1
公开(公告)日：2013-01-03
申请号：US13536798
申请日：2012-06-28
申请人： Joseph SEEGER , Igor TCHERTKOV , Hasan AKYOL , Goksen G. YARALIOGLU , Steven S. NASIRI , Ilya GURIN
发明人： Joseph SEEGER , Igor TCHERTKOV , Hasan AKYOL , Goksen G. YARALIOGLU , Steven S. NASIRI , Ilya GURIN
CPC分类号： G01L9/0073 , B81B7/02 , B81B2201/025 , B81B2201/0257 , B81B2201/0264 , B81B2207/015 , B81C99/0045 , B81C2203/0771 , G01L1/142 , G01L5/223 , G01L19/0636 , G01L27/007 , G01P15/125 , G01P2015/084 , H01L2924/16235
摘要： A system and method for providing a MEMS device with integrated electronics are disclosed. The MEMS device comprises an integrated circuit substrate and a MEMS subassembly coupled to the integrated circuit substrate. The integrated circuit substrate includes at least one circuit coupled to at least one fixed electrode. The MEMS subassembly includes at least one standoff formed by a lithographic process, a flexible plate with a top surface and a bottom surface, and a MEMS electrode coupled to the flexible plate and electrically coupled to the at least one standoff. A force acting on the flexible plate causes a change in a gap between the MEMS electrode and the at least one fixed electrode.
摘要翻译： 公开了一种用于向MEMS器件提供集成电子器件的系统和方法。 MEMS器件包括集成电路基板和耦合到集成电路基板的MEMS子组件。 集成电路基板包括耦合到至少一个固定电极的至少一个电路。 MEMS子组件包括由光刻工艺形成的至少一个支座，具有顶表面和底表面的柔性板，以及耦合到柔性板并电耦合到至少一个支座的MEMS电极。 作用在柔性板上的力导致MEMS电极与至少一个固定电极之间的间隙的变化。
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4.发明申请INTEGRATED MOTION PROCESSING UNIT (MPU) WITH MEMS INERTIAL SENSING AND EMBEDDED DIGITAL ELECTRONICS 审中-公开集成运动处理单元（MPU），具有MEMS惯性感应和嵌入式数字电子公开(公告)号：US20120253738A1
公开(公告)日：2012-10-04
申请号：US13492717
申请日：2012-06-08
申请人： Steven S. NASIRI , David SACHS , Babak TAHERI
发明人： Steven S. NASIRI , David SACHS , Babak TAHERI
IPC分类号： G06F15/00
CPC分类号： G01C19/5776 , G01C19/5769 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0845 , G01P2015/0865 , G01P2015/088
摘要： A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.
摘要翻译： 一种可操作以安装在电路板表面上的模块。 该模块包括线性加速度计，以提供对应于至少一个轴线性加速度的测量的第一测量输出，以及第一旋转传感器，其可操作以提供对应于围绕至少一个轴线的旋转测量的第二测量输出。 加速度计和第一旋转传感器形成在第一基板上。 该模块还包括专用集成电路（ASIC），用于接收来自线性加速度计的第一测量输出和来自第一旋转传感器的第二测量输出。 ASIC包括模数转换器并且被实现在第二基板上。 第一衬底垂直地结合到第二衬底。
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5.发明申请Integrated Motion Processing Unit (MPU) With MEMS Inertial Sensing And Embedded Digital Electronics 有权集成运动处理单元（MPU）与MEMS惯性感应和嵌入式数字电子公开(公告)号：US20090007661A1
公开(公告)日：2009-01-08
申请号：US11774488
申请日：2007-07-06
申请人： Steven S. NASIRI , David Sachs , Babak Taheri
发明人： Steven S. NASIRI , David Sachs , Babak Taheri
CPC分类号： G01C19/5776 , G01C19/5769 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0845 , G01P2015/0865 , G01P2015/088
摘要： A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.
摘要翻译： 一种可操作以安装在电路板表面上的模块。 该模块包括线性加速度计，以提供对应于至少一个轴线性加速度的测量的第一测量输出，以及第一旋转传感器，其可操作以提供对应于围绕至少一个轴线的旋转测量的第二测量输出。 加速度计和第一旋转传感器形成在第一基板上。 该模块还包括专用集成电路（ASIC），用于接收来自线性加速度计的第一测量输出和来自第一旋转传感器的第二测量输出。 ASIC包括模数转换器并且被实现在第二基板上。 第一衬底垂直地结合到第二衬底。
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6.发明申请X-Y AXIS DUAL-MASS TUNING FORK GYROSCOPE WITH VERTICALLY INTEGRATED ELECTRONICS AND WAFER-SCALE HERMETIC PACKAGING 有权X-Y AXIS双质量调音枪具有垂直集成电子和水平放大包装公开(公告)号：US20100132460A1
公开(公告)日：2010-06-03
申请号：US12621463
申请日：2009-11-18
IPC分类号： G01C19/56
CPC分类号： G01C19/56 , G01C19/5712 , G01C19/5719 , G01C19/574
摘要： An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
摘要翻译： 角速度传感器具有横向设置在X-Y平面中并间接连接到框架的两个质量块。 两个质量通过联动使得它们必须沿着相反方向移动。传感器绕Y轴的角速度可以通过将两个质量驱动成Z向反相振荡并测量角振荡幅度来感测 传给框架。 在优选实施例中，角速度传感器由体MEMS陀螺仪晶片，盖晶片和参考晶片制成。 在另一优选实施例中，晶片组件提供了质量和周围环境之间的密封屏障。
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7.发明申请PROCESS FOR A SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIRONMENT 审中-公开具有暴露于环境的部件的密封MEMS器件的工艺公开(公告)号：US20130001710A1
公开(公告)日：2013-01-03
申请号：US13536896
申请日：2012-06-28
CPC分类号： H01L23/10 , B81B2201/0264 , B81B2201/047 , B81B2207/115 , B81C1/00238 , B81C2203/0109 , B81C2203/0145 , B81C2203/0792 , G01P15/0802 , G01P15/125 , G02B26/0833 , H01L2224/48091 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要： A method and system for providing a MEMS device with a portion exposed to an outside environment are disclosed. The method comprises bonding a handle wafer to a device wafer to form a MEMS substrate with a dielectric layer disposed between the handle and device wafers. The method includes lithographically defining at least one standoff on the device wafer and bonding the at least one standoff to an integrated circuit substrate to form a sealed cavity between the MEMS substrate and the integrated circuit substrate. The method includes defining at least one opening in the handle wafer, standoff, or integrated circuit substrate to expose a portion of the to expose a portion of the device wafer to the outside environment.
摘要翻译： 公开了一种用于向MEMS器件提供暴露于外部环境的部分的方法和系统。 该方法包括将处理晶片结合到器件晶片以形成具有设置在手柄和器件晶片之间的介电层的MEMS衬底。 该方法包括光刻地限定器件晶片上的至少一个间隔，并将至少一个支架结合到集成电路衬底，以在MEMS衬底和集成电路衬底之间形成密封空腔。 该方法包括在处理晶片，支座或集成电路基板中限定至少一个开口，以暴露一部分将器件晶片的一部分暴露于外部环境。
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公开(公告)号：US20120235297A1
公开(公告)日：2012-09-20
申请号：US13455494
申请日：2012-04-25
申请人： Michael J. DANEMAN , Steven S. NASIRI , Martin LIM
发明人： Michael J. DANEMAN , Steven S. NASIRI , Martin LIM
IPC分类号： H01L23/498
CPC分类号： A45D27/42 , B81C1/00238 , B81C2203/0792 , H01L21/76898
摘要： A MEMS device is disclosed. The MEMS device comprises a MEMS substrate and a CMOS substrate having a front surface, a back surface and one or more metallization layers. The front surface being bonded to the MEMS substrate. The MEMS device includes one or more conductive features on the back surface of the CMOS substrate and electrical connections between the one or more metallization layers and the one or more conductive features.
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公开(公告)号：US20100290769A1
公开(公告)日：2010-11-18
申请号：US12726244
申请日：2010-03-17
申请人： Steven S. NASIRI , Mansur KIADEH , Yuan ZHENG , Shang-Hung LIN , Sheena SHI
发明人： Steven S. NASIRI , Mansur KIADEH , Yuan ZHENG , Shang-Hung LIN , Sheena SHI
IPC分类号： G03B17/00
CPC分类号： G03B17/00
摘要： An optical image stabilization system for a camera module is disclosed. The stabilization system comprises a voice coil motor (VCM), at least one digital gyroscope for receiving signals from the VCM, and an angular velocity sensor for receiving signals from the digital gyroscope and outputting an angular position error signal. The stabilization system further comprises signal processing logic for receiving the error signal, and comparing the error signal to a reference signal and providing a stabilized image based upon that comparison, wherein the hard-coded logic, digital gyroscope and rate and position sensor resides on the same chip.
摘要翻译： 公开了一种用于相机模块的光学图像稳定系统。 稳定系统包括音圈电机（VCM），用于接收来自VCM的信号的至少一个数字陀螺仪和用于从数字陀螺仪接收信号并输出角位置误差信号的角速度传感器。 稳定系统还包括用于接收误差信号的信号处理逻辑，以及将误差信号与参考信号进行比较并基于该比较提供稳定图像，其中硬编码逻辑，数字陀螺仪和速率和位置传感器位于 相同的芯片
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公开(公告)号：US20090184849A1
公开(公告)日：2009-07-23
申请号：US12106921
申请日：2008-04-21
申请人： Steven S. NASIRI , Joseph Jiang , David Sachs
发明人： Steven S. NASIRI , Joseph Jiang , David Sachs
CPC分类号： G06F3/0346 , A63F13/211 , A63F2300/105 , A63F2300/209 , B81B7/02 , G01C19/42 , G01P15/02 , G06F3/017 , G06F3/038
摘要： Interfacing application programs and motion sensors of a device. In one aspect, a high-level command is received from an application program running on a motion sensing device, where the application program implements one of multiple different types of applications available for use on the device. The high-level command requests high-level information derived from the output of motion sensors of the device that include rotational motion sensors and linear motion sensors. The command is translated to cause low-level processing of motion sensor data output by the motion sensors, the low-level processing following requirements of the type of application and determining the high-level information in response to the command. The application program is ignorant of the low-level processing, and the high-level information is provided to the application program.
摘要翻译： 接口应用程序和设备的运动传感器。 在一个方面，从运动感测装置上运行的应用程序接收高级命令，其中应用程序实现可用于设备上的多种不同类型的应用中的一种。 高级命令请求从包括旋转运动传感器和线性运动传感器的装置的运动传感器的输出得到的高级信息。 该命令被转换为对运动传感器输出的运动传感器数据进行低级处理，按照应用类型的要求进行低级处理，并根据命令确定高级信息。 应用程序对低级处理无知，向应用程序提供高级信息。
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