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公开(公告)号：US5630932A
公开(公告)日：1997-05-20
申请号：US524054
申请日：1995-09-06
CPC分类号： G01Q70/16 , B82Y35/00 , Y10S977/875 , Y10S977/881 , Y10S977/891
摘要： A tip and substrate preparation system for use with scanning probe microscopes (SPMs) includes a scanning tunneling microscope (STM) tip maker, STM tip coater, a substrate treatment method for producing clean, flat gold substrates for STM use and methods for preparing chemically activated substrates for use with an atomic force microscope (AFM). The tip maker includes a coater and an etcher which are preferably controlled by electronic controllers. The etcher provides fully automatic tip etching in a two-stage process in sodium hydroxide (NaOH) solution, permitting platinum alloys to be etched without the use of cyanide-containing chemicals. The coater is used to insulate the tips with soft polymer coatings so as to ensure very low tip leakage current (on the order of about 1 pA typical). The substrate treatment device comprises a quartz plate and a quartz torch for annealing substrates in a hydrogen flame. The chemically activated substrates for atomic force microscopy permit the surface of mica to be modified at will so as to be hydrophobic, hydrophilic, positively or negatively charged.
摘要翻译： 用于扫描探针显微镜（SPM）的尖端和底物制备系统包括扫描隧道显微镜（STM）尖端制造器，STM尖端涂布机，用于制造用于STM的清洁的平坦金基底的基底处理方法和用于制备化学活化的方法 用于原子力显微镜（AFM）的底物。 尖端制造器包括优选由电子控制器控制的涂布机和蚀刻机。 蚀刻器在氢氧化钠（NaOH）溶液中在两步法中提供全自动尖端蚀刻，允许在不使用含氰化合物的情况下对铂合金进行蚀刻。 涂层机用于将尖端与柔性聚合物涂层绝缘，以确保极低的尖端泄漏电流（典型值约为1 pA）。 基板处理装置包括用于在氢火焰中退火基板的石英板和石英手电筒。 用于原子力显微镜的化学活化的底物允许云母的表面随意改性，以便是疏水性的，亲水的，带正电荷或带负电荷的。
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公开(公告)号：US6017590A
公开(公告)日：2000-01-25
申请号：US760757
申请日：1996-12-05
CPC分类号： G01Q70/16 , B82Y35/00 , Y10S977/875 , Y10S977/881 , Y10S977/891
摘要： A tip coating system for use with scanning tunneling microscope (STM) tips. The tip coating system includes a tip holder, a plate having a slot for receiving the tip and for holding a coating material, a heater for heating the coating material into a molten blob, a micropositioner for displacing the plate to and from the tip and for moving the tip within the slot so that selected portions of the tip contact the molten blob of coating material. The tip coating system is preferably controlled by electronic controllers, including a temperature controller for the heater. The tip coating system is used to insulate the tips with soft polymer coating material to ensure very low tip leakage current (on the order of about 1 pA typical).
摘要翻译： 用于扫描隧道显微镜（STM）尖端的尖端涂层系统。 尖端涂覆系统包括：刀片保持器，具有用于接收尖端并用于保持涂层材料的槽的板，用于将涂层材料加热成熔融斑块的加热器，用于使板移动到尖端的微定位器， 将尖端移动到狭槽内，使得尖端的选定部分接触熔融的涂层材料块。 尖端涂覆系统优选地由电子控制器控制，包括用于加热器的温度控制器。 尖端涂层系统用于将尖端与软质聚合物涂层材料绝缘，以确保非常低的尖端泄漏电流（典型值约为1 pA）。
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公开(公告)号：US5821545A
公开(公告)日：1998-10-13
申请号：US729395
申请日：1996-10-11
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q30/10 , H01J2237/2001 , H01J2237/2818 , Y10S977/871
摘要： A heater for use in heating a sample stage of a microscope such as a scanning probe microscope is bonded to a sample stage which sits on a tube of a ceramic thermal insulator which is, in turn, mounted within or part of a tube of the same material. This re-entrant design provides an increased thermal path over straight line distances between the heater and the support structure for the sample stage and thus provides excellent thermal insulation, while also maximizing the thermal stability of the system.
摘要翻译： 用于加热诸如扫描探针显微镜的显微镜的样品台的加热器被结合到位于陶瓷绝热体的管上的样品台上，陶瓷绝热体又安装在其中的管或其一部分中 材料。 这种重新设计的设计提供了加热器和样品台的支撑结构之间的直线距离上的增加的热路径，因此提供了优异的隔热性，同时也使系统的热稳定性最大化。
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公开(公告)号：US6051825A
公开(公告)日：2000-04-18
申请号：US100049
申请日：1998-06-19
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q60/40 , B82Y35/00 , G01Q30/14 , Y10S977/85 , Y10S977/871
摘要： A scanning probe microscope for measuring the characteristics of a surface of a sample is provided and includes a probe for scanning the surface of a sample to be measured and a sample stage which is adapted to position a sample in the microscope. In a preferred embodiment, the microscope is a conducting atomic force microscope. The microscope also includes a source of voltage in communication with the probe and the sample and a detector for measuring the electrical current to or from the probe and the sample. The probe and the sample are positioned within an enclosure which isolates the probe and the sample from the ambient environment, and the enclosure includes a gas inlet and a gas outlet for controlling the environment in the enclosure to maintain the atmosphere in the enclosure at approximately atmospheric pressure.
摘要翻译： 提供了用于测量样品表面特性的扫描探针显微镜，包括用于扫描待测样品表面的探针和适于将样品置于显微镜中的样品台。 在优选实施例中，显微镜是导电原子力显微镜。 显微镜还包括与探头和样品连通的电压源，以及用于测量来自探针和样品的电流的检测器。 探针和样品位于外壳内，将探头和样品与周围环境隔离，并且外壳包括气体入口和气体出口，用于控制外壳中的环境，以将外壳中的气氛维持在大气压 压力。
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公开(公告)号：US5675154A
公开(公告)日：1997-10-07
申请号：US653200
申请日：1996-05-24
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
摘要： Features for incorporation with scanning probe microscopes are provided which may be used separately or together. The features include constructing the microscope with a hinged top housing providing easy access to the heart of the microscope; a self-aligning and torque limiting magnetic clutch coupling a motor drive powering at least one vertical adjustment screw of the microscope; a removable microscope head for easy adjustment; an optical microscope, optionally mounted to an electronic camera and imaging system, installed adjacent to the head; operation on an inverted microscope stage; bowing error correction; a gas sparging system providing contaminant and noise reduction; a glove box type of loading system so that reactive materials may be safely loaded into the microscope; and a compact desk-top chamber which provides acoustic and vibration isolation.
摘要翻译： 提供用于结合扫描探针显微镜的特征，其可以单独使用或一起使用。 这些特征包括用铰链顶部外壳构建显微镜，可轻松访问显微镜的心脏; 耦合电动机驱动器的自对准和扭矩限制电磁离合器为显微镜的至少一个垂直调节螺钉供电; 一个可拆卸的显微镜头，便于调节; 光学显微镜，可选地安装在电子照相机和成像系统上，安装在头部附近; 在倒置显微镜阶段进行手术; 弯曲误差校正; 提供污染和降噪的气体喷射系统; 手套箱式加载系统，使反应性材料可以安全地载入显微镜; 和一个紧凑的桌面室，提供隔音和隔音。
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公开(公告)号：US6121611A
公开(公告)日：2000-09-19
申请号：US82095
申请日：1998-05-20
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q60/40 , B82Y35/00 , G01Q70/14 , Y10S977/865 , Y10S977/873
摘要： Force sensing probes for use in scanning probe microscopes and a method for coating such probes with a film comprising a magnetostrictive material are provided. The probes may be magnetized by placing them in a magnetic field which can be oriented in any direction with respect to the probes. The magnetostrictive effect leads to a compression or expansion of the magnetic film, altering its length by the strength of the applied field. This in turn causes the probe, which in a preferred embodiment is in the form of a cantilever, and the applied magnetic film, to deflect or bend. The consequent motion of the probe is much greater than that obtained by direct application of a magnetic force and the effect is not sensitive to the direction of the applied field.
摘要翻译： 提供用于扫描探针显微镜的力传感探针和用包含磁致伸缩材料的膜涂覆这种探针的方法。 可以通过将探针放置在可以相对于探针的任何方向定向的磁场中来磁化探针。 磁致伸缩效应导致磁膜的压缩或膨胀，通过施加磁场的强度改变其长度。 这又导致在优选实施例中是悬臂形式的探针和所施加的磁性膜偏转或弯曲。 探头的随后的运动远远大于通过直接施加磁力获得的运动，并且该效果对所施加的磁场的方向不敏感。
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公开(公告)号：US5753814A
公开(公告)日：1998-05-19
申请号：US722344
申请日：1996-09-27
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q30/14 , G01Q60/38 , Y10S977/865 , Y10S977/872
摘要： In accordance with a first aspect of the present invention, the sensitivity of a magnetically modulated AC-AFM is substantially improved by the use of a ferrite-core solenoid for modulating the magnetic cantilever of the ACAFM. In accordance with a second aspect of the present invention, the detection system for a magnetically modulated AC-AFM incorporates AC coupling of the signal from the position sensitive detector/beam deflection detector in order to remove the DC component of the signal, resulting in significantly improved dynamic range over systems utilizing DC coupling. High frequency modulation signals are detected through the use of fast analog multipliers which, after active filtering, give a low frequency signal which may be processed by digital electronics. In accordance with a third aspect of the present invention, operation of the microscope at small amplitudes of oscillation leaves small asperities on the tip intact and results in dramatic improvement in resolution.
摘要翻译： 根据本发明的第一方面，通过使用用于调制ACAFM的磁悬臂的铁氧体磁芯螺线管，实质上改进了磁调制的AC-AFM的灵敏度。 根据本发明的第二方面，用于磁调制AC-AFM的检测系统结合来自位置敏感检测器/光束偏转检测器的信号的AC耦合，以便去除信号的DC分量，导致明显的 改善使用直流耦合的系统的动态范围。 通过使用快速模拟乘法器来检测高频调制信号，其在有源滤波之后给出可由数字电子器件处理的低频信号。 根据本发明的第三方面，显微镜在小振幅振幅下的操作使尖端的粗糙度不变，导致分辨率的显着提高。
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公开(公告)号：US07687767B2
公开(公告)日：2010-03-30
申请号：US10725769
申请日：2003-12-02
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
IPC分类号： G02B26/00
CPC分类号： G01Q10/04
摘要： A fast translation stage for a scanning probe microscope is provided. The stage includes at least one axis of translation driven at the natural resonant frequency of the translation stage such that distortion associated with rapid changes in scan direction is avoided. In one embodiment, the stage includes a sample plate or support that is driven, preferably by one or more piezoelectric actuator elements, so that the plate translates along the fast scan frequency at its resonant frequency.
摘要翻译： 提供扫描探针显微镜的快速平移阶段。 平台包括在平移台的固有共振频率下驱动的至少一个平移轴，从而避免与扫描方向的快速变化相关联的失真。 在一个实施例中，平台包括样品板或支撑件，其优选地由一个或多个压电致动器元件驱动，使得该板以其谐振频率沿快速扫描频率平移。
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公开(公告)号：US5805448A
公开(公告)日：1998-09-08
申请号：US805030
申请日：1997-02-21
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
CPC分类号： G01Q10/065 , B82Y35/00 , Y10S977/851
摘要： A scanning probe microscope controller includes a digital signal processor (DSP) and an analog feedback control loop. The DSP serves to process the output of the scanning probe in the digital realm after conversion of the signal to digital form. After processing, the signal is restored to analog form. The height correction signal to be applied to a transducer controlling the distance between the scanning probe and a sample surface is then generated by an analog feedback control circuit, at least one parameter of which is under computer control. At the end of each scan-line, a variance may be calculated for the data and the inverse of this quantity is used to adjust the gain with which digitization of the data is carried out. Linearization of the data to correct for non-linearities in the scanning transducers may be carried out by the DSP after the data is acquired. This permits the scanning ramps applied to the transducers to be linear but the final displayed data do not show the effects of non-linearities. Adjustment of the feedback control loop gain may be carried out by monitoring the signal level from the scanning probe as each line is scanned. A computer determines if slow variations in this signal level have occurred across a line-scan. If so, the gain is increased. This process is continued until signals characteristic of excess gain (oscillation) are detected. At that point, the gain is reduced to a level slightly below the onset of the oscillation.
摘要翻译： 扫描探针显微镜控制器包括数字信号处理器（DSP）和模拟反馈控制回路。 在将信号转换为数字形式之后，DSP用于处理数字领域中扫描探针的输出。 处理后，信号恢复为模拟形式。 然后，通过模拟反馈控制电路产生要施加到控制扫描探针和样品表面之间的距离的换能器的高度校正信号，模拟反馈控制电路的至少一个参数在计算机控制下。 在每条扫描线的最后，可以为数据计算方差，并且该数量的倒数用于调整执行数据数字化的增益。 在获取数据之后，可以由DSP对数据进行线性化以校正扫描换能器中的非线性。 这允许将应用于换能器的扫描斜坡线性化，但是最终显示的数据不显示非线性的影响。 可以通过在扫描每条线时监视来自扫描探针的信号电平来执行反馈控制环路增益的调整。 计算机确定在线扫描中是否发生了该信号电平的缓慢变化。 如果是这样，增益就会增加。 继续进行该过程，直到检测到具有超增益（振荡）特性的信号。 在这一点上，增益降低到稍低于振荡开始的水平。
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公开(公告)号：US5760396A
公开(公告)日：1998-06-02
申请号：US874440
申请日：1997-06-16
申请人： Stuart M. Lindsay , Tianwei Jing
发明人： Stuart M. Lindsay , Tianwei Jing
摘要： Features for incorporation with scanning probe microscopes are provided which may be used separately or together. The features include constructing the microscope with a hinged top housing providing easy access to the heart of the microscope; a self-aligning and torque limiting magnetic clutch coupling a motor drive powering at least one vertical adjustment screw of the microscope; a removable microscope head for easy adjustment; an optical microscope, optionally mounted to an electronic camera and imaging system, installed adjacent to the head; operation on an inverted microscope stage; bowing error correction; a gas sparging system providing contaminant and noise reduction; a glove box type of loading system so that reactive materials may be safely loaded into the microscope; and a compact desk-top chamber which provides acoustic and vibration isolation.
摘要翻译： 提供用于结合扫描探针显微镜的特征，其可以单独使用或一起使用。 这些特征包括用铰链顶部外壳构建显微镜，可轻松访问显微镜的心脏; 耦合电动机驱动器的自对准和扭矩限制电磁离合器为显微镜的至少一个垂直调节螺钉供电; 一个可拆卸的显微镜头，便于调节; 光学显微镜，可选地安装在电子照相机和成像系统上，安装在头部附近; 在倒置显微镜阶段进行手术; 弯曲误差校正; 提供污染和降噪的气体喷射系统; 手套箱式加载系统，使反应性材料可以安全地载入显微镜; 和一个紧凑的桌面室，提供隔音和隔音。
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