公开(公告)号：US07194897B2

公开(公告)日：2007-03-27

申请号：US10651680

申请日：2003-08-28

申请人： Sung Q Lee ,  Ki Bong Song ,  Kang Ho Park ,  Jun Ho Kim ,  Eun Kyoung Kim ,  Kyi Hwan Park ,  Woo Sub Youm

发明人： Sung Q Lee ,  Ki Bong Song ,  Kang Ho Park ,  Jun Ho Kim ,  Eun Kyoung Kim ,  Kyi Hwan Park ,  Woo Sub Youm

IPC分类号： G01B5/28 ,  G01N13/16

CPC分类号： G01Q60/32

摘要： An apparatus capable of tracking a sample surface level in a z direction and oscillating a cantilever at resonant frequency by using a frequency separation scheme in non-contact mode and method thereof. The inventive apparatus includes a sensing unit for sensing a sample surface; a frequency transforming unit for transforming the sensed signal; a frequency combining unit for combining signals; and an actuating unit for actuating the sensing unit.

摘要翻译： 一种能够通过使用非接触模式中的频率分离方案来跟踪z方向上的样品表面水平并以共振频率振荡悬臂的装置及其方法。 本发明的装置包括用于感测样品表面的感测单元; 用于变换感测信号的频率变换单元; 用于组合信号的频率组合单元; 以及用于致动感测单元的致动单元。

公开(公告)号：US07393713B2

公开(公告)日：2008-07-01

申请号：US11020180

申请日：2004-12-27

申请人： Eun Kyoung Kim ,  Sung Q Lee ,  Ki Bong Song ,  Kang Ho Park

发明人： Eun Kyoung Kim ,  Sung Q Lee ,  Ki Bong Song ,  Kang Ho Park

IPC分类号： H01L21/00

CPC分类号： G01Q60/22 ,  G11B7/1387

摘要： Provided is a method of fabricating a near-field optical probe adapted to a near-field scanning optical microscopy and a near-field information storage device, in which a cantilever and an optical tip are provided in one body and the optical tip is arranged to face the upper portion of the substrate. High-concentrated boron ions are implanted into an uppermost silicon layer of a silicon on insulator (SOI) substrate, and a silicon layer into which boron ions are implanted while the silicon inside the tip is etched to form the hole to act as an etch stop layer, thereby easily removing the silicon inside the tip even with the cantilever exposed, and simplifying the process due to the simultaneous fabrication of the cantilever and the tip.

摘要翻译： 本发明提供一种制造适用于近场扫描光学显微镜和近场信息存储装置的近场光学探针的方法，其中悬臂和光学尖端设置在一体内，并且光学尖端布置成 面对基板的上部。 将高浓度硼离子注入到绝缘体上硅（SOI）衬底的最上层的硅层中，并且注入硼离子的硅层，同时蚀刻尖端内部的硅以形成蚀刻停止孔 从而即使悬臂暴露也容易去除尖端内的硅，并且由于悬臂和尖端的同时制造而简化了工艺。

公开(公告)号：US07720332B2

公开(公告)日：2010-05-18

申请号：US12316875

申请日：2008-12-17

申请人： Kang Ho Park ,  Eun Kyoung Kim ,  Sung Q Lee

发明人： Kang Ho Park ,  Eun Kyoung Kim ,  Sung Q Lee

IPC分类号： G02B6/32 ,  C03B37/00

CPC分类号： G11B7/1387 ,  G02B6/241 ,  G02B6/262 ,  G02B6/32

摘要： Provided is an optical fiber illuminator used for recording and reading high density optical information according to a near field recording (NFR) scheme, a method of fabricating the optical fiber illuminator, and an optical recording head and recording apparatus having the optical fiber illuminator. The optical fiber illuminator includes: an optical fiber having a core upon which light is incident and a clad that surrounds the core, one end of the optical fiber having a mirror formed in an inclined manner; and a lens formed on an outer surface of the optical fiber for focusing light reflected by the mirror. The optical fiber illuminator has an improved optical arrangement for optical illumination and detection, it is easy to manufacture, its optical input is easy to control, and it can be readily provided in an array form. When an array type optical recording and reading apparatus having an optical recording head and multiple aperture probes adopts the optical fiber illuminator, the resulting simple arrangement and compact size enables size reduction of the overall apparatus, a signal to noise ratio is high, and high density optical information can be recorded and reproduced at an extremely high rate.

摘要翻译： 提供了一种用于根据近场记录（NFR）方案记录和读取高密度光学信息的光纤照明器，制造光纤照明器的方法，以及具有光纤照明器的光学记录头和记录装置。 光纤照明器包括：具有光入射的芯和围绕芯的包层的光纤，光纤的一端具有以倾斜方式形成的反射镜; 以及形成在光纤的外表面上的用于聚焦由反射镜反射的光的透镜。 光纤照明器具有用于光学照明和检测的改进的光学布置，其易于制造，其光学输入易于控制，并且可以容易地以阵列形式提供。 当具有光学记录头和多个孔径探针的阵列型光学记录和读取装置采用光纤照明器时，所得到的简单布置和紧凑的尺寸使得整个装置的尺寸减小，信噪比高，并且高密度 可以以非常高的速率记录和再现光学信息。

公开(公告)号：US07757247B2

公开(公告)日：2010-07-13

申请号：US11288693

申请日：2005-11-29

申请人： Woo Seok Cheong ,  Yong Goo Yoo ,  Sung Q Lee ,  Ho Jun Ryu ,  Mun Cheol Paek ,  Eun Kyoung Kim ,  Kang Ho Park

发明人： Woo Seok Cheong ,  Yong Goo Yoo ,  Sung Q Lee ,  Ho Jun Ryu ,  Mun Cheol Paek ,  Eun Kyoung Kim ,  Kang Ho Park

IPC分类号： G11B7/24 ,  G11B23/03 ,  G11B3/70 ,  G11B5/84 ,  G11B7/26 ,  G11B5/82

CPC分类号： G11B23/0035

摘要： Provided is a small form factor optical/magnetic disk including an integrated metal hub and a disk plate. The integrated metal hub includes a circular upper metal hub and a circular lower metal hub integrally formed with and disposed under the upper metal hub. The circular lower metal hub has a smaller diameter smaller than the upper metal hub. A central hole is formed in central portions of the upper and lower metal hubs and passes through the upper and lower metal hubs. The disk plate has a through-hole that is formed in a central portion and is directly associated with the integrated metal hub, and a recess that is formed around the through-hole and allows the upper metal hub to be mounted therein. Since the central portion of the small form factor optical/magnetic disk is not thick, the small form factor optical/magnetic disk can contribute to an ultra thin small form factor information storage device. Also, since manufacturing processes are simple, price and quality competitiveness can be enhanced.

摘要翻译： 提供了包括集成金属毂和盘片的小型光学/磁盘。 集成金属毂包括圆形上金属毂和与上金属毂一体形成并设置在其下的圆形下金属毂。 圆形下部金属毂具有比上部金属毂更小的直径。 中心孔形成在上下金属轮毂的中心部分，并通过上下金属轮毂。 盘片具有形成在中心部分并且与集成金属毂直接相关联的通孔，以及形成在通孔周围并允许上金属毂安装在其中的凹部。 由于小型光学/磁盘的中心部分不厚，因此小型光学/磁盘可以有助于超薄型小尺寸信息存储装置。 此外，由于制造工艺简单，因此可以提高价格和质量竞争力。

公开(公告)号：US20090142708A1

公开(公告)日：2009-06-04

申请号：US12316875

申请日：2008-12-17

申请人： Kang Ho Park ,  Eun Kyoung Kim ,  Sung Q Lee

发明人： Kang Ho Park ,  Eun Kyoung Kim ,  Sung Q Lee

IPC分类号： G03F7/20

CPC分类号： G11B7/1387 ,  G02B6/241 ,  G02B6/262 ,  G02B6/32

摘要： Provided is an optical fiber illuminator used for recording and reading high density optical information according to a near field recording (NFR) scheme, a method of fabricating the optical fiber illuminator, and an optical recording head and recording apparatus having the optical fiber illuminator. The optical fiber illuminator includes: an optical fiber having a core upon which light is incident and a clad that surrounds the core, one end of the optical fiber having a mirror formed in an inclined manner; and a lens formed on an outer surface of the optical fiber for focusing light reflected by the mirror. The optical fiber illuminator has an improved optical arrangement for optical illumination and detection, it is easy to manufacture, its optical input is easy to control, and it can be readily provided in an array form. When an array type optical recording and reading apparatus having an optical recording head and multiple aperture probes adopts the optical fiber illuminator, the resulting simple arrangement and compact size enables size reduction of the overall apparatus, a signal to noise ratio is high, and high density optical information can be recorded and reproduced at an extremely high rate.

摘要翻译： 提供了一种用于根据近场记录（NFR）方案记录和读取高密度光学信息的光纤照明器，制造光纤照明器的方法，以及具有光纤照明器的光学记录头和记录装置。 光纤照明器包括：具有光入射的芯和围绕芯的包层的光纤，光纤的一端具有以倾斜方式形成的反射镜; 以及形成在光纤的外表面上的用于聚焦由反射镜反射的光的透镜。 光纤照明器具有用于光学照明和检测的改进的光学布置，其易于制造，其光学输入易于控制，并且可以容易地以阵列形式提供。 当具有光学记录头和多个孔径探针的阵列型光学记录和读取装置采用光纤照明器时，由此得到的简单布置和紧凑的尺寸使得整个装置的尺寸减小，信噪比高，并且高密度 可以以非常高的速率记录和再现光学信息。

公开(公告)号：US07562374B2

公开(公告)日：2009-07-14

申请号：US11149098

申请日：2005-06-09

申请人： Woo Seok Cheong ,  Yong Goo Yoo ,  Sung Q Lee ,  Ho Jun Ryu ,  Mun Cheol Paek ,  Eun Kyoung Kim

发明人： Woo Seok Cheong ,  Yong Goo Yoo ,  Sung Q Lee ,  Ho Jun Ryu ,  Mun Cheol Paek ,  Eun Kyoung Kim

IPC分类号： G11B25/04

CPC分类号： G11B23/0035

摘要： Provided is a form factor disk such as an optical or magnetic disk used in electronic appliances and information appliances. The form factor disk includes: a circular plate having a first hole for inserting a rotational shaft, a plurality of second holes formed adjacent to the first hole, and an information storage region formed at a surface thereof; an upper metal hub located on the circular plate, and having a hole aligned with the first hole of the circular plate and column-shaped joints formed at portions corresponding to the second holes of the circular plate; and a lower metal hub located under the circular plate, and having a hole aligned with the first hole of the circular plate and column-shaped joints formed at portions corresponding to the second holes of the circular plate, wherein the joints of the upper and lower metal hubs are jointed through the second holes.

摘要翻译： 提供了诸如用于电子设备和信息设备中的光学或磁盘的形状因子盘。 形状因素盘包括：圆板，具有用于插入旋转轴的第一孔，与第一孔相邻形成的多个第二孔以及形成在其表面的信息存储区; 位于圆板上的上金属毂，具有与圆板的第一孔对准的孔和形成在对应于圆板的第二孔的部分处的柱形接头; 以及位于圆板下方的下金属毂，并且具有与圆板的第一孔对准的孔和形成在与圆板的第二孔对应的部分处形成的柱状接头，其中上下的接头 金属轮毂通过第二个孔接合。

公开(公告)号：US07719760B2

公开(公告)日：2010-05-18

申请号：US11940379

申请日：2007-11-15

申请人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seook Park ,  Hyun Jin Ji

发明人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seook Park ,  Hyun Jin Ji

IPC分类号： G02B21/06

CPC分类号： G02B21/06 ,  G01N21/21 ,  G02B21/365 ,  G02B27/286 ,  Y10S977/881

摘要： Provided is an optical microscope system for detecting nanowires to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires and including: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires.

摘要翻译： 提供了一种用于检测纳米线的光学显微镜系统，以允许使用现有的光学显微镜来制造具有纳米线的电子器件，并且包括：用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜，用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机，用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换（FFT）的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。

公开(公告)号：US07846786B2

公开(公告)日：2010-12-07

申请号：US11927881

申请日：2007-10-30

申请人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

发明人： Hong Yeol Lee ,  Seung Eon Moon ,  Eun Kyoung Kim ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Jae Woo Lee ,  Hye Yeon Ryu ,  Jung Hwan Huh

IPC分类号： H01L21/00 ,  H01L21/16 ,  H01L29/06 ,  H01L27/088

CPC分类号： H01L29/0673 ,  H01L21/76289 ,  H01L27/1225 ,  H01L29/0665 ,  H01L29/24 ,  H01L29/66969 ,  H01L29/7869 ,  Y10S977/762

摘要： Provided is a method of fabricating a nano-wire array, including the steps of: depositing a nano-wire solution, which contains nano-wires, on a substrate; forming a first etch region in a stripe shape on the substrate and then patterning the nano-wires; forming drain and source electrode lines parallel to each other with the patterned nano-wires interposed therebetween; forming a plurality of drain electrodes which have one end connected to the drain electrode line and contact at least one of the nano-wires, and forming a plurality of source electrodes, which have one end connected to the source electrode line and contact the nano-wires that contact the drain electrodes; forming a second etch region between pairs of the drain and source electrodes so as to prevent electrical contacts between the pairs of the drain and source electrodes; forming an insulating layer on the substrate; and forming a gate electrode between the drain and source electrodes contacting the nano-wires on the insulating layer. Accordingly, even in an unparallel structure of nano-wires to electrode lines, a large scale nano-wire array is practicable and applicable to an integrated circuit or display unit with nano-wire alignment difficulty, as well as to device applications using flexible substrates.

摘要翻译： 提供一种制造纳米线阵列的方法，包括以下步骤：在衬底上沉积包含纳米线的纳米线溶液; 在衬底上形成带状的第一蚀刻区域，然后对纳米线进行构图; 形成彼此平行的漏极和源极电极线，其间插入图案化的纳米线; 形成多个漏电极，所述多个漏电极的一端连接到所述漏电极线并接触所述纳米线中的至少一个，并且形成多个源电极，所述多个源电极的一端连接到所述源电极线并接触所述纳米线， 接触漏电极的电线; 在所述漏极和源极电极之间形成第二蚀刻区域，以防止所述漏极和源极电极之间的电接触; 在所述基板上形成绝缘层; 以及在与绝缘层上的纳米线接触的漏极和源电极之间形成栅电极。 因此，即使在纳米线与电极线的不平行结构中，大规模的纳米线阵列也是可行的并且适用于具有纳米线对准困难的集成电路或显示单元以及使用柔性基板的器件应用。

公开(公告)号：US07951698B2

公开(公告)日：2011-05-31

申请号：US11947139

申请日：2007-11-29

申请人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  So Jeong Park ,  Gyu Tae Kim

发明人： Seung Eon Moon ,  Eun Kyoung Kim ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  So Jeong Park ,  Gyu Tae Kim

IPC分类号： H01L45/00 ,  H01L21/00

CPC分类号： H01L21/76892 ,  H01L2221/1094

摘要： A method of fabricating an electronic device using nanowires, minimizing the number of E-beam processing steps and thus improving a yield, includes the steps of: forming electrodes on a substrate; depositing a plurality of nanowires on the substrate including the electrodes; capturing an image of the substrate including the nanowires and the electrodes; drawing virtual connection lines for connecting the nanowires with the electrodes on the image using an electrode pattern simulated through a computer program, after capturing the image; coating an E-beam photoresist on the substrate; removing the photoresist from regions corresponding to the virtual connection lines and the electrode pattern using E-beam lithography; depositing a metal layer on the substrate after removing the photoresist from the regions of the virtual connection lines; and removing remaining photoresist from the substrate using a lift-off process.

摘要翻译： 使用纳米线制造电子器件的方法，使电子束处理步骤的数量最小化并因此提高产量，包括以下步骤：在衬底上形成电极; 在包括电极的基板上沉积多个纳米线; 捕获包括纳米线和电极的衬底的图像; 绘制虚拟连接线，用于在捕获图像之后，使用通过计算机程序模拟的电极图案将纳米线与图像上的电极连接; 在基板上涂覆电子束光致抗蚀剂; 使用电子束光刻从与虚拟连接线对应的区域和电极图案中去除光致抗蚀剂; 在从虚拟连接线的区域去除光致抗蚀剂之后，在基板上沉积金属层; 以及使用剥离工艺从衬底去除剩余的光致抗蚀剂。

公开(公告)号：US20090195869A1

公开(公告)日：2009-08-06

申请号：US11940379

申请日：2007-11-15

申请人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seok Park ,  Hyun Jin Ji

发明人： Eun Kyoung Kim ,  Seung Eon Moon ,  Hong Yeol Lee ,  Jong Hyurk Park ,  Kang Ho Park ,  Jong Dae Kim ,  Gyu Tae Kim ,  Do Young Jang ,  Eung Seok Park ,  Hyun Jin Ji

IPC分类号： G02B21/06 ,  G06K9/00

CPC分类号： G02B21/06 ,  G01N21/21 ,  G02B21/365 ,  G02B27/286 ,  Y10S977/881

摘要： Provided is an optical microscope system for detecting nanowires that is designed with a rotational polarizer and Fast Fourier Transform (FFT) to allow for use of an existing optical microscope in fabricating an electronic device having the nanowires. The optical microscope system includes: a light source for emitting light to provide the light to a nanowire sample; a rotational polarizer provided on a path of the light emitted from the light source for polarizing the light; an optical microscope for detecting a nanowire image using light that is polarized by the rotational polarizer and incident on the nanowire sample; a CCD camera provided in a region of the optical microscope for photographing and storing the nanowire image detected by the optical microscope; and a data processor for performing Fast Fourier Transform (FFT) on the nanowire image stored in the CCD camera. Intensity of reflected light varies, due to optical anisotropy of the nanowires, along a polarizing orientation of light incident on the nanowires. It is possible to obtain a distinct image of the nanowires having a nanometer line width by performing FFT on each pixel of reflected light images obtained at predetermined time intervals after light passing through the polarizer rotating in a predetermined period is incident on the nanowires.

摘要翻译： 提供了一种用于检测纳米线的光学显微镜系统，其被设计为具有旋转偏振器和快速傅里叶变换（FFT），以允许使用现有的光学显微镜来制造具有纳米线的电子器件。 光学显微镜系统包括：用于发射光以向纳米线样品提供光的光源; 设置在从光源发射的光的路径上以使光偏振的旋转偏振器; 光学显微镜，用于使用被旋转偏振器偏振并入射在纳米线样品上的光检测纳米线图像; 设置在光学显微镜的区域中的CCD照相机，用于拍摄和存储由光学显微镜检测的纳米线图像; 以及用于在存储在CCD照相机中的纳米线图像上执行快速傅里叶变换（FFT）的数据处理器。 反射光的强度由于纳米线的光学各向异性而沿着入射在纳米线上的光的偏振方向而变化。 通过在经过预定时间内旋转的偏振片的光入射到纳米线上之后，以预定时间间隔获得的反射光图像的每个像素执行FFT，可以获得具有纳米线宽度的纳米线的不同图像。