Method for growing high quality group-III nitride thin film by metal organic chemical vapor deposition

    公开(公告)号:US06555167B2

    公开(公告)日:2003-04-29

    申请号:US09881711

    申请日:2001-06-18

    IPC分类号: C23C1634

    摘要: A method for growing a group-III nitride compound (including BN, AlN, GaN and InN) semiconductor film, to which much attention is currently paid in the field of optical semiconductors. If the internal pressure of a reactor increases, vertical growth becomes faster, and internal crystal defects are reduced while many fine pits are generated in view of outer appearance. If the internal pressure of a reactor decreases, vertical growth becomes slower and lateral growth becomes relatively faster, producing fewer pits in view of outer appearance, while internal crystal defects increase. Based on such experimental results, nitride crystals having many fine pits and fewer internal defects are first grown by a high pressure growth method and the fine pits relatively increased in number are then filled by a low pressure growth method, thereby attaining a high quality group-III nitride film.

    Laser display device
    4.
    发明申请
    Laser display device 失效
    激光显示装置

    公开(公告)号:US20070284530A1

    公开(公告)日:2007-12-13

    申请号:US11798562

    申请日:2007-05-15

    IPC分类号: G01T1/00

    CPC分类号: H04N9/3129

    摘要: Provided is a laser display device. The laser display device may include at least one light source configured to emit at least one laser beam, at least one scanning unit configured to perform a scanning with the at least one laser beam, and an image forming unit configured to generate excitation light and scattering light by receiving the at least one laser beam from the scanning unit to form an image.

    摘要翻译: 提供了一种激光显示装置。 激光显示装置可以包括被配置为发射至少一个激光束的至少一个光源,被配置为用至少一个激光束执行扫描的至少一个扫描单元,以及被配置为产生激发光和散射的图像形成单元 通过从扫描单元接收至少一个激光束来形成图像。

    Semiconductor laser diode array
    5.
    发明申请
    Semiconductor laser diode array 失效
    半导体激光二极管阵列

    公开(公告)号:US20070237200A1

    公开(公告)日:2007-10-11

    申请号:US11513053

    申请日:2006-08-31

    IPC分类号: H01S5/00

    摘要: A semiconductor laser diode array is provided. The semiconductor laser diode array includes: a lower semiconductor laser diode chip having a dual structure including a lower substrate, a first laser generating region disposed on the lower substrate, and a second laser generating region disposed on the lower substrate and separated from the first laser generating region; an upper semiconductor laser diode chip having a dual structure including an upper substrate, a third laser generating region disposed on the upper substrate, and a fourth laser generating region disposed on the upper substrate and separated from the third laser generating region; and an electrode unit electrically connecting the first through fourth laser generating regions to the outside. The first and second laser generating regions are vertically bonded to the third and fourth laser generating regions, respectively, so that the first through fourth light-emitting points in the first through fourth laser generating regions from which laser beams are emitted are arranged in a two-dimensional fashion.

    摘要翻译: 提供半导体激光二极管阵列。 半导体激光二极管阵列包括:具有双结构的下半导体激光二极管芯片,包括下基板,设置在下基板上的第一激光产生区域和设置在下基板上并与第一激光器分离的第二激光产生区域 生成区域 具有双重结构的上半导体激光二极管芯片,包括上基板,设置在上基板上的第三激光产生区域和设置在上基板上并与第三激光产生区域分离的第四激光发生区域; 以及将第一至第四激光产生区域电连接到外部的电极单元。 第一和第二激光产生区域分别垂直地结合到第三和第四激光产生区域,使得发射激光束的第一至第四激光产生区域中的第一至第四发光点被布置成两个 维度时尚。

    Semiconductor laser diode array
    6.
    发明授权
    Semiconductor laser diode array 失效
    半导体激光二极管阵列

    公开(公告)号:US07616674B2

    公开(公告)日:2009-11-10

    申请号:US11513053

    申请日:2006-08-31

    IPC分类号: H01S5/40

    摘要: A semiconductor laser diode array is provided. The semiconductor laser diode array includes: a lower semiconductor laser diode chip having a dual structure including a lower substrate, a first laser generating region disposed on the lower substrate, and a second laser generating region disposed on the lower substrate and separated from the first laser generating region; an upper semiconductor laser diode chip having a dual structure including an upper substrate, a third laser generating region disposed on the upper substrate, and a fourth laser generating region disposed on the upper substrate and separated from the third laser generating region; and an electrode unit electrically connecting the first through fourth laser generating regions to the outside. The first and second laser generating regions are vertically bonded to the third and fourth laser generating regions, respectively, so that the first through fourth light-emitting points in the first through fourth laser generating regions from which laser beams are emitted are arranged in a two-dimensional fashion.

    摘要翻译: 提供半导体激光二极管阵列。 半导体激光二极管阵列包括:具有双结构的下半导体激光二极管芯片,包括下基板,设置在下基板上的第一激光产生区域和设置在下基板上并与第一激光器分离的第二激光产生区域 生成区域 具有双重结构的上半导体激光二极管芯片,包括上基板,设置在上基板上的第三激光产生区域和设置在上基板上并与第三激光产生区域分离的第四激光发生区域; 以及将第一至第四激光产生区域电连接到外部的电极单元。 第一和第二激光产生区域分别垂直地结合到第三和第四激光产生区域,使得发射激光束的第一至第四激光产生区域中的第一至第四发光点被布置成两个 维度时尚。

    GaN-based III—V group compound semiconductor device and p-type electrode for the same
    7.
    发明授权
    GaN-based III—V group compound semiconductor device and p-type electrode for the same 有权
    GaN基III-V族化合物半导体器件和p型电极

    公开(公告)号:US07285857B2

    公开(公告)日:2007-10-23

    申请号:US10953282

    申请日:2004-09-30

    IPC分类号: H01L29/45 H01L33/00

    摘要: Provided are a p-type electrode and a III-V group GaN-based compound semiconductor device using the same. The electrode includes a first layer disposed on a III-V group nitride compound semiconductor layer and formed of a Zn-based material containing a solute; and a second layer stacked on the first layer and formed of at least one selected from the group consisting of Au, Co, Pd, Pt, Ru, Rh, Ir, Ta, Cr, Mn, Mo, Tc, W, Re, Fe, Sc, Ti, Sn, Ge, Sb, Al, ITO, and ZnO. The Zn-based p-type electrode has excellent electrical, optical, and thermal properties.

    摘要翻译: 提供了使用该p型电极和III-V族GaN基化合物半导体器件。 电极包括设置在III-V族氮化物化合物半导体层上并由含有溶质的Zn基材料形成的第一层; 以及层叠在第一层上并由选自Au,Co,Pd,Pt,Ru,Rh,Ir,Ta,Cr,Mn,Mo,Tc,W,Re,Fe中的至少一种形成的第二层 ,Sc,Ti,Sn,Ge,Sb,Al,ITO和ZnO。 Zn基p型电极具有优异的电学,光学和热学特性。

    Laser display device employing blue laser diode
    10.
    发明授权
    Laser display device employing blue laser diode 失效
    采用蓝色激光二极管的激光显示装置

    公开(公告)号:US08262227B2

    公开(公告)日:2012-09-11

    申请号:US13064413

    申请日:2011-03-23

    IPC分类号: G03B21/00

    CPC分类号: H04N9/3129

    摘要: Provided is a laser display device. The laser display device may include at least one light source configured to emit at least one laser beam, at least one scanning unit configured to perform a scanning with the at least one laser beam, and an image forming unit configured to generate excitation light and scattering light by receiving the at least one laser beam from the scanning unit to form an image.

    摘要翻译: 提供了一种激光显示装置。 激光显示装置可以包括被配置为发射至少一个激光束的至少一个光源,被配置为用至少一个激光束执行扫描的至少一个扫描单元,以及被配置为产生激发光和散射的图像形成单元 通过从扫描单元接收至少一个激光束来形成图像。