IDT electroded piezoelectric diaphragms
    6.
    发明申请
    IDT electroded piezoelectric diaphragms 有权
    IDT电磁压电隔膜

    公开(公告)号:US20060186761A1

    公开(公告)日:2006-08-24

    申请号:US10996604

    申请日:2004-11-26

    IPC分类号: H01L41/18

    摘要: The disclosed invention relates to achieving micromachined piezoelectrically-actuated diaphragms. The piezoelectric diaphragm includes a central, inactive electrode free region and an annular shaped interdigitated electrode adjacent to the outer periphery of the central region. The diaphragm also may have an inactive annular, electrode free region and an active central, interdigitated electrode region. The diaphragms may be used in, such as, miniature pumps. The pumps may include a plurality of chambers to generate peristaltic pumping of fluids.

    摘要翻译: 所公开的发明涉及实现微加工的压电致动隔膜。 压电振膜包括中心的非活性电极自由区和与中心区的外周相邻的环形交错电极。 隔膜还可以具有无活性环形,无电极区域和活性中心交叉电极区域。 隔膜可用于例如微型泵中。 泵可以包括多个腔室以产生流体的蠕动泵送。