Method for preparing dense, epitaxial metal oxide film
    1.
    发明授权
    Method for preparing dense, epitaxial metal oxide film 失效
    制备密集的外延金属氧化物膜的方法

    公开(公告)号:US06183554B2

    公开(公告)日:2001-02-06

    申请号:US09272564

    申请日:1999-03-19

    IPC分类号: C30B702

    CPC分类号: C23C18/1216 C23C18/04

    摘要: A process for forming a dense, epitaxial metal oxide film on a single crystal substrate, including cleaning the surface of the single crystal substrate, contacting the cleaned surface with a polar organic compound such as a small molecular weight alcohol, so that the cleaned surface adsorbs the polar organic compound, then applying a hydrocarbon solvent solution containing at least one organic group-containing metal compound on the polar organic compound-adsorbed surface, and then heating the substrate to decompose the organic group-containing metal compound and to form a dense epitaxial metal oxide film on the substrate.

    摘要翻译: 一种用于在单晶衬底上形成致密的外延金属氧化物膜的方法,包括清洗单晶衬底的表面,使清洁的表面与极小的有机化合物如小分子量醇接触,使得清洁的表面吸附 极性有机化合物,然后在极性有机化合物吸附表面上施加含有至少一种含有机基团的金属化合物的烃溶剂溶液,然后加热底物以分解含有机基团的金属化合物并形成致密的外延 金属氧化物膜在基板上。

    Method for producing a metal oxide and method for forming a minute pattern
    3.
    发明授权
    Method for producing a metal oxide and method for forming a minute pattern 失效
    金属氧化物的制造方法及形成微小图案的方法

    公开(公告)号:US06576302B1

    公开(公告)日:2003-06-10

    申请号:US09513814

    申请日:2000-02-25

    IPC分类号: C08J718

    摘要: There is disclosed a method for producing a metal oxide, which comprises the steps of: dissolving a metal organic compound (e.g. a metal organic acid salt, a metal acetylacetonato complex, and a metal alkoxide having an organic group with 6 or more carbon atoms) in a solvent to provide a state of solution, applying the solution onto a substrate, drying the solution, and subjecting the resultant substrate to irradiation with a laser light of a 400 nm or less wavelength, to form a metal oxide on the substrate. According to that method, a metal oxide can be produced without applying a heat treatment at a high temperature of the degree adopted in the conventionally known application thermal decomposition method.

    摘要翻译: 公开了一种金属氧化物的制造方法,该方法包括以下步骤:将金属有机化合物(例如金属有机酸盐,金属乙酰丙酮络合物和具有6个或更多个碳原子的有机基团的金属醇盐) 在溶剂中以提供溶液状态,将溶液施加到基材上,干燥溶液,并使所得基板对波长为400nm以下的激光进行照射,以在基板上形成金属氧化物。 根据该方法,可以在常规已知的应用热分解方法中采用的高温下进行金属氧化物而不进行热处理。

    Infrared sensor manufacturing method suitable for mass production
    6.
    发明授权
    Infrared sensor manufacturing method suitable for mass production 有权
    红外传感器制造方法适合批量生产

    公开(公告)号:US07781030B2

    公开(公告)日:2010-08-24

    申请号:US11710962

    申请日:2007-02-27

    IPC分类号: B05D3/06 G01J5/00

    CPC分类号: G01J5/20

    摘要: An infrared sensor manufacturing method according to this invention includes a step of forming a bridge structure of an insulating material on an Si substrate, a step of forming a vanadium oxide thin film on the bridge structure by a dry film forming method, a step of irradiating laser light onto the vanadium oxide thin film to thereby change material properties thereof, a step of forming the vanadium oxide thin film with the changed material properties into a bolometer resistor having a predetermined pattern, and a step of forming a protective layer of an insulating material so as to cover the bolometer resistor having the predetermined pattern and the bridge structure.

    摘要翻译: 根据本发明的红外线传感器的制造方法包括在Si基板上形成绝缘材料的桥接结构的步骤,通过干式成膜法在桥式结构体上形成氧化钒薄膜的工序, 将激光照射到氧化钒薄膜上,从而改变其材料特性,将具有改变的材料特性的氧化钒薄膜形成具有预定图案的辐照热电阻器的步骤,以及形成绝缘材料的保护层的步骤 以覆盖具有预定图案和桥结构的测辐射热电阻。

    Infrared sensor manufacturing method suitable for mass production
    7.
    发明申请
    Infrared sensor manufacturing method suitable for mass production 有权
    红外传感器制造方法适合批量生产

    公开(公告)号:US20070272863A1

    公开(公告)日:2007-11-29

    申请号:US11710962

    申请日:2007-02-27

    IPC分类号: G01J5/00 C23C14/00 C25D5/00

    CPC分类号: G01J5/20

    摘要: An infrared sensor manufacturing method according to this invention includes a step of forming a bridge structure of an insulating material on an Si substrate, a step of forming a vanadium oxide thin film on the bridge structure by a dry film forming method, a step of irradiating laser light onto the vanadium oxide thin film to thereby change material properties thereof, a step of forming the vanadium oxide thin film with the changed material properties into a bolometer resistor having a predetermined pattern, and a step of forming a protective layer of an insulating material so as to cover the bolometer resistor having the predetermined pattern and the bridge structure.

    摘要翻译: 根据本发明的红外线传感器的制造方法包括在Si基板上形成绝缘材料的桥接结构的步骤,通过干式成膜法在桥式结构体上形成氧化钒薄膜的工序, 将激光照射到氧化钒薄膜上,从而改变其材料特性,将具有改变的材料特性的氧化钒薄膜形成具有预定图案的辐照热电阻器的步骤,以及形成绝缘材料的保护层的步骤 以覆盖具有预定图案和桥结构的测辐射热电阻。

    Ophthalmic disease detection apparatus

    公开(公告)号:US4950068A

    公开(公告)日:1990-08-21

    申请号:US216394

    申请日:1988-07-07

    申请人: Susumu Mizuta

    发明人: Susumu Mizuta

    IPC分类号: A61B3/10 A61B3/107 A61B3/12

    CPC分类号: A61B3/1225 A61B3/107

    摘要: An apparatus for detecting ophthalmic diseases in a patient's eye includes light projection system for projecting a laser beam at a spot in the eye. The light scattered from the eye is photoelectrically detected and converted into an electrical signal which is subsequently used to determine the protein concentration essential to ophthalmic disease detection. A monitor is provided in the light projection system for monitoring light scattered from the cornea of the eye on which the laser beam is projected, and for monitoring a virtual image which is formed by the cornea surface from light scattered at the exit window of the light projection system to correctly position and align the apparatus in order to ensure accurate protein concentration measurements.

    Ophthalmic disease detection apparatus
    10.
    发明授权
    Ophthalmic disease detection apparatus 失效
    眼科疾病检测仪

    公开(公告)号:US4941741A

    公开(公告)日:1990-07-17

    申请号:US216385

    申请日:1988-07-07

    申请人: Susumu Mizuta

    发明人: Susumu Mizuta

    IPC分类号: A61B3/10 A61B3/117 A61B3/12

    CPC分类号: A61B3/117 A61B3/10

    摘要: An apparatus for detecting ophthalmic diseases, such as inflammation in a patient's eye, includes a projection system for projecting and focusing a laser beam at a selected spot in the eye. The laser light scattered from the eye is photoelectrically detected through a slit in a mask and converted into an electrical signal which is used to determine the protein concentration in the patient's eye. A light shield member is displaceable in front of the mask slit to selectively block diffused light from the eye or scattered laser light to improve the S/N ratio of the electrical signal.