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公开(公告)号：US20170170809A1
公开(公告)日：2017-06-15
申请号：US15356197
申请日：2016-11-18
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Tsuyoshi YOKOYAMA , Jiansong LIU
CPC classification number: H03H9/02157 , H03H9/02118 , H03H9/13 , H03H9/173 , H03H9/175 , H03H9/587 , H03H9/589 , H03H9/605 , H03H9/706
Abstract: A piezoelectric thin film resonator includes: a piezoelectric film located on a substrate, and formed of stacked lower and upper piezoelectric films; lower and upper electrodes facing each other across at least a part of the piezoelectric film; and an insertion film inserted between the lower and upper piezoelectric films, wherein an air gap including a resonance region where the lower and upper electrodes face each other across the piezoelectric film and being larger than the resonance region is located under the lower electrode, and a multilayered film formed of the lower piezoelectric film, the insertion film, and the upper piezoelectric film is located in at least a part of a region located further out than an outer outline of the resonance region, further in than an outer outline of the air gap, and surrounding the resonance region, and is not located in a center region of the resonance region.
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公开(公告)号：US20150130561A1
公开(公告)日：2015-05-14
申请号：US14527335
申请日：2014-10-29
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Shinji TANIGUCHI , Tokihiro NISHIHARA , Tsuyoshi YOKOYAMA , Takeshi SAKASHITA
Abstract: A piezoelectric thin film resonator includes: a substrate; a piezoelectric film provided on the substrate; a lower electrode and an upper electrode that sandwich at least a part of the piezoelectric film and face with each other; and an inserted film that is inserted in the piezoelectric film, is provided on an outer circumference region in a resonance region in which the lower electrode and the upper electrode sandwich the piezoelectric film and face with each other, is not provided in a center region of the resonance region, and has a cutout in the resonance region.
Abstract translation: 压电薄膜谐振器包括：基板; 设置在基板上的压电膜; 夹着所述压电膜的至少一部分并且彼此面对的下电极和上电极; 并且插入在压电膜中的插入膜设置在下电极和上电极夹着压电膜并相互面对的谐振区域的外周区域上，不设置在中心区域 共振区域，并且在共振区域中具有切口。
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3.发明申请公开(公告)号：US20180026604A1
公开(公告)日：2018-01-25
申请号：US15616080
申请日：2017-06-07
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Tsuyoshi YOKOYAMA , Tokihiro NISHIHARA
IPC: H03H9/17 , H01L41/047 , H01L41/18 , H03H9/70 , H01L41/314 , H01L41/293 , H03H3/02 , H01L41/08 , H03H9/54
CPC classification number: H03H9/17 , H01L41/0472 , H01L41/081 , H01L41/18 , H01L41/293 , H01L41/314 , H03H3/02 , H03H9/02015 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/54 , H03H9/605 , H03H9/706
Abstract: A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate, the piezoelectric film including an aluminum nitride film containing a II-group or XII-group element and a IV-group or V-group element, a concentration of the IV-group or V-group element being higher than a concentration of the II-group or XII-group element in a middle region in a thickness direction, the concentration of the II-group or XII-group element being higher than the concentration of the IV-group or V-group element in at least one of end regions in the thickness direction; and a lower electrode and an upper electrode facing each other across the piezoelectric film.
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公开(公告)号：US20170170807A1
公开(公告)日：2017-06-15
申请号：US15357644
申请日：2016-11-21
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Tsuyoshi YOKOYAMA , Takeshi SAKASHITA , Shinji TANIGUCHI , Tokihiro NISHIHARA
CPC classification number: H03H9/171 , H03H9/02118 , H03H9/173 , H03H9/175 , H03H9/54 , H03H9/587 , H03H9/605
Abstract: A piezoelectric thin film resonator includes: a substrate; a lower electrode and an upper electrode located on the substrate; a piezoelectric film, at least a part of the piezoelectric film being sandwiched between the upper electrode and the lower electrode, the piezoelectric film including a discontinuous portion in which the piezoelectric film discontinues in at least a part of a region surrounding a center region that includes a center of a resonance region where the upper electrode and the lower electrode face each other across the at least a part of the piezoelectric film.
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公开(公告)号：US20150130560A1
公开(公告)日：2015-05-14
申请号：US14527273
申请日：2014-10-29
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Tsuyoshi YOKOYAMA , Tokihiro NISHIHARA , Takeshi SAKASHITA
CPC classification number: H03H9/706 , H01P5/028 , H01P7/082 , H01P11/008 , H03H9/02015 , H03H9/02118 , H03H9/173 , H03H9/175 , H03H9/587 , H03H9/589
Abstract: A piezoelectric thin-film resonator includes, a substrate, a piezoelectric film provided on the substrate, and a lower electrode and an upper electrode that face each other through the piezoelectric film. The piezoelectric film has an air space that is provided in at least part of an outer circumferential part of a resonance region in which the upper and lower electrodes face each other through the piezoelectric film and is not provided in a central part of the resonance region.
Abstract translation: 压电薄膜谐振器包括基板，设置在基板上的压电膜，以及通过压电膜彼此相对的下电极和上电极。 压电膜具有设置在谐振区域的外周部的至少一部分中的空气空间，其中上电极和下电极通过压电膜彼此面对，并且不设置在谐振区域的中心部分。
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Patent Agency Ranking
公开(公告)号：US20170257076A1
公开(公告)日：2017-09-07
申请号：US15416283
申请日：2017-01-26
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Hiroomi KANEKO , Hiroshi KAWAKAMI , Shinji TANIGUCHI , Tokihiro NISHIHARA , Tsuyoshi YOKOYAMA
IPC: H03H9/70 , H01L41/053 , H03H9/17 , H01L41/047 , H03H9/54
CPC classification number: H03H9/02118 , H01L41/0475 , H01L41/0533 , H01L41/187 , H03H9/172 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/706
Abstract: A piezoelectric thin film resonator includes: lower and upper electrodes located on a substrate and facing each other; a piezoelectric film sandwiched between the lower and upper electrodes and including lower and upper piezoelectric films, an outer outline of the upper piezoelectric film coinciding with or being located further out than an outer outline of a resonance region in a region surrounding the resonance region, the outer outline of the upper piezoelectric film being located further in than an outer outline of the lower piezoelectric film in the region; an insertion film interposed between the lower and upper piezoelectric films, located in an outer peripheral region within the resonance region, not located in a central region of the resonance region, and located on an upper surface of the lower piezoelectric film in the region; and a protective film located on the upper electrode in the resonance region, and located so as to cover an end face of the upper piezoelectric film and an upper surface of the insertion film in the region.
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公开(公告)号：US20170033769A1
公开(公告)日：2017-02-02
申请号：US15214786
申请日：2016-07-20
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Tsuyoshi YOKOYAMA
CPC classification number: H03H9/02015 , H03H9/02118 , H03H9/13 , H03H9/173 , H03H9/174 , H03H9/175
Abstract: A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate and having a Poisson's ratio of 0.33 or less; a lower electrode and an upper electrode facing each other across the piezoelectric film; and an insertion film that is located in the piezoelectric film or on a lower surface or an upper surface of the piezoelectric film in an outer peripheral region within a resonance region, in which the lower electrode and the upper electrode face each other across the piezoelectric film, and is not located in a center region of the resonance region, wherein at least one of the lower electrode, the piezoelectric film, and the upper electrode in the outer peripheral region within the resonance region is thinner than the at least one of the lower electrode, the piezoelectric film, and the upper electrode in the center region of the resonance region.
Abstract translation: 压电薄膜谐振器包括：基板; 位于基板上并具有0.33或更小的泊松比的压电薄膜; 下电极和上电极跨过压电膜; 以及插入膜，其位于所述压电膜内或所述压电膜的下表面或上表面内的共振区域内的外周区域中，所述下电极和所述上电极在所述压电膜之间彼此面对 并且不位于谐振区域的中心区域中，其中在谐振区域内的外周区域中的下电极，压电膜和上电极中的至少一个比下部电极中的至少一个薄 电极，压电膜以及谐振区域的中心区域中的上部电极。
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公开(公告)号：US20160353221A1
公开(公告)日：2016-12-01
申请号：US15142925
申请日：2016-04-29
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Ryuichi OKAMURA , Hiroshi KAWAKAMI , Hiroomi KANEKO , Shinji TANIGUCHI , Tsuyoshi YOKOYAMA
CPC classification number: H04R31/006 , H04R17/00 , H04R17/005 , H04R2201/003
Abstract: A piezoelectric thin film resonator includes: a lower electrode and an upper electrode facing each other across a piezoelectric film; an insertion film inserted into the piezoelectric film, located in at least a part of an outer peripheral region in a resonance region and outside the outer peripheral region, and not located in a center region of the resonance region; a protective film on the upper electrode and the piezoelectric film; and a wiring line connecting to the lower electrode and covering an outer periphery of the protective film in an extraction region of the lower electrode, wherein in the extraction region, an outer periphery of the insertion film is further out than an outer periphery of the upper electrode and further in than an outer periphery of the piezoelectric film, and the outer periphery of the protective film is further out than the outer periphery of the insertion film.
Abstract translation: 一种压电薄膜谐振器包括：一个下电极和一个上电极，横跨压电膜彼此面对; 插入到所述压电膜中的插入膜，位于所述共振区域的外周区域的外周区域的外周区域的至少一部分中，并且不位于所述共振区域的中心区域; 上电极和压电膜上的保护膜; 以及连接到下电极并在下电极的提取区域中覆盖保护膜的外周的布线，其中在提取区域中，插入膜的外周比上层的外周更远 电极，并且比压电膜的外周更进一步，保护膜的外周比插入膜的外周更远。
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公开(公告)号：US20180219528A1
公开(公告)日：2018-08-02
申请号：US15877070
申请日：2018-01-22
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Jiansong LIU , Tokihiro NISHIHARA , Tsuyoshi YOKOYAMA , Shinji TANIGUCHI , Taisei IRIEDA
CPC classification number: H03H9/175 , H03H3/02 , H03H9/02015 , H03H9/02118 , H03H9/131 , H03H9/587 , H03H9/589 , H03H2003/021
Abstract: A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film; and an insertion film that is inserted between the lower electrode and the upper electrode, is located in an outer peripheral region within a resonance region where the lower electrode and the upper electrode face each other across the piezoelectric film, is located in a region that is located outside the resonance region and surrounds the resonance region, is not located in a center region of the resonance region, and includes a first part, which is located in the resonance region and has a first film thickness, and a second part, which is located outside the resonance region and has a second film thickness, the first film thickness being less than the second film thickness.
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公开(公告)号：US20170230031A1
公开(公告)日：2017-08-10
申请号：US15417725
申请日：2017-01-27
Applicant: TAIYO YUDEN CO., LTD.
Inventor： Tsuyoshi YOKOYAMA , Jiansong LIU
Abstract: A piezoelectric thin film resonator includes: a substrate; a lower electrode located on the substrate; a piezoelectric film that has a step on an upper surface thereof and is located on the lower electrode, a film thickness of the piezoelectric film inside the step being greater than a film thickness of the piezoelectric film outside the step; an upper electrode located on the piezoelectric film so that a resonance region is formed, the lower electrode and the upper electrode facing each other across the piezoelectric film in the resonance region, the resonance region including the step in plan view; and an insertion film located in the piezoelectric film, between the piezoelectric film and the lower electrode, or between the piezoelectric film and the upper electrode in at least a part of an outer peripheral region within the resonance region, and not located in a central region of the resonance region.
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