MAGNETICALLY ACTUATED MEMS SWITCH
    2.
    发明申请

    公开(公告)号:US20190318893A1

    公开(公告)日:2019-10-17

    申请号:US16377418

    申请日:2019-04-08

    Abstract: A magnetically actuated MEMS switch 100 includes a first magnetic core portion 120, a first signal line 15, a first contact point 16, a second magnetic core portion 220, a second signal line 25, a second contact point 26, and a first coil portion 111 and a second coil portion 211 serving as a magnetic field applying portion that causes a current to flow in conductor coil to apply a magnetic field to the first magnetic core portion 120 and the second magnetic core portion 220. The first contact point 16 is displaced depending on the presence or absence of a magnetic field applied by the magnetic field applying portion. Connection and disconnection between the first contact point 16 and the second contact point 26 are switched in response to displacement of the first contact point 16.

    MAGNETICALLY ACTUATED MEMS SWITCH

    公开(公告)号:US20210313130A1

    公开(公告)日:2021-10-07

    申请号:US17354432

    申请日:2021-06-22

    Abstract: A magnetically actuated MEMS switch 100 includes a first magnetic core portion 120, a first signal line 15, a first contact point 16, a second magnetic core portion 220, a second signal line 25, a second contact point 26, and a first coil portion 111 and a second coil portion 211 serving as a magnetic field applying portion that causes a current to flow in conductor coil to apply a magnetic field to the first magnetic core portion 120 and the second magnetic core portion 220. The first contact point 16 is displaced depending on the presence or absence of a magnetic field applied by the magnetic field applying portion. Connection and disconnection between the first contact point 16 and the second contact point 26 are switched in response to displacement of the first contact point 16.

    THIN FILM CAPACITOR
    7.
    发明申请
    THIN FILM CAPACITOR 审中-公开
    薄膜电容器

    公开(公告)号:US20160293334A1

    公开(公告)日:2016-10-06

    申请号:US15083649

    申请日:2016-03-29

    Abstract: A lower electrode (4) can have an uneven surface structure. An upper electrode (6) can also have the uneven surface structure. A projecting portion of the upper electrode (6) projecting to the lower electrode side is positioned in a gap between projecting portions of the lower electrode (4) and the lower electrode (4) includes Cu as a main component. Young's moduli of a substrate (1), a stress adjustment layer (2), and the lower electrode (4) have a specific relation. Also, corner portions of radii (R1) of curvature positioned inside a projecting portion (4b) have a specific relation.

    Abstract translation: 下电极(4)可以具有不均匀的表面结构。 上电极(6)也可以具有不平坦的表面结构。 上部电极(6)的突出于下部电极侧的突出部分位于下部电极(4)的突出部分之间的间隙中,下部电极(4)包括Cu作为主要部件。 衬底(1),应力调节层(2)和下电极(4)的杨氏模具具有特定的关系。 此外,位于突出部分(4b)内部的曲率半径(R1)的角部分具有特定的关系。

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