Aluminum oxide humidity sensor
    6.
    发明授权

    公开(公告)号:US3574681A

    公开(公告)日:1971-04-13

    申请号:US3574681D

    申请日:1968-10-09

    Inventor: CECIL OLIN B

    CPC classification number: G01N27/121 Y10T29/49002 Y10T29/49082

    Abstract: AN ALUMINUM OXIDE HUMIDITY SENSOR IS FABRICATED BY A SEQUENCE OF STEPS BEGINNING WITH THE ANODIZATION OF AN ALUMINUM BODY TO FORM A SURFACE LAYER OF DENSE ALUMINUM OXIDE ON THE ALUMINUM BODY AND A LAYER OF POROUS ALUMINUM OXIDE ON THE DENSE LAYER. THE POROUS ALUMINUM OXIDE IS THEN SEPARATED FROM THE DENSE ALUMINUM OXIDE, AND AN ELECTRODE IS FORMED ON EACH OF THE OPPOSITE FACES OF THE ALUMINUM OXIDE, AT LEAST ONE OF THE ELECTRODES BEING PERVIOUS TO WATER VAPOR.

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