公开(公告)号：US20160086960A1

公开(公告)日：2016-03-24

申请号：US14728683

申请日：2015-06-02

Applicant: Texas Instruments Incorporated

Inventor： Huang-Chun Wen ,  Richard Allen Bailey ,  Antonio Guillermo Acosta ,  John A. Rodriguez ,  Scott Robert Summerfelt ,  Kemal Tamer San

IPC: H01L27/115 ,  H01L21/02 ,  H01L29/78 ,  H01L23/31 ,  H01L23/29 ,  H01L21/326 ,  H01L23/00

CPC classification number: H01L27/11507 ,  H01L21/02118 ,  H01L21/0217 ,  H01L21/02197 ,  H01L21/02318 ,  H01L21/56 ,  H01L23/3114 ,  H01L23/3192 ,  H01L23/562 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L2224/024 ,  H01L2224/0401 ,  H01L2224/05569 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2924/07025 ,  H01L2924/014

Abstract: Curing of a passivation layer applied to the surface of a ferroelectric integrated circuit so as to enhance the polarization characteristics of the ferroelectric structures. A passivation layer, such as a polyimide, is applied to the surface of the ferroelectric integrated circuit after fabrication of the active devices. The passivation layer is cured by exposure to a high temperature, below the Curie temperature of the ferroelectric material, for a short duration such as on the order of ten minutes. Variable frequency microwave energy may be used to effect such curing. The cured passivation layer attains a tensile stress state, and as a result imparts a compressive stress upon the underlying ferroelectric material. Polarization may be further enhanced by polarizing the ferroelectric material prior to the cure process.

Abstract translation: 固化施加到铁电集成电路的表面的钝化层，以增强铁电结构的极化特性。 在制造有源器件之后，将钝化层（例如聚酰亚胺）施加到铁电集成电路的表面。 钝化层通过暴露于低于铁电材料的居里温度的高温固化，持续时间短，例如十分钟左右。 可以使用变频微波能量来实现这种固化。 固化的钝化层达到拉伸应力状态，结果赋予了下伏的铁电材料的压应力。 在固化过程之前极化铁电材料可以进一步提高极化。

公开(公告)号：US11495607B2

公开(公告)日：2022-11-08

申请号：US16056827

申请日：2018-08-07

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Huang-Chun Wen ,  Richard Allen Bailey ,  Antonio Guillermo Acosta ,  John A. Rodriguez ,  Scott Robert Summerfelt ,  Kemal Tamer San

IPC: H01L27/11507 ,  H01L21/02 ,  H01L23/31 ,  H01L21/56 ,  H01L23/00

Abstract: Curing of a passivation layer applied to the surface of a ferroelectric integrated circuit so as to enhance the polarization characteristics of the ferroelectric structures. A passivation layer, such as a polyimide, is applied to the surface of the ferroelectric integrated circuit after fabrication of the active devices. The passivation layer is cured by exposure to a high temperature, below the Curie temperature of the ferroelectric material, for a short duration such as on the order of ten minutes. Variable frequency microwave energy may be used to effect such curing. The cured passivation layer attains a tensile stress state, and as a result imparts a compressive stress upon the underlying ferroelectric material. Polarization may be further enhanced by polarizing the ferroelectric material prior to the cure process.