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公开(公告)号:US11183460B2
公开(公告)日:2021-11-23
申请号:US16132906
申请日:2018-09-17
Applicant: Texas Instruments Incorporated
Inventor: Woochan Kim , Mutsumi Masumoto , Kengo Aoya , Vivek Kishorechand Arora , Anindya Poddar
IPC: H01L23/538 , H01L23/373 , H01L21/56 , H01L23/498
Abstract: Packaged electronic devices and integrated circuits include a ceramic material or other thermally conductive, electrically insulating substrate with a patterned electrically conductive feature on a first side, and an electrically conductive layer on a second side. The IC further includes a semiconductor die mounted to the substrate, the semiconductor die including an electrically conductive contact structure, and an electronic component, with an electrically insulating lamination structure enclosing the semiconductor die, the frame and the thermal transfer structure. A redistribution layer with a conductive structure is electrically connected to the electrically conductive contact structure.
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公开(公告)号:US20150147845A1
公开(公告)日:2015-05-28
申请号:US14552548
申请日:2014-11-25
Applicant: Texas Instruments Incorporated
Inventor: Anindya Poddar , Mark Allen Gerber , Mutsumi Masumoto , Masamitsu Matsuura , Kengo Aoya , Takeshi Onogami
IPC: H01L25/00 , H01L21/304 , H01L21/683 , H01L21/3213 , H01L21/321 , H01L21/3105 , H01L21/768
CPC classification number: H01L21/561 , H01L21/4857 , H01L21/568 , H01L21/6836 , H01L23/49822 , H01L23/49827 , H01L23/5389 , H01L24/19 , H01L24/96 , H01L24/97 , H01L2221/68327 , H01L2221/68345 , H01L2224/04105 , H01L2924/12042 , H01L2924/18162 , H01L2924/3511 , H01L2924/00
Abstract: Embodiments of the invention provide a method for forming a dual sided embedded die system. The method begins with starting material including a top surface and a bottom surface, a plurality of vias, a plurality of plated metal posts, die pads, and stiffeners. The surface are planarized to expose the included metal which is than selectively etching from die attach pad DAP areas to form cavities. Create a stiffener by using photo resist patterning and plating. Apply tacky tape. Attach a die. Laminate and grind. Remove tacky tape. Form redistribution layers RDLs and a solder mask. Mounting Surface Mount Devices.
Abstract translation: 本发明的实施例提供了一种用于形成双面嵌入式模具系统的方法。 该方法从起始材料开始,包括顶表面和底表面,多个通孔,多个电镀金属柱,冲压垫和加强件。 将表面平坦化以暴露所包含的金属,其不是从管芯附着垫DAP区域选择性地蚀刻以形成空腔。 通过使用光刻胶图案和电镀创建一个加强筋。 涂抹胶带。 附上一个模具 层压和研磨。 去除胶带。 形式重新分配层RDL和焊接掩模。 安装表面贴装器件。
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公开(公告)号:US11410875B2
公开(公告)日:2022-08-09
申请号:US16225875
申请日:2018-12-19
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Hau Thanh Nguyen , Woochan Kim , Yi Yan , Luu Thanh Nguyen , Ashok Prabhu , Anindya Poddar , Masamitsu Matsuura , Kengo Aoya , Mutsumi Masumoto
IPC: H01L21/768 , H01L23/528 , H01L23/31 , H01L23/00
Abstract: An electronic device (100) includes a substrate (110) and an integrated circuit (120) provided on the substrate (110) having a surface facing away from the substrate (110). An insulating layer (150) extends over the substrate (110) and around the integrated circuit (120) to define an interface (154) between the insulating layer (150) and the integrated circuit (120). An electrically conductive via (130) is provided on the surface of the integrated circuit (120). An insulating material (140) extends over the via (130) and includes an opening (142) exposing a portion of the via (130). A repassivation member (162) extends over the insulating layer (150) and has a surface (164) aligned with the interface (154). An electrically conductive redistribution member (181) is electrically connected to the via (130) and extends over the repassivation member (162) into contact with the insulating layer (150).
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公开(公告)号:US11183441B2
公开(公告)日:2021-11-23
申请号:US16808018
申请日:2020-03-03
Applicant: Texas Instruments Incorporated
Inventor: Woochan Kim , Masamitsu Matsuura , Mutsumi Masumoto , Kengo Aoya , Hau Thanh Nguyen , Vivek Kishorechand Arora , Anindya Poddar
IPC: H01L23/10 , H01L23/34 , H01L23/367 , H01L21/56 , H01L23/00 , H01L23/373
Abstract: The disclosed principles provide a stress buffer layer between an IC die and heat spreader used to dissipate heat from the die. The stress buffer layer comprises distributed pairs of conductive pads and a corresponding set of conductive posts formed on the conductive pads. In one embodiment, the stress buffer layer may comprise conductive pads laterally distributed over non-electrically conducting surfaces of an embedded IC die to thermally conduct heat from the IC die. In addition, such a stress buffer layer may comprise conductive posts laterally distributed and formed directly on each of the conductive pads. Each of the conductive posts thermally conduct heat from respective conductive pads. In addition, each conductive post may have a lateral width less than a lateral width of its corresponding conductive pad. A heat spreader is then formed over the conductive posts which thermally conducts heat from the conductive posts through the heat spreader.
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公开(公告)号:US20190385924A1
公开(公告)日:2019-12-19
申请号:US16008119
申请日:2018-06-14
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Woochan Kim , Masamitsu Matsuura , Mutsumi Masumoto , Kengo Aoya , Hau Thanh Nguyen , Vivek Kishorechand Arora , Anindya Poddar
IPC: H01L23/367 , H01L21/56 , H01L23/00
Abstract: The disclosed principles provide a stress buffer layer between an IC die and heat spreader used to dissipate heat from the die. The stress buffer layer comprises distributed pairs of conductive pads and a corresponding set of conductive posts formed on the conductive pads. In one embodiment, the stress buffer layer may comprise conductive pads laterally distributed over non-electrically conducting surfaces of an embedded IC die to thermally conduct heat from the IC die. In addition, such a stress buffer layer may comprise conductive posts laterally distributed and formed directly on each of the conductive pads. Each of the conductive posts thermally conduct heat from respective conductive pads. In addition, each conductive post may have a lateral width less than a lateral width of its corresponding conductive pad. A heat spreader is then formed over the conductive posts which thermally conducts heat from the conductive posts through the heat spreader.
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公开(公告)号:US20160240392A1
公开(公告)日:2016-08-18
申请号:US15137114
申请日:2016-04-25
Applicant: Texas Instruments Incorporated
Inventor: Anindya Poddar , Mark Allen Gerber , Mutsumi Masumoto , Masamitsu Matsuura , Kengo Aoya , Takeshi Onogami
CPC classification number: H01L21/561 , H01L21/4857 , H01L21/568 , H01L21/6836 , H01L23/49822 , H01L23/49827 , H01L23/5389 , H01L24/19 , H01L24/96 , H01L24/97 , H01L2221/68327 , H01L2221/68345 , H01L2224/04105 , H01L2924/12042 , H01L2924/18162 , H01L2924/3511 , H01L2924/00
Abstract: Embodiments of the invention provide a method for forming a dual sided embedded die system. The method begins with starting material including a top surface and a bottom surface, a plurality of vias, a plurality of plated metal posts, die pads, and stiffeners. The surface are planarized to expose the included metal which is than selectively etching from die attach pad DAP areas to form cavities. Create a stiffener by using photo resist patterning and plating. Apply tacky tape. Attach a die. Laminate and grind. Remove tacky tape. Form redistribution layers RDLs and a solder mask. Mounting Surface Mount Devices.
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公开(公告)号:US20140069989A1
公开(公告)日:2014-03-13
申请号:US14024803
申请日:2013-09-12
Applicant: Texas Instruments Incorporated
Inventor: Mutsumi Masumoto
IPC: H01L21/50
CPC classification number: H01L21/50 , H01L24/75 , H01L24/81 , H01L2224/13144 , H01L2224/75303 , H01L2224/75317 , H01L2224/75745 , H01L2224/81121 , H01L2224/81191 , H01L2224/81203 , H01L2924/10253 , Y10T156/1168 , H01L2924/00 , H01L2924/00014
Abstract: The embodiments of the invention provide a semiconductor chip mounting methods to prevent the occurrence of particles created while mounting a thin semiconductor chip onto a substrate. A semiconductor chip having conductive bumps on its main surface is held by its back via an elastic film using a suction tool having a plurality of suction holes, the semiconductor chip is positioned against a substrate provided with connection wires corresponding to said conductive bumps, and the semiconductor chip is mounted onto the substrate in such a manner that the conductive bumps connect to said connection wires, and uniform pressure is applied from the oversized bonding tool suction to the semiconductor chip via said film while said semiconductor chip is being pressed against said substrate by oversized bonding tool to keep constant pressure in order to bond said conductive bumps with said connection wires. The film assisted bonding tool has a film cooling system to assist in making vacuum holes and a through-hole tool movable relative to the bonding head to create a plurality of holes in said assist film with a plurality of needles.
Abstract translation: 本发明的实施例提供一种半导体芯片安装方法,以防止在将薄半导体芯片安装到基板上时产生的颗粒的出现。 在其主表面上具有导电凸块的半导体芯片通过使用具有多个吸孔的抽吸工具通过弹性膜由其背面保持,半导体芯片位于与设置有与所述导电凸块相对应的连接线的基板上, 将半导体芯片以这样的方式安装到基板上,使得导电凸块连接到所述连接线,并且通过所述薄膜将超大的焊接工具抽吸均匀地施加到半导体芯片上,同时所述半导体芯片被所述衬底压靠在所述衬底上 超大的焊接工具以保持恒定的压力,以便将所述导电凸块与所述连接线接合。 薄膜辅助粘结工具具有薄膜冷却系统,以帮助制造真空孔,并且通孔工具相对于粘合头可移动,以在多个针中在所述辅助薄膜中产生多个孔。
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公开(公告)号:US12154861B2
公开(公告)日:2024-11-26
申请号:US16669666
申请日:2019-10-31
Applicant: Texas Instruments Incorporated
Inventor: Woochan Kim , Masamitsu Matasuura , Mutsumi Masumoto , Kengo Aoya , Hau Thanh Nguyen , Vivek Kishorechand Arora , Anindya Poddar , Hideaki Matsunaga
IPC: H01L23/538 , H01L21/48 , H01L21/56 , H01L23/00 , H01L23/31
Abstract: In one example, embedded die package, including a layer having an exposed boundary, wherein at least a portion of the exposed boundary comprises organic material. The package also includes at least one integrated circuit die positioned in the layer and within the exposed boundary. The package also includes a dielectric material positioned in the layer and between the at least one integrated circuit and structure adjacent the at least one integrated circuit.
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公开(公告)号:US11158595B2
公开(公告)日:2021-10-26
申请号:US16028741
申请日:2018-07-06
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor: Woochan Kim , Masamitsu Matsuura , Mutsumi Masumoto , Kengo Aoya , Hau Thanh Nguyen , Vivek Kishorechand Arora , Anindya Poddar
IPC: H01L23/48 , H01L23/00 , H01L25/065 , H01L23/532 , H01L21/56 , H01L23/31 , H01L25/00 , H01L23/29 , H01L23/528 , H01L23/522 , H01L23/538 , H01L23/433 , H01L23/367
Abstract: An embedded die package includes a first die having an operating voltage between a first voltage potential and a second voltage potential that is less than the first voltage potential. A via, including a conductive material, is electrically connected to a bond pad on a surface of the first die, the via including at least one extension perpendicular to a plane along a length of the via. A redistribution layer (RDL) is electrically connected to the via, at an angle with respect to the via defining a space between the surface and a surface of the RDL. A build-up material is in the space.
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公开(公告)号:US20210134729A1
公开(公告)日:2021-05-06
申请号:US16669666
申请日:2019-10-31
Applicant: Texas Instruments Incorporated
Inventor: Woochan Kim , Masamitsu Matasuura , Mutsumi Masumoto , Kengo Aoya , Hau Thanh Nguyen , Vivek Kishorechand Arora , Anindya Poddar , Hideaki Matsunaga
IPC: H01L23/538 , H01L23/31 , H01L23/00 , H01L21/56 , H01L21/48
Abstract: In one example, embedded die package, including a layer having an exposed boundary, wherein at least a portion of the exposed boundary comprises organic material. The package also includes at least one integrated circuit die positioned in the layer and within the exposed boundary. The package also includes a dielectric material positioned in the layer and between the at least one integrated circuit and structure adjacent the at least one integrated circuit.
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