公开(公告)号：US10324028B2

公开(公告)日：2019-06-18

申请号：US15504501

申请日：2015-02-23

申请人： TOHOKU UNIVERSITY

发明人： Shigetoshi Sugawa ,  Rihito Kuroda

IPC分类号： G01N21/00 ,  G01N21/31 ,  G01N21/03 ,  G01N21/3504 ,  A61B5/145 ,  A61B5/1455 ,  G01N21/35 ,  G01N21/15 ,  A61B5/00 ,  A61B5/11 ,  A61B5/1477

摘要： To provide a concentration measuring method with which the concentration of a predetermined chemical component can be accurately, quickly, and nondestructively measured down to a concentration range of an extremely small amount with a simple means, and to provide a concentration measuring method with which the concentration of a chemical component in an object to be measured can be accurately and quickly measured down to a concentration range of a nano-order extremely small amount in real time, the method having universality, i.e., the ability to be embodied in various forms and modes. Light having a first wavelength and light having a second wavelength, which have different light absorptances with respect to an object to be measured, are each radiated onto the object to be measured using a time-sharing method; the light having the first wavelength and the light having the second wavelength, optically passing through the object to be measured as a result of the irradiation with the light having the first and second wavelengths, are received with a common light receiving sensor; a differential signal between a signal related to the light having the first wavelength and a signal related to the light having the second wavelength to be output from the light receiving sensor according to the received light is formed; and the concentration of a chemical component in the object to be measured is derived on the basis of the differential signal.

公开(公告)号：US09568364B2

公开(公告)日：2017-02-14

申请号：US14937095

申请日：2015-11-10

申请人： Tohoku University

发明人： Shigetoshi Sugawa ,  Rihito Kuroda

IPC分类号： H01L21/00 ,  G01J3/28 ,  H01L27/146 ,  H01L31/06 ,  H01L31/18 ,  H01L27/144 ,  H01L31/103

CPC分类号： G01J3/2803 ,  G01J3/2823 ,  G01J2003/2813 ,  H01L27/1446 ,  H01L27/14601 ,  H01L27/14609 ,  H01L27/14643 ,  H01L31/02363 ,  H01L31/06 ,  H01L31/103 ,  H01L31/18 ,  H01L31/1804 ,  H01L31/1864 ,  Y02E10/50 ,  Y02E10/547 ,  Y02P70/521

摘要： Provided is a photodiode having a high-concentration layer on its surface, in which the high-concentration layer is formed so that the thickness of a non-depleted region is larger than the roughness of an interface between silicon and an insulation film layer, and is smaller than a penetration depth of ultraviolet light.

摘要翻译： 提供了在其表面上具有高浓度层的光电二极管，其中形成高浓度层，使得非耗尽区的厚度大于硅与绝缘膜层之间的界面的粗糙度，以及 小于紫外线的穿透深度。

公开(公告)号：US20150296160A1

公开(公告)日：2015-10-15

申请号：US14438260

申请日：2013-10-28

申请人： SHIMADZU CORPORATION ,  TOHOKU UNIVERSITY

发明人： Hideki Tominaga ,  Ryuta Hirose ,  Kenji Takubo ,  Shigetoshi Sugawa ,  Rihito Kuroda

IPC分类号： H04N5/378 ,  H04N5/376

CPC分类号： H04N5/378 ,  H01L27/14609 ,  H04N5/3692 ,  H04N5/3742 ,  H04N5/3765

摘要： A logical gate circuit (5) and four stages of flip flips (4a-4d) are assigned to each pixel (1). A controller (7) inputs four phase identification signals into the logical gate circuit (5) and also inputs a start signal STR into a shift register (4) synchronously with the four mutually different phases defined by the phase identification signals. During one round of scanning all the pixels (1) for a readout control, if an enable signal ENBL is set to “0” while an output of a phase identification circuit (110) is “1”, a charge accumulation time at the pixel (1) concerned becomes equal to a readout period T. If the enable signal ENBL is set to “1” while the output of the phase identification circuit (110) is “1”, electric charges accumulated in a photodiode (11) until that point are entirely discarded, so that the charge accumulation time becomes shorter than the readout period T. Thus, the charge accumulation time at each pixel (1) can be controlled to ensure an adequate SN ratio while avoiding signal saturation at some pixels even if the light source has a bright line at a specific wavelength.

摘要翻译： 逻辑门电路（5）和四级翻盖（4a-4d）被分配给每个像素（1）。 控制器（7）将四个相位识别信号输入到逻辑门电路（5）中，并且与由相位识别信号定义的四个相互不同的相位同步地将起始信号STR输入到移位寄存器（4）中。 在扫描所有像素（1）的一轮扫描读出控制期间，如果在相位识别电路（110）的输出为“1”的情况下使能信号ENBL被设置为“0”，则像素处的电荷累积时间 （1）相当于读出期间T.如果在相位识别电路（110）的输出为“1”的情况下将使能信号ENBL设定为“1”，则在该光电二极管（11）中累积的电荷直到那 点被完全丢弃，使得电荷累积时间变得比读出周期T短。因此，可以控制每个像素（1）处的电荷累积时间，以确保足够的SN比，同时避免某些像素处的信号饱和，即使 光源在特定波长处具有亮线。

公开(公告)号：US09137469B2

公开(公告)日：2015-09-15

申请号：US14302516

申请日：2014-06-12

申请人： TOHOKU UNIVERSITY ,  OLYMPUS CORPORATION

发明人： Shigetoshi Sugawa

IPC分类号： H04N5/374 ,  H04N5/363 ,  H04N5/3745

CPC分类号： H04N5/3742 ,  H04N5/363 ,  H04N5/37457

摘要： Reset noise in pixels is removed. A solid-state imaging device includes pixels arranged in row and column directions, in which each of the pixels includes a charge-voltage conversion terminal for voltage-converting signal charges transferred from a photoelectric conversion element by a transfer means, and a first reset means for resetting a voltage at the charge-voltage conversion terminal; signal lines, each of which is connected to the pixels in each column; a scanning means for selecting one row among others; and constant current circuit elements for supplying constant current to the signal lines. In the device, within each selected row, each reset voltage at each charge-voltage conversion terminal and a converted voltage from transferred signal charges are read out to and stored in each signal line supplied with constant current by each constant current circuit element, and then output.

摘要翻译： 去除重置噪点（以像素为单位）。 固态成像装置包括以行和列方向布置的像素，其中每个像素包括用于通过转印装置对从光电转换元件传送的信号电荷进行电压转换的电荷电压转换端，以及第一复位装置 用于复位所述充电电压转换端子处的电压; 信号线，每条信号线连接到每列中的像素; 用于选择一行等的扫描装置; 以及用于向信号线提供恒定电流的恒流电路元件。 在该设备中，在每个选定的行内，每个充电电压转换端子处的每个复位电压和来自传送的信号电荷的转换电压被每个恒流电路元件读出并存储在由恒定电流提供的每条信号线中，然后 输出。

公开(公告)号：US20140097510A1

公开(公告)日：2014-04-10

申请号：US14124129

申请日：2012-06-04

申请人： SHIMADZU CORPORATION ,  TOHOKU UNIVERSITY

发明人： Shigetoshi Sugawa ,  Rihito Kuroda

IPC分类号： H01L27/146 ,  H01L31/18 ,  H01L31/06

CPC分类号： G01J3/2803 ,  G01J3/2823 ,  G01J2003/2813 ,  H01L27/1446 ,  H01L27/14601 ,  H01L27/14609 ,  H01L27/14643 ,  H01L31/02363 ,  H01L31/06 ,  H01L31/103 ,  H01L31/18 ,  H01L31/1804 ,  H01L31/1864 ,  Y02E10/50 ,  Y02E10/547 ,  Y02P70/521

摘要： Provided is a photodiode having a high-concentration layer on its surface, in which the high-concentration layer is formed so that the thickness of a non-depleted region is larger than the roughness of an interface between silicon and an insulator layer, and is smaller than a penetration depth of ultraviolet light.

摘要翻译： 提供了在其表面上具有高浓度层的光电二极管，其中形成高浓度层，使得非耗尽区的厚度大于硅与绝缘体层之间的界面的粗糙度，并且是 小于紫外线的穿透深度。

公开(公告)号：US11343458B2

公开(公告)日：2022-05-24

申请号：US16615647

申请日：2018-04-23

申请人： TOHOKU UNIVERSITY

发明人： Shigetoshi Sugawa ,  Rihito Kuroda

IPC分类号： H04N5/378 ,  G01J1/46 ,  H04N5/372

摘要： A light-receiving device that achieves both high saturation performance and high sensitivity performance includes a light-receiving pixel including a light-receiving element, a first capacitive element that accumulates a photoelectric charge produced by light received by the light-receiving element, a second capacitive element that accumulates a transferred portion of an amount of the photoelectric charge accumulated in the capacitive element, a switch means for turning on and off a photoelectric charge transfer operation from the capacitive element to the capacitive element, a resetting switch means for resetting the capacitive element and the capacitive element, a pixel selecting switch means, and a source follower switch means. An effective saturation capacity of the capacitive element is 10 to 5,000 times an effective saturation capacity of the capacitive element.

公开(公告)号：US10553626B2

公开(公告)日：2020-02-04

申请号：US15307883

申请日：2015-05-07

申请人： TOHOKU UNIVERSITY

发明人： Shigetoshi Sugawa ,  Rihito Kuroda

IPC分类号： H01L27/144 ,  H01L31/103 ,  G01J1/42 ,  G01J1/44 ,  H01L31/0352

摘要： To provide a solid-state light-receiving device for ultraviolet light which can measure the amount of irradiation with ultraviolet light harmful to the human body using a simplified structure and properly and accurately, which can be readily integrated with a sensor of a peripheral circuit, which is small, light-weight, and low-cost, and which is suitable for mobile or wearable purposes. One solution is a solid-state light-receiving device for ultraviolet light which is provided with a first photodiode (1), a second photodiode (2), and a differential circuit which receives respective signals based on outputs from these photodiodes, wherein a position of the maximum concentration of a semiconductor impurity is provided in each of the photodiodes (1,2) and in a semiconductor layer region formed on each photodiode, and an optically transparent layer having a different wavelength selectivity is provided on a light-receiving surface of each photodiode.

公开(公告)号：US20180234652A1

公开(公告)日：2018-08-16

申请号：US15923136

申请日：2018-03-16

申请人： TOHOKU UNIVERSITY

发明人： Shigetoshi Sugawa ,  Rihito Kuroda ,  Shunichi Wakashima

IPC分类号： H04N5/378 ,  H04N5/3745 ,  H04N5/355

CPC分类号： H04N5/378 ,  H01L27/14616 ,  H04N5/3559 ,  H04N5/3745

摘要： One problem addressed by the present invention is to provide an optical sensor, a solid-state imaging device, and methods for reading the signals therefrom, which contribute greatly to the development of industry and the realization of a safer and more secure society. One solution according to the present invention is an optical sensor having a light-receiving element, storage capacitors that store a charge, and a transfer switch for transferring to the storage capacitors a charge generated by light input to the light-receiving element, wherein the storage capacitors are a floating diffusion capacitor and a lateral overflow integration capacitor, and the transfer switch is a non-LDD/MOS transistor, that is, a non-LDD/MOS transistor for which the impurity concentration of the drain region is reduced by 50%.

公开(公告)号：US20170254743A1

公开(公告)日：2017-09-07

申请号：US15504501

申请日：2015-02-23

申请人： TOHOKU UNIVERSITY

发明人： Shigetoshi Sugawa ,  Rihito Kuroda

IPC分类号： G01N21/31 ,  A61B5/145 ,  A61B5/1455

CPC分类号： G01N21/31 ,  A61B5/1112 ,  A61B5/1122 ,  A61B5/14532 ,  A61B5/14535 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/1477 ,  A61B5/4227 ,  A61B5/6898 ,  A61B2505/07 ,  G01N21/031 ,  G01N21/0332 ,  G01N21/3151 ,  G01N21/35 ,  G01N21/3504 ,  G01N2021/158 ,  G01N2021/3159 ,  G01N2021/3181 ,  G01N2201/08

摘要： To provide a concentration measuring method with which the concentration of a predetermined chemical component can be accurately, quickly, and nondestructively measured down to a concentration range of an extremely small amount with a simple means, and to provide a concentration measuring method with which the concentration of a chemical component in an object to be measured can be accurately and quickly measured down to a concentration range of a nano-order extremely small amount in real time, the method having universality, i.e., the ability to be embodied in various forms and modes. Light having a first wavelength and light having a second wavelength, which have different light absorptances with respect to an object to be measured, are each radiated onto the object to be measured using a time-sharing method; the light having the first wavelength and the light having the second wavelength, optically passing through the object to be measured as a result of the irradiation with the light having the first and second wavelengths, are received with a common light receiving sensor; a differential signal between a signal related to the light having the first wavelength and a signal related to the light having the second wavelength to be output from the light receiving sensor according to the received light is formed; and the concentration of a chemical component in the object to be measured is derived on the basis of the differential signal.

公开(公告)号：US11662328B2

公开(公告)日：2023-05-30

申请号：US17358292

申请日：2021-06-25

申请人： OHT inc. ,  TOHOKU UNIVERSITY

发明人： Toshiro Yasuda ,  Kazutoshi Kamibayashi ,  Shigetoshi Sugawa ,  Rihito Kuroda ,  Tetsuya Goto

IPC分类号： G01N27/24

CPC分类号： G01N27/24

摘要： A capacitive sensor includes a sensing electrode, a first electrode pad, a substrate, and a second electrode pad. The sensing electrode outputs a signal corresponding to a capacitance between the sensing electrode and a detection target. The first electrode pad is coupled to the sensing electrode. The substrate includes a substrate surface portion and a step portion. On the substrate surface portion are the sensing electrode and the first electrode pad mounted. The step portion is provided at a position in the substrate lower than the substrate surface portion. The second electrode pad is mounted on the step portion and coupled to an external line.