公开(公告)号：US20230215700A1

公开(公告)日：2023-07-06

申请号：US18121611

申请日：2023-03-15

Applicant: Tokyo Electron Limited

Inventor： Kae KUMAGAI ,  Motoi TAKAHASHI ,  Ryutaro SUDA ,  Maju TOMURA ,  Yoshihide KIHARA ,  Takatoshi ORUI

IPC: H01J37/32 ,  H01L21/02

CPC classification number: H01J37/32449 ,  H01J37/32715 ,  H01J37/32798 ,  H01L21/02164 ,  H01L21/0217 ,  H01J37/32082 ,  H01J37/32458 ,  H01J2237/334

Abstract: A substrate processing method includes placing a substrate with a dielectric film on a substrate support in a chamber, and etching the dielectric film with plasm generated from a reaction gas containing an HF gas and at least one CxHyFz gas selected from the group consisting of a C4H2F6 gas, a C4H2F8 gas, a C3H2F4 gas, and a C3H2F6 gas. The etching includes setting the substrate support at a temperature of 0° C. or lower and setting the HF gas to a flow rate greater than a flow rate of the CxHyFz gas.

公开(公告)号：US20230215691A1

公开(公告)日：2023-07-06

申请号：US18121608

申请日：2023-03-15

Applicant: Tokyo Electron Limited

Inventor： Ryutaro SUDA ,  Takatoshi ORUI ,  Kae KUMAGAI ,  Maju TOMURA ,  Yoshihide KIHARA

IPC: H01J37/32

CPC classification number: H01J37/32082 ,  H01J37/3244 ,  H01J37/32458 ,  H01J37/32798 ,  H01J2237/334

Abstract: A technique increases verticality in etching. An etching method is a method for etching a target film with a plasma processing apparatus including a chamber and a substrate support located in the chamber to support a substrate, the substrate support holding a substrate that includes the target film, the target film including a patterned mask film having at least one opening. The etching method includes supplying a process gas containing an HF gas into the chamber, and etching the target film by: generating plasma from the process gas in the chamber with radio-frequency power having a first frequency, and applying a pulsed voltage periodically to the substrate support at a second frequency lower than the first frequency.

公开(公告)号：US20230268191A1

公开(公告)日：2023-08-24

申请号：US18140694

申请日：2023-04-28

Applicant: Tokyo Electron Limited

Inventor： Maju TOMURA ,  Takatoshi ORUI ,  Kae KUMAGAI ,  Ryutaro SUDA ,  Satoshi OHUCHIDA ,  Yusuke WAKO ,  Yoshihide KIHARA

IPC: H01L21/311 ,  H01L21/033 ,  H01L21/3213 ,  H01J37/32

CPC classification number: H01L21/31116 ,  H01L21/0332 ,  H01L21/31144 ,  H01L21/32137 ,  H01L21/32139 ,  H01J37/32449 ,  H01J2237/3341

Abstract: An etching method includes (a) providing a substrate in a chamber in a plasma processing apparatus. The substrate includes a silicon-containing film. The etching method further includes (b) etching the silicon-containing film with a chemical species in plasma generated from a process gas in the chamber. The process gas contains a hydrogen fluoride gas and a phosphorus-containing gas.

公开(公告)号：US20220359167A1

公开(公告)日：2022-11-10

申请号：US17736009

申请日：2022-05-03

Applicant: Tokyo Electron Limited

Inventor： Takatoshi ORUI ,  Ryutaro SUDA ,  Yoshihide KIHARA ,  Maju TOMURA ,  Kae KUMAGAI

IPC: H01J37/32

Abstract: A substrate processing method comprising: providing a substrate having a silicon-containing dielectric film in the substrate support; and generating plasma from a processing gas including a hydrogen- and fluorine-containing gas to etch the silicon-containing dielectric film, wherein the etching step comprises supplying the processing gas into the chamber, supplying a first radio-frequency signal for generating the plasma to the substrate support or the upper electrode, and supplying a first electrical bias to the upper electrode.

公开(公告)号：US20220157616A1

公开(公告)日：2022-05-19

申请号：US17528196

申请日：2021-11-17

Applicant: Tokyo Electron Limited

Inventor： Kae KUMAGAI ,  Ryutaro SUDA ,  Maju TOMURA ,  Kenji OUCHI ,  Hiroki MURAKAMI ,  Munehito KAGAYA ,  Shuichiro SAKAI

IPC: H01L21/311 ,  H01J37/32

Abstract: A substrate processing method includes: (a) carrying a substrate having a first film with a recess, and a mask into a first chamber; (b) adjusting the substrate temperature to 200° C. or higher; (c-1) supplying silicon-containing reactive species into the first chamber, thereby adsorbing the species onto the side wall of the recess; and (c-2) supplying nitrogen-containing reactive species into the first chamber, thereby forming a second film on the side wall of the recess; (d) carrying the substrate into a second chamber; and (e) adjusting the substrate temperature to 100° C. or lower; and (f) etching the bottom of the recess. Further, (a) to (f) are repeated in this order until an aspect ratio of a depth dimension from the opening of the mask to the bottom of the recess becomes 50 or more.

公开(公告)号：US20230122980A1

公开(公告)日：2023-04-20

申请号：US18083434

申请日：2022-12-16

Applicant: Tokyo Electron Limited

Inventor： Kae KUMAGAI ,  Toru HISAMATSU ,  Masanobu HONDA

IPC: H01L21/02 ,  C23C16/455 ,  C23C16/52 ,  H01L21/308 ,  H01L21/3065 ,  H01L21/66 ,  H01J37/32

Abstract: An apparatus for processing a substate includes: a chamber having a gas inlet and a gas outlet; a substrate support disposed in the chamber; a plasma generator; and a controller programmed to: (a) place a substrate on the substrate support, the substrate having a pattern, (b) supply a first reactive species into the chamber to adsorb the first reactive species onto the pattern of the substrate, (c) partially purge the first reactive species from the chamber to adjust an amount of a residual first reactive species in the chamber, (d) supply a second reactive species into the chamber, and (e) expose the substrate to a plasma generated from the residual first reactive species and the second reactive species by the plasma generator to form a film on the pattern of the substrate.

公开(公告)号：US20220093406A1

公开(公告)日：2022-03-24

申请号：US17540257

申请日：2021-12-02

Applicant: Tokyo Electron Limited

Inventor： Yuki IIJIMA ,  Toru HISAMATSU ,  Kae KUMAGAI

IPC: H01L21/3065 ,  G03F7/20 ,  H01L21/311 ,  H01L21/768 ,  H01L21/3213 ,  H01L21/67

Abstract: A method for processing a substrate includes a step of providing a substrate and a first step. In the step of providing a substrate, a substrate having a first film and a second film formed on the first film and having a pattern formed thereon is provided. In the first step, a protective film is formed on a side wall of the first film by a product generated by sputtering of the second film while a first processing gas is turned into plasma and the first film is etched simultaneously with the sputtering of the second film.

公开(公告)号：US20210375633A1

公开(公告)日：2021-12-02

申请号：US16884063

申请日：2020-05-27

Applicant: Tokyo Electron Limited

Inventor： Ryutaro SUDA ,  Kae KUMAGAI ,  Maju TOMURA

IPC: H01L21/311 ,  H01L21/67 ,  H01J37/32 ,  H01L21/02 ,  H01L21/3065

Abstract: A substrate processing apparatus performs a method of etching a substrate that includes etching the substrate to form a first portion of a recess in the substrate, the first portion of the recess including a bottom surface and a sidewall. The method also includes forming an ammonium fluorosilicate (AFS) layer in or on the sidewall, and then etching the bottom surface to form a second portion of the recess. The etching the bottom surface is performed while maintaining protection of the sidewall with the AFS layer.

公开(公告)号：US20210143004A1

公开(公告)日：2021-05-13

申请号：US17097141

申请日：2020-11-13

Applicant: TOKYO ELECTRON LIMITED

Inventor： Kae KUMAGAI ,  Toru HISAMATSU ,  Masanobu HONDA

IPC: H01L21/02 ,  C23C16/455 ,  C23C16/52 ,  H01L21/3065 ,  H01L21/308 ,  H01L21/66 ,  H01J37/32

Abstract: A method for processing a substrate includes: (a) exposing a substrate with a pattern formed on a surface thereof to a first reactive species in a chamber, thereby adsorbing the first reactive species onto the surface of the substrate; (b) exposing the substrate to plasma formed by a second reactive species in the chamber, thereby forming a film on the surface of the substrate; and (c) repeating a processing including (a) and (b) two or more times while changing a residence amount of the first reactive species at a time of starting (b).