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    Dual-frequency grating interferometer displacement measurement system
    1.
    发明授权
    Dual-frequency grating interferometer displacement measurement system 有权

    公开(公告)号：US09885556B2

    公开(公告)日：2018-02-06

    申请号：US14441828

    申请日：2013-10-28

    申请人： TSINGHUA UNIVERSITY

    发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Jinchun Hu ,  Longmin Chen ,  Kaiming Yang ,  Dengfeng Xu ,  Wensheng Yin ,  Haihua Mu

    IPC分类号： G01B9/02 ,  G01D5/26 ,  G01D5/38 ,  G01B11/14

    CPC分类号： G01B9/02007 ,  G01B9/02049 ,  G01B11/14 ,  G01D5/266 ,  G01D5/38

    摘要： A dual-frequency grating interferometer displacement measurement system, comprises a dual-frequency laser, an interferometer, a measurement grating and an electronic signal processing component. The measurement system realizes displacement measurement based on grating diffraction, optical Doppler effect and optical beat frequency theory. Dual-frequency laser light is emitted from the dual-frequency laser and split into reference light and measurement light via a polarization spectroscope. The measurement light is incident to the measurement grating to generate positive and negative first-order diffraction. The diffraction light and the reference light form a beat frequency signal containing displacement information about two directions at a photo-detection unit, and linear displacement output is realized after signal processing. The measurement system can realize sub-nanometer and even higher resolution and accuracy, and is able to measure long horizontal displacement and vertical displacement at the same time.

    METHOD FOR MEASURING DISPLACEMENT OF PLANAR MOTOR ROTOR
    2.
    发明申请
    METHOD FOR MEASURING DISPLACEMENT OF PLANAR MOTOR ROTOR 有权
    测量平面电机转子位移的方法

    公开(公告)号：US20150097508A1

    公开(公告)日：2015-04-09

    申请号：US14382221

    申请日：2013-02-21

    申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. ,  TSINGHUA UNIVERSITY

    发明人： Yu Zhu ,  Jinchun Hu ,  Dengfeng Xu ,  Yuting Sun ,  Wensheng Yin ,  Ming Zhang ,  Kaiming Yang ,  Haihua Mu

    IPC分类号： G05B6/02 ,  G01B7/14

    CPC分类号： G05B6/02 ,  G01B7/023 ,  G01B7/14

    摘要： A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals Bsx, Bcx, Bsy and Bcy and magnetic field reference values Bksx, Bkcx, Bksy and Bkcy; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δx and Δy are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value.  B ksx  B cx - B kcx  B sx B M 2  ≥ Δ x ( I )  B ksy  B cy - B kcy  B sy B M 2  ≥ Δ y ( II )

    摘要翻译： 一种用于测量平面电动机转子的位移的方法。 测量方法包括：四个磁感应强度传感器分布在平面电机转子上; 处理四个分布式传感器的采样信号以获得信号Bsx，Bcx，Bsy和Bcy以及磁场参考值Bksx，Bkcx，Bksy和Bkcy; 并且可以通过判断根据不等式（I）和（II）分别测量X方向位移和Y方向位移，其中＆Dgr; x和＆Dgr; y分别是X方向位移分辨率和Y方向位移分辨率， BM是所述平面电动机的磁场的磁感应强度振幅。 本发明提供的方法计算简单，可以避免超验函数的计算，解决象限判断问题，有利于实时高速运行，具有很高的工程价值。 B ksxB cx - B kcx B B sx B M 2≥＆Dgr; x（I）B yBsy sy y（II）

    Laser interference photolithography system
    3.
    发明授权
    Laser interference photolithography system 有权

    公开(公告)号：US12038690B2

    公开(公告)日：2024-07-16

    申请号：US17767424

    申请日：2020-10-23

    申请人： TSINGHUA UNIVERSITY ,  BEIJING U-PRECISION TECH CO., LTD.

    发明人： Leijie Wang ,  Yu Zhu ,  Ming Zhang ,  Jitao Xu ,  Xin Li ,  Rong Cheng ,  Kaiming Yang ,  Jinchun Hu

    IPC分类号： G03F7/20

    CPC分类号： G03F7/2053

    摘要： A laser interference photolithography system, comprising a laser device, a first reflector, a grating beam-splitter, a second reflector, a first universal reflector, a first lens, a second universal reflector, a second lens, a beam splitting prism, a control module, an angle measurement module, a third lens and a substrate. The control module comprises a signal processing terminal, a controller, and a driver. The signal processing terminal is connected to the angle measurement module, the controller is connected to both the signal processing terminal and the driver, and the driver is connected to both the first universal reflector and the second universal reflector. The laser emits a laser light that is split into two beams of light by the system, and the two beams of light are focused on the substrate for exposure.

    Five-degree-of-freedom heterodyne grating interferometry system
    5.
    发明授权
    Five-degree-of-freedom heterodyne grating interferometry system 有权

    公开(公告)号：US11525673B2

    公开(公告)日：2022-12-13

    申请号：US17275651

    申请日：2018-11-16

    申请人： TSINGHUA UNIVERSITY

    发明人： Yu Zhu ,  Ming Zhang ,  Leijie Wang ,  Weinan Ye ,  Fuzhong Yang ,  Yizhou Xia ,  Xin Li

    IPC分类号： G01B11/26

    摘要： A five-degree-of-freedom heterodyne grating interferometry system, comprising a single frequency laser device (1) and an acousto-optic modulator (2); the single frequency laser device (1) emits a single frequency laser, and the single frequency laser is coupled by optical fiber and, after being split, enters the acousto-optic modulator (2) to obtain two linearly polarized lights of different frequencies, one being a reference light, and one being a measurement light; an interferometer lens group (3) and a measurement grating (4), used for forming the reference light and the measurement light into a measurement interference signal and a compensation interference signal; and multiple optical fiber bundles (5), respectively receiving the measurement interference signal and the compensation interference signal, each optical fiber bundle (5) having multiple multimode optical fibers respectively receiving signals at different positions on the same plane. The present measurement system has the advantages of high measurement precision, a large measurement range, not being sensitive to temperature drift, and small overall size, and can be used as a photoetching machine ultra-precision workpiece table position measurement system.

    Single degree of freedom vibration isolating device of linear motor and motion control method thereof
    8.
    发明授权
    Single degree of freedom vibration isolating device of linear motor and motion control method thereof 有权
    线性电动机的单自由度隔振装置及其运动控制方法

    公开(公告)号：US09310797B2

    公开(公告)日：2016-04-12

    申请号：US14395471

    申请日：2013-04-15

    申请人： TSINGHUA UNIVERSITY

    发明人： Kaiming Yang ,  Yu Zhu ,  Dongdong Yu ,  Rong Cheng ,  Ming Zhang ,  Xin Li ,  Haihua Mu ,  Jinchun Hu ,  Dengfeng Xu ,  Wensheng Yin ,  Guofeng Ji

    IPC分类号： G05B5/01 ,  G05B11/00 ,  G05B19/18 ,  H02P25/06

    CPC分类号： G05B19/18 ,  G05B2219/41117 ,  H02P25/06

    摘要： A single degree of freedom vibration isolating device of a linear motor and a motion control method thereof. The vibration isolating device comprises a balance block, an anti-drifting driving unit, and a control unit. An upper surface of the balance block is connected to a stator of the linear motor, and a lower surface of the balance block is connected to a base. The anti-drifting driving unit is connected to the balance block for controlling the position of the balance block. Provided two motion control methods: inputting a second grating ruler signal to the control unit as feedback to perform variable stiffness and nonlinear control on the balance block; inputting a first and a second grating ruler signal to the control unit as feedback to obtain resultant centroid displacement signals of the rotor and the balance block to perform nonlinear anti-drifting control on the balance block.

    摘要翻译： 线性电动机的单自由度隔振装置及其运动控制方法。 防振装置包括平衡块，防漂移驱动单元和控制单元。 平衡块的上表面连接到线性电动机的定子，并且平衡块的下表面连接到基座。 防漂移驱动单元连接到用于控制平衡块的位置的平衡块。 提供两种运动控制方法：将第二光栅尺信号输入到控制单元作为反馈，以对平衡块执行可变刚度和非线性控制; 将第一和第二光栅标尺信号输入到控制单元作为反馈，以获得转子和平衡块的合成重心位移信号，以对平衡块执行非线性防漂移控制。

    Method for measuring displacement of planar motor rotor
    9.
    发明授权
    Method for measuring displacement of planar motor rotor 有权
    平面电机转子位移测量方法

    公开(公告)号：US09310782B2

    公开(公告)日：2016-04-12

    申请号：US14382221

    申请日：2013-02-21

    申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. ,  TSINGHUA UNIVERSITY

    发明人： Yu Zhu ,  Jinchun Hu ,  Dengfeng Xu ,  Yuting Sun ,  Wensheng Yin ,  Ming Zhang ,  Kaiming Yang ,  Haihua Mu

    IPC分类号： G05B1/06 ,  G05B11/01 ,  G05B6/02 ,  G01B7/02 ,  G01B7/14

    CPC分类号： G05B6/02 ,  G01B7/023 ,  G01B7/14

    摘要： A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals Bsx, Bcx, Bsy and Bcy and magnetic field reference values Bksx, Bkcx, Bksy and Bkcy; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δx and Δy are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value.  B ksx ⁢ B cx - B kcx ⁢ B sx B M 2  ≥ Δ x ( I )  B ksy ⁢ B cy - B kcy ⁢ B sy B M 2  ≥ Δ y ( II )

    摘要翻译： 一种用于测量平面电动机转子的位移的方法。 测量方法包括：四个磁感应强度传感器分布在平面电机转子上; 处理四个分布式传感器的采样信号以获得信号Bsx，Bcx，Bsy和Bcy以及磁场参考值Bksx，Bkcx，Bksy和Bkcy; 并且可以通过判断根据不等式（I）和（II）分别测量X方向位移和Y方向位移，其中＆Dgr; x和＆Dgr; y分别是X方向位移分辨率和Y方向位移分辨率， BM是所述平面电动机的磁场的磁感应强度振幅。 本发明提供的方法计算简单，可以避免超验函数的计算，解决象限判断问题，有利于实时高速运行，具有很高的工程价值。 B ksx B cx - B kcx B sx B M 2ß≥＆Dgr; x（I）B ksy B cy-B kcy B sy B M 2ß≥＆Dgr; y（II）

    Wafer Stage Having Function of Anti-Collision
    10.
    发明申请
    Wafer Stage Having Function of Anti-Collision 审中-公开
    具有抗碰撞功能的晶圆台

    公开(公告)号：US20150311099A1

    公开(公告)日：2015-10-29

    申请号：US14651385

    申请日：2013-12-06

    申请人： SHANGHAI MICRO ELECTRONICS EQUIPMENT CO., LTD. ,  TSINGHUA UNIVERSITY

    发明人： Yu Zhu ,  Ming Zhang ,  Zhao Liu ,  Kaiming Yang ,  Dengfeng Xu ,  Li Tian ,  Li Zhang ,  Huichao Qin ,  Ping an Wang ,  Wensheng Yin ,  Jinchun Hu ,  Haihua Mu

    IPC分类号： H01L21/673

    CPC分类号： H01L21/67346

    摘要： A silicon wafer platform with anti-collision function comprises a silicon wafer platform body (1) and a cable platform (2). The cable platform (2) is mounted on one side of the silicon wafer platform. The silicon wafer platform comprises three airbags (3), four damping buffer elements (4) and an air source (6), the three airbags (3) being connected in series and respectively secured on the other three sides of the silicon wafer platform by an airbag support (5), two adjacent airbags (3) communicating with a gas pipeline by one damping buffer element (4), and the gas pipeline being secured on the cable platform (2) and communicating with the air source. When two silicon platforms collide, the collision is buffered by the airbags and the silicon wafer platforms are not bounced off.

    摘要翻译： 具有防碰撞功能的硅晶片平台包括硅晶片平台主体（1）和电缆平台（2）。 电缆平台（2）安装在硅晶片平台的一侧。 硅晶片平台包括三个安全气囊（3），四个阻尼缓冲元件（4）和空气源（6），三个安全气囊（3）串联连接，并分别固定在硅晶片平台的另外三个侧面上 安全气囊支撑件（5），两个相邻的安全气囊（3），其通过一个阻尼缓冲元件（4）与气体管道连通，并且所述气体管道固定在所述电缆平台（2）上并与所述空气源连通。 当两个硅平台碰撞时，碰撞由气囊缓冲，硅晶片平台不会反弹。