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公开(公告)号:US11088071B2
公开(公告)日:2021-08-10
申请号:US16905049
申请日:2020-06-18
发明人: Hsiao-Tsung Yen , Cheng-Wei Luo
IPC分类号: H01L23/522 , H01L25/065 , H01L27/06 , H01L21/822 , H01L23/66 , H01L23/48
摘要: A tank circuit structure includes a first gate layer, a first substrate, a first shielding layer, a first conductive line and a first inter metal dielectric (IMD) layer. The first substrate is over the first gate layer. The first shielding layer is over the first substrate. The first conductive line is over the first shielding layer. The first IMD layer is between the first substrate and the first conductive line.
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公开(公告)号:US09472612B2
公开(公告)日:2016-10-18
申请号:US15071014
申请日:2016-03-15
发明人: Chin-Wei Kuo , Cheng-Wei Luo , Hsiao-Tsung Yen , Jun-Cheng Huang , Min-Chie Jeng
IPC分类号: H01L49/02
CPC分类号: H01L28/87 , H01L23/5223 , H01L28/86 , H01L28/91 , H01L2924/0002 , H01L2924/00
摘要: A method includes forming first, second, and third conductive leaf structures. The first conductive leaf structure includes a first conductive midrib and conductive veins. The second conductive leaf structure is electrically connected to the first conductive leaf structure, and includes a second conductive midrib, conductive veins extending toward the first conductive midrib, and conductive veins extending away from the first conductive midrib. The third conductive leaf structure includes a third conductive midrib between the first conductive midrib and the second conductive midrib, conductive veins extending toward the first conductive midrib, and conductive veins extending toward the second conductive midrib.
摘要翻译: 一种方法包括形成第一,第二和第三导电叶结构。 第一导电叶结构包括第一导电中脉和导电静脉。 第二导电叶结构电连接到第一导电叶结构,并且包括第二导电中脉,朝向第一导电中脉延伸的导电静脉和远离第一导电中脉延伸的导电静脉。 第三导电叶结构包括在第一导电中脉和第二导电中脉之间的第三导电中脉,朝向第一导电中脉延伸的导电静脉和朝向第二导电中脉延伸的导电静脉。
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公开(公告)号:US09331013B2
公开(公告)日:2016-05-03
申请号:US13902575
申请日:2013-05-24
发明人: Hsiao-Tsung Yen , Cheng-Wei Luo , Jun-Cheng Huang , Chin-Wei Kuo , Min-Chie Jeng
IPC分类号: H01L49/02 , H01L23/522
CPC分类号: H01L28/87 , H01L23/5223 , H01L28/86 , H01L28/91 , H01L2924/0002 , H01L2924/00
摘要: A structure includes first, second, and third conductive leaf structures. The first conductive leaf structure includes a first conductive midrib and conductive veins. The second conductive leaf structure is electrically connected to the first conductive leaf structure, and includes a second conductive midrib, conductive veins extending toward the first conductive midrib, and conductive veins extending away from the first conductive midrib. The third conductive leaf structure includes a third conductive midrib between the first conductive midrib and the second conductive midrib, conductive veins extending toward the first conductive midrib, and conductive veins extending toward the second conductive midrib.
摘要翻译: 一种结构包括第一,第二和第三导电叶结构。 第一导电叶结构包括第一导电中脉和导电静脉。 第二导电叶结构电连接到第一导电叶结构,并且包括第二导电中脉,朝向第一导电中脉延伸的导电静脉和远离第一导电中脉延伸的导电静脉。 第三导电叶结构包括在第一导电中脉和第二导电中脉之间的第三导电中脉,朝向第一导电中脉延伸的导电静脉和朝向第二导电中脉延伸的导电静脉。
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公开(公告)号:US20150255391A1
公开(公告)日:2015-09-10
申请号:US14720805
申请日:2015-05-24
发明人: Cheng-Wei Luo , Hsiao-Tsung Yen , Chin-Wei Kuo , Min-Chie Jeng
IPC分类号: H01L23/522 , H01L49/02
CPC分类号: H01L23/5227 , H01F17/0033 , H01F2017/0066 , H01F2017/0086 , H01F2027/2809 , H01L21/486 , H01L23/147 , H01L23/49816 , H01L23/49822 , H01L23/5384 , H01L28/10 , H01L2224/16225 , H01L2224/16235 , H01L2924/13091 , H01L2924/15311 , H01L2924/00
摘要: In accordance with an embodiment, a semiconductor device comprises a semiconductor die, an interposer, and conductive bumps bonding the semiconductor die to the interposer. The semiconductor die comprises a first metallization layer, and the first metallization layer comprises a first conductive pattern. The interposer comprises a second metallization layer, and the second metallization layer comprises a second conductive pattern. Some of the conductive bumps electrically couple the first conductive pattern to the second conductive pattern to form a coil. A magnetic layer is positioned within the coil. In another embodiment, a coil is formed on a single substrate, wherein a magnetic layer is positioned within the coil. Other embodiments contemplate other configurations of coils, inductors, and/or transformers, and contemplate methods of manufacture.
摘要翻译: 根据实施例,半导体器件包括半导体管芯,插入件和将半导体管芯接合到插入件的导电凸块。 半导体管芯包括第一金属化层,第一金属化层包括第一导电图案。 插入器包括第二金属化层,并且第二金属化层包括第二导电图案。 一些导电凸块将第一导电图案电耦合到第二导电图案以形成线圈。 磁性层位于线圈内。 在另一个实施例中,线圈形成在单个基板上,其中磁性层位于线圈内。 其他实施例考虑了线圈,电感器和/或变压器的其他配置,并考虑了制造方法。
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公开(公告)号:US20140264742A1
公开(公告)日:2014-09-18
申请号:US13902575
申请日:2013-05-24
发明人: Hsiao-Tsung Yen , Cheng-Wei Luo , Jun-Cheng Huang , Chin-Wei Kuo , Min-Chie Jeng
IPC分类号: H01L49/02
CPC分类号: H01L28/87 , H01L23/5223 , H01L28/86 , H01L28/91 , H01L2924/0002 , H01L2924/00
摘要: A structure includes first, second, and third conductive leaf structures. The first conductive leaf structure includes a first conductive midrib and conductive veins. The second conductive leaf structure is electrically connected to the first conductive leaf structure, and includes a second conductive midrib, conductive veins extending toward the first conductive midrib, and conductive veins extending away from the first conductive midrib. The third conductive leaf structure includes a third conductive midrib between the first conductive midrib and the second conductive midrib, conductive veins extending toward the first conductive midrib, and conductive veins extending toward the second conductive midrib.
摘要翻译: 一种结构包括第一,第二和第三导电叶结构。 第一导电叶结构包括第一导电中脉和导电静脉。 第二导电叶结构电连接到第一导电叶结构,并且包括第二导电中脉,朝向第一导电中脉延伸的导电静脉和远离第一导电中脉延伸的导电静脉。 第三导电叶结构包括在第一导电中脉和第二导电中脉之间的第三导电中脉,朝向第一导电中脉延伸的导电静脉和朝向第二导电中脉延伸的导电静脉。
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公开(公告)号:US11929196B2
公开(公告)日:2024-03-12
申请号:US17395122
申请日:2021-08-05
发明人: Hsiao-Tsung Yen , Cheng-Wei Luo
IPC分类号: H01F21/12
CPC分类号: H01F21/12 , H01F2021/125
摘要: A method of making a slow wave inductive structure includes depositing a first dielectric layer over a first substrate. The method further includes forming a first conductive winding in the first dielectric layer. The method further includes bonding a second substrate to the first dielectric layer, wherein the second substrate is physically separated from the first conductive winding, and the second substrate has a thickness ranging from about 50 nanometers (nm) to about 150 nm. The method further includes depositing a second dielectric layer over the second substrate. The method further includes forming a second conductive winding in the second dielectric layer, wherein the second substrate is physically separated from the second conductive winding.
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公开(公告)号:US11101061B2
公开(公告)日:2021-08-24
申请号:US16048030
申请日:2018-07-27
发明人: Hsiao-Tsung Yen , Cheng-Wei Luo
IPC分类号: H01F21/12
摘要: A method of making a slow wave inductive structure includes forming a first conductive winding over a first substrate. The method further includes bonding a second substrate to the first substrate, wherein the second substrate has a thickness ranging from about 50 nanometers (nm) to about 150 nm, wherein a distance between the first conductive winding and the second substrate ranges from about 1 micron (μm) to about 2 μm.
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公开(公告)号:US10720387B2
公开(公告)日:2020-07-21
申请号:US15078387
申请日:2016-03-23
发明人: Hsiao-Tsung Yen , Cheng-Wei Luo
IPC分类号: H01L23/522 , H01L25/065 , H01L21/822 , H01L27/06 , H01L23/48 , H01L23/66
摘要: A tank circuit structure includes a first gate layer, a first substrate, a first shielding layer, a first conductive line and a first inter metal dielectric (IMD) layer. The first substrate is over the first gate layer. The first shielding layer is over the first substrate. The first conductive line is over the first shielding layer. The first IMD layer is between the first substrate and the first conductive line.
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公开(公告)号:US09754874B2
公开(公告)日:2017-09-05
申请号:US14062924
申请日:2013-10-25
发明人: Hsiao-Tsung Yen , Cheng-Wei Luo
IPC分类号: H01L21/8234 , H01L21/8244 , H01L23/522 , H01L21/822 , H01L23/66 , H01L27/06 , H01L25/065
CPC分类号: H01L23/5227 , H01L21/8221 , H01L23/481 , H01L23/5223 , H01L23/5225 , H01L23/5226 , H01L23/66 , H01L25/065 , H01L25/0657 , H01L27/0694 , H01L2223/6622 , H01L2225/06527 , H01L2225/06537 , H01L2225/06541 , H01L2924/0002 , H01L2924/00
摘要: An inductive capacitive structure including a first substrate, a first conductive line over the first substrate, a first shielding layer over the first substrate and a second substrate over the first substrate.
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公开(公告)号:US09449917B2
公开(公告)日:2016-09-20
申请号:US14720805
申请日:2015-05-24
发明人: Cheng-Wei Luo , Hsiao-Tsung Yen , Chin-Wei Kuo , Min-Chie Jeng
IPC分类号: H01L29/00 , H01L23/522 , H01L21/48 , H01L23/14 , H01L23/498 , H01L23/538 , H01F17/00 , H01L49/02 , H01F27/28
CPC分类号: H01L23/5227 , H01F17/0033 , H01F2017/0066 , H01F2017/0086 , H01F2027/2809 , H01L21/486 , H01L23/147 , H01L23/49816 , H01L23/49822 , H01L23/5384 , H01L28/10 , H01L2224/16225 , H01L2224/16235 , H01L2924/13091 , H01L2924/15311 , H01L2924/00
摘要: In accordance with an embodiment, a semiconductor device comprises a semiconductor die, an interposer, and conductive bumps bonding the semiconductor die to the interposer. The semiconductor die comprises a first metallization layer, and the first metallization layer comprises a first conductive pattern. The interposer comprises a second metallization layer, and the second metallization layer comprises a second conductive pattern. Some of the conductive bumps electrically couple the first conductive pattern to the second conductive pattern to form a coil. A magnetic layer is positioned within the coil. In another embodiment, a coil is formed on a single substrate, wherein a magnetic layer is positioned within the coil. Other embodiments contemplate other configurations of coils, inductors, and/or transformers, and contemplate methods of manufacture.
摘要翻译: 根据实施例,半导体器件包括半导体管芯,插入件和将半导体管芯接合到插入件的导电凸块。 半导体管芯包括第一金属化层,第一金属化层包括第一导电图案。 插入器包括第二金属化层,并且第二金属化层包括第二导电图案。 一些导电凸块将第一导电图案电耦合到第二导电图案以形成线圈。 磁性层位于线圈内。 在另一个实施例中,线圈形成在单个基板上,其中磁性层位于线圈内。 其他实施例考虑了线圈,电感器和/或变压器的其他配置,并考虑了制造方法。
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