摘要:
An immersion exposure liquid which exhibits a high refractive index, prevents elution and dissolution of a photoresist film or its upper layer film component, and reduces defects during formation of a resist pattern when used in an immersion exposure method, and an immersion exposure method using the immersion exposure liquid. The immersion exposure liquid is used for an immersion exposure device or an immersion exposure method in which a substrate is exposed through a liquid provided between a lens of a projection optical system and the substrate, the immersion exposure liquid being liquid in an operating temperature range of the immersion exposure device and including an alicyclic hydrocarbon compound or a cyclic hydrocarbon compound containing a silicon atom in the ring structure.
摘要:
An immersion exposure liquid which exhibits a high refractive index, prevents elution and dissolution of a photoresist film or its upper layer film component, and reduces defects during formation of a resist pattern when used in an immersion exposure method, and an immersion exposure method using the immersion exposure liquid. The immersion exposure liquid is used for an immersion exposure device or an immersion exposure method in which a substrate is exposed through a liquid provided between a lens of a projection optical system and the substrate, the immersion exposure liquid being liquid in an operating temperature range of the immersion exposure device and including an alicyclic hydrocarbon compound or a cyclic hydrocarbon compound containing a silicon atom in the ring structure.
摘要:
A sulfonium salt compound excelling in transparency to deep ultraviolet rays at a wavelength of 220 nm or less, exhibiting well-balanced excellent performance such as sensitivity, resolution, pattern form, LER, and storage stability when used as a photoacid generator, a photoacid generator comprising the sulfonium salt compound, and a positive-tone radiation-sensitive resin composition containing the photoacid generator. The sulfonium salt compound is shown by the following formula (I), wherein R1 represents a halogen atom, an alkyl group, a monovalent alicyclic hydrocarbon group, an alkoxyl group, or —OR3 group, wherein R3 is a monovalent alicyclic hydrocarbon group, R2 represents a (substituted)-alkyl group or two or more R2 groups form a cyclic structure, p is 0-7, q is 0-6, n is 0-3, and X− indicates a sulfonic acid anion. The positive-tone radiation-sensitive resin composition comprises (A) a photoacid generator of the sulfonium-salt compound and (B) an acid-dissociable group-containing resin.
摘要:
A sulfonium salt compound excelling in transparency to deep ultraviolet rays at a wavelength of 220 nm or less, exhibiting well-balanced excellent performance such as sensitivity, resolution, pattern form, LER, and storage stability when used as a photoacid generator, a photoacid generator comprising the sulfonium salt compound, and a positive-tone radiation-sensitive resin composition containing the photoacid generator.The sulfonium salt compound is shown by the following formula (I), wherein R1 represents a halogen atom, an alkyl group, a monovalent alicyclic hydrocarbon group, an alkoxyl group, or —OR3 group, wherein R3 is a monovalent alicyclic hydrocarbon group, R2 represents a (substituted)-alkyl group or two or more R2 groups form a cyclic structure, p is 0-7, q is 0-6, n is 0-3, and X− indicates a sulfonic acid anion. The positive-tone radiation-sensitive resin composition comprises (A) a photoacid generator of the sulfonium-salt compound and (B) an acid-dissociable group-containing resin.
摘要:
A computer system comprises a keyboard with a plurality of touchbands, each of which is a narrow multi-touch touchpad, a display device and a computer touchband device application program executable on the computer processor configured to manage a multi-level context-dependent cascading menu interface wherein each menu item includes a plurality of drag-control functions, a plurality of tap commands and a plurality of submenu items; specify a plurality of menu operations, a plurality of control-drag operations and a plurality of command-tap operations from the multi-touch gestures on the touchbands; move the highlight in the menu structure based on the menu operations and display highlighted menu item contents under the active menu layer; change the value of the specified drag-control function listed for the highlighted menu item when detected a control-drag operation; trigger the specified tap command listed for the highlighted menu item when detected a command-tap operation.
摘要:
The present invention discloses the Theory and Method of Unified Internet Integration (UII) which is characterized in followings: the foundation theory of internet map/platform iconology, a series of conceptual definitions, specifications, standards and methods including a complete theoretical system and methodology invented to integrate all the Internet and other local area networks such as GIS, IoT, Block Chain etc into a whole. Especially, the present invention proposed a new concept of Positioning Oriented Architecture (POA) first time in the world and in computer science, and proposed a data structure of POA to organize all different types of icon positioning resources with other IP Address resources and service resources in a uniformed data format to form an icon positioning object to be transferred and used in all network platforms. This is impossible by all current traditional internet and network's theories and technologies.
摘要:
A heat pipe based passive residual heat removal system for a spent fuel pool (3). Partitions (6) are arranged around an inside of the spent fuel pool. Evaporation-end heat pipes (4) are arranged between the outside of the partitions and an inner wail of the pool. The evaporation-end heat pipes have outlets that extend beyond the pool and are connected to an Inlet of an ascending pipe (10), and have inlets connected to an outlet of a descending pipe (5). Condensation-end heat pipes (7) have inlets connected to an outlet of the ascending pipe, and have outlets connected to an inlet of the descending pipe. The heat pipes cool the spent fuel pool. A heat exchange by phase change of working medium in the heat pipe leads to heat exchange of low temperature difference and high efficiency, relying on density difference for natural circulation drive.
摘要:
Determining diffusivity of multiple diffusion components within a tissue using diffusion magnetic resonance data representing a volume of the tissue. A plurality of candidate fibers having a direction is defined within the volume. A possibility coefficient is calculated by a processor for each candidate fiber of the plurality of candidate fibers based on the magnetic resonance data and the direction of the candidate fiber. The possibility coefficient represents a likelihood that the candidate fiber exists in the volume. Candidate fibers associated with a possibility coefficient greater than a threshold value are selected by the processor to create one or more probable fibers. For each probable fiber of the one or more probable fibers, an axial diffusivity indicating a diffusion of water in the direction of the probable fiber and a radial diffusivity indicating a diffusion of water perpendicular to the direction of the probable fiber are calculated by the processor. The diffusivity of isotropic diffusion component and the volume ratios of each fiber component and isotropic components are calculated.
摘要:
An electric motor has a wound stator and a permanent magnet rotor. The rotor includes a shaft, a hub fixed on the shaft, a plurality of rotor core segments and magnets fixed around the hub. The rotor core segment includes at least two rotor blocks inwardly extending from the innermost portion thereof. The hub includes a plurality of hub blocks equidistantly and outwardly extending from the outer surface thereof. The rotor blocks of each rotor core segment engage with at least one hub block to fix the rotor core segment to the hub. The number of rotor blocks is greater than the number of hub blocks.